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公开(公告)号：US06323120B1
公开(公告)日：2001-11-27
申请号：US09522473
申请日：2000-03-09
申请人： Takao Fujikawa , Yutaka Narukawa , Kohei Suzuki , Takuya Masui
发明人： Takao Fujikawa , Yutaka Narukawa , Kohei Suzuki , Takuya Masui
IPC分类号： H01L21283
CPC分类号： H01L21/76873 , H01L21/76843 , H01L21/76882
摘要： A method of forming an intact wiring film by applying a filling treatment with a metal material with no pores to holes/trenches, the method comprising forming a barrier layer 3 to an insulation film 2 having holes/trenches 2A, forming a seed layer by a PVD method on the surface of the barrier layer and laminating a wiring film 5A by a electrolytic plating method and heat treating the same under a high temperature/high pressure gas atmosphere.
摘要翻译： 通过对孔/沟槽没有孔的金属材料进行填充处理来形成完整的布线膜的方法，该方法包括在具有孔/沟槽2A的绝缘膜2上形成阻挡层3，形成阻挡层3，通过 PVD法，通过电解电镀法层叠布线膜5A，并在高温高压气体气氛下进行热处理。
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公开(公告)号：US6077053A
公开(公告)日：2000-06-20
申请号：US58185
申请日：1998-04-10
CPC分类号： F04B39/064 , F04B39/0005
摘要： It is intended to provide a piston type gas compressor capable of replacing a seal ring of a piston with a new one while preventing incorporation of metallic particles into a processing gas. A gas suction port 9 and a gas discharge port 10 are formed in a flange 2 of a cylinder 3 in communication with a gas compressing space H. With a plug 7 removed from an internally threaded hole 6A, a free piston 5, together with a seal ring 4, can be inserted into and removed from the cylinder 3 through the internally threaded hole 6A.
摘要翻译： 旨在提供一种活塞式气体压缩机，其能够用新的活塞代替活塞的密封环，同时防止金属颗粒结合到处理气体中。 在与气体压缩空间H连通的气缸3的凸缘2中形成气体吸入口9和气体排出口10.在从内螺纹孔6A除去塞子7的情况下，自由活塞5与 密封环4可以通过内螺纹孔6A插入和移出圆筒3。
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公开(公告)号：US5792271A
公开(公告)日：1998-08-11
申请号：US845821
申请日：1997-04-28
CPC分类号： F17C7/00 , B01J3/02 , B01J4/008 , F17C2205/0332 , F17C2205/0341 , F17C2221/011 , F17C2221/016 , F17C2221/05 , F17C2223/0123 , F17C2227/0348 , F17C2227/0386 , F17C2227/048 , F17C2270/0518
摘要： The present invention provides a system for supplying a high-pressure medium gas suitable for processing a semiconductor to be processed by heating under isostatic pressure in a short cycle. The system includes a gas holder containing a high-pressure medium gas, a compressor for pressurizing the high-pressure medium gas supplied from the gas holder, a high-pressure vessel having a heater, an accumulator for storing the high-pressure medium gas pressurized by the compressor, a first evacuation unit for evacuating the inside of a pipeline for the high-pressure medium gas, a vacuum casing for holding the opening of the high-pressure vessel in a vacuum, a second evacuation unit for evacuating the inside of the vacuum casing, and a valve unit for connecting the high-pressure vessel and the accumulator so that series connection and parallel connection can be switched on the outlet side of the compressor.
摘要翻译： 本发明提供了一种用于在短时间内以等压压力下加热适于处理待处理半导体的高压介质气体的系统。 该系统包括含有高压介质气体的气体保持器，用于对从气体保持器供给的高压介质气体进行加压的压缩机，具有加热器的高压容器，用于将高压介质气体进行加压的储液器 通过压缩机将用于排出高压介质气体的管道内部的第一抽空单元，用于将高压容器的开口保持在真空中的真空壳体，用于抽出高压介质气体的内部的第二抽空单元 真空壳体和用于连接高压容器和蓄能器的阀单元，使得可以在压缩机的出口侧上切换串联和并联连接。
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公开(公告)号：US5137755A
公开(公告)日：1992-08-11
申请号：US656691
申请日：1991-02-19
申请人： Takao Fujikawa , Takahiko Ishii
发明人： Takao Fujikawa , Takahiko Ishii
CPC分类号： C04B35/521 , C04B35/52 , C04B35/83
摘要： An impregnating carbonizing process and apparatus which permit reduction in cost of consumable goods and can operate at a reduced cost and a heating and vacuum impregnating operation which requires a very long period of time can be performed on the outside of an expensive high pressure vessel to accomplish rapid carbonization and baking. The process comprises of inserting a porous shaped body of carbon and a block of impregnant into a specimen case, discharging gas from within the specimen case, heating the impregnant into a molten condition under a reduced pressure, inserting the specimen case into a high pressure vessel, admitting high pressure gas into the high pressure vessel and also into the specimen case so as to penetrate the impregnant into the shaped body of carbon, heating the shaped body to a high temperature, and discharging the high pressure gas to lower the pressure within the specimen case at a controlled rate in response to a pressure within the high pressure vessel to carbonize the impregnant. The apparatus is constructed to suitably carry out the process.
摘要翻译： 可以在昂贵的高压容器的外部进行浸渍碳化方法和装置，其允许降低消耗品的成本并且可以以降低的成本运行并且需要非常长的时间段的加热和真空浸渍操作来完成 快速碳化和烘烤。 该方法包括将多孔成形体的碳和一块浸渍剂插入样品壳体中，从样品壳体内排出气体，将浸渍剂在减压下加热到熔融状态，将样品箱插入高压容器 将高压气体进入高压容器并进入样品箱，以便将浸渍剂渗透到成型体中，将成形体加热到高温，并排出高压气体以降低内部压力 样品盒以受控的速率响应于高压容器内的压力以使浸渍剂碳化。 该装置被构造成适当地执行该过程。
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公开(公告)号：US5898727A
公开(公告)日：1999-04-27
申请号：US845822
申请日：1997-04-28
CPC分类号： C23C14/5806 , C23C14/5886 , H01L21/67017
摘要： The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least one of which has a cooling unit, a frame for holding a load acting in the axial direction of the high-pressure vessel in processing a workpiece to be processed in the high-pressure vessel, an actuator for moving the vessel component members of the high-pressure vessel in the axial direction thereof so as to load and unload the workpiece, a sealing unit fitted to a portion for loading and unloading the workpiece, which is formed when the vessel component members are moved in the axial direction of the vessel, and a retractable cotter unit for transmitting a load acting in the axial direction of the high-pressure vessel to the frame.
摘要翻译： 本发明提供一种用于消除硅半导体的通孔中的孔的处理装置。 该装置包括在其轴向方向上分成至少两个容器部件的高压容器，其中至少一个具有冷却单元，用于保持在高压容器的轴向方向上作用的负载的框架 在高压容器内加工待加工的工件，用于使高压容器的容器部件沿其轴向移动以便加载和卸载工件的致动器，安装到用于装载的部分的密封单元 以及卸载当容器部件沿容器的轴向移动时形成的工件，以及用于将在高压容器的轴向方向上作用的负载传递到框架的伸缩开口单元。
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公开(公告)号：US5022343A
公开(公告)日：1991-06-11
申请号：US374782
申请日：1989-07-03
申请人： Takao Fujikawa , Takahiko Ishii
发明人： Takao Fujikawa , Takahiko Ishii
CPC分类号： C04B35/521 , C04B35/52 , C04B35/83
摘要： An impregnating carbonizing process and apparatus which permit reduction in cost of consumable goods and can operate at a reduced cost and a heating and vacuum impregnating operation which requires a very long period of time can be performed on the outside of an expensive high pressure vessel to accomplish rapid carbonization and baking. The process comprises of inserting a porous shaped body of carbon and a block of impregnant into a specimen case, discharging gas from within the specimen case, heating the impregnant into a molten condition under a reduced pressure to dip the shaped body of carbon in the molten liquid of the impregnant, inserting the speciment case into a high pressure vessel, admitting high pressure gas into the high pressure vessel and also into the specimen case so as to penetrate the impregnant into the shaped body of carbon, heating the shaped body to a high temperature, and discharging the high pressure gas to lower the pressure within the specimen case at a controlled rate in response to a pressure within the high pressure vessel to carbonize the impregnant. The apparatus is constructed to suitably carry out the process.
摘要翻译： 可以在昂贵的高压容器的外部进行浸渍碳化方法和装置，其允许降低消耗品的成本并且可以以降低的成本进行操作并且需要很长时间的加热和真空浸渍操作来完成 快速碳化和烘烤。 该方法包括将多孔成形体的碳和一块浸渍剂插入到样品壳体中，从样品壳体内排出气体，将浸渍剂在减压下加热到熔融状态，将成形体的碳体浸入熔融的 浸渍剂的液体，将样品盒插入高压容器中，将高压气体进入高压容器并进入样品箱，以便将浸渍剂渗入成型体中，将成形体加热至高 温度和排出高压气体，以响应于高压容器内的压力以受控的速率降低样品箱内的压力，以使浸渍剂碳化。 该装置被构造成适当地执行该过程。
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17.发明授权Method for producing high density sintered silicon nitride(Si.sub.3 N.sub.4 ) 失效生产高密度烧结氮化硅（Si3N4）的方法
公开(公告)号：US5665291A
公开(公告)日：1997-09-09
申请号：US463273
申请日：1995-06-05
IPC分类号： C04B35/593 , C04B35/584
CPC分类号： C04B35/593 , C04B35/5935
摘要： The specification describes a method for producing high density sintered silicon nitride (Si.sub.3 N.sub.4) having a relative density of at least 98%. In a first step, silicon nitride powder is compacted into a desired shape. It is then pre-sintered in a second step, generally, under normal pressure to obtain a presintered body having a relative density of at least 92%. In a third step, the presintered body is subjected to a hot isostatic pressing (HIP) in an inert gas atmosphere of 1500.degree.-2100.degree. C. and of nitrogen gas partial pressure of at least 500 atm. Since the presintering does not require any capsule, it is possible to produce high density sintered Si.sub.3 N.sub.4 of complex configurations. As a sintering aid, Y.sub.2 O.sub.3 --Al.sub.2 O.sub.3 --MgO system sintering aid is particularly effective. To improve the strength of sintered Si.sub.3 N.sub.4, it is effective to add a heat treatment step after the HIP and maintain the temperature of the sintered Si.sub.3 N.sub.4 above 500.degree. C. for a while. Between the second and third steps, the temperature of the presintered body is preferably maintained above 500.degree. C. These temperature controls are effective not only to improve the strength of sintered Si.sub.3 N.sub.4 but also to save the thermal energy and to shorten the production cycle.
摘要翻译： 该说明书描述了一种生产相对密度至少为98％的高密度烧结氮化硅（Si3N4）的方法。 在第一步骤中，氮化硅粉末被压制成所需的形状。 通常在常压下在第二步骤中预烧结，得到相对密度至少为92％的预烧结体。 在第三步骤中，将预烧结体在1500-2100℃的惰性气体气氛和至少500atm的氮气分压下进行热等静压（HIP）。 由于预烧结不需要任何胶囊，因此可以生产复合结构的高密度烧结Si 3 N 4。 作为烧结助剂，Y2O3-Al2O3-MgO体系的烧结助剂特别有效。 为了提高烧结Si3N4的强度，在HIP之后添加热处理步骤并将烧结的Si 3 N 4的温度保持在500℃以上一段时间是有效的。 在第二和第三步骤之间，预烧结体的温度优选保持在500℃以上。这些温度控制不仅有效地提高了烧结Si 3 N 4的强度，而且有效地节约了热能并缩短了生产周期。
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18.发明授权Method for encapsulating material to be processed by hot or warm isostatic pressing 失效通过热或温度等压压制加工材料的方法
公开(公告)号：US5096518A
公开(公告)日：1992-03-17
申请号：US480764
申请日：1990-02-16
申请人： Takao Fujikawa , Kazuhiko Nakajima , Yasuo Manabe
发明人： Takao Fujikawa , Kazuhiko Nakajima , Yasuo Manabe
CPC分类号： B29C43/12 , B22F3/1258 , B23K15/0053 , B23K26/244 , B29C43/3642 , B30B11/001 , B29C2043/3647 , B29K2105/251 , B29K2905/02
摘要： Described herein is a method of encapsulating a material to be processed by warm or hot isostatic pressing, and an apparatus suitable for practicing the method, which basically includes the steps of (a) enveloping a processing material in the form of loose or compacted powder with a metal foil of 30 .mu.m in thickness, and (b) welding overlying and underlying metal foil portions to encapsulate said material in said metal foil in sealed state.
摘要翻译： 这里描述的是通过温热或热等静压来封装待处理材料的方法，以及适用于实施该方法的装置，其基本上包括以下步骤：（a）将松散或压实粉末形式的处理材料包封， 厚度为30μm的金属箔，和（b）焊接覆盖和下面的金属箔部分，以密封状态将所述材料封装在所述金属箔中。
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19.发明授权
公开(公告)号：US5092938A
公开(公告)日：1992-03-03
申请号：US258113
申请日：1988-10-14
申请人： Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
发明人： Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
CPC分类号： G01K1/08 , B30B11/002 , G01K7/04
摘要： A temperature detector for use in a high temperature and high pressure furnace, including thermocouple wires received in a tubular protective sheath for protection against the furnace atmosphere, and characterized by the provision of a pair of rod members of a large diameter serving as a thermocouple pair for the positive and negative sides thereof, a protective sheath having a rod suspending holder portion in an upper portion thereof for supporting the thermocouple rod members therein in a vertically suspended state and arranged to hold the rod members out of contact with each other except at a temperature measuring point and to contact the rod members with the protective sheath only in a region other than a high temperature region of the furnace.
摘要翻译： 一种在高温高压炉中使用的温度检测器，包括容纳在管状保护套中的热电偶线，用于保护炉气氛，并且特征在于提供一对大直径的杆构件作为热电偶对 对于其正面和负面，具有在其上部具有杆悬挂保持器部分的保护护套，用于将垂直悬挂状态的热电偶杆构件支撑在其中，并且布置成保持杆构件彼此不接触，除了在 温度测量点，并且仅在除了炉的高温区域之外的区域中将杆构件与保护护套接触。
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20.再颁专利
公开(公告)号：USRE33245E
公开(公告)日：1990-06-26
申请号：US209954
申请日：1988-06-22
申请人： Shigeki Tojyo , Tatsuo Uesaka, deceased , Yoshio Kawate , Masayoshi Iwasaki , Takefumi Horiuchi , Masato Moritoki , Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
发明人： Shigeki Tojyo , Tatsuo Uesaka, deceased , Yoshio Kawate , Masayoshi Iwasaki , Takefumi Horiuchi , Masato Moritoki , Takeshi Kanda , Takao Fujikawa , Shigeo Kofune
CPC分类号： G01J5/08 , B30B11/002 , B30B11/005 , G01J5/0044 , G01J5/041 , G01J5/06 , G01J5/0806 , G01J5/0818 , G01J5/0821 , G01J5/0834 , G01J5/0896 , G01J2005/0048 , G01J5/045 , G01J5/52
摘要： A method of measuring the temperature in a high pressure furnace of a hot isostatic pressing apparatus, wherein a closed-end pipe having its inside communicated with the inside of the high pressure furnace and enabling a pressure medium to pass therethrough is disposed in the furnace, an incident top end of an optical fiber, a bundle of optical fibers or like other equivalent optical rod-like memeber is disposed to the open end of the closed-end pipe so as to be capable of receiving thermally radiated light from the inside of the closed-ended pipe and an exit rear end thereof is led out through a cover and to the outside of said high pressure vessel and a measuring system is connected to said exit rear end to detect heat radiation power from the top end of the closed-end pipe to thereby measure the temperature inside of the furnace.
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