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    Ion beam apparatus with separately replaceable elements
    11.
    发明授权
    Ion beam apparatus with separately replaceable elements 失效
    离子束装置，具有可单独更换的元件

    公开(公告)号：US3930163A

    公开(公告)日：1975-12-30

    申请号：US45375074

    申请日：1974-03-22

    Applicant: VARIAN ASSOCIATES

    Inventor： GERLACH ROBERT L ,  ROSSINI GEORGE

    IPC: H01J37/08 ,  H01J3/04 ,  H01J27/00 ,  H01J27/02 ,  H01J27/20 ,  H01J49/10 ,  H05H7/08 ,  G01K1/08

    CPC classification number: H01J27/20

    Abstract: In an ion beam apparatus wherein ions are generated by the collision of electrons from a filamentary emitter with gas atoms in the vicinity of an electron-attracting grid structure, with subsequent extraction of the ions so generated from the vicinity of the grid structure and the focusing of these ions into a beam by an electrostatic lens system, a new way of mounting the ion extractor and the electrostatic lens system is disclosed which facilitates the removal and replacement of the filament and the grid structure. A configuration of the grid structure is also disclosed which optimizes the profile and the current density of the ion beam.

    Abstract translation: 在离子束装置中，其中通过电子从丝状发射体与电子吸引栅格结构附近的气体原子的碰撞产生离子，随后从栅格结构和聚焦附近提取离子 这些离子通过静电透镜系统进入光束，公开了一种安装离子提取器和静电透镜系统的新方法，其有助于灯丝和栅格结构的去除和替换。 还公开了优化离子束的分布和电流密度的网格结构的配置。

    Ion source with reduced emittance
    13.
    发明授权
    Ion source with reduced emittance 失效
    离子源具有减少的发生

    公开(公告)号：US3767952A

    公开(公告)日：1973-10-23

    申请号：US3767952D

    申请日：1972-10-24

    Applicant: CA ATOMIC ENERGY LTD

    Inventor： ORMROD J

    IPC: H01J3/04 ,  H01J27/00 ,  H01J27/02 ,  H01J27/10 ,  H05H7/08 ,  H05H7/00

    CPC classification number: H01J27/022 ,  H01J27/10

    Abstract: An ion source modified by an additional electrode, designated as a scraper electrode, positioned between the anode and extractor electrode, having an aperture slightly less than the source plasma aperture, and adapted to carry a pre-determined voltage in reference to the anode. It has been found that the scraper electrode intercepts and removes ions at the periphery of the beam cross-sectional area and this is the region that contains ions that contribute most greatly to the increased emittance. The central, non-intercepted cross-sectional area therefore has a much reduced emittance. The voltage on the scraper electrode should be such as to not disturb or distract the electric field between anode and extractor electrode.

    Abstract translation: 位于阳极和提取器电极之间的称为刮刀电极的附加电极修改的离子源具有略小于源等离子体孔径的孔，并且适于相对于阳极承载预定电压。 已经发现，刮刀电极在束截面积的周围拦截并除去离子，并且这是含有对增加的发射率贡献最大的离子的区域。 因此，中心的，不被截取的横截面面积的发射率大大降低。 刮刀电极上的电压应该不会妨碍或分散阳极和提取器电极之间的电场。

    Velocity selected laser ablation metal atom source
    17.
    发明授权
    Velocity selected laser ablation metal atom source 失效
    速度选择激光烧蚀金属原子源

    公开(公告)号：US5567935A

    公开(公告)日：1996-10-22

    申请号：US458518

    申请日：1995-06-02

    Applicant: Mario E. Fajardo ,  Michel Macler

    Inventor： Mario E. Fajardo ,  Michel Macler

    IPC: H01J49/04 ,  H01J49/16 ,  H05H3/02 ,  H01J3/04

    CPC classification number: H01J49/0463 ,  H01J49/061 ,  H01J49/162 ,  H05H3/02

    Abstract: A pulsed plume of laser ablated photo-ionizable material is emitted from a target in a vacuum, and a pulsed beam of light thereafter produces ionization of two plume sections straddling a central nonionized plume portion. A mask is provided, intermediate the plume and the laser generating the ionizing pulsed beam of light, to shield the central plume portion to prevent ionization thereof. The ionized portions of the plume are swept away from the vicinity of the non-ionized plume portion by a magnetic field, and the remaining nonionized portion passes through an aperture in a retrieval mask to produce the output of the atomic source.

    Abstract translation: 在真空中从目标物发射激光烧蚀的可光电离材料的脉冲羽流，然后脉冲光束产生跨越中心非离子化羽流部分的两个羽流部分的离子化。 提供掩模，在羽流和产生电离脉冲光束的激光之间，屏蔽中心羽流部分以防止其离子化。 羽流的离子化部分通过磁场从非离子化羽流部分的附近扫除，剩余的非离子部分通过检索掩模中的孔，以产生原子源的输出。

    Pulsed ion beam source
    18.
    发明授权
    Pulsed ion beam source 失效
    脉冲离子束源

    公开(公告)号：US5525805A

    公开(公告)日：1996-06-11

    申请号：US340519

    申请日：1994-11-16

    Applicant: John B. Greenly

    Inventor： John B. Greenly

    IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

    CPC classification number: C08J7/123 ,  B29C59/16 ,  C23C14/48 ,  C23C8/36 ,  H01J27/14 ,  B29C2035/0872 ,  H01J2237/08 ,  H01J2237/31701

    Abstract: An improved magnetically-confined anode plasma pulsed ion beam source. Beam rotation effects and power efficiency are improved by a magnetic design which places the separatrix between the fast field flux structure and the slow field structure near the anode of the ion beam source, by a gas port design which localizes the gas delivery into the gap between the fast coil and the anode, by a pre-ionizer ringing circuit connected to the fast coil, and by a bias field means which optimally adjusts the plasma formation position in the ion beam source.

    Abstract translation: 改进的磁约束阳极等离子体脉冲离子束源。 光束旋转效应和功率效率通过将气体输送定位到离子束源之间的间隙中的气体端口设计的磁性设计来改善，该磁性设计将分离矩阵放置在离子束源的阳极附近的快速场通量结构和慢场结构之间 快速线圈和阳极，通过连接到快速线圈的预电离器振铃电路以及最佳地调节离子束源中的等离子体形成位置的偏置场装置。

    Microwave ion source
    19.
    发明授权
    Microwave ion source 失效
    微波离子源

    公开(公告)号：US4598231A

    公开(公告)日：1986-07-01

    申请号：US524140

    申请日：1983-02-01

    Applicant: Koji Matsuda ,  Toshinori Takagi ,  Junzo Ishikawa

    Inventor： Koji Matsuda ,  Toshinori Takagi ,  Junzo Ishikawa

    IPC: H01J37/08 ,  H01J3/04 ,  H01J27/02 ,  H01J27/16 ,  H01J27/18 ,  H05H7/08 ,  H01J7/24 ,  H05B31/26

    CPC classification number: H01J27/18 ,  H01J27/022

    Abstract: A microwave ion source comprising a discharge chamber provided with an ion source seed material inlet and an ion outlet, a means for radiating microwaves in said discharge chamber, a means for applying a magnetic filed to the inside of said discharge chamber, a means for supplying ion source seed material to said discharge chamber through said ion source seed material inlet and an ion extraction electrode, said ion extraction electrode being made of magnetic material having a resistivity of less than 10.sup.6 .OMEGA.cm and a permeability of more than 5. The present microwave ion source has an improved ion current efficiency.

    Abstract translation: 一种微波离子源，包括设置有离子源种子材料入口和离子出口的放电室，用于在所述放电室中辐射微波的装置，用于将磁场施加到所述放电室的内部的装置，用于提供 离子源种子材料通过所述离子源种子材料入口和离子提取电极到所述放电室，所述离子提取电极由电阻率小于106欧姆·厘米且磁导率大于5的磁性材料制成。本微波 离子源具有改善的离子电流效率。

    Metal ion source
    20.
    发明授权
    Metal ion source 失效
    金属离子源

    公开(公告)号：US4488045A

    公开(公告)日：1984-12-11

    申请号：US412215

    申请日：1982-08-27

    Applicant: Norimichi Anazawa ,  Masahiko Okunuki ,  Ryuzo Aihara

    Inventor： Norimichi Anazawa ,  Masahiko Okunuki ,  Ryuzo Aihara

    IPC: H01J37/08 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J49/16

    CPC classification number: H01J27/26

    Abstract: A reservoir containing a material to be ionized has in its bottom a capillary extending outwardly in symmetrical with the optical axis of an ion source, and has a needle extending coaxially through said capillary in said reservoir so that the apex end of the needle projects slightly beyond the exterior surface of the reservoir. Intensive electric field at the apex end of the needle is formed by an extracting electrode disposed in facing the needle. An electric current is supplied through conductive wires or filaments supporting the reservoir for heating the reservoir. As a result, the liquid material to be ionized in the reservoir seeps smoothly through the capillary of the reservoir toward the apex end of the needle for field evaporation and ionization.

    Abstract translation: 包含待离子化的材料的储存器在其底部具有向外延伸的毛细管，其与离子源的光轴对称，并且具有同轴地延伸穿过所述储存器中的毛细管的针，使得针的顶端略微超过 储存器的外表面。 针的顶端处的强电场由设置在针上的提取电极形成。 通过支撑储存器的导电丝或细丝供应电流来加热储存器。 结果，在储存器中被离子化的液体材料通过储存器的毛细管顺畅地渗透到针的顶端，用于场蒸发和离子化。

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