PHOTORESIST COMPOSITION AND METHOD OF FORMING A COLOR FILTER USING THE SAME
    14.
    发明申请
    PHOTORESIST COMPOSITION AND METHOD OF FORMING A COLOR FILTER USING THE SAME 有权
    光刻胶组合物和使用其形成色彩过滤器的方法

    公开(公告)号:US20130302727A1

    公开(公告)日:2013-11-14

    申请号:US13655597

    申请日:2012-10-19

    Abstract: Exemplary embodiments of the present invention relate to a photoresist composition and method of forming a color filter using the same. A photoresist composition according to an exemplary embodiment includes about 5% by weight to about 10% by weight of a binder resin, about 5% by weight to about 10% by weight of a monomer, about 1% by weight to about 15% by weight of a photo initiator configured to be activated a light having a peak wavelength from about 400 nm to about 410 nm, about 1% by weight to about 10% by weight of a pigment, about 0.01% by weight to about 1% by weight of a pigment dispersing agent, and a solvent.

    Abstract translation: 本发明的示例性实施方案涉及光致抗蚀剂组合物和使用其形成滤色器的方法。 根据示例性实施方案的光致抗蚀剂组合物包含约5重量%至约10重量%的粘合剂树脂,约5重量%至约10重量%的单体,约1重量%至约15重量% 光引发剂的重量被配置为激活具有约400nm至约410nm的峰值波长的光,约1重量%至约10重量%的颜料,约0.01重量%至约1重量% 的颜料分散剂和溶剂。

    SEALING COMPOSITION AND METHOD FOR MANUFACTURING DISPLAY PANEL USING THE SAME
    15.
    发明申请
    SEALING COMPOSITION AND METHOD FOR MANUFACTURING DISPLAY PANEL USING THE SAME 审中-公开
    密封组合物和使用其制造显示面板的方法

    公开(公告)号:US20130248110A1

    公开(公告)日:2013-09-26

    申请号:US13762015

    申请日:2013-02-07

    CPC classification number: C09J163/00 C09J163/10

    Abstract: A sealing composition and a method of manufacturing a display panel using the sealing composition are disclosed. The sealing composition includes about 10% by weight to about 80% by weight of a denatured epoxy resin having a methacrylate group, about 5% by weight to about 40% by weight of a photo-curing acrylate monomer, about 1% by weight to about 10% by weight of a heat-curing agent, about 1% by weight to about 10% by weight of a photo-polymerization initiator, about 5% by weight to about 50% by weight of a filler, about 1% by weight to about 10% by weight of a flexibility improving agent and about 0.001% by weight to about 8% by weight of an additive.

    Abstract translation: 公开了一种密封组合物和使用密封组合物制造显示面板的方法。 密封组合物包含约10重量%至约80重量%的具有甲基丙烯酸酯基团的变性环氧树脂,约5重量%至约40重量%的光固化丙烯酸酯单体,约1重量%至约 约10重量%的热固化剂,约1重量%至约10重量%的光聚合引发剂,约5重量%至约50重量%的填料,约1重量% 至约10重量%的柔性改善剂和约0.001重量%至约8重量%的添加剂。

    Exposure apparatus and method thereof
    16.
    发明授权
    Exposure apparatus and method thereof 有权
    曝光装置及其方法

    公开(公告)号:US09594307B2

    公开(公告)日:2017-03-14

    申请号:US14226621

    申请日:2014-03-26

    CPC classification number: G03F7/70291 G03F7/70508 G03F7/7055

    Abstract: An exposure apparatus includes a light source, an illuminating member, a projecting member, a stage, an inspecting member, and an information processing member. The light source is configured to provide a light in accordance with a pulse event generation (PEG) representing a period of light radiation. The illuminating member is configured to change the light into point lights. The projecting member is configured to project the point lights according to a photoresist shape extending in various directions. The point lights are projected on the stage. The inspecting member is configured to inspect a photoresist pattern formed by the projected point lights. The information processing member is configured to analyze different photoresist patterns corresponding to different PEGs to select one PEG from the different PEGs. The one PEG being associated with a minimum error in the various directions.

    Abstract translation: 曝光装置包括光源,照明构件,突出构件,台,检查构件和信息处理构件。 光源被配置为根据表示光辐射周期的脉冲事件生成(PEG)提供光。 照明构件被配置为将光改变为点光。 突出构件被配置为根据在各个方向上延伸的光致抗蚀剂形状来投射点光源。 点灯投射在舞台上。 检查构件被配置为检查由投影点光形成的光致抗蚀剂图案。 信息处理构件被配置为分析对应于不同PEG的不同光刻胶图案,以从不同的PEG中选择一个PEG。 一个PEG与各个方向上的最小误差相关联。

    MASKLESS EXPOSURE DEVICE AND MASKLESS EXPOSURE METHOD USING THE SAME
    17.
    发明申请
    MASKLESS EXPOSURE DEVICE AND MASKLESS EXPOSURE METHOD USING THE SAME 有权
    无障碍曝光装置和使用其的无障碍曝光方法

    公开(公告)号:US20160202615A1

    公开(公告)日:2016-07-14

    申请号:US14836422

    申请日:2015-08-26

    CPC classification number: G03F7/70141 G03F7/7005 G03F7/704

    Abstract: A maskless exposure device includes a plurality of exposure heads, each exposure head including a digital micro-mirror device configured to scan an exposure beam to a substrate, the exposure heads being disposed in staggered first and second rows, a plurality of reflecting members disposed on side surfaces of the exposure heads and having reflecting surfaces parallel with each other, a light emitting part configured to light to the reflecting members, and a light receiving part configured to receive light via the reflecting members.

    Abstract translation: 无掩模曝光装置包括多个曝光头,每个曝光头包括配置成将曝光光束扫描到基板的数字微镜装置,曝光头设置在交错的第一和第二行中,多个反射部件设置在 曝光头的侧表面并且具有彼此平行的反射表面,被配置为对反射构件发光的发光部,以及被配置为经由反射构件接收光的光接收部。

    MASKLESS EXPOSURE DEVICE AND METHOD FOR COMPENSATING CUMULATIVE ILLUMINATION USING THE SAME
    18.
    发明申请
    MASKLESS EXPOSURE DEVICE AND METHOD FOR COMPENSATING CUMULATIVE ILLUMINATION USING THE SAME 有权
    用于使用该方法来补偿积分照明的无障碍曝光装置和方法

    公开(公告)号:US20160109809A1

    公开(公告)日:2016-04-21

    申请号:US14831830

    申请日:2015-08-20

    CPC classification number: G03F7/70275 G03F7/70291 G03F7/70358 G03F7/70558

    Abstract: A maskless exposure device including a light source configured to emit an exposure beam, a light modulation element configured to modulate the exposure beam according to an exposure pattern, a projection optical system configured to transfer a modulated exposure beam to a substrate as a beam spot array, a beam measurement part configured to measure a beam data of the beam spot array, and a compensating mask generator configured to generate a compensating mask by utilizing a measured data of the exposure beam for compensating cumulative illumination, wherein the compensating mask generator is configured to turn off left and right beams of a first selected spot beam selected by the beam data, and then to turn off a second selected spot beam.

    Abstract translation: 一种无掩模曝光装置,包括被配置为发射曝光光束的光源,配置成根据曝光图案调制曝光光束的光调制元件,被配置为将调制曝光光束传送到基板的投影光学系统作为光束阵列 ,被配置为测量所述光束阵列的光束数据的光束测量部分以及被配置为通过利用所述曝光光束的测量数据来补偿累积照明来生成补偿掩模的补偿掩码发生器,其中所述补偿掩码发生器被配置为 关闭由光束数据选择的第一选定光束的左右光束,然后关闭第二选定的光束。

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