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    Forming a cantilever assembly for verticle and lateral movement
    11.
    发明申请
    Forming a cantilever assembly for verticle and lateral movement 有权
    形成用于垂直和横向运动的悬臂组件

    公开(公告)号：US20090001486A1

    公开(公告)日：2009-01-01

    申请号：US11824465

    申请日：2007-06-29

    Applicant: John Heck ,  Tsung-Kuan Allen Chou

    Inventor： John Heck ,  Tsung-Kuan Allen Chou

    IPC: H01L29/84 ,  H01L21/00

    CPC classification number: B81C1/00246 ,  B81B2201/07 ,  B81B2201/11 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C2203/0735 ,  B82Y10/00 ,  G11B9/1436

    Abstract: In one embodiment, the present invention includes a method for forming a sacrificial oxide layer on a base layer of a microelectromechanical systems (MEMS) probe, patterning the sacrificial oxide layer to provide a first trench pattern having a substantially rectangular form and a second trench pattern having a substantially rectangular portion and a lateral portion extending from the substantially rectangular portion, and depositing a conductive layer on the patterned sacrificial oxide layer to fill the first and second trench patterns to form a support structure for the MEMS probe and a cantilever portion of the MEMS probe. Other embodiments are described and claimed.

    Abstract translation: 在一个实施例中，本发明包括在微机电系统（MEMS）探针的基底层上形成牺牲氧化物层的方法，图案化牺牲氧化物层以提供具有基本矩形形状的第一沟槽图案和第二沟槽图案 具有基本上矩形的部分和从所述大致矩形部分延伸的横向部分，以及在所述图案化的牺牲氧化物层上沉积导电层以填充所述第一和第二沟槽图案以形成用于所述MEMS探针的支撑结构， MEMS探针。 描述和要求保护其他实施例。

    Bi-directional, single material thermal actuator
    13.
    发明申请
    Bi-directional, single material thermal actuator 有权
    双向单材料热传动器

    公开(公告)号：US20030002133A1

    公开(公告)日：2003-01-02

    申请号：US09892616

    申请日：2001-06-28

    Applicant: SOUTH WEST RESEARCH INSTITUTE

    Inventor： Heather Shannon Hanson ,  Joseph Nathan Mitchell

    IPC: G02B026/00

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2201/11 ,  B81B2203/055 ,  H01H2061/008

    Abstract: A thermal actuator includes a first arm having a proximal end and a distal end, a second arm, parallel to the first arm, having a proximal end and a distal end, and a third arm arranged between and parallel to the first and second arms, the third arm having a proximal end and a distal end. The third arm has at least one portion at the distal end of the third arm having a width that is substantially larger than a width of the first arm and a width of the second arm. The distal ends of the first, second and third arms are coupled together to form a distal end of the thermal actuator, and the first, second and third arms preferably are made of a single material. When the proximal end of the third arm is coupled to ground and current is applied to the proximal end of the first arm, the distal end of the thermal actuator moves and applies force in a first direction, and when the proximal end of the third arm is coupled to ground and current is applied to the proximal end of the second arm, the distal end of the thermal actuator moves and applies force in a direction opposite to the first direction. A number of thermal actuators can be arranged in an array. The thermal actuator or array of thermal actuators can be coupled to an applicator.

    Abstract translation: 热致动器包括具有近端和远端的第一臂，平行于第一臂的第二臂，具有近端和远端，以及布置在第一臂和第二臂之间并平行于第一臂的第三臂， 第三臂具有近端和远端。 第三臂具有在第三臂的远端处的至少一个部分，其宽度基本上大于第一臂的宽度和第二臂的宽度。 第一，第二和第三臂的远端联接在一起以形成热致动器的远端，并且第一，第二和第三臂优选地由单一材料制成。 当第三臂的近端联接到地面并且电流被施加到第一臂的近端时，热致动器的远端在第一方向上移动并施加力，并且当第三臂的近端 耦合到地面，并且电流施加到第二臂的近端，热致动器的远端移动并沿与第一方向相反的方向施加力。 许多热致动器可以排列成阵列。 热致动器或热致动器阵列可以耦合到施加器。

    Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit
    14.
    发明申请
    Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit 失效
    微镜单元，使用其的光盘驱动器以及微镜单元的制造方法

    公开(公告)号：US20010017726A1

    公开(公告)日：2001-08-30

    申请号：US09750007

    申请日：2000-12-27

    Inventor： Masaki Hara ,  Kazuhito Hori ,  Hiroto Ido ,  Naoto Kojima ,  Kazuhiro Hane

    IPC: G02B026/08 ,  G02B007/182

    CPC classification number: G11B7/08564 ,  B81B2201/042 ,  B81B2201/11 ,  B81B2203/0109 ,  B81C1/00595 ,  G02B7/1821 ,  G02B26/0841 ,  G11B7/08576 ,  Y10T428/24942

    Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.

    Abstract translation: 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和镜体（12）的反射镜基板材料由诸如SiN x的不同材料形成。

    ACTUATOR USING COMB-TOOTH
    17.
    发明申请
    ACTUATOR USING COMB-TOOTH 失效
    执行器使用COMB-TOOTH

    公开(公告)号：US20090273255A1

    公开(公告)日：2009-11-05

    申请号：US12295027

    申请日：2007-03-30

    Applicant: Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

    Inventor： Takanori Maeda ,  Hirokazu Takahashi ,  Masahiro Ishimori

    IPC: H02N1/00

    CPC classification number: H02N1/008 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1454

    Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.

    Abstract translation: 致动器包括连接部分，其一端可旋转地连接到固定部分的连接点（C1），另一端可旋转地连接到移动部分的连接点（C2），连接部分的一端可旋转地连接到 所述固定部分的连接点（C3）和另一端可旋转地连接到所述移动部分的连接点（C4），所述梳齿电极具有连接到梳齿基点（B1）的根部部分， 所述梳齿电极具有连接到所述固定部分的所述根部部分，而所述另一部分沿着所述梳齿电极的曲线延伸并且与所述梳齿电极以预定间隙相对。

    Method of fabricating micro actuator having media stage
    18.
    发明授权
    Method of fabricating micro actuator having media stage 失效
    具有介质载物台的微型致动器的制造方法

    公开(公告)号：US07520998B2

    公开(公告)日：2009-04-21

    申请号：US11595876

    申请日：2006-11-13

    Applicant: Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    Inventor： Hong-sik Park ,  Seung-bum Hong ,  Jong-youp Shim

    IPC: C23F1/00

    CPC classification number: H02K41/0354 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/11 ,  B81B2203/051 ,  B82Y10/00 ,  G11B9/1436 ,  H02K2201/18

    Abstract: A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

    Abstract translation: 提供了一种制造微型致动器的方法，包括：介质台，其具有介质装载表面和用于驱动介质载物台的线圈，其形成在介质载台的相对表面上至介质装载表面。 该方法包括在第一基板的第一表面上形成凹槽，在第二基板的第一表面上形成线圈，将第一基板的第一表面接合到第二基板的第一表面，并且形成介质装载表面 在第二基板的与第二基板的第一表面相对的第二表面上。

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