摘要:
A system comprises a parser operable to receive a log file containing detailed processing tool transactional data and generate an operation journal containing a subset of the detailed processing tool transactional data arranged in a known format, a comparator operable to receive automated material tracking data, and compare with the operation journal data, and an automatic correction module operable to automatically correct the automated material tracking data in response to a discrepancy between the automated material tracking data and the operation journal data.
摘要:
A system for WAT (Wafer Acceptance Test) configuration. The system comprises an input/output device, a storage device, and a processor. The input/output device receives a first WAT model and qualification criteria. The storage device stores a preset WAT model and qualification criteria. The processor modifies the preset WAT model according to the first WAT model to generate a second WAT model, and modifies the preset qualification criteria according to the first qualification criteria to generate second qualification criteria.
摘要:
The present disclosure relates to a process tool system that utilizes tool sensor data and an embedded or built-in tool model to facilitate semiconductor fabrication. The process tool system includes a sensor data component, the tool model, and an execution system. The sensor data component is configured to provide the tool sensor data. The tool model is built in a process tool and is configured to generate model outputs based on model inputs. The manufacturing execution system is configured to provide tool process data, including actual metrology and previous process data, to the sensor data component. Additionally, the execution system provides the model inputs to the tool model and receives the model outputs from the tool model. The execution system provides one or more execution system outputs based on the sensor data and the model outputs. The sensor data can include measured semiconductor device characteristics.
摘要:
Provided is a semiconductor image sensor device that includes a non-scribe-line region and a scribe-line region. The image sensor device includes a first substrate portion disposed in the non-scribe-line region. The first substrate portion contains a doped radiation-sensing region. The image sensor device includes a second substrate portion disposed in the scribe-line region. The second substrate portion has the same material composition as the first substrate portion. Also provided is a method of fabricating an image sensor device. The method includes forming a plurality of radiation-sensing regions in a substrate. The radiation-sensing regions are formed in a non-scribe-line region of the image sensor device. The method includes forming an opening in a scribe-line region of the image sensor device by etching the substrate in the scribe-line region. A portion of the substrate remains in the scribe-line region after the etching. The method includes filling the opening with an organic material.
摘要:
A display panel includes a first substrate, a conductive light-shielding pattern, color filter patterns, a second substrate, scan lines, data lines, pixel structures, third pads and fourth pads. The conductive light-shielding pattern disposed on the first substrate defines conductive matrix pattern, first pads, and second pads. Each first pad is electrically connected to one corresponding second pad through the conductive matrix pattern and insulated with other second pads. The color filter patterns are disposed on the first substrate and a portion of each color filter pattern overlaps the conductive light-shielding pattern. The third pads are one-to-one electrically to the first pads while the fourth pads are one-to-one electrically connected to the second pads. Each fourth pad is electrically connected to one of the scan lines and one of the data lines.
摘要:
A transflective liquid crystal display is provided which includes a color-filter substrate, an active matrix substrate, and a liquid crystal layer interposed between them. The active matrix substrate includes a first transparent substrate and includes a plurality of switching devices, a plurality of transparent pixel electrodes and a plurality of reflective pixel electrodes formed on the first transparent substrate. The color-filter substrate includes a second transparent substrate, a first and second transparent conducting layers and a dielectric layer. The first transparent conducting layer is interposed between the second transparent substrate and the second transparent conducting layer, and the dielectric layer is interposed between the first and second transparent conducting layers. The second transparent conducting layer in each pixel area has at least one opening. The openings positionally correspond to the reflective pixel electrodes.
摘要:
A method of forming an image sensor device includes forming a light sensing region at a front surface of a silicon substrate and a patterned metal layer there over. Thereafter, the method also includes performing an ion implantation process to the back surface of the silicon substrate and performing a green laser annealing process to the implanted back surface of the silicon substrate. The green laser annealing process uses an annealing temperature greater than or equal to about 1100° C. for a duration of about 100 to about 400 nsec. After performing the green laser annealing process, a silicon polishing process is performed on the back surface of the silicon substrate.
摘要:
A touch-sensitive display panel including a first panel, a second panel and a spacer layer is provided. The first panel has a touch-sensitive area. The second panel, parallel to the first panel, has a display area correspondingly located below the touch-sensitive area. The spacer layer is disposed between the first panel and the second panel and includes a plurality of conductive spacers for electrically connecting the first panel and the second panel.
摘要:
A color washout reducing LCD panel including a first substrate, a second substrate and a liquid crystal layer sealed between the first and second substrates is provided. The first substrate includes several thin film transistors (TFTs) arranged in an array and several pixel electrodes each electrically connected to one TFT. Each pixel electrode has a first and a second electrode blocks. The first electrode block has several first slits, wherein a first interval of the first electrode block is perpendicular to the first slits, and a first width of the first electrode block is between any two neighboring first slits. The second electrode block has several second slits, wherein a second interval of the second electrode block is perpendicular to the second slit and not equal to the first interval, and a second width of the second electrode block is between any two neighboring second slits.
摘要:
A system for tool monitoring is provided. The system comprises a first cassette, a second cassette, a processing tool, a first metrology tool, and a second metrology tool. The first cassette contains a first control wafer used for a first metrology process. The second cassette contains a second control wafer used for a second metrology process. The processing tool receives the first cassette and processes the first control wafer, and receives the second cassette and processes the second control wafer. The first metrology tool receives the first cassette from the processing tool, and performs the first metrology process on the first control wafer processed by the processing tool. The second metrology tool receives the second cassette from the processing tool, and performs the second metrology process on the second control wafer processed by the processing tool.