公开(公告)号：US20130127293A1

公开(公告)日：2013-05-23

申请号：US13748687

申请日：2013-01-24

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Shinsuke Ikeuchi ,  Kansho Yamamoto

IPC: H01L41/08

CPC classification number: H01L41/0805 ,  C23C14/0036 ,  C23C14/083 ,  C23C14/088 ,  H01L41/0815 ,  H01L41/1873 ,  H01L41/22 ,  H01L41/316 ,  H01L41/319

Abstract: Provided is a method for producing a piezoelectric thin-film element including a piezoelectric thin-film layer having good surface morphology and high crystallinity. The method includes forming a lower electrode layer on a substrate; forming a piezoelectric thin-film buffer layer on the lower electrode layer at a relatively low film-formation temperature; forming a piezoelectric thin-film layer on the piezoelectric thin-film buffer layer at a film-formation temperature that is higher than the film-formation temperature for the piezoelectric thin-film buffer layer; and forming an upper electrode layer on the piezoelectric thin-film layer.

Abstract translation: 提供一种包括具有良好的表面形态和高结晶度的压电薄膜层的压电薄膜元件的制造方法。 该方法包括在基板上形成下电极层; 在较低的成膜温度下在下电极层上形成压电薄膜缓冲层; 在压电薄膜缓冲层上形成压电薄膜层，其成膜温度高于压电薄膜缓冲层的成膜温度; 以及在所述压电薄膜层上形成上电极层。

公开(公告)号：US10107743B2

公开(公告)日：2018-10-23

申请号：US15386613

申请日：2016-12-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Junya Komoda ,  Kansho Yamamoto

IPC: G01N21/35 ,  G01N21/3504 ,  H01L35/22 ,  H01L37/02 ,  G01N33/00 ,  G01J5/08 ,  G01J5/12 ,  G01N21/31 ,  G01J3/42

Abstract: A thermal infrared sensor for gas measurement including a sensing element. The sensing element includes a thermal detection layer that outputs an electric signal based on a temperature change, a light-receiving surface electrode disposed on a light-receiving surface of the thermal detection layer, and a back electrode disposed on the thermal detection layer opposite the light-receiving surface electrode. The light-receiving surface electrode has a periodic structure configured to selectively absorb infrared light having an absorption wavelength of a sample gas.

公开(公告)号：US20170102326A1

公开(公告)日：2017-04-13

申请号：US15386613

申请日：2016-12-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： JUNYA KOMODA ,  Kansho Yamamoto

IPC: G01N21/3504 ,  G01N33/00

CPC classification number: G01N21/3504 ,  G01J5/0831 ,  G01J5/0853 ,  G01J5/0862 ,  G01J5/12 ,  G01J2003/421 ,  G01N21/314 ,  G01N33/0009 ,  H01L35/22 ,  H01L37/02

Abstract: A thermal infrared sensor for gas measurement including a sensing element. The sensing element includes a thermal detection layer that outputs an electric signal based on a temperature change, a light-receiving surface electrode disposed on a light-receiving surface of the thermal detection layer, and a back electrode disposed on the thermal detection layer opposite the light-receiving surface electrode. The light-receiving surface electrode has a periodic structure configured to selectively absorb infrared light having an absorption wavelength of a sample gas.

公开(公告)号：US20170069820A1

公开(公告)日：2017-03-09

申请号：US15355657

申请日：2016-11-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takuo Hada ,  Kansho Yamamoto

IPC: H01L41/047 ,  H01L41/29 ,  H01L41/053

CPC classification number: H01L41/047 ,  H01L41/053 ,  H01L41/0973 ,  H01L41/22 ,  H01L41/29 ,  H03H3/02 ,  H03H9/174 ,  H04R17/00 ,  H04R17/02 ,  H04R31/00

Abstract: A piezoelectric device that includes a support layer, a lower electrode, a piezoelectric film and an upper electrode on a substrate. In the substrate, a first opening is provided that penetrates through at least part of the substrate in a thickness direction of the substrate. A second opening that faces the support layer and the first opening is provided above the first opening. An opening area of the first opening is smaller than an opening area of the second opening.

Abstract translation: 一种在基板上包括支撑层，下电极，压电膜和上电极的压电器件。 在基板中，提供在基板的厚度方向上穿透基板的至少一部分的第一开口。 面向支撑层和第一开口的第二开口设置在第一开口的上方。 第一开口的开口面积小于第二开口的开口面积。

公开(公告)号：US08847470B2

公开(公告)日：2014-09-30

申请号：US13748687

申请日：2013-01-24

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Kansho Yamamoto

IPC: H01L41/22 ,  C23C14/08 ,  H01L41/187 ,  H01L41/316 ,  H01L41/319 ,  H01L41/08 ,  C23C14/00

CPC classification number: H01L41/0805 ,  C23C14/0036 ,  C23C14/083 ,  C23C14/088 ,  H01L41/0815 ,  H01L41/1873 ,  H01L41/22 ,  H01L41/316 ,  H01L41/319

Abstract: Provided is a method for producing a piezoelectric thin-film element including a piezoelectric thin-film layer having good surface morphology and high crystallinity. The method includes forming a lower electrode layer on a substrate; forming a piezoelectric thin-film buffer layer on the lower electrode layer at a relatively low film-formation temperature; forming a piezoelectric thin-film layer on the piezoelectric thin-film buffer layer at a film-formation temperature that is higher than the film-formation temperature for the piezoelectric thin-film buffer layer; and forming an upper electrode layer on the piezoelectric thin-film layer.

Abstract translation: 提供一种包括具有良好的表面形态和高结晶度的压电薄膜层的压电薄膜元件的制造方法。 该方法包括在基板上形成下电极层; 在较低的成膜温度下在下电极层上形成压电薄膜缓冲层; 在压电薄膜缓冲层上形成压电薄膜层，其成膜温度高于压电薄膜缓冲层的成膜温度; 以及在所述压电薄膜层上形成上电极层。

公开(公告)号：US11233190B2

公开(公告)日：2022-01-25

申请号：US16273191

申请日：2019-02-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

IPC: H01L41/257 ,  H01L41/047 ,  H01L41/107 ,  H02N2/18 ,  B06B1/06 ,  H01L41/083 ,  H01L41/29

Abstract: A piezoelectric transformer that includes a vibration portion assembly having an output electrode, an output-side intermediate electrode, an input-side intermediate electrode, and an input electrode. The vibration portion assembly includes n vibration portions. The input electrode includes one to n input electrode pieces. The output electrode includes one to n output electrode pieces. Wiring lines are arranged such that voltages of opposite phases can be respectively applied to a first input electrode piece group of the input electrode pieces corresponding to odd-numbered vibration portions, and a second input electrode piece group of the input electrode pieces corresponding to even-numbered vibration portions. The second output electrode piece and the first output-side intermediate electrode piece are superposed with each other in the thickness direction. The first output electrode piece is not superposed with either of the first and second output-side intermediate electrode pieces in the thickness direction.

公开(公告)号：US11018292B2

公开(公告)日：2021-05-25

申请号：US15795579

申请日：2017-10-27

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Kansho Yamamoto ,  Takuo Hada ,  Yoichi Mochida ,  Hideya Horiuchi

IPC: H01L41/09 ,  H01L41/107 ,  H01L41/047 ,  H01L41/04 ,  H01L41/31 ,  H01L41/083 ,  H01L41/187 ,  H01L41/314 ,  H04R17/00

Abstract: A piezoelectric device that includes a base member having an opening therein and an upper layer supported by the base member. The upper layer includes a vibration portion at a location corresponding to the opening in the base member. The vibration portion includes a lower electrode, an intermediate electrode and an upper electrode that are spaced apart from one another in a thickness direction of the piezoelectric device. The upper layer includes a first piezoelectric layer disposed so as to be at least partially sandwiched between the lower electrode and the intermediate electrode, and a second piezoelectric layer disposed so as to overlap with the first piezoelectric layer and so as to be at least partially sandwiched between the intermediate electrode and the upper electrode. The first piezoelectric layer and the second piezoelectric layer are different in relative permittivity in the thickness direction of the piezoelectric device.

公开(公告)号：US10608166B2

公开(公告)日：2020-03-31

申请号：US15641470

申请日：2017-07-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kansho Yamamoto ,  Takuo Hada

IPC: H04R17/00 ,  H01L41/29 ,  H01L41/253 ,  H01L41/113 ,  H01L41/39 ,  H01L41/09 ,  H03H3/02 ,  H01L41/23 ,  H03H9/58 ,  H03H9/17 ,  H05B3/26 ,  H01L41/08 ,  H01L41/332 ,  H01L41/338 ,  H05B3/03 ,  H03H9/02 ,  H03H3/04 ,  H01L41/314

Abstract: A method for manufacturing a piezoelectric device that includes a substrate, a piezoelectric layer directly or indirectly supported by the substrate and arranged above the substrate, a heater, and a heater electrode for driving the heater. Moreover, the method includes forming the piezoelectric layer, the heater, and the heater electrode and subjecting the piezoelectric device to heat treatment with heat generated from the heater by driving the heater by feeding electric power to the heater electrode.

公开(公告)号：US20160252382A1

公开(公告)日：2016-09-01

申请号：US15153977

申请日：2016-05-13

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Taro Nishino ,  Kansho Yamamoto ,  Katsumi Fujimoto

IPC: G01F15/14 ,  G01F1/69

CPC classification number: G01F1/6886 ,  G01F1/6845 ,  G01F1/69 ,  G01F1/692 ,  G01F15/14 ,  G01P5/10

Abstract: A thermal-type flow-rate sensor includes a substrate and a detection unit that is supported by the substrate and at least an upper surface of which is exposed to a flow of a fluid. The detection unit includes: an insulating layer, a heating element arranged on an upper surface of the insulating layer, an upstream temperature measurement element that is arranged on the upper surface of the insulating layer upstream of the heating element in the flow direction that includes a pyroelectric layer, and a downstream temperature measurement element arranged on the upper surface of the insulating layer so as to be positioned downstream of the heating element in the flow direction and that includes a pyroelectric layer.

Abstract translation: 热式流量传感器包括基板和由基板支撑的至少其上表面暴露于流体流的检测单元。 检测单元包括：绝缘层，布置在绝缘层的上表面上的加热元件，上游温度测量元件，其布置在沿着流动方向的加热元件上游的绝缘层的上表面上，该上游温度测量元件包括 热电层和布置在绝缘层的上表面上的下游温度测量元件，以便沿着流动方向位于加热元件的下游，并且包括热电层。