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公开(公告)号：US20190316981A1
公开(公告)日：2019-10-17
申请号：US15955266
申请日：2018-04-17
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
IPC: G01L9/02
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US20170146420A1
公开(公告)日：2017-05-25
申请号：US15421805
申请日：2017-02-01
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
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公开(公告)号：US20160131548A1
公开(公告)日：2016-05-12
申请号：US14536102
申请日：2014-11-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Scott C. Heinbuch
IPC: G01L21/34
CPC classification number: G01L21/34 , G01L21/30 , G01L21/32 , H01J27/00 , H01J27/02 , H01J37/04 , H01J37/08 , H01J41/00 , H01J41/02 , H01J41/06
Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.
Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。
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公开(公告)号：US20150091580A1
公开(公告)日：2015-04-02
申请号：US14537593
申请日：2014-11-10
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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公开(公告)号：US12181366B2
公开(公告)日：2024-12-31
申请号：US18583344
申请日：2024-02-21
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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Patent Agency Ranking
公开(公告)号：US11946823B2
公开(公告)日：2024-04-02
申请号：US18303222
申请日：2023-04-19
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
CPC classification number: G01L9/025 , G01L9/00 , G01L9/0002 , G01L21/10 , G01L21/14
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US20230127693A1
公开(公告)日：2023-04-27
申请号：US17452030
申请日：2021-10-22
Applicant: MKS Instruments, Inc.
Inventor： Chad David Wilson , Gerardo A. Brucker , Junhua Ding
Abstract: Systems and methods for detecting a composition of a binary gas mixture are provided. Such methods and systems include, with a species-dependent mass flow meter, sensing a mass flow rate of a binary gas mixture comprising gases of differing gas correction factors and, with a species-independent pressure sensor, sensing a total pressure of the binary gas mixture. An output representative of a relative concentration of one gas of the binary gas mixture is provided. The relative concentration is determined as a function of the sensed mass flow rate and the sensed total pressure.
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公开(公告)号：US20220228939A1
公开(公告)日：2022-07-21
申请号：US17154698
申请日：2021-01-21
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.
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公开(公告)号：US10359332B2
公开(公告)日：2019-07-23
申请号：US14994969
申请日：2016-01-13
Applicant: MKS Instruments, Inc.
Inventor： Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
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20.发明授权公开(公告)号：US10132707B2
公开(公告)日：2018-11-20
申请号：US14795706
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Stephen C. Blouch , Paul C. Arnold , Gerardo A. Brucker , Wesley J. Graba , Douglas C. Hansen
Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
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