公开(公告)号：US08431894B2

公开(公告)日：2013-04-30

申请号：US11659145

申请日：2005-07-28

Applicant: Erik Essers ,  Gerd Benner ,  Volker Drexel

Inventor： Erik Essers ,  Gerd Benner ,  Volker Drexel

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2449

Abstract: An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.

公开(公告)号：US20120131785A1

公开(公告)日：2012-05-31

申请号：US13369340

申请日：2012-02-09

Applicant: Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

Inventor： Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

IPC: B23P19/04

CPC classification number: H01J37/065 ,  H01J1/3044 ,  H01J37/06 ,  H01J2201/30415 ,  H01J2201/30446 ,  H01J2201/30476 ,  H01J2237/06316 ,  H01J2237/06375 ,  H01J2237/065 ,  Y10T29/49888

Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.

Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。

公开(公告)号：US07462839B2

公开(公告)日：2008-12-09

申请号：US10500951

申请日：2001-06-29

Applicant: Peter Gnauck ,  Volker Drexel ,  David Bate ,  Eric Essers

Inventor： Peter Gnauck ,  Volker Drexel ,  David Bate ,  Eric Essers

IPC: H01J37/28

CPC classification number: H01J37/244

Abstract: A detector for scanning electron microscopes, which can be used under different pressure conditions in the specimen chamber of the electron microscope, designed for the detection of both electrons and light. For this purpose, the detector has a photodetector and a scintillator of a material transmissive for visible light connected before the photodetector. The scintillator can be provided with a coating transparent to visible light. By the application of different potentials, the detector is suitable for the detection of electrons in high vacuum and for the detection of light with high pressures in the specimen chamber.

Abstract translation: 用于扫描电子显微镜的检测器，其可以在电子显微镜的样品室中在不同压力条件下使用，被设计用于检测电子和光。 为此目的，检测器具有光电检测器和用于在光电检测器之前连接的可见光透射的材料的闪烁体。 闪烁体可以具有对可见光透明的涂层。 通过应用不同的电位，检测器适用于检测高真空中的电子和检测样品室中高压的光。

公开(公告)号：US06872956B2

公开(公告)日：2005-03-29

申请号：US10337795

申请日：2003-01-06

Applicant: Peter Gnauck ,  Volker Drexel

Inventor： Peter Gnauck ,  Volker Drexel

IPC: F04D19/04 ,  F04D25/00 ,  H01J37/18 ,  H01J37/28 ,  H01J37/26

CPC classification number: H01J37/18 ,  F04D19/046 ,  F04D25/00 ,  H01J2237/188 ,  H01J2237/2605

Abstract: A cascade type pump arrangement for a particle beam device has first and second turbomolecular pumps, wherein an outlet of the second turbomolecular pump is forepumped by an intermediate pressure region situated between a main pump port and an outlet of the first turbomolecular pump. The particle beam device has a particle beam source operated in ultra high vacuum and a specimen chamber operated at pressures from high vacuum at least up to 1 hPa.

Abstract translation: 用于粒子束装置的级联型泵装置具有第一和第二涡轮分子泵，其中第二涡轮分子泵的出口通过位于第一涡轮分子泵的主泵口和出口之间的中间压力区域前进。 粒子束装置具有在超高真空下操作的粒子束源和在高真空至少高达1hPa的压力下操作的试样室。

公开(公告)号：US08536773B2

公开(公告)日：2013-09-17

申请号：US13075325

申请日：2011-03-30

Applicant: Wolfram Buehler ,  Volker Drexel

Inventor： Wolfram Buehler ,  Volker Drexel

IPC: H01J19/06 ,  H01K1/04

CPC classification number: H01J3/022 ,  H01J1/148 ,  H01J1/3044 ,  H01J1/50 ,  H01J3/02 ,  H01J37/073 ,  H01J2237/06383 ,  H01J2237/24465 ,  H01J2237/24557

Abstract: An electron beam source includes a base and a tip fixed to the base and extending from the base. The tip includes a core and a coating applied to the core. The core has a surface that includes a first material. The coating includes a second material which is different from the first material. The second material forms a surface of the tip, and the second coating includes more than 30% by weight of a lanthanide element.

Abstract translation: 电子束源包括基部和固定到基部并从基部延伸的尖端。 尖端包括芯和施加到芯的涂层。 芯具有包括第一材料的表面。 涂层包括与第一材料不同的第二材料。 第二材料形成尖端的表面，第二涂层包含超过30重量％的镧系元素。

公开(公告)号：US08362443B2

公开(公告)日：2013-01-29

申请号：US13449435

申请日：2012-04-18

Applicant: Volker Drexel

Inventor： Volker Drexel

IPC: H01J3/20

CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/1471

Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.

Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。

公开(公告)号：US08178849B2

公开(公告)日：2012-05-15

申请号：US12551783

申请日：2009-09-01

Applicant: Volker Drexel

Inventor： Volker Drexel

IPC: H01J3/20

CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/1471

Abstract: An objective lens for focussing charged particles includes a magnetic lens and an electrostatic lens whose components are displaceable relative to each other. The bore of the outer pole piece of the magnetic lens exhibits a diameter Da which is larger than a diameter Di of the bore of the inner pole piece of the magnetic lens. The following relationship is satisfied: 1.5·Di≦Da≦3·Di. The lower end of the inner pole piece is disposed in a distance of at least 2 mm offset from the inner end of the outer pole piece in a direction of the optical axis.

Abstract translation: 用于聚焦带电粒子的物镜包括磁性透镜和其组件相对于彼此移位的静电透镜。 磁性透镜的外极片的孔的直径Da大于磁性透镜的内极片的孔的直径Di。 满足以下关系：1.5·Di＆nlE; Da＆nlE; 3·Di。 内极靴的下端设置在距离外极极的内端至少2mm沿光轴方向的距离处。

公开(公告)号：US07910887B2

公开(公告)日：2011-03-22

申请号：US12380596

申请日：2009-02-27

Applicant: Michael D. G. Steigerwald ,  Dirk Preikszas ,  Volker Drexel

Inventor： Michael D. G. Steigerwald ,  Dirk Preikszas ,  Volker Drexel

IPC: H01J37/28 ,  H01J37/244

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/0458 ,  H01J2237/2443 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.

Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。

公开(公告)号：US20100078557A1

公开(公告)日：2010-04-01

申请号：US12570112

申请日：2009-09-30

Applicant: Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

Inventor： Volker Drexel ,  Ulrich Mantz ,  Bernd Irmer ,  Christian Penzkofer

IPC: G21K5/00 ,  G01N23/00 ,  C23C14/00 ,  C23C14/30

CPC classification number: H01J37/065 ,  H01J1/3044 ,  H01J37/06 ,  H01J2201/30415 ,  H01J2201/30446 ,  H01J2201/30476 ,  H01J2237/06316 ,  H01J2237/06375 ,  H01J2237/065 ,  Y10T29/49888

Abstract: A tip of an electron beam source includes a core carrying a coating. The coating is formed from a material having a greater electrical conductivity than a material forming the surface of the core.

Abstract translation: 电子束源的尖端包括承载涂层的芯。 该涂层由具有比形成芯的表面的材料更大的导电性的材料形成。

公开(公告)号：US20070120071A1

公开(公告)日：2007-05-31

申请号：US11594691

申请日：2006-11-08

Applicant: Michael Steigerwald ,  Dirk Preikszas ,  Volker Drexel

Inventor： Michael Steigerwald ,  Dirk Preikszas ,  Volker Drexel

IPC: G21G5/00

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/0458 ,  H01J2237/2443 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: An electron-beam device having a beam generator for generating an electron beam, an objective lens for focusing the electron beam on an object, and at least one detector for detecting electrons scattered on the object or emitted by the object. Furthermore, a detector system for detecting electrons is described. With an electron-beam device having a detector system according to the present invention, it is possible to make a selection in a simple manner, in particular according to backscattered and secondary electrons. At the same time, as many electrons as possible may be detected using the detector system. For this purpose, the electron-beam device exhibits at least one adjustable diaphragm which is allocated to the detector. The detector system exhibits a detector on which a reflector for reflecting electrons onto the detector is accommodated.

Abstract translation: 一种具有用于产生电子束的光束发生器，用于将电子束聚焦在物体上的物镜的电子束装置，以及用于检测物体上分散的或被物体发射的电子的至少一个检测器。 此外，描述了用于检测电子的检测器系统。 利用具有根据本发明的检测器系统的电子束装置，可以以简单的方式进行选择，特别是根据反向散射和二次电子。 同时，使用检测器系统可以检测尽可能多的电子。 为此目的，电子束装置表现出至少一个分配给检测器的可调节膜片。 检测器系统呈现一个检测器，在该检测器上容纳用于将电子反射到检测器上的反射器。