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    Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates
    15.
    发明授权
    Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates 有权
    作为UV快门或可调谐UV过滤器的臭氧增压器用于清洁半导体衬底

    公开(公告)号：US08624210B2

    公开(公告)日：2014-01-07

    申请号：US13923920

    申请日：2013-06-21

    Applicant: Lam Research Corporation

    Inventor： Yen-Kun Victor Wang ,  Shang-I Chou ,  Jason Autustino

    IPC: H01L21/465 ,  B32B17/00 ,  C03B23/20

    CPC classification number: H01L21/268 ,  C03B20/00 ,  H01L21/02041 ,  H01L21/67028 ,  H01L21/67115

    Abstract: A quartz window with an interior plenum is operable as a shutter or UV filter in a degas chamber by supplying the plenum with an ozone-containing gas. Pressure in the plenum can be adjusted to block UV light transmission into the degas chamber or adjust transmittance of UV light through the window. When the plenum is evacuated, the plenum allows maximum transmission of UV light into the degas chamber.

    Abstract translation: 具有内部增压室的石英窗口可通过向气室供应含臭氧的气体而在脱气室中作为快门或UV过滤器操作。 可以调节增压室中的压力以阻止UV光透射​​到脱气室中或调节通过窗口的UV光的透射率。 当集气室抽真空时，增压室允许最大限度地将UV光透射​​到脱气室中。

    Hermetically sealed glass package and method of manufacture
    16.
    发明授权
    Hermetically sealed glass package and method of manufacture 失效
    密封玻璃包装及其制造方法

    公开(公告)号：US08375744B2

    公开(公告)日：2013-02-19

    申请号：US11992370

    申请日：2006-11-27

    Applicant: Keith James Becken ,  Stephan Lvovich Logunov ,  Aiyu Zhang ,  John Bayne

    Inventor： Keith James Becken ,  Stephan Lvovich Logunov ,  Aiyu Zhang ,  John Bayne

    IPC: C03B23/20 ,  C03B23/24

    CPC classification number: B65B7/00 ,  C03C27/06 ,  H01L21/50 ,  H01L51/5246

    Abstract: A method for manufacturing a hermetically sealed package is provided, the method comprising the steps of: using a laser to heat a frit, disposed in a pattern between two substrates, such that the heated frit forms a hermetic seal which connects the substrates and further comprising: directing the laser to enter the frit pattern, then to trace the frit pattern, then to retrace a portion of the frit pattern, and then to exit the frit pattern; and selecting an initial laser power which, when the laser enters the frit pattern, is insufficient to heat the frit to form a hermetic seal; then increasing the laser power over a first section of the frit pattern to a target laser power at least sufficient to heat the frit to form a hermetic seal; and then decreasing the laser power over a second section of the frit pattern until the laser power is insufficient to heat the frit to form a hermetic seal before the laser exits the frit pattern.

    Abstract translation: 提供了一种用于制造密封包装的方法，所述方法包括以下步骤：使用激光加热设置在两个基板之间的图案的玻璃料，使得加热的玻璃料形成连接基板的气密密封件，并且还包括 ：引导激光进入玻璃料图案，然后跟踪玻璃料图案，然后回扫玻璃料图案的一部分，然后退出玻璃料图案; 以及选择当激光进入玻璃料图案时的初始激光功率不足以加热玻璃料以形成气密密封; 然后将玻璃料图案的第一部分上的激光功率增加至至少足以加热玻璃料以形成气密密封的目标激光功率; 然后在玻璃料图案的第二部分上降低激光功率，直到激光功率不足以加热玻璃料以在激光器离开玻璃料图案之前形成气密密封。

    GLASS WELDING METHOD AND GLASS LAYER FIXING METHOD
    17.
    发明申请
    GLASS WELDING METHOD AND GLASS LAYER FIXING METHOD 有权
    玻璃焊接方法和玻璃层固定方法

    公开(公告)号：US20120260694A1

    公开(公告)日：2012-10-18

    申请号：US13511683

    申请日：2010-09-17

    Applicant: Satoshi Matsumoto

    Inventor： Satoshi Matsumoto

    IPC: C03B23/20 ,  C03C17/04

    CPC classification number: B23K26/211 ,  B23K26/0869 ,  B23K26/244 ,  B23K26/324 ,  C03C23/0025 ,  C03C27/06 ,  H01J9/261 ,  H01J9/268 ,  H01J9/40

    Abstract: A glass layer 3 is irradiated with laser light L2 for temporary firing in order to gasify a binder and melt the glass layer 3, thereby fixing the glass layer 3 to a glass member 4. Here, an irradiation region of the laser light L2 has regions A1, A2 arranged along an extending direction of a region to be fused R and is moved along the region to be fused R such that the region A1 precedes the region A2. The region A2 irradiates the glass layer 3 before the glass layer 3 molten by irradiation with the region A1 solidifies. This makes the glass layer 3 take a longer time to solidify, whereby the binder gasified by irradiation with the region A1 of the laser light L2 is more likely to escape from the glass layer 3.

    Abstract translation: 用激光L2照射玻璃层3以暂时烧制，以便气化粘合剂并熔化玻璃层3，从而将玻璃层3固定在玻璃部件4上。这里，激光L2的照射区域具有区域 A1，A2沿着待融合区域R的延伸方向排列并且沿着待融合区域R移动，使得区域A1在区域A2之前。 在区域A1照射熔融的玻璃层3固化之前，区域A2照射玻璃层3。 这使得玻璃层3需要更长的时间凝固，由此通过照射激光L2的区域A1而气化的粘合剂更可能从玻璃层3逸出。

    GLASS WELDING METHOD
    18.
    发明申请
    GLASS WELDING METHOD 有权
    玻璃焊接方法

    公开(公告)号：US20120234048A1

    公开(公告)日：2012-09-20

    申请号：US13509112

    申请日：2010-09-17

    Applicant: Satoshi Matsumoto

    Inventor： Satoshi Matsumoto

    IPC: C03B33/09 ,  C03B23/20

    CPC classification number: C03B33/076 ,  B23K26/57 ,  C03B23/245 ,  C03B33/091 ,  C03C27/06 ,  Y02P40/57

    Abstract: Glass layers 3 are molten by irradiation with laser light L, so as to generate a temperature difference in a part along regions to be fused R in each of glass substrates 40, 50 so that main faces 40a, 50a on the glass layer 3 side have a temperature higher than that on main faces 40b, 50b on the opposite side of the glass layers 3. Thereafter, the molten glass layers 3 solidify, and cooling generates a stress in the glass substrates 40, 50. Here, since initial fractures 8 are formed in the glass substrate 50 so as to overlap the glass layers 3, fractures grow in the thickness direction of the glass substrates 40, 50 through the glass layers 3 from the initial fractures 8 acting as a start point.

    Abstract translation: 玻璃层3通过照射激光L熔融，从而在玻璃基板40,50中的每一个中沿着熔融区域R的一部分产生温度差，使得玻璃层3侧的主面40a，50a具有 其温度高于玻璃层3的相反侧的主面40b，50b的温度。此后，熔融玻璃层3凝固，冷却在玻璃基板40,50中产生应力。这里，由于初始断裂8为 在玻璃基板50上形成为与玻璃层3重叠，从作为起点的初始断裂8通过玻璃层3在玻璃基板40,50的厚度方向上产生断裂。

    GLASS FUSION METHOD
    19.
    发明申请
    GLASS FUSION METHOD 审中-公开
    玻璃熔融法

    公开(公告)号：US20120151965A1

    公开(公告)日：2012-06-21

    申请号：US13345199

    申请日：2012-01-06

    Applicant: Satoshi Matsumoto ,  Toshimitsu Wakuda

    Inventor： Satoshi Matsumoto ,  Toshimitsu Wakuda

    IPC: C03B23/20

    CPC classification number: C03C27/06 ,  C03C8/24

    Abstract: A glass layer fixing method for manufacturing a glass layer fixing member by fixing a glass layer to a first glass member, includes the steps of disposing the glass layer on the first glass member along a region to be fused, the glass layer containing a glass powder and a laser-absorbing material and irradiating the region to be fused therealong with a first laser beam, so as to melt the glass layer, fix the glass layer to the first glass member, and increase a laser absorptance of the glass layer.

    Abstract translation: 通过将玻璃层固定在第一玻璃构件上来制造玻璃层固定构件的玻璃层固定方法包括以下步骤：沿着要熔融的区域将玻璃层设置在第一玻璃构件上，玻璃层含有玻璃粉末 和激光吸收材料，并用第一激光束照射要熔融的区域，以熔化玻璃层，将玻璃层固定在第一玻璃构件上，并增加玻璃层的激光吸收率。

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