公开(公告)号：US08625649B2

公开(公告)日：2014-01-07

申请号：US13413910

申请日：2012-03-07

Applicant: Mitsuhiro Ikuta ,  Aihiko Numata

Inventor： Mitsuhiro Ikuta ,  Aihiko Numata

IPC: H01S5/00 ,  H01S3/20

CPC classification number: H01S5/18391 ,  G03G15/0435 ,  G03G2215/0404 ,  H01S5/18313 ,  H01S5/18327 ,  H01S5/18333 ,  H01S5/18338 ,  H01S5/18369 ,  H01S5/18375 ,  H01S5/18394

Abstract: A surface emitting laser includes a stepped structure having a step between a first region and a second region, the stepped structure provided in an emission area located in an upper portion of the upper mirror. The surface emitting laser includes a light shielding member provided in a third region between the first region and the second region. The light shielding member is not provided in a portion of the first region and a portion of the second region.

Abstract translation: 表面发射激光器包括在第一区域和第二区域之间具有台阶的台阶结构，该台阶结构设置在位于上反射镜上部的发射区域中。 表面发射激光器包括设置在第一区域和第二区域之间的第三区域中的遮光构件。 遮光构件不设置在第一区域的一部分和第二区域的一部分中。

公开(公告)号：US20130177336A1

公开(公告)日：2013-07-11

申请号：US13824710

申请日：2011-10-05

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/183

CPC classification number: H01S5/18 ,  B41J2/455 ,  B41J2/473 ,  H01S3/02 ,  H01S5/183 ,  H01S5/18313 ,  H01S5/1833 ,  H01S5/18361 ,  H01S5/18391 ,  H01S5/3202 ,  H01S5/423 ,  H01S2301/16 ,  H01S2301/166 ,  H01S2301/18

Abstract: The present invention provides a surface emitting laser that provides a sufficient optical output and is suitable as a light source intended for electrophotographic apparatuses, and a surface-emitting-laser array and an image forming apparatus each including the surface emitting laser.The surface emitting laser includes a first stepped structure on a front surface of a front mirror. In the first stepped structure, a difference L between an optical path length in a first area and an optical path length in a second area satisfies the following expression: (¼+N)λ

Abstract translation: 本发明提供一种表面发射激光器，其提供足够的光输出并且适合作为用于电子照相设备的光源，以及包括表面发射激光器的表面发射激光器阵列和图像形成装置。 表面发射激光器包括在前反射镜的前表面上的第一阶梯结构。 在第一阶梯结构中，第一区域中的光路长度与第二区域中的光程长度之间的差L满足以下表达式：（¼+ N）λ<| L | <（¾+ N）λ其中 N是整数。

公开(公告)号：US20120147918A1

公开(公告)日：2012-06-14

申请号：US13311310

申请日：2011-12-05

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: G03G15/04072 ,  H01S5/18313 ,  H01S5/18391 ,  H01S2301/18

Abstract: A surface emitting laser includes a stepped structure including portions having different thicknesses. The optical path length from a plane defined above the stepped structure and extending parallel to a base substrate to an interface between a front mirror and the stepped structure is set to a specific value in each of the portions of the stepped structure.

Abstract translation: 表面发射激光器包括具有不同厚度的部分的阶梯式结构。 从阶梯状结构上方平面的平面延伸到前反射镜与阶梯状结构之间的界面的光路长度被设定为阶梯状结构的各部分中的特定值。

公开(公告)号：US08068529B2

公开(公告)日：2011-11-29

申请号：US12958987

申请日：2010-12-02

Applicant: Mitsuhiro Ikuta ,  Yasuhisa Inao ,  Takako Yamaguchi

Inventor： Mitsuhiro Ikuta ,  Yasuhisa Inao ,  Takako Yamaguchi

IPC: H01S5/00

CPC classification number: H01S5/18391 ,  H01S5/18311 ,  H01S5/18347 ,  H01S2301/166 ,  H01S2301/176

Abstract: Provided is a surface emitting laser manufacturing method, etc., which reduces process damage occurring to a surface relief structure, enabling stable provision of a single transverse mode characteristic. Provided is a method including a surface relief structure for controlling a reflectance in a light emitting portion of an upper mirror, the surface relief structure including a stepped structure, includes: forming a resist pattern including a pattern for forming a mesa structure and a pattern for forming a stepped structure, on or above the upper mirror, and performing first-phase etching for etching the surface layer of the upper mirror to determine the horizontal position of the stepped structure; forming a current confining structure after the performing first-phase etching; and performing second-phase etching for further etching the area that the first-phase etching has been performed, to determine the depth position of the stepped structure, after the forming a current confining structure.

Abstract translation: 本发明提供了一种表面发射激光制造方法等，其减少了对表面起伏结构发生的工艺损伤，能够稳定地提供单一横模特性。 提供了一种包括用于控制上反射镜的发光部分中的反射率的表面浮雕结构的方法，所述表面浮雕结构包括阶梯结构，包括：形成包括用于形成台面结构的图案的抗蚀剂图案和用于形成台阶结构的图案 在上反射镜上或上方形成台阶结构，并执行用于蚀刻上镜的表面层的第一相蚀刻以确定阶梯结构的水平位置; 在执行第一相蚀刻之后形成电流限制结构; 并且在形成电流限制结构之后，执行第二相蚀刻以进一步蚀刻已经执行第一相蚀刻的区域，以确定阶梯结构的深度位置。

公开(公告)号：US07991035B2

公开(公告)日：2011-08-02

申请号：US12599991

申请日：2009-02-24

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/42 ,  B82Y20/00 ,  H01S5/041 ,  H01S5/105 ,  H01S5/2027 ,  H01S5/2063 ,  H01S5/2081 ,  H01S5/34326 ,  H01S5/34333 ,  H01S2301/176

Abstract: Provided is a surface emitting laser array using a photonic crystal, which allows an active layer to be shared without disconnecting the active layer between the individual surface emitting lasers adjacent to each other, and enables high-density arraying easily. The surface emitting laser array includes: at least two surface emitting lasers formed on a substrate, each having a laminated structure of multiple semiconductor layers including a semiconductor multilayer mirror, an active layer, and a photonic crystal having a refractive index profile in an in-plane direction, the photonic crystal and the semiconductor multilayer mirror in the laminated structure forming a waveguide for guiding light in a resonance mode; and a region without the photonic crystal provided between adjacent surface emitting lasers in the surface emitting laser array, in which the surface emitting lasers have the same semiconductor multilayer mirror and the same active layer.

Abstract translation: 提供了使用光子晶体的表面发射激光器阵列，其允许共享活性层而不断开彼此相邻的各个表面发射激光器之间的有源层，并且能够容易地进行高密度排列。 表面发射激光器阵列包括：形成在衬底上的至少两个表面发射激光器，每个具有包括半导体多层反射镜，有源层和具有折射率分布的光子晶体的多个半导体层的层叠结构， 平面方向，层叠结构中的光子晶体和半导体多层反射镜，形成用于引导谐振模式的光的波导; 以及在表面发射激光器阵列中的相邻表面发射激光器之间提供没有光子晶体的区域，其中表面发射激光器具有相同的半导体多层反射镜和相同的有源层。

公开(公告)号：US07888149B2

公开(公告)日：2011-02-15

申请号：US12562605

申请日：2009-09-18

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01L21/00

CPC classification number: H01S5/18391 ,  H01S5/18311 ,  H01S5/2086 ,  H01S5/209 ,  H01S2301/166

Abstract: Provided is a surface emitting laser or the like capable of suppressing horizontal misalignment between the surface relief structure and the current confining structure to make higher the precision of the alignment, to thereby obtain single transverse mode characteristics with stability. The surface emitting laser having a semiconductor layer laminated therein includes: a first etching region formed by etching a part of the upper mirror; and a second etching region formed by performing etching from a bottom portion of the first etching region to a semiconductor layer for forming a current confining structure, in which a depth of the second etching region is smaller than a depth of the first etching region.

公开(公告)号：US20110027925A1

公开(公告)日：2011-02-03

申请号：US12837039

申请日：2010-07-15

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01L21/00 ,  H01S5/00 ,  B41J2/435

CPC classification number: H01S5/18311 ,  H01S5/0286 ,  H01S5/18313 ,  H01S5/18316 ,  H01S5/18333 ,  H01S5/18347 ,  Y10S257/918

Abstract: A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.

Abstract translation: 表面发射激光器包括层叠在基板上的下多层反射镜，有源层和上多层反射镜。 使用第一沟槽结构在有源层的上方或下方形成具有第一导电区域和第一绝缘区域的第一电流限制层。 使用第二沟槽结构在第一电流限制层的上方或下方形成具有第二导电区域和第二绝缘区域的第二电流限制层。 第一和第二沟槽结构从上多层反射镜的顶表面延伸到衬底，使得第二沟槽结构围绕第一沟槽结构。 当在基板的面内方向上观察表面发射激光时，第一导电区域和第一绝缘区域之间的边界设置在第二导电区域的内部。

公开(公告)号：US07796667B2

公开(公告)日：2010-09-14

申请号：US12234037

申请日：2008-09-19

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/423 ,  B41J2/45

Abstract: Provided is a two-dimensional surface-emitting laser array that enables to dispose more elements in a smaller area and enables compact size, high resolution, and high speed thereof. The two-dimensional surface-emitting laser array includes surface-emitting laser elements arranged in a two-dimensional manner of m rows and n columns (m is an integer of two or larger, and n is an integer of three or larger). The interval between mesas for arranging electrical wirings for individually driving the surface-emitting laser elements is assigned so that the interval in the m row direction increases according to the number of the electrical wirings passing through between the mesas.

Abstract translation: 提供了一种二维表面发射激光器阵列，其能够在更小的面积中配置更多的元件，并且能够实现紧凑的尺寸，高分辨率和高速度。 二维表面发射激光器阵列包括以m行和n列（m为2或更大的整数，n为3或更大的整数）的二维方式布置的表面发射激光器元件。 分配用于单独驱动表面发射激光元件的电气布线的台面之间的间隔被分配，使得m行方向上的间隔根据在台面之间通过的电气布线的数量而增加。

公开(公告)号：US20090232179A1

公开(公告)日：2009-09-17

申请号：US12105481

申请日：2008-04-18

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/00

CPC classification number: H01S5/18 ,  H01S5/0425 ,  H01S5/105

Abstract: A surface emitting laser having a photonic crystal layer 130 on a substrate 105 with an active layer therebetween, in which the photonic crystal layer includes at least a first periodic structure for resonating in an in-plane direction and a second periodic structure for modulating a light intensity distribution in an in-plane direction. The light intensity in the photonic crystal layer is periodically distributed to a region having high light intensity and a region having low light intensity by the second periodic structure. Further, a conductive film 170 for performing current injection into the active layer is selectively provided just above the region having low light intensity. The surface emitting laser provides suppression of light absorption and highly efficient current injection into an active layer to attain a high power.

Abstract translation: 一种表面发射激光器，其具有在衬底105上的光子晶体层130，其间具有有源层，其中光子晶体层至少包括用于在面内方向上谐振的第一周期性结构和用于调制光的第二周期性结构 在平面方向上的强度分布。 光子晶体层中的光强度通过第二周期性结构周期性地分布到具有高光强度的区域和具有低光强度的区域。 此外，用于在有源层进行电流注入的导电膜170选择性地设置在具有低光强度的区域正上方。 表面发射激光器提供抑制光吸收和高效电流注入有源层以获得高功率。

公开(公告)号：US20090086786A1

公开(公告)日：2009-04-02

申请号：US12234037

申请日：2008-09-19

Applicant: Mitsuhiro Ikuta

Inventor： Mitsuhiro Ikuta

IPC: H01S5/026

CPC classification number: H01S5/423 ,  B41J2/45

Abstract: Provided is a two-dimensional surface-emitting laser array that enables to dispose more elements in a smaller area and enables compact size, high resolution, and high speed thereof. The two-dimensional surface-emitting laser array includes surface-emitting laser elements arranged in a two-dimensional manner of m rows and n columns (m is an integer of two or larger, and n is an integer of three or larger). The interval between mesas for arranging electrical wirings for individually driving the surface-emitting laser elements is assigned so that the interval in the m row direction increases according to the number of the electrical wirings passing through between the mesas.

Abstract translation: 提供了一种二维表面发射激光器阵列，其能够在更小的面积中配置更多的元件，并且能够实现紧凑的尺寸，高分辨率和高速度。 二维表面发射激光器阵列包括以m行和n列（m为2或更大的整数，n为3或更大的整数）的二维方式布置的表面发射激光器元件。 分配用于单独驱动表面发射激光元件的电气布线的台面之间的间隔被分配，使得m行方向上的间隔根据在台面之间通过的电气布线的数量而增加。