公开(公告)号：US20200043736A1

公开(公告)日：2020-02-06

申请号：US16598210

申请日：2019-10-10

Applicant: nLIGHT, Inc.

Inventor： Robert J. Martinsen ,  Scott R. Karlsen ,  Ken Gross

IPC: H01L21/268 ,  H01L21/02 ,  B23K26/00 ,  B23K26/0622

Abstract: Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.

公开(公告)号：US11886053B2

公开(公告)日：2024-01-30

申请号：US17854933

申请日：2022-06-30

Applicant: NLIGHT, INC.

Inventor： Ken Gross ,  Brian Victor ,  Robert J. Martinsen ,  Dahv A. V. Kliner ,  Roger Farrow

IPC: G02F1/01 ,  B23K26/067 ,  B23K26/38 ,  G02B6/14 ,  B23K26/21 ,  B22F3/11 ,  B22F3/24 ,  B23K26/03 ,  G02B6/02 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B23K26/342 ,  B29C48/08 ,  G02B6/036 ,  G02B6/42 ,  B23K26/062 ,  B23K26/70 ,  B29C64/264 ,  B29C64/153 ,  H01S5/00 ,  B22F10/20 ,  B22F10/31 ,  B22F10/36 ,  B23K26/064 ,  B23K26/073 ,  G02B6/255 ,  G02B27/09 ,  G02B26/10 ,  G02B6/028 ,  G02F1/015 ,  B22F12/44 ,  B22F12/49 ,  G02B6/26 ,  G02B6/12

CPC classification number: G02F1/0115 ,  B22F3/1109 ,  B22F3/24 ,  B22F10/20 ,  B22F10/31 ,  B22F10/36 ,  B23K26/032 ,  B23K26/034 ,  B23K26/0342 ,  B23K26/062 ,  B23K26/064 ,  B23K26/067 ,  B23K26/073 ,  B23K26/21 ,  B23K26/342 ,  B23K26/38 ,  B23K26/704 ,  B29C48/08 ,  B29C64/153 ,  B29C64/264 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  G02B6/02 ,  G02B6/021 ,  G02B6/023 ,  G02B6/02042 ,  G02B6/02347 ,  G02B6/02371 ,  G02B6/02395 ,  G02B6/036 ,  G02B6/03611 ,  G02B6/03694 ,  G02B6/14 ,  G02B6/255 ,  G02B6/4203 ,  G02B6/4206 ,  G02B27/0927 ,  G02B27/0933 ,  G02B27/0994 ,  H01S5/0085 ,  B22F12/44 ,  B22F12/49 ,  G02B6/02004 ,  G02B6/0281 ,  G02B6/0288 ,  G02B6/0365 ,  G02B6/03616 ,  G02B6/03627 ,  G02B6/03633 ,  G02B6/03638 ,  G02B6/03688 ,  G02B6/262 ,  G02B6/4296 ,  G02B26/101 ,  G02B2006/12121 ,  G02F1/0151

Abstract: A method of processing by controlling one or more beam characteristics of an optical beam may include: launching the optical beam into a first length of fiber having a first refractive-index profile (RIP); coupling the optical beam from the first length of fiber into a second length of fiber having a second RIP and one or more confinement regions; modifying the one or more beam characteristics of the optical beam in the first length of fiber, in the second length of fiber, or in the first and second lengths of fiber; confining the modified one or more beam characteristics of the optical beam within the one or more confinement regions of the second length of fiber; and/or generating an output beam, having the modified one or more beam characteristics of the optical beam, from the second length of fiber. The first RIP may differ from the second RIP.

公开(公告)号：US10668567B2

公开(公告)日：2020-06-02

申请号：US15933160

申请日：2018-03-22

Applicant: nLIGHT, Inc.

Inventor： Brian M. Victor ,  Ken Gross ,  Aaron W. Brown ,  Dahv A. V. Kliner

IPC: B23K26/34 ,  B23K26/342 ,  B28B1/00 ,  B29C64/141 ,  B29C64/268 ,  B29C64/371 ,  G02B27/09 ,  G02B6/26 ,  B23K26/12 ,  B23K26/04 ,  B23K26/06 ,  B29C64/153 ,  B23K26/14 ,  G02B6/14 ,  G02B6/036 ,  B22F3/105 ,  B33Y40/00 ,  G02B6/028 ,  B33Y30/00

Abstract: Disclosed herein are methods, apparatus, and systems for a multi-operation optical beam delivery device having a laser source to generate the optical beam. A beam characteristic conditioner that, in response to a control input indicating a change between the different laser process operations, controllably modifies the beam characteristics for a corresponding laser process operation of the different laser process operations. A delivery fiber has an input end coupled to the beam characteristic conditioner and an output end coupled to a process head for performing the corresponding laser process operation.

公开(公告)号：US10649241B2

公开(公告)日：2020-05-12

申请号：US15934714

申请日：2018-03-23

Applicant: nLIGHT, Inc.

Inventor： David Martin Hemenway ,  Ken Gross ,  Dahv A. V. Kliner ,  Roger Farrow

IPC: G02F1/01 ,  G02B27/09 ,  G02B6/42 ,  G02B6/255 ,  G02B6/26 ,  G02B6/036 ,  G02B6/028 ,  B23K26/06 ,  B23K26/21 ,  B23K26/073 ,  B23K26/38 ,  B23K1/00 ,  B23K26/34 ,  B23K1/005 ,  B23K101/42

Abstract: A method of tailoring beam characteristics of a laser beam during fabrication of an electronic device. The method includes: providing a substrate comprising one or more layers; adjusting one or more characteristics of a laser beam; and impinging the laser beam having the adjusted beam characteristics on the substrate to carry out at least one process step for fabricating the electronic device. The adjusting of the laser beam comprises: perturbing the laser beam propagating within a first length of fiber to adjust the one or more beam characteristics of the laser beam in the first length of fiber or a second length of fiber or a combination thereof, the second length of fiber having two or more confinement regions; coupling the perturbed laser beam into the second length of fiber; and emitting the laser beam having the adjusted beam characteristics from the second length of fiber.

公开(公告)号：US10559395B2

公开(公告)日：2020-02-11

申请号：US15804802

申请日：2017-11-06

Applicant: nLIGHT, Inc.

Inventor： Ken Gross

IPC: G02B26/08 ,  G21K5/04 ,  H05K3/02 ,  H01L31/18 ,  H05K1/03

Abstract: Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

公开(公告)号：US20180214985A1

公开(公告)日：2018-08-02

申请号：US15933160

申请日：2018-03-22

Applicant: nLIGHT, Inc.

Inventor： Brian M. Victor ,  Ken Gross ,  Aaron W. Brown ,  Dahv A.V. Kliner

IPC: B23K26/342 ,  B33Y30/00 ,  B22F3/105 ,  B28B1/00 ,  B29C64/141 ,  B29C64/268 ,  B29C64/371 ,  B33Y40/00 ,  G02B27/09 ,  G02B6/26 ,  B23K26/12 ,  B23K26/04 ,  B23K26/06

Abstract: Disclosed herein are methods, apparatus, and systems for a multi-operation optical beam delivery device having a laser source to generate the optical beam. A beam characteristic conditioner that, in response to a control input indicating a change between the different laser process operations, controllably modifies the beam characteristics for a corresponding laser process operation of the different laser process operations. A delivery fiber has an input end coupled to the beam characteristic conditioner and an output end coupled to a process head for performing the corresponding laser process operation.

公开(公告)号：US11888084B2

公开(公告)日：2024-01-30

申请号：US17817942

申请日：2022-08-05

Applicant: nLIGHT, Inc.

Inventor： Ken Gross

IPC: H01L31/18 ,  G21K5/04 ,  H05K3/02 ,  G06F3/044 ,  G06F3/041 ,  H05K1/03

CPC classification number: H01L31/1884 ,  G06F3/044 ,  G06F3/04164 ,  G21K5/04 ,  H05K3/02 ,  G06F2203/04102 ,  G06F2203/04103 ,  G06F2203/04112 ,  H05K1/0393 ,  H05K3/027 ,  H05K2201/0108 ,  H05K2201/0145 ,  H05K2201/026 ,  H05K2203/1142 ,  Y02E10/50

Abstract: Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

公开(公告)号：US20230039104A1

公开(公告)日：2023-02-09

申请号：US17817942

申请日：2022-08-05

Applicant: nLIGHT, Inc.

Inventor： Ken Gross

IPC: H01L31/18 ,  G21K5/04 ,  H05K3/02 ,  G06F3/044 ,  G06F3/041

Abstract: Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

公开(公告)号：US20200251237A1

公开(公告)日：2020-08-06

申请号：US16786957

申请日：2020-02-10

Applicant: nLIGHT, Inc.

Inventor： Ken Gross

IPC: G21K5/04 ,  H05K3/02 ,  H01L31/18 ,  G06F3/044 ,  G06F3/041

Abstract: Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

公开(公告)号：US10692620B2

公开(公告)日：2020-06-23

申请号：US15804802

申请日：2017-11-06

Applicant: nLIGHT, Inc.

Inventor： Ken Gross

IPC: G02B26/08 ,  G21K5/04 ,  G06F3/041 ,  G06F3/044 ,  H01L31/18 ,  H05K3/02 ,  H05K1/03

Abstract: Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.