公开(公告)号：US11037956B2

公开(公告)日：2021-06-15

申请号：US16988548

申请日：2020-08-07

Applicant: Micron Technology, Inc.

Inventor： Byeung Chul Kim ,  Francois H. Fabreguette ,  Richard J. Hill ,  Purnima Narayanan ,  Shyam Surthi

IPC: H01L27/11582 ,  H01L27/1157 ,  H01L21/02 ,  G11C16/08

Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have conductive terminal ends within control gate regions. The control gate regions are vertically spaced from one another by first insulative regions which include first insulative material. Charge-storage material is laterally outward of the conductive terminal ends, and is configured as segments. The segments of the charge-storage material are arranged one atop another and are vertically spaced from one another by second insulative regions which include second insulative material. The second insulative material has a different dielectric constant than the first insulative material. Charge-tunneling material extends vertically along the stack, and is adjacent to the segments of the charge-trapping material. Channel material extends vertically along the stack, and is adjacent to the charge-tunneling material. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US20210175249A1

公开(公告)日：2021-06-10

申请号：US16708673

申请日：2019-12-10

Applicant: Micron Technology, Inc.

Inventor： John D. Hopkins ,  Purnima Narayanan ,  Jordan D. Greenlee

IPC: H01L27/11582 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L23/522 ,  H01L21/311 ,  H01L21/3215 ,  H01L21/768

Abstract: Some embodiments include a method of forming an integrated assembly. A stack of alternating first and second materials is formed over a conductive structure. The conductive structure includes a semiconductor-containing material over a metal-containing material. An opening is formed to extend through the stack and through the semiconductor-containing material, to expose the metal-containing material. The semiconductor-containing material is doped with carbon and/or with one or more metals. After the doping of the semiconductor-containing material, the second material of the stack is removed to form voids. Conductive material is formed within the voids. Insulative material is formed within the opening. Some embodiments include integrated assemblies having carbon distributed within at least a portion of a semiconductor material.

公开(公告)号：US10090317B2

公开(公告)日：2018-10-02

申请号：US15221131

申请日：2016-07-27

Applicant: Micron Technology, Inc.

Inventor： Jie Sun ,  Zhenyu Lu ,  Roger W. Lindsay ,  Brian Cleereman ,  John Hopkins ,  Hongbin Zhu ,  Fatma Arzum Simsek-Ege ,  Prasanna Srinivasan ,  Purnima Narayanan

IPC: H01L21/3205 ,  H01L27/11582 ,  H01L27/11556 ,  H01L27/11524 ,  H01L29/66 ,  H01L29/788 ,  G11C16/04 ,  H01L27/1157

Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.

公开(公告)号：US11844202B2

公开(公告)日：2023-12-12

申请号：US17994663

申请日：2022-11-28

Applicant: Micron Technology, Inc.

Inventor： Purnima Narayanan

IPC: H01L25/065 ,  H10B41/27 ,  H01L21/50 ,  G11C5/02 ,  G11C5/06 ,  H10B43/27

CPC classification number: H10B41/27 ,  G11C5/025 ,  G11C5/06 ,  H01L21/50 ,  H01L25/0657 ,  H10B43/27

Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The first tiers comprise doped silicon dioxide and the second tiers comprise undoped silicon dioxide. Horizontally-elongated trenches are formed into the stack. Through the trenches, the doped silicon dioxide that is in the first tiers is etched selectively relative to the undoped silicon dioxide that is in the second tiers. Conducting material is formed in the void space in the first tiers that is left by the etching. Structure independent of method is disclosed.

公开(公告)号：US20220020759A1

公开(公告)日：2022-01-20

申请号：US16930843

申请日：2020-07-16

Applicant: Micron Technology, Inc.

Inventor： Purnima Narayanan

IPC: H01L27/11556 ,  H01L25/065 ,  H01L27/11582 ,  G11C5/02 ,  G11C5/06 ,  H01L21/50

Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. The first tiers comprise doped silicon dioxide and the second tiers comprise undoped silicon dioxide. Horizontally-elongated trenches are formed into the stack. Through the trenches, the doped silicon dioxide that is in the first tiers is etched selectively relative to the undoped silicon dioxide that is in the second tiers. Conducting material is formed in the void space in the first tiers that is left by the etching. Structure independent of method is disclosed.

公开(公告)号：US20210358951A1

公开(公告)日：2021-11-18

申请号：US17391453

申请日：2021-08-02

Applicant: Micron Technology, Inc.

Inventor： John D. Hopkins ,  Justin B. Dorhout ,  Nirup Bandaru ,  Damir Fazil ,  Nancy M. Lomeli ,  Jivaan Kishore Jhothiraman ,  Purnima Narayanan

IPC: H01L27/11582 ,  H01L27/11524 ,  H01L27/1157 ,  H01L27/11556 ,  H01L27/11565 ,  H01L27/11519

Abstract: Some embodiments include an integrated assembly having a first deck which has first memory cells, and having a second deck which has second memory cells. The first memory cells have first control gate regions which include a first conductive material vertically between horizontally-extending bars of a second conductive material. The second memory cells have second control gate regions which include a fourth conductive material along an outer surface of a third conductive material. A pillar passes through the first and second decks. The pillar includes a dielectric-barrier material laterally surrounding a channel material. The first and fourth materials are directly against the dielectric-barrier material. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US11056505B2

公开(公告)日：2021-07-06

申请号：US16708673

申请日：2019-12-10

Applicant: Micron Technology, Inc.

Inventor： John D. Hopkins ,  Purnima Narayanan ,  Jordan D. Greenlee

IPC: H01L27/115 ,  H01L27/11582 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L23/522 ,  H01L21/768 ,  H01L21/3215 ,  H01L21/311 ,  H01L27/11578 ,  H01L27/06

Abstract: Some embodiments include a method of forming an integrated assembly. A stack of alternating first and second materials is formed over a conductive structure. The conductive structure includes a semiconductor-containing material over a metal-containing material. An opening is formed to extend through the stack and through the semiconductor-containing material, to expose the metal-containing material. The semiconductor-containing material is doped with carbon and/or with one or more metals. After the doping of the semiconductor-containing material, the second material of the stack is removed to form voids. Conductive material is formed within the voids. Insulative material is formed within the opening. Some embodiments include integrated assemblies having carbon distributed within at least a portion of a semiconductor material.

公开(公告)号：US20150123189A1

公开(公告)日：2015-05-07

申请号：US14069574

申请日：2013-11-01

Applicant: Micron Technology, Inc.

Inventor： Jie Sun ,  Zhenyu Lu ,  Roger W. Lindsay ,  Brian Cleereman ,  John Hopkins ,  Hongbin Zhu ,  Fatma Arzum Simsek-Ege ,  Prasanna Srinivasan ,  Purnima Narayanan

IPC: H01L27/115

CPC classification number: H01L27/11582 ,  G11C16/0483 ,  H01L27/11524 ,  H01L27/11556 ,  H01L27/1157 ,  H01L29/66825 ,  H01L29/7889

Abstract: Methods for forming a string of memory cells, apparatuses having a string of memory cells, and systems are disclosed. One such method for forming a string of memory cells forms a source material over a substrate. A capping material may be formed over the source material. A select gate material may be formed over the capping material. A plurality of charge storage structures may be formed over the select gate material in a plurality of alternating levels of control gate and insulator materials. A first opening may be formed through the plurality of alternating levels of control gate and insulator materials, the select gate material, and the capping material. A channel material may be formed along the sidewall of the first opening. The channel material has a thickness that is less than a width of the first opening, such that a second opening is formed by the semiconductor channel material.

Abstract translation: 公开了形成一串存储单元的方法，具有一串存储单元的装置和系统。 用于形成一串存储单元的一种这样的方法在衬底上形成源材料。 可以在源材料上形成封盖材料。 可以在封盖材料之上形成选择栅极材料。 多个电荷存储结构可以在选择栅极材料上以多个交替层级的控制栅极和绝缘体材料形成。 可以通过控制栅极和绝缘体材料，选择栅极材料和封盖材料的多个交替层级形成第一开口。 通道材料可以沿着第一开口的侧壁形成。 通道材料的厚度小于第一开口的宽度，使得第二开口由半导体沟道材料形成。

公开(公告)号：US20230262981A1

公开(公告)日：2023-08-17

申请号：US18138350

申请日：2023-04-24

Applicant: Micron Technology, Inc.

Inventor： Byeung Chul Kim ,  Francois H. Fabreguette ,  Richard J. Hill ,  Purnima Narayanan ,  Shyam Surthi

IPC: H10B43/27 ,  G11C16/08 ,  H01L21/02 ,  H10B43/35

CPC classification number: H10B43/27 ,  G11C16/08 ,  H01L21/0214 ,  H10B43/35

Abstract: Some embodiments include a memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have conductive terminal ends within control gate regions. The control gate regions are vertically spaced from one another by first insulative regions which include first insulative material. Charge-storage material is laterally outward of the conductive terminal ends, and is configured as segments. The segments of the charge-storage material are arranged one atop another and are vertically spaced from one another by second insulative regions which include second insulative material. The second insulative material has a different dielectric constant than the first insulative material. Charge-tunneling material extends vertically along the stack, and is adjacent to the segments of the charge-trapping material. Channel material extends vertically along the stack, and is adjacent to the charge-tunneling material. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US20210167081A1

公开(公告)日：2021-06-03

申请号：US16700877

申请日：2019-12-02

Applicant: Micron Technology, Inc.

Inventor： John D. Hopkins ,  Justin B. Dorhout ,  Nirup Bandaru ,  Damir Fazil ,  Nancy M. Lomeli ,  Jivaan Kishore Jhothiraman ,  Purnima Narayanan

IPC: H01L27/11582 ,  H01L27/11524 ,  H01L27/11519 ,  H01L27/11556 ,  H01L27/11565 ,  H01L27/1157

Abstract: Some embodiments include an integrated assembly having a first deck which has first memory cells, and having a second deck which has second memory cells. The first memory cells have first control gate regions which include a first conductive material vertically between horizontally-extending bars of a second conductive material. The second memory cells have second control gate regions which include a fourth conductive material along an outer surface of a third conductive material. A pillar passes through the first and second decks. The pillar includes a dielectric-barrier material laterally surrounding a channel material. The first and fourth materials are directly against the dielectric-barrier material. Some embodiments include methods of forming integrated assemblies.