Abstract:
A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.
Abstract:
This disclosure provides systems, methods and apparatus including processes that use two layers of resist, with a layer of etch stop material in between. The two layers of resist may be etched in separate processes to form devices having vias with sidewalls that extend through both layers of resist
Abstract:
In one innovative aspect of the disclosure, a method includes patterning a first region and a first portion of a second region of a substrate using a first reticle. The method also includes patterning the second region and a first portion of the first region using a second reticle. The method additionally includes forming a first array of first patterned elements based on the patterning by the first reticle, and forming a second array of second patterned elements based on the patterning by the second reticle. In some implementations, each of the first and the second arrays are incomplete in each of the first portions. However, the first patterned elements in the first portion of the second region are complementary to the second patterned elements in the first portion of the second region. Similarly, the first patterned elements in the first portion of the first region are complementary to the second patterned elements in the first portion of the first region. In some such implementations, the combination of the first array and the second array form a complete array of patterned elements.
Abstract:
This disclosure provides systems, methods and apparatus including microelectromechanical system microphones. In one aspect, the systems include a substrate made of a low dielectric material, such as glass. A layer of semiconductor material extends, substantially continuously over a surface of the substrate and includes an array of display elements that modulate light to form an image and a movable diaphragm that detects acoustic signals. The diaphragm is held away from the substrate by springs that include beams having an aspect ratio of about four to one.
Abstract:
This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes dual-level shutter assemblies. Each dual-level shutter assembly includes front and rear light obstructing levels positioned adjacent to respective front and rear light blocking layers. The front and rear light blocking layers define apertures providing optical paths from a backlight to the front of the display. The dual-level shutters selectively obstruct these optical paths to generate an image.
Abstract:
This disclosure provides systems, methods, and apparatus for providing pixel circuits for controlling the state of operation of light modulators in a display. A pixel circuit used to control one or more display elements of a MEMS display apparatus can include a first output node coupled to a first actuator of a display element and a second output node coupled to a second actuator of the display element. The first output node can be coupled to an actuation interconnect via a first pre-charge switch connected in parallel with a first capacitor. The second output node can be connected to the actuation interconnect via a second pre-charge switch connected in parallel with a second capacitor. Energizing the first output node or the second output node can cause the display element to enter or remain in a first state or a second state, respectively.
Abstract:
This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include a transparent substrate, a display element formed on the substrate, a light blocking elevated aperture layer (EAL) supported over the substrate by an anchor formed on the substrate, and an electrical interconnect disposed on the EAL for carrying an electrical signal to the display element. The electrical interconnect can include one or more of a data voltage interconnect, a scan-line interconnect or a global interconnect. In some implementations, a dielectric layer can separate the electrical interconnect from the EAL. The EAL can include an aperture formed through it that corresponds to the display element. In some implementations, a second electrical interconnect disposed on the substrate can be electrically coupled to a plurality of display elements.