CMP SLURRY COMPOSITIONS AND METHODS FOR ALUMINUM POLISHING
    18.
    发明申请
    CMP SLURRY COMPOSITIONS AND METHODS FOR ALUMINUM POLISHING 审中-公开
    CMP浆料组合物和铝抛光方法

    公开(公告)号:US20150368515A1

    公开(公告)日:2015-12-24

    申请号:US14743583

    申请日:2015-06-18

    IPC分类号: C09G1/02 C23F3/03

    CPC分类号: C09G1/02 C23F3/02 C23F3/03

    摘要: Chemical-mechanical polishing (CMP) compositions and methods are described, which are suitable for polishing an aluminum surface. The compositions comprise alumina abrasive particles coated with an anionic polymer, and suspended in an acidic or neutral pH carrier. In some cases, a polishing aid such as silica, a carboxylic acid, a phosphonic acid compound, or a combination thereof may be added to the CMP compositions. The described CMP compositions and methods improve polishing efficacy and reduce surface imperfections on a polished aluminum surface compared to CMP methods using uncoated alumina abrasive.

    摘要翻译: 描述了适用于抛光铝表面的化学机械抛光(CMP)组合物和方法。 组合物包含涂覆有阴离子聚合物并悬浮在酸性或中性pH载体中的氧化铝磨粒。 在一些情况下,可以向CMP组合物中加入诸如二氧化硅,羧酸,膦酸化合物或其组合的抛光助剂。 与使用未涂覆的氧化铝研磨剂的CMP方法相比,所描述的CMP组合物和方法改善了抛光效率并减少了抛光铝表面的表面缺陷。

    Aluminum cleaning and brightening composition and method of manufacture
thereof
    19.
    发明授权
    Aluminum cleaning and brightening composition and method of manufacture thereof 失效
    铝清洗和增亮组合物及其制造方法

    公开(公告)号:US4970014A

    公开(公告)日:1990-11-13

    申请号:US456989

    申请日:1989-12-22

    IPC分类号: C23F3/03 C23G1/12

    CPC分类号: C23G1/125 C23F3/03

    摘要: An acidic solution for use as an aluminum cleaning and brightening composition includes an aqueous solution of from about 1-15 weight percent hydrofluoric acid, about 1-5 weight percent sulfuric acid, and about 1-5 weight percent phosphoric acid. In addition, approximately 83-97 weight percent of an aqueous hydrochloric acid-based composition is included, which composition has a pH of less than about 1.0 yet is substantially non-reactive with compounds having low oxidative states, including human skin tissue.

    摘要翻译: 用作铝清洁和增亮组合物的酸性溶液包括约1-15重量%氢氟酸,约1-5重量%硫酸和约1-5重量%磷酸的水溶液。 此外,包含约83-97重量%的基于盐酸的盐酸组合物,该组合物的pH值小于约1.0,但与氧化态低的化合物(包括人皮肤组织)基本上不具有反应性。

    Aluminium polishing compositions
    20.
    发明授权
    Aluminium polishing compositions 失效
    铝抛光组合物

    公开(公告)号:US4116699A

    公开(公告)日:1978-09-26

    申请号:US733508

    申请日:1976-10-18

    申请人: Terence R. Rooney

    发明人: Terence R. Rooney

    IPC分类号: C23F3/03 C09K13/06

    CPC分类号: C23F3/03

    摘要: Aluminium polishing solutions containing phosphoric, nitric and sulphuric acids provide etched finishes if the proportion of sulphuric acid is increased. The invention inhibits such etching by addition to the bath of an aromatic ring compound, in which at least 2 hetero atoms are conjugated with the ring such as benztriazole.

    摘要翻译: 含有磷酸,硝酸和硫酸的铝抛光液如果硫酸的比例增加,则会提供蚀刻的表面处理。 本发明通过加入至少两个杂环原子与环结合的芳环化合物的浴来抑制这种蚀刻,例如苯并三唑。