Abstract:
A semiconductor device includes a plurality of lines disposed on a semiconductor substrate, and remaining line patterns disposed spaced apart from the lines on extensions from the lines. The lines include first end-portions adjacent to the remaining line patterns. The remaining line patterns include second end-portions adjacent to the lines. The first end-portions and second end-portions are formed to have mirror symmetry with respect to each other.
Abstract:
A semiconductor device includes a plurality of lines disposed on a semiconductor substrate, and remaining line patterns disposed spaced apart from the lines on extensions from the lines. The lines include first end-portions adjacent to the remaining line patterns. The remaining line patterns include second end-portions adjacent to the lines. The first end-portions and second end-portions are formed to have mirror symmetry with respect to each other.
Abstract:
A semiconductor device includes a substrate; a stack structure on the substrate and including an alternating stack of interlayer insulating layers and gate electrodes; first and second separation regions each extending through the stack structure and extending in a first direction; a first upper separation region between the first and second separation regions and extending through a portion of the stack structure; a plurality of channel structures between the first and second separation regions and extending through the stack structure; and a plurality of first vertical structures each extending through a particular one of the first and second separation regions. Each of the first and second separation regions has a first width in a second direction that is perpendicular to the first direction. Each first vertical structure has a second width in the second direction, the second width being greater than the first width.
Abstract:
A semiconductor memory device includes structures including insulation layers and semiconductor layers alternately stacked in a vertical direction, the structures being spaced apart from one another in a horizontal direction; an interlayer insulation layer between the structures; gate electrodes respectively in gate trenches passing through the interlayer insulation layer in the vertical direction, between the structures, the gate electrodes connected to the semiconductor layers; and vertical insulation layers respectively on sidewalls of the gate trenches, wherein each gate electrode includes first portions overlapping the insulation layers in the horizontal direction and second portions overlapping the semiconductor layers in the horizontal direction, and a first width of each first portion in the horizontal direction is greater than a second width of each second portion in the horizontal direction.
Abstract:
A semiconductor device includes a circuit region, a peripheral circuit structure on a first substrate; a cell region on the circuit region, a cell array region and connection region, the cell region including a second substrate; gate stacking structure on the second substrate, a lower structure, upper structures including gate electrodes; a channel structure penetrating the gate stacking structure; a gate contact penetrating the gate stacking structure electrically connected to the circuit region, and to a connection gate electrode insulated from a gate electrode by an insulating pattern between the gate electrode and the gate contact; a boundary insulating pattern partially formed in a boundary gate electrode among the gate electrodes of the lower structure adjacent to a boundary portion between the upper and lower structure surrounding the gate contact to maintain an electrical connection path of the boundary gate electrode and having a different structure from the insulating pattern.
Abstract:
A nonvolatile memory device includes a peripheral circuit structure including a peripheral circuit and a first insulating structure covering the peripheral circuit and a cell array structure bonded to the peripheral circuit structure and including a cell region and a connection region, wherein the cell array structure includes a common source line layer, a buffer insulating layer on the common source line layer, a plurality of contact stop layers buried in the buffer insulating layer, a cell stack which includes a plurality of gate electrodes and a plurality of insulating layers alternately stacked on the buffer insulating layer, a plurality of cell channel structures extending to the common source line layer by passing through the cell stack, a plurality of contact structures each connected to one or more of the plurality of gate electrodes, and a second insulating structure covering the cell stack.
Abstract:
A semiconductor device includes a source structure including a plate layer and first and second horizontal conductive layers stacked in order on the plate layer, gate electrodes stacked and spaced apart from each other in a first direction perpendicular to an upper surface of the source structure, a channel structure penetrating through the gate electrodes, extending in the first direction, and including a channel layer in contact with the first horizontal conductive layer, and a separation region penetrating through the gate electrodes and extending in the first direction and in a second direction perpendicular to the first direction, wherein the first horizontal conductive layer extends horizontally below the separation region and has a seam overlapping the separation region in the first direction.
Abstract:
A semiconductor device and a data storage system, the device including a lower structure; and an upper structure on the lower structure and including a memory cell array, wherein the lower structure includes a semiconductor substrate, first and second active regions spaced apart from each other in a first direction on the semiconductor substrate, the first and second active regions being defined by an isolation insulating layer on the semiconductor substrate, and first and second gate pattern structures extending in the first direction to cross the first and second active regions, respectively, on the semiconductor substrate, the first gate pattern structure and the second gate pattern structure have first and second end portions spaced apart from each other in a facing manner in the first direction, respectively, and the first and second end portions are concavely curved in opposite directions away from each other in a plan view.
Abstract:
A semiconductor memory device including a substrate, first pad layers and a second pad layer on the substrate, a pattern structure including first openings on the first pad layers and a second opening on the second pad layer, and having first and second regions, gate electrodes on the pattern structure and each including a pad region, channel structures penetrating through the gate electrodes in the first region, gate contact plugs electrically connected to the gate electrodes through the pad region of each of the gate electrodes and extending in a vertical direction to penetrate the first openings and connected to the first pad layers, a source contact plug, extending in the vertical direction penetrating the second opening and connected to the second pad layer, and a source connection patter under the pattern structure and in contact with the source contact plug and the second pad layer may be provided.
Abstract:
A semiconductor device includes a memory cell region. The memory cell region includes a memory stack structure including a first stack structure and a second stack structure; a plurality of channel structures vertically penetrating through the memory stack structure and connected to the second substrate; at least one first dummy structure; and at least one second dummy structure. At least a portion of the first dummy structure does not overlap the second dummy structure in a vertical direction.