公开(公告)号：US11781999B2

公开(公告)日：2023-10-10

申请号：US17830389

申请日：2022-06-02

申请人： BRUKER TECHNOLOGIES LTD.

发明人： Alexander Krokhmal

IPC分类号： G01N23/201 ,  G01N23/207

CPC分类号： G01N23/201 ,  G01N23/207 ,  G01N2223/045 ,  G01N2223/6116

摘要： An X-ray system includes, first and second X-ray channels (XCs), a spot sizer and a processor. The first XC is configured to: (i) direct a first X-ray beam for producing a spot on a surface of a sample, and (ii) produce a first signal responsively to a first X-ray radiation received from the surface. The spot sizer is positioned at a distance from the surface and is shaped and positioned to set the spot size by passing to the surface a portion of the first X-ray beam. The second XC is configured to: (i) direct a second X-ray beam to the surface, and (ii) produce a second signal responsively to a second X-ray radiation received from the surface, and the processor is configured to: (i) perform an analysis of the sample based on the first signal, and (ii) estimate the size of the spot based on the second signal.

公开(公告)号：US11774380B1

公开(公告)日：2023-10-03

申请号：US18107026

申请日：2023-02-08

申请人： SICHUAN UNIVERSITY

发明人： Yuanjun Xu ,  Ze He ,  Peng Wang ,  Ning Huang ,  Zhu An

IPC分类号： G01N23/20008 ,  G01N23/207 ,  G01N23/2206 ,  G01N23/223

CPC分类号： G01N23/2206 ,  G01N23/207 ,  G01N23/20008 ,  G01N23/223 ,  G01N2223/045 ,  G01N2223/056 ,  G01N2223/076 ,  G01N2223/1016 ,  G01N2223/301 ,  G01N2223/306 ,  G01N2223/316 ,  G01N2223/321 ,  G01N2223/323 ,  G01N2223/3303 ,  G01N2223/402 ,  G01N2223/605

摘要： A diffraction analysis device and a method for a full-field X-ray fluorescence imaging analysis are disclosed. The device includes a switching assembly, collimation assemblies, an X-ray source, an X-ray detector, a laser indicator, and a computer control system. The switching assembly combines with the collimation assemblies to achieve a functional effect that is previously achieved by two different types of devices through only one device by changing the positioning layout of the X-ray source and the X-ray detector. The full-field X-ray fluorescence imaging analysis can be realized, and the crystal phase composition information and the element distribution imaging information of the sample can be quickly obtained through the same device without scanning, which not only greatly improves the utilization rate of each assembly in the device, reduces the assemblies cost of the device, makes the device structure more compact, but also greatly improves the analysis efficiency and detection accuracy.

公开(公告)号：US11774379B2

公开(公告)日：2023-10-03

申请号：US17295862

申请日：2019-11-21

申请人： Rigaku Corporation

发明人： Takashi Sato

IPC分类号： G01N23/20 ,  G01N1/28 ,  G01N23/20033 ,  G01N23/20025 ,  G01N23/207

CPC分类号： G01N23/20033 ,  G01N1/28 ,  G01N23/20025 ,  G01N23/207

摘要： It is made possible to surely supply a porous complex crystal in which a sample is soaked, into a single-crystal X-ray structure analysis apparatus. There is provided a soaking machine for soaking a sample, comprising a supply section that supplies the sample to the porous complex crystal held by a sample holder 310, a temperature control section that controls a temperature of the porous complex crystal, a drive section that drives the supply section, and a control section that controls the supply section, the temperature control section and the drive section. The supply section supplies the sample to the porous complex crystal held by the sample holder 310 inside the applicator 311; and the temperature control section controls the temperature of the porous complex crystal held by the sample holder 310, inside the applicator 311 into which the sample is supplied.

公开(公告)号：US20230288351A1

公开(公告)日：2023-09-14

申请号：US17892313

申请日：2022-08-22

申请人： Kioxia Corporation

发明人： Takehiro Nakai ,  Yumiko Yamashita ,  Ippei Kamiyama

IPC分类号： G01N23/207

CPC分类号： G01N23/207 ,  G01N2223/056 ,  G01N2223/646

摘要： An evaluation device includes an X-ray diffraction measuring device configured to acquire a first X-ray locking curve having a first main peak and a first sub-peak partially overlapping the first main peak by measuring an X-ray locking curve of a first portion of a sample having a crystalline material. The evaluation device includes an analysis device configured to separate the first sub-peak from the first main peak, perform first evaluation of a crystal defects or distortion of the sample based on a peak position, peak intensity, or a half width of the separated first sub-peak, and output the first evaluation.

公开(公告)号：US11703465B2

公开(公告)日：2023-07-18

申请号：US17168491

申请日：2021-02-05

申请人： Kioxia Corporation

发明人： Nobuhito Kuge ,  Toshihisa Fujiwara ,  Yui Fujiwara ,  Chisaki Usui

IPC分类号： G01N23/207 ,  G01N23/2055

CPC分类号： G01N23/207 ,  G01N23/2055 ,  G01N2223/0561 ,  G01N2223/0566 ,  G01N2223/1016 ,  G01N2223/3037 ,  G01N2223/331 ,  G01N2223/3308 ,  G01N2223/403 ,  G01N2223/607 ,  G01N2223/6116

摘要： An apparatus for inspecting a semiconductor device according to an embodiment includes an X-ray irradiation unit configured to make monochromatic X-rays obliquely incident on the semiconductor device, which is an object at a predetermined angle of incidence, a detection unit configured to detect observed X-rays observed from the object using a plurality of two-dimensionally disposed photodetection elements, an analysis apparatus configured to generate X-ray diffraction images obtained by photoelectrically converting the observed X-rays, and a control unit configured to change an angle of incidence and a detection angle of the X-rays, in which the analysis apparatus acquires an X-ray diffraction image every time the angle of incidence is changed, extracts a peak X-ray diffraction image, X-ray intensity of which becomes maximum for each of pixels and compares the peak X-ray diffraction image among the pixels to thereby estimate a stress distribution of the object.

公开(公告)号：US11674912B2

公开(公告)日：2023-06-13

申请号：US17665607

申请日：2022-02-07

申请人： HONDA MOTOR CO., LTD.

发明人： Junji Kuwabara ,  Kenji Sato ,  Atsushi Tamai

IPC分类号： G01N23/207 ,  G01N23/20008

CPC分类号： G01N23/20008 ,  G01N23/207

摘要： The present invention provides an X-ray diffraction measurement apparatus configured to measure properties of an object to be measured M based on X-ray diffraction generated by the object to be measured at an intersection position between an incident optical axis and outgoing optical axes, the X-ray diffraction measurement apparatus including: three slits of a linear shape through which X-rays pass and that are arranged so as to be inclined in an axial direction of the outgoing optical axis; a first two-dimensional detector and a second two-dimensional detector that detect the X-rays passing through the slits within a detection region; and a profile calculator that calculates diffraction profiles indicating intensities of the passing X-rays detected by the two-dimensional detectors, for each of the passing X-rays, thereby being capable of simultaneously obtaining measurement results relating to properties of a plurality of materials having different diffraction angles.

公开(公告)号：US20190250112A1

公开(公告)日：2019-08-15

申请号：US16263495

申请日：2019-01-31

申请人： The Industry & Academic Cooperation In Chungnam National University (IAC)

发明人： Yung-Eun SUNG ,  Jungjin PARK ,  Chunjoong KIM ,  Jong Sig LEE ,  Jae-Hyuk PARK

IPC分类号： G01N23/2005 ,  G01N23/207

CPC分类号： G01N23/2005 ,  G01N23/207 ,  G01N2223/306 ,  G01N2223/60

摘要： Provided is an in-situ X-ray analysis apparatus including a potentiostat connected to an in-situ electrochemical cell and configured to adjust voltage, current, and time of the in-situ electrochemical cell or to record information regarding voltage, current, resistance, capacity, and time information of the in-situ electrochemical cell; an X-ray analysis apparatus configured to obtain X-ray diffraction information regarding the in-situ electrochemical cell; and a controller connected to the X-ray analysis apparatus and the potentiostat and configured to provide or receive signals to or from the X-ray analysis apparatus and the potentiostat.

公开(公告)号：US20190250098A1

公开(公告)日：2019-08-15

申请号：US15894447

申请日：2018-02-12

申请人： Saudi Arabian Oil Company

发明人： Tulay Inan ,  Husinsyah Sitepu ,  Rasha A. Al-Ghamdi ,  Abdullah Al-Dakheel ,  Amer Al-Tuwailib

IPC分类号： G01N21/3563 ,  C01B39/24 ,  G01N23/207 ,  G01N21/25

CPC分类号： G01N21/3563 ,  B01J29/08 ,  C01B39/24 ,  C01P2002/76 ,  C01P2002/82 ,  C01P2002/88 ,  G01N21/255 ,  G01N21/274 ,  G01N23/207 ,  G01N2021/3595 ,  G01N2201/061

摘要： To determine Si/Al ratio in zeolite samples, a Si/Al ratio of a first physical zeolite Y sample is determined. A computational zeolite Y sample having properties substantially similar to properties of the first physical sample is generated. The computational zeolite Y sample is associated with properties including a computational Si/Al ratio and computational FT-IR spectra. A calibration model that maps Si/Al ratios of the computational zeolite Y sample to FT-IR spectra of the computational zeolite Y sample based on the Si/Al ratio of the first physical zeolite Y sample and the FT-IR spectra of the first physical zeolite Y sample is generated. FT-IR spectra of a second physical zeolite Y sample is determined. A Si/Al ratio of the second physical zeolite Y sample is determined using the calibration model and the FT-IR spectra of the second physical zeolite Y sample.

公开(公告)号：US20190086343A1

公开(公告)日：2019-03-21

申请号：US16184068

申请日：2018-11-08

申请人： United Technologies Corporation

发明人： luliana Cernatescu ,  Vasisht Venkatesh ,  David Ulrich Furrer

IPC分类号： G01N23/207 ,  G01N23/20016

CPC分类号： G01N23/207 ,  G01N23/20008 ,  G01N23/20016 ,  G01N2223/605 ,  G01N2223/606 ,  G01N2223/632

摘要： A system for the x-ray topography analysis of a sample, comprising in combination, a goniometer having a base, a tube arm rotatably associated with the base, a detector arm rotatably associated with the base, and a sample stage operatively associated with the base. The system also includes an x-ray source operatively coupled with the tube arm and is capable of emitting a non-collimated beam of x-rays. A collimator is operatively associated with the x-ray source and converts the non-collimated beam of x-rays into a collimated beam of x-rays having a quasi-rectangular shape with a divergence less than three degrees in all directions. A detector operatively coupled to the detector arm.

公开(公告)号：US20190064083A1

公开(公告)日：2019-02-28

申请号：US16104550

申请日：2018-08-17

申请人： Rigaku Corporation

发明人： Akito Sasaki ,  Akihiro Himeda ,  Yukiko Ikeda ,  Keigo Nagao

IPC分类号： G01N23/207

CPC分类号： G01N23/207

摘要： A method for displaying measurement results from X-ray diffraction measurement, in which a sample is irradiated with X-rays and the X-rays diffracted by the sample are detected by an X-ray detector, comprises: (1) forming a one-dimensional diffraction profile by displaying, on the basis of output data from an X-ray detector, a profile in which one orthogonal coordinate axis shows 2θ angle values and another orthogonal coordinate axis shows X-ray intensity values; (2) forming a two-dimensional diffraction pattern by linearly displaying X-ray intensity data, for each 2θ angle value and on the basis of output data from the X-ray detector; the X-ray intensity data being present in the circumferential direction of a plurality of Debye rings formed at each 2θ angle by diffracted X-rays; and (3) displaying the two-dimensional diffraction pattern and the one-dimensional diffraction profile so as to be aligned such that the 2θ angle values of both coincide with each other.