公开(公告)号：US20080014743A1

公开(公告)日：2008-01-17

申请号：US11765006

申请日：2007-06-19

申请人： Takashi Onishi ,  Mikako Takeda ,  Masao Mizuno ,  Susumu Tsukimoto ,  Tatsuya Kabe ,  Toshifumi Morita ,  Miki Moriyama ,  Kazuhiro Ito ,  Masanori Murakami

发明人： Takashi Onishi ,  Mikako Takeda ,  Masao Mizuno ,  Susumu Tsukimoto ,  Tatsuya Kabe ,  Toshifumi Morita ,  Miki Moriyama ,  Kazuhiro Ito ,  Masanori Murakami

IPC分类号： H01L21/768

CPC分类号： H01L21/76843 ,  H01L21/76864 ,  H01L21/76867

摘要： A method of fabricating semiconductor interconnections is provided which can form a Ti-rich layer as a barrier layer and which can embed pure Cu material as interconnection material into every corner of grooves provided in an insulating film even when the grooves have a narrow minimum width and are deep. The method may include the steps of forming one or more grooves in an insulating film on a semiconductor substrate, the recess having a minimum width of 0.15 μm or less and a ratio of a depth of the groove to the minimum width thereof (depth/minimum width) of 1 or more, forming a Cu alloy thin film containing 0.5 to 10 atomic % of Ti in the groove of the insulated film along a shape of the groove in a thickness of 10 to 50 nm, forming a pure Cu thin film in the groove with the Cu alloy thin film attached thereto, and annealing the substrate with the films at 350° C. or more to allow the Ti to be precipitated between the insulating film and the Cu alloy thin film.

摘要翻译： 提供一种制造半导体互连的方法，其可以形成富Ti层作为阻挡层，并且即使当沟槽具有窄的最小宽度时，也可以将纯Cu材料作为互连材料嵌入设置在绝缘膜中的沟槽的每个角落，并且 很深 该方法可以包括以下步骤：在半导体衬底上的绝缘膜中形成一个或多个凹槽，凹槽具有0.15μm或更小的最小宽度以及凹槽的深度与其最小宽度的比（深度/最小值 宽度）为1以上，沿着形状为10〜50nm的槽的形状，在绝缘膜的槽内形成含有0.5〜10原子％的Ti的Cu合金薄膜，形成纯Cu薄膜 与Cu合金薄膜连接的槽，并使膜在350℃以上退火，使Ti在绝缘膜与Cu合金薄膜之间析出。

公开(公告)号：US20070218690A1

公开(公告)日：2007-09-20

申请号：US11532796

申请日：2006-09-18

申请人： Takashi Onishi ,  Masao Mizuno ,  Mikako Takeda ,  Susumu Tsukimoto ,  Tatsuya Kabe ,  Toshifumi Morita ,  Miki Moriyama ,  Kazuhiro Ito ,  Masanori Murakami

发明人： Takashi Onishi ,  Masao Mizuno ,  Mikako Takeda ,  Susumu Tsukimoto ,  Tatsuya Kabe ,  Toshifumi Morita ,  Miki Moriyama ,  Kazuhiro Ito ,  Masanori Murakami

IPC分类号： H01L21/44

CPC分类号： H01L21/76882 ,  H01L21/76843 ,  H01L21/76867 ,  H01L23/53233 ,  H01L2924/0002 ,  H01L2924/00

摘要： There is provided a fabrication method for interconnections, capable of embedding a Cu-alloy in recesses in an insulating film, and forming a barrier layer on an interface between the an insulating film and Cu-interconnections, without causing a rise in electric resistivity of the interconnections when fabricating semiconductor interconnections of the Cu-alloy embedded in the recesses provided in the insulating film on a semiconductor substrate. The fabrication method for the interconnections may comprise the steps of forming the respective recesses having a minimum width not more than 0.15 μm, and a ratio of a depth thereof to the minimum width (a depth/minimum width ratio) not less than 1, forming a Cu-alloy film containing Ti in a range of 0.5 to 3 at %, and N in a range of 0.4 to 2.0 at % over the respective recesses, and subsequently, annealing the Cu-alloy film to not lower than 200° C., and pressurizing the Cu-alloy film to not less than 50 MPa to thereby embed the Cu-alloy film into the respective recesses.

摘要翻译： 提供了一种用于互连的制造方法，其能够将铜合金嵌入绝缘膜中的凹部中，并且在绝缘膜和Cu互连之间的界面上形成阻挡层，而不会导致电阻率的上升 当制造嵌入在设置在半导体衬底上的绝缘膜中的凹部中的Cu合金的半导体互连时，互连。 互连的制造方法可以包括以下步骤：形成具有不大于0.15μm的最小宽度的相应凹槽，以及其深度与最小宽度（深度/最小宽度比）的比不小于1，形成 在各凹部中含有0.5〜3原子％的Ti，N为0.4〜2.0原子％的Ti的Cu合金膜，然后将Cu合金膜退火至200℃以上。 并将Cu合金膜加压至50MPa以上，从而将Cu合金膜嵌入各凹部。

公开(公告)号：US09393524B2

公开(公告)日：2016-07-19

申请号：US14002597

申请日：2012-01-26

申请人： Keita Naito ,  Toshio Nakahira ,  Yoshikazu Takemoto ,  Takashi Onishi

发明人： Keita Naito ,  Toshio Nakahira ,  Yoshikazu Takemoto ,  Takashi Onishi

IPC分类号： F01N3/00 ,  B01D53/94 ,  F01N3/025 ,  F01N3/32 ,  F01N3/36

CPC分类号： B01D53/9495 ,  F01N3/025 ,  F01N3/0256 ,  F01N3/323 ,  F01N3/36 ,  F01N2240/14

摘要： An engine exhaust treatment device is capable of combusting PM accumulated in a DPF or activating an exhaust purification catalyst even immediately after engine startup or at the time of light load operation. A combustible gas supply passage (8) communicates with an exhaust passage (4) on an upstream of a combustion catalyst (5). An air supply unit (9) and an ignition unit (10) are provided in this supply passage and interlocked with a control unit (11). Where a temperature of the exhaust is lower than a predetermined temperature, the control unit supplies air (12) to a combustible gas by the air supply unit (9) and causes ignition of the combustible gas by the ignition unit (10), so as to cause flame combustion of the combustible gas. The temperature of the exhaust (6) in the exhaust passage (4) is increased by heat of this flame combustion.

摘要翻译： 发动机排气处理装置能够即使在发动机启动后或轻负载运转时，也可以燃烧积聚在DPF中的PM或者使排气净化催化剂活化。 可燃气体供给通路（8）与燃烧催化剂（5）的上游侧的排气通路（4）连通。 供气单元（9）和点火单元（10）设置在该供应通道中并与控制单元（11）互锁。 在排气温度低于预定温度的情况下，控制单元通过空气供应单元（9）将空气（12）供应到可燃气体，并使点燃单元（10）点燃可燃气体，以便 引起可燃气体的火焰燃烧。 排气通道（4）中的排气（6）的温度由于该火焰燃烧的热量而增加。

公开(公告)号：USD685820S1

公开(公告)日：2013-07-09

申请号：US29411964

申请日：2012-01-27

申请人： Mitsugu Okuda ,  Toshio Nakahira ,  Takashi Onishi ,  Yuichi Tamaki

设计人： Mitsugu Okuda ,  Toshio Nakahira ,  Takashi Onishi ,  Yuichi Tamaki

公开(公告)号：US20130015131A1

公开(公告)日：2013-01-17

申请号：US13637780

申请日：2011-03-10

申请人： Takashi Onishi ,  Keiichi Ikeda ,  Kenichi Okubo

发明人： Takashi Onishi ,  Keiichi Ikeda ,  Kenichi Okubo

IPC分类号： B01D65/02 ,  C02F1/44

CPC分类号： B01D65/02 ,  B01D2315/06 ,  B01D2315/18 ,  B01D2321/04 ,  B01D2321/185 ,  C02F1/283 ,  C02F1/441 ,  C02F1/56 ,  C02F9/00

摘要： The present invention provides a method for washing a separation membrane module after filtering raw water containing particles having a hardness higher than that of a separation membrane. Thus, after completion of filtration, water at the primary side in a separation membrane module is drained to outside the system, backwash waste water in the separation membrane module is then drained while carrying out backwash, and any of the steps of: (a) filling the primary side in the separation membrane module with water and carrying out air scrubbing; and (b) carrying out air scrubbing while feeding water to the primary side in the separation membrane module is then carried out, followed by draining water at the primary side in the separation membrane module to outside the system.

摘要翻译： 本发明提供一种洗涤分离膜组件的方法，其中过滤含有高于分离膜硬度的颗粒的含水原水。 因此，过滤结束后，将分离膜组件的一次侧的水排出到系统外部，在进行反冲洗的同时排出分离膜组件中的废水，并进行以下任一步骤：（a） 用水填充分离膜组件的初级侧并进行空气洗涤; 然后进行向分离膜组件的初级侧供给水的同时进行空气洗涤，然后将分离膜组件的初级侧的水排出到系统外部。

公开(公告)号：US20120117068A1

公开(公告)日：2012-05-10

申请号：US13382485

申请日：2010-04-08

申请人： Takashi Onishi ,  Shinichi Ando ,  Satoshi Nakazawa

发明人： Takashi Onishi ,  Shinichi Ando ,  Satoshi Nakazawa

IPC分类号： G06F17/30

CPC分类号： G06F16/35 ,  G06F16/355

摘要： The text mining device 300 includes a clustering section 301. The clustering section 301 performs clustering on a plurality of characteristic expressions extracted from a document set such that characteristic expressions, in which sentences to be referred to as original sentences are the same, are compiled in one cluster, based on the similarity in original document sets which are sets of documents including the respective characteristic expressions, the documents being of the document set. Consequently, the probability of repeatedly viewing the same original document by a user can be reduced reliably.

摘要翻译： 文本挖掘装置300包括聚类部分301.聚类部分301对从文档集提取的多个特征表达执行聚类，使得将被称为原始句子的句子相同的特征表达式被编译成 基于原始文档集合中的相似性的一个集群，其是包括各个特征表达式的文档集合，文档集合是文档集合。 因此，可以可靠地减少用户反复观看同一原稿的概率。

公开(公告)号：US20110237333A1

公开(公告)日：2011-09-29

申请号：US13131088

申请日：2009-06-18

申请人： Hitoshi Otomo ,  Takeshi Okubo ,  Yoshinori Shiigi ,  Motoki Kanematsu ,  Takashi Onishi ,  Kenichi Akiyama

发明人： Hitoshi Otomo ,  Takeshi Okubo ,  Yoshinori Shiigi ,  Motoki Kanematsu ,  Takashi Onishi ,  Kenichi Akiyama

IPC分类号： A63F9/24

CPC分类号： A63F13/828 ,  A63F13/10 ,  A63F13/12 ,  A63F13/795 ,  A63F13/812 ,  A63F2300/6045 ,  A63F2300/64 ,  A63F2300/6661 ,  A63F2300/8011

摘要： To provide a game device that is capable, in a match in which a player character group including operating characters of a plurality of game players and one or more teammate character competes with an opponent character or an opponent character group opposing the player character group, of improving diversity of combination of the characters belonging to the player character group while suppressing increase of data amount. An operating character obtaining unit (30) obtains the player data on an operating player of each game player. A teammate character obtaining unit (32) obtains the player data on a teammate player of each game player. A game execution unit (36) carries out a game in which an operating team takes part in a soccer match with an opponent team, based on the player data on the respective operating players and that on the respective teammate players.

摘要翻译： 为了提供一种游戏装置，能够在包括多个游戏玩家的操作人物和一个或多个队友角色的玩家角色组与对手角色或与玩家角色组相对的对手角色组竞争的比赛中， 提高属于播放器角色组的角色的组合的多样性，同时抑制数据量的增加。 操作字符获取单元（30）获取每个游戏者的操作玩家的玩家数据。 队友角色获取单元（32）获得每个游戏者的同伴玩家的玩家数据。 游戏执行单元（36）根据各运营玩家的玩家数据和各队友玩家进行与对手队的足球比赛的运动队伍的游戏。

公开(公告)号：US20100292983A1

公开(公告)日：2010-11-18

申请号：US12812133

申请日：2009-01-09

申请人： Takashi Onishi ,  Shinichi Ando ,  Kunihiko Sadamasa

发明人： Takashi Onishi ,  Shinichi Ando ,  Kunihiko Sadamasa

IPC分类号： G06F17/28

CPC分类号： G06F17/2872

摘要： A preprocessing unit (3) identifies an original text input from an input unit (1) as one of a plurality of types of basic element functions defined in advance as basic element functions that construct a description format of a claim, and outputs the original text in basic element functions. A translation unit (4) changes a translation manner in accordance with the type of basic element function of the original text output the preprocessing unit (3). This enables to appropriately translate a claim.

摘要翻译： 预处理单元（3）将从输入单元（1）输入的原始文本识别为预先定义为构成权利要求的描述格式的基本元素功能的多种类型的基本元素功能之一，并输出原始文本 在基本元素的功能。 翻译单元（4）根据输出预处理单元（3）的原始文本的基本元素函数的类型来改变翻译方式。 这使得能够适当地翻译权利要求。

公开(公告)号：US20100106480A1

公开(公告)日：2010-04-29

申请号：US12450275

申请日：2008-03-12

申请人： Kunihiko Sadamasa ,  Shinichi Doi ,  Shinichi Ando ,  Takashi Onishi

发明人： Kunihiko Sadamasa ,  Shinichi Doi ,  Shinichi Ando ,  Takashi Onishi

IPC分类号： G06F17/28

CPC分类号： G06F17/2881

摘要： When part or all of first character data is converted into another expression to generate second character data, there are prepared an acceptance rule indicative of correspondence between a language phenomenon, a principal word of the language phenomenon, and a scope of the language phenomenon, and a conversion method as correspondence between a language phenomenon and another expression into which an expression of the language phenomenon is converted. The acceptance rule stored in the storage device is applied for a word W included in the first character data, and an acceptance part of one of the word W, a phrase, a clause, and a sentence including the word W is extracted. A converted expression of the acceptance part is generated in accordance with the conversion method stored in the storage device that corresponds to a language phenomenon of the extracted acceptance part. The second character data are generated based on the converted expression and the first character data.

摘要翻译： 当部分或全部第一字符数据被转换为另一表达式以产生第二字符数据时，准备表示语言现象，语言现象的主语与语言现象的范围之间的对应关系的接受规则，以及 将语言现象与语言现象的表达式转换成语言现象的对应关系的转换方法。 存储在存储装置中的接受规则被应用于包括在第一字符数据中的字W，并且提取字W，短语，子句和包括字W的句子中的一个的接受部分。 根据与提取的接收部分的语言现象对应的存储装置中存储的转换方法，生成接收部分的转换表达式。 基于转换表达式和第一字符数据生成第二字符数据。

公开(公告)号：US20050045822A1

公开(公告)日：2005-03-03

申请号：US10902255

申请日：2004-07-30

申请人： Takashi Onishi

发明人： Takashi Onishi

IPC分类号： H01J37/16 ,  G01N23/225 ,  H01J37/09 ,  H01J37/244 ,  H01J37/304 ,  H01J37/305 ,  H01L21/027 ,  G01N23/00 ,  G21K7/00

CPC分类号： H01J37/02 ,  B82Y10/00 ,  B82Y40/00 ,  G01N23/2252 ,  H01J37/16 ,  H01J37/24 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3174 ,  H01J2237/0213 ,  H01J2237/0225 ,  H01J2237/045 ,  H01J2237/16 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/3175

摘要： The charged particle beams is provided, which can analyze contamination of the inner wall of the system without being disassembled and supply information on appropriate maintenance timing. The contamination level of the inner wall of the system is identified by measuring the spectrum of the X-rays emitted from the inner wall due to irradiation of a charged particle beam or a recoil electron.

摘要翻译： 提供带电粒子束，其可以分解系统的内壁的污染而不被拆卸并在适当的维护时间上提供信息。 通过测量由于带电粒子束或反冲电子的照射而从内壁发射的X射线的光谱，来识别系统内壁的污染水平。