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    CERAMIC COVER WAFERS OF ALUMINUM NITRIDE OR BERYLLIUM OXIDE
    12.
    发明申请
    CERAMIC COVER WAFERS OF ALUMINUM NITRIDE OR BERYLLIUM OXIDE 有权
    氮化铝或氧化铝的陶瓷覆膜

    公开(公告)号：US20090068433A1

    公开(公告)日：2009-03-12

    申请号：US12204240

    申请日：2008-09-04

    申请人： MUHAMMAD M. RASHEED

    发明人： MUHAMMAD M. RASHEED

    IPC分类号： B32B9/00

    CPC分类号： C04B35/581 ,  C04B35/08 ,  C04B2235/3205 ,  C04B2235/3217 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3232 ,  C04B2235/3239 ,  C04B2235/3241 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3256 ,  C04B2235/3258 ,  C04B2235/40 ,  C04B2235/80 ,  C04B2235/94 ,  C04B2235/95 ,  C04B2235/9607 ,  C04B2235/963 ,  Y10T428/265

    摘要： Embodiments of the invention provide a method and apparatus for protecting a susceptor during a cleaning operation by loading a ceramic cover substrate containing either aluminum nitride or beryllium oxide onto the susceptor before introducing the cleaning agent into the chamber. In one embodiment, an aluminum nitride ceramic cover substrate is provided which includes an aluminum nitride ceramic wafer having a thermal conductivity of greater than 160 W/m-K, a circular-shaped geometry having a diameter within a range from about 11 inches to about 13 inches, a thickness within a range from about 0.030 inches to about 0.060 inches, and a flatness of about 0.010 inches or less. The thermal conductivity may be about 180 W/m-K, about 190 W/m-K, or greater. The thickness may be within a range from about 0.035 inches to about 0.050 inches, and the flatness may be about 0.008 inches, about 0.006 inches, or less.

    摘要翻译： 本发明的实施例提供了一种用于在清洁操作期间通过将包含氮化铝或氧化铍的陶瓷覆盖基板载入到基座上来保护基座的方法和装置，然后将清洁剂引入室中。 在一个实施例中，提供了一种氮化铝陶瓷覆盖衬底，其包括导热率大于160W / mK的氮化铝陶瓷晶片，直径在约11英寸至约13英寸的范围内的圆形几何形状 ，在约0.030英寸至约0.060英寸的范围内的厚度，以及约0.010英寸或更小的平坦度。 热导率可以为约180W / m-K，约190W / m-K或更大。 厚度可以在约0.035英寸至约0.050英寸的范围内，并且平坦度可以为约0.008英寸，约0.006英寸或更小。

    Tunable lossy dielectric ceramic material having ZrC as a dispersed second phase
    14.
    发明申请
    Tunable lossy dielectric ceramic material having ZrC as a dispersed second phase 审中-公开
    具有ZrC作为分散的第二相的可调谐损耗介电陶瓷材料

    公开(公告)号：US20060014626A1

    公开(公告)日：2006-01-19

    申请号：US10892719

    申请日：2004-07-15

    申请人： Biljana Mikijelj

    发明人： Biljana Mikijelj

    IPC分类号： C04B35/56 ,  C04B35/582

    CPC分类号： C04B35/581 ,  C04B35/08 ,  C04B35/117 ,  C04B2235/3203 ,  C04B2235/3208 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3227 ,  C04B2235/3839 ,  C04B2235/5409 ,  C04B2235/5436 ,  C04B2235/658 ,  C04B2235/77

    摘要： An aluminum nitride (AlN), alumina, magnesia, beryllia or other dielectric matrix with a ZrC dispersed phase is provided. Mixed powders of aluminum nitride or other dielectric phases and ZrC, with or without Y2O3, CaO, Li2O, La2O3, and other rare earth metal oxides or mixtures thereof are formed by dry pressing (or isostatic pressing, injection molding or other similar methods known to those familiar with the art). Consolidation at high temperatures (and or pressures) to a virtually dense material with densities of over 95%, preferably higher than 97% of theoretical density can be attained by hot pressing, hip-ing, gas-pressure sintering or pressureless sintering (including microwave sintering). A controlled inert atmosphere is required to prevent the oxidation or other reaction of the carbide phase. Ar or similar atmosphere is preferred to avoid reactions with ZrC. Materials produced according to the invention can have real dielectric constants in at least the 8-40 range, with the loss tangents ranging from 0.01-0.3 at 2 GHz. The materials described have lossy properties over a wide frequency range (0.5 to over 20 GHz), and at temperatures from 2 K to above room temperature.

    摘要翻译： 提供了具有ZrC分散相的氮化铝（AlN），氧化铝，氧化镁，铍或其它介电基体。 氮化铝或其他电介质相的混合粉末和具有或不具有Y 2 O 3 3，CaO，Li 2 O，La

    UO{HD 2{B BeO fuel process
    17.
    发明授权
    UO{HD 2{B BeO fuel process 失效
    UO {HD 2 {B BeO燃料过程

    公开(公告)号：US3865746A

    公开(公告)日：1975-02-11

    申请号：US82766159

    申请日：1959-07-16

    申请人： ATOMIC ENERGY COMMISSION

    发明人： RUBIN JACK A ,  JOHNSON PETER D

    IPC分类号： C04B35/08 ,  C04B35/51 ,  G21C3/64 ,  C09K3/00

    CPC分类号： C04B35/51 ,  C04B35/08 ,  G21C3/64 ,  Y02E30/38

    摘要： 1. A method of forming a UO2-BeO ceramic body which comprises melting together uranium nitrate and beryllium nitrate to a temperature of approximately 50*-100*C, heating the resulting melt until a homogeneous mixture of beryllium oxide and uranium oxide is obtained, hot-pressing the resulting composition at approximate conditions of 1,200*-2,000*C, at a pressure of 1,000 to 6,000 psi for one-half to 6 hours.

    摘要翻译： 1.一种形成UO2-BeO陶瓷体的方法，其包括将硝酸铀和硝酸铍熔融在约50℃-100℃的温度下，加热所得熔体直至获得氧化铍和氧化铀的均匀混合物， 在1200〜2000℃的近似条件下，在1000-6,000psi的压力下热压所得组合物半至6小时。

    Ceramic composition
    18.
    发明授权
    Ceramic composition 失效
    陶瓷组合物

    公开(公告)号：US3791833A

    公开(公告)日：1974-02-12

    申请号：US3791833D

    申请日：1972-01-27

    申请人： KYOTO CERAMIC

    发明人： SUGIURA M ,  HIRABAYASHI M ,  GOTO Y

    IPC分类号： C04B35/08 ,  C04B35/111 ,  C09C1/00 ,  H01B3/12 ,  C04B33/26

    CPC分类号： C04B35/111 ,  C01P2006/40 ,  C04B35/08 ,  C09C1/0009

    摘要： A colored ceramic body for use in various parts of electronic equipment, comprising at least one of A12O3 and BeO as a basic component, 0.1 to 5 percent by weight CoO and further additive chosen from the group consisting of MnO2, Cr2O3, V2O5, Fe2O3 and mixtures thereof, the total amount of CoO and further additive being 1.0 to 10 percent by weight. The ceramic body is dark in color and has excellent electrical, mechanical and thermal characteristics, and maintains an acceptably high volume resistivity even after the body has been heated in a reducing atmosphere.

    摘要翻译： 一种用于电子设备的各种部件的着色陶瓷体，包括作为碱性组分的A12O3和BeO中的至少一种，CoO的0.1至5重量％，以及选自MnO 2，Cr 2 O 3，V 2 O 5，Fe 2 O 3和 其混合物，CoO和另外的添加剂的总量为1.0至10重量％。 陶瓷体颜色较暗，具有优异的电气，机械和热特性，即使在还原气氛中加热后，也保持了可接受的高体积电阻率。