Semiconductor device and method for making the same

    公开(公告)号:US10811415B2

    公开(公告)日:2020-10-20

    申请号:US16298887

    申请日:2019-03-11

    Abstract: According to some example embodiments of the present disclosure, a semiconductor device includes: a substrate; a first semiconductor layer over the substrate, the first semiconductor layer being a first type of semiconductor device; and a second semiconductor layer over the substrate and the first semiconductor layer, the second semiconductor layer being the first type of semiconductor device, wherein a first portion of the first semiconductor layer overlaps the second semiconductor layer when viewed in a direction perpendicular to a plane of the substrate and a second portion of the first semiconductor layer is laterally offset from the second semiconductor layer when viewed in the direction perpendicular to the plane of the substrate.

    NANOSHEET FIELD EFFECT TRANSISTOR CELL ARCHITECTURE

    公开(公告)号:US20200152801A1

    公开(公告)日:2020-05-14

    申请号:US16390859

    申请日:2019-04-22

    Abstract: A semiconductor device includes first and second GAA FETs spaced apart by an inter-channel spacing. Each of the GAA FETs includes a horizontal nanosheet conductive channel structure, a gate material completely surrounding the horizontal nanosheet conductive channel structure, source and drain regions at opposite ends of the horizontal nanosheet conductive channel structure, source and drain contacts on the source and drain regions. A width of the horizontal nanosheet conductive channel structure of the first GAA FET or the second GAA FET is smaller than a maximum allowed width. The semiconductor device also includes a gate contact on the gate material in the inter-channel spacing between the first and second GAA FETs. The gate contact is spaced apart by a distance from each of the source and drain regions of the first and second GAA FETs in a range from a minimum design rule spacing to a maximum distance.

Patent Agency Ranking