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11.
公开(公告)号:US20210175380A1
公开(公告)日:2021-06-10
申请号:US16948325
申请日:2020-09-14
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Swarnal BORTHAKUR , Marc Allen SULFRIDGE
IPC: H01L31/0232 , H01L31/107 , H01L27/146
Abstract: An imaging device may include single-photon avalanche diodes (SPADs). To improve the sensitivity and signal-to-noise ratio of the SPADs, light scattering structures may be formed in the semiconductor substrate to increase the path length of incident light through the semiconductor substrate. To mitigate crosstalk, an isolation structure may be formed in a ring around the SPAD. The isolation structure may be a hybrid isolation structure with both a metal filler that absorbs light and a low-index filler that reflects light. The isolation structure may be formed as a single trench or may include a backside deep trench isolation portion and a front side deep trench isolation portion. The isolation structure may also include a color filtering material.
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公开(公告)号:US20190131333A1
公开(公告)日:2019-05-02
申请号:US15799833
申请日:2017-10-31
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Swarnal BORTHAKUR , Marc Allen SULFRIDGE
IPC: H01L27/146
Abstract: Multi-photodiode image pixels may include sub-pixels with differing light sensitivities. Microlenses may be formed over the multi-photodiode image pixels so that light sensitivity of sub-pixels in an outer group of sub-pixels is enhanced. To prevent high angle light incident upon one of the sub-pixels of the image pixel from generating charges in a photosensitive region of another sub-pixel of the image pixel, intra-pixel isolation structures may be formed. Intra-pixel isolation structures may surround, and in some embodiments, overlap the light collecting region of an inner photodiode. When the intra-pixel isolation structures have a different index of refraction than light filtering material formed adjacent to the isolation structures, high angle light incident upon the isolation structures may be reflected back into the sub-pixel it was initially incident upon. Intra-pixel isolation structures may be formed entirely from optically transparent materials or a combination of optically transparent and opaque materials.
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公开(公告)号:US20180083058A1
公开(公告)日:2018-03-22
申请号:US15268183
申请日:2016-09-16
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Larry Duane KINSMAN , Swarnal BORTHAKUR , Marc Allen SULFRIDGE
IPC: H01L27/146 , H01L25/065 , H01L25/00
Abstract: Various embodiments of the present technology may comprise a method and apparatus for an image sensor with a thermal equalizer for distributing heat. The method and apparatus may comprise a thermal equalizer disposed between a sensor die and a circuit die to prevent uneven heating of the pixels in the sensor die. The method and apparatus may comprise a thermal equalizer integrated within the circuit die.
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公开(公告)号:US20160286102A1
公开(公告)日:2016-09-29
申请号:US14667457
申请日:2015-03-24
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Marc Allen SULFRIDGE , Andrew Eugene PERKINS , Rickie Charles LAKE , Jonathan Michael STERN
IPC: H04N5/225
CPC classification number: H04N5/2253 , B29C66/345 , B29C66/81455 , B29C66/8266 , H01L21/00 , H01L27/14601 , H01L27/14607 , H01L27/14618 , H01L27/14687 , H01L27/14698
Abstract: A method for forming curved image sensors may include applying positive pressure to the face of an image sensor, forcing the image sensor to adhere the curved surface of a substrate. The pressure may be applied to the face of the image sensor in a variety of ways, including using pneumatic pressure, hydraulic pressure, or pressure from an elastic or inelastic solid. Processing may occur on either a single image sensor die or an image sensor wafer. When an image sensor wafer is processed, a substrate may be used that has a number of cavities defined by respective curved surfaces with each cavity corresponding to a respective image sensor. When pressure is applied to the image sensor, the image sensor may deform until the curvature of the image sensor matches the curvature of the curved surface of the underlying substrate.
Abstract translation: 用于形成弯曲图像传感器的方法可以包括向图像传感器的表面施加正压力,迫使图像传感器粘附基底的弯曲表面。 压力可以以各种方式施加到图像传感器的表面,包括使用气动压力,液压或来自弹性或非弹性固体的压力。 处理可能发生在单个图像传感器裸片或图像传感器晶片上。 当处理图像传感器晶片时,可以使用具有由各个曲面限定的多个空腔的基板,每个空腔对应于相应的图像传感器。 当对图像传感器施加压力时,图像传感器可能变形直到图像传感器的曲率与下面的基底的曲面的曲率相匹配。
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公开(公告)号:US20250125284A1
公开(公告)日:2025-04-17
申请号:US18488628
申请日:2023-10-17
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Jeffrey Peter GAMBINO , David T. PRICE , Marc Allen SULFRIDGE , Richard MAURITZSON , James Joseph STEFFES
IPC: H01L23/60 , H01L23/00 , H01L27/146
Abstract: A semiconductor device may include a first chip with a first wafer and a first dielectric layer, and a second chip that includes a second wafer and a second dielectric layer, the second chip having a backside surface and a frontside surface opposed to the backside surface and bonded to the first chip at the frontside surface to define a bond line between the first dielectric layer and the second dielectric layer. The semiconductor device may include a die seal layer on the backside surface having a die seal ground contact in contact with the second wafer, and an electrostatic discharge path that includes the die seal layer, the die seal ground contact, a first die seal in the first dielectric layer, a second die seal in the second dielectric layer, and a hybrid bond connecting the first die seal and the second die seal through the bond line.
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公开(公告)号:US20240371905A1
公开(公告)日:2024-11-07
申请号:US18309933
申请日:2023-05-01
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Swarnal BORTHAKUR , Marc Allen SULFRIDGE , Jeffrey Peter GAMBINO , Vladimir KOROBOV , Richard MAURITZSON , David T. PRICE
IPC: H01L27/146 , H01L23/58
Abstract: A semiconductor device may include a first chip that includes a first wafer and a first dielectric layer disposed thereon. The semiconductor device may include a second chip that includes a second wafer and a second dielectric layer disposed thereon, the second chip having a backside surface and a frontside surface opposed to the backside surface, the second chip being bonded to the first chip at the frontside surface to define a bond line between the first dielectric layer and the second dielectric layer. An opening through the backside surface of the second chip may extend into the second dielectric layer, and a bond pad may be disposed within the second dielectric layer between the second wafer and the bond line.
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公开(公告)号:US20240321924A1
公开(公告)日:2024-09-26
申请号:US18673521
申请日:2024-05-24
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Jeffrey Peter GAMBINO , David T. PRICE , Marc Allen SULFRIDGE , Richard MAURITZSON , Michael Gerard KEYES , Ryan RETTMANN , Kevin MCSTAY
IPC: H01L27/146
CPC classification number: H01L27/1463 , H01L27/14603 , H01L27/14623 , H01L27/1464
Abstract: An imaging device may include single-photon avalanche diodes (SPADs). To mitigate crosstalk, isolation structures may be formed around each SPAD. The isolation structures may include front side deep trench isolation structures that extend partially or fully through a semiconductor substrate for the SPADs. The isolation structures may include a metal filler such as tungsten that absorbs photons. The isolation structures may include a p-type doped semiconductor liner to mitigate dark current. The isolation structures may include a buffer layer such as silicon dioxide that is interposed between the metal filler and the p-type doped semiconductor liner. The isolation structures may have a tapered portion or may be formed in two steps such that the isolation structures have different portions with different properties. An additional filler such as polysilicon or borophosphosilicate glass may be included in some of the isolation structures in addition to the metal filler.
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18.
公开(公告)号:US20240055537A1
公开(公告)日:2024-02-15
申请号:US18493996
申请日:2023-10-25
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Marc Allen SULFRIDGE , Anne DEIGNAN , Nader JEDIDI , Michael Gerard KEYES
IPC: H01L31/02 , H01L27/146 , H01L31/055 , H01L31/107 , H01L31/0232 , G02B3/06
CPC classification number: H01L31/02027 , H01L27/14605 , H01L31/055 , H01L31/107 , H01L27/14643 , H01L27/14621 , H01L27/14627 , H01L27/14629 , H01L27/14649 , H01L31/02327 , G02B3/06 , H01L27/1463 , H01L27/1464 , H04N25/63
Abstract: An imaging device may include single-photon avalanche diodes (SPADs). To improve the sensitivity and signal-to-noise ratio of the SPADs, light scattering structures may be formed in the semiconductor substrate to increase the path length of incident light through the semiconductor substrate. To mitigate crosstalk, multiple rings of isolation structures may be formed around the SPAD. An outer deep trench isolation structure may include a metal filler such as tungsten and may be configured to absorb light. The outer deep trench isolation structure therefore prevents crosstalk between adjacent SPADs. Additionally, one or more inner deep trench isolation structures may be included. The inner deep trench isolation structures may include a low-index filler to reflect light and keep incident light in the active area of the SPAD.
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公开(公告)号:US20230230987A1
公开(公告)日:2023-07-20
申请号:US18065992
申请日:2022-12-14
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Byounghee LEE , Swarnal BORTHAKUR , Marc Allen SULFRIDGE
IPC: H01L27/146 , H04N25/131
CPC classification number: H01L27/14621 , H01L27/14627 , H04N25/131
Abstract: Imaging systems, and image pixels and related methods. At least one example is an image sensor comprising a plurality of image pixels. Each image pixel may comprise: a color router defining a router collection area on an upper surface; a first photosensitive region beneath the color router; a second photosensitive region beneath the color router; and a third photosensitive region beneath the color router. The color router may be configured to route photons of a first wavelength received at the router collection area to the first photosensitive region, route photons of a second wavelength received at the router collection area to the second photosensitive region, and route photons of a third wavelength received at the router collection area to the third photosensitive region.
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公开(公告)号:US20220139982A1
公开(公告)日:2022-05-05
申请号:US17576268
申请日:2022-01-14
Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Inventor: Larry Duane KINSMAN , Swarnal BORTHAKUR , Marc Allen SULFRIDGE , Scott Donald CHURCHWELL , Brian VAARTSTRA
IPC: H01L27/146
Abstract: An image sensor package may include a semiconductor wafer having a pixel array, a color filter array (CFA) formed over the pixel array, and one or more lenses formed over the CFA. A light block layer may couple over the semiconductor wafer around a perimeter of the lenses and an encapsulation layer may be coupled around the perimeter of the lenses and over the light block layer. The light block layer may form an opening providing access to the lenses. A mold compound layer may be coupled over the encapsulation layer and the light block layer. A temporary protection layer may be used to protect the one or more lenses from contamination during application of the mold compound and/or during processes occurring outside of a cleanroom environment.
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