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公开(公告)号：US4598231A
公开(公告)日：1986-07-01
申请号：US524140
申请日：1983-02-01
申请人： Koji Matsuda , Toshinori Takagi , Junzo Ishikawa
发明人： Koji Matsuda , Toshinori Takagi , Junzo Ishikawa
CPC分类号： H01J27/18 , H01J27/022
摘要： A microwave ion source comprising a discharge chamber provided with an ion source seed material inlet and an ion outlet, a means for radiating microwaves in said discharge chamber, a means for applying a magnetic filed to the inside of said discharge chamber, a means for supplying ion source seed material to said discharge chamber through said ion source seed material inlet and an ion extraction electrode, said ion extraction electrode being made of magnetic material having a resistivity of less than 10.sup.6 .OMEGA.cm and a permeability of more than 5. The present microwave ion source has an improved ion current efficiency.
摘要翻译： 一种微波离子源，包括设置有离子源种子材料入口和离子出口的放电室，用于在所述放电室中辐射微波的装置，用于将磁场施加到所述放电室的内部的装置，用于提供 离子源种子材料通过所述离子源种子材料入口和离子提取电极到所述放电室，所述离子提取电极由电阻率小于106欧姆·厘米且磁导率大于5的磁性材料制成。本微波 离子源具有改善的离子电流效率。
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2.发明授权
公开(公告)号：US4563610A
公开(公告)日：1986-01-07
申请号：US477971
申请日：1983-03-23
申请人： Toshinori Takagi , Junzo Ishikawa , Koji Matsuda
发明人： Toshinori Takagi , Junzo Ishikawa , Koji Matsuda
CPC分类号： H01J27/028
摘要： A negative-ion source comprising means for discharging alkaline metal for discharging neutral alkaline metal particles together with alkaline metal ion particles; an electrode for generating negative ions which can serve as an extraction electrode for extracting said alkaline metal ion particles and a target bombarded with said alkaline metal ion particles and which provides with a hold for holding negative-ion seed material in the portion bombarded with said alkaline metal ion particles and an aperture for letting out negative-ion particles; and a negative-ion extraction electrode for said negative-ion particles. The present negative-ion source has an improved ion current efficiency and is compact size.
摘要翻译： 负离子源包括用于排出碱金属以排放中性碱金属颗粒与碱金属离子颗粒的装置; 用于产生负离子的电极，其可以用作提取所述碱金属离子颗粒的提取电极和用所述碱金属离子颗粒轰击的靶，并且提供用于将负离子种子材料保持在用所述碱性物质轰击的部分中的保持 金属离子颗粒和用于排出负离子颗粒的孔; 和用于所述负离子颗粒的负离子提取电极。 本负离子源具有改善的离子电流效率并且尺寸紧凑。
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公开(公告)号：US4638217A
公开(公告)日：1987-01-20
申请号：US476470
申请日：1983-03-18
申请人： Masao Okubo , Kiyoshi Sugaya , Toshinori Takagi , Junzo Ishikawa
发明人： Masao Okubo , Kiyoshi Sugaya , Toshinori Takagi , Junzo Ishikawa
CPC分类号： H01J27/26
摘要： An ion source having a sintered metal head for ionizing various substances is disclosed. This ion source comprises a container made of a material which has a higher fusing point than that of the substance which is to be ionized, and a tip formed of a molded sintered metal of a higher fusing point than that of the substance which is to be ionized. The head is formed into a nearly conical shape and has a porosity capable of allowing the substance which is to be ionized to infiltrate therethrough in the molten state and the tip of the head is positioned at the opening of one end of the container for the ionizable material and arranged in such a manner that it protrudes beyond the end of the container.
摘要翻译： 公开了一种具有用于电离各种物质的烧结金属头的离子源。 该离子源包括由与要离子化的物质相比具有更高熔点的材料制成的容器，以及由与要物质相同的物质的熔点高的成型烧结金属形成的尖端 电离。 头部形成为近似圆锥形的形状，并且具有能够使被离子化的物质在熔融状态下渗透的孔隙，并且头部的顶端位于容器的一端的开口处，用于可离子化 材料并且以使其突出超过容器的端部的方式布置。
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4.发明授权
公开(公告)号：US4774413A
公开(公告)日：1988-09-27
申请号：US919409
申请日：1986-10-16
申请人： Masao Okubo , Kiyoshi Sugaya , Toshinori Takagi , Junzo Ishikawa
发明人： Masao Okubo , Kiyoshi Sugaya , Toshinori Takagi , Junzo Ishikawa
摘要： An ion emmisive head for fusing a metal to emit ion beam is disclosed, wherein a fused metal is designed to infiltrate through a porous portion for flow control and to reach an extremely sharpened needle which is provided after infiltration and wherefrom the fused metal is converted to ion beam by electrical action. Thus, ionized metallic beam is rendered to have smaller width or more focused ray. Submicron technology used in the IC industry, for instance, desires far thinner, finer beam line to attain more compact circuits, which need will be responded in the present invention by disposing a tipping needle to extend out of a porous tip portion which receives the fused metal from melting zone. Appropriate combination of sharpness at the needle point and provision of a beam guiding electrode in neighborhood of an emitting needle point enable to produce about 0.1 micron beam width by prevention of plasma ball which will otherwise diffuse the emitted beam.
摘要翻译： 公开了用于熔化金属以发射离子束的离子发射头，其中熔融金属被设计成渗透通过多孔部分以进行流量控制，并且到达在渗透之后提供的非常锋利的针，并且将熔融金属转化为 离子束通过电动作用。 因此，使电离金属束具有较小的宽度或更聚焦的光线。 例如，在IC工业中使用的亚微米技术需要更薄更细的光束线以获得更紧凑的电路，这在本发明中将需要响应，通过设置倾翻针以延伸出多孔尖端部分，该多孔尖端部分接收熔融 金属从熔化区。 在针尖处的锋利度和在发射针尖附近提供光束引导电极的适当组合使得能够通过防止等离子体球产生大约0.1微米的光束宽度，否则会使发射的光束扩散。
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5.发明申请公开(公告)号：US20120085918A1
公开(公告)日：2012-04-12
申请号：US13377253
申请日：2010-04-27
申请人： Dan Nicolaescu , Shigeki Sakai , Junzo Ishikawa , Yasuhito Gotoh
发明人： Dan Nicolaescu , Shigeki Sakai , Junzo Ishikawa , Yasuhito Gotoh
CPC分类号： H01J37/3171 , H01J2237/004 , H01J2237/0041 , H01J2237/0048 , H01J2237/06341 , H01J2237/083 , H01J2237/1538 , H01J2237/24535 , H01J2237/24542
摘要： To improve an efficiency of utilizing electrons and efficiently suppress an ion beam spread by a space charge effect while eliminating a need for a special magnetic pole structure by effectively using a space in the vicinity of a magnet, there are provided an ion source, a collimating magnet and a plurality of electron sources, wherein the electron sources are arranged in a magnetic field gradient region formed on an ion beam upstream side or ion beam downstream side of the collimating magnet and arranged outside a region passed by the ion beam, and an irradiation direction of the electrons is directed to supply the electrons to the magnetic field gradient region.
摘要翻译： 为了提高利用电子的效率，有效地抑制通过空间电荷效应扩散的离子束，同时通过有效地利用磁体附近的空间来消除对特殊磁极结构的需要，提供离子源，准直 磁体和多个电子源，其中电子源被布置在形成在准直磁体的离子束上游侧或离子束下游侧的磁场梯度区域中，并且布置在通过离子束的区域的外侧， 电子的方向被引导以将电子提供给磁场梯度区域。
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公开(公告)号：US5901398A
公开(公告)日：1999-05-11
申请号：US788515
申请日：1997-01-24
摘要： According to a conventional continuous car washing machine in which one of the right and left side brushes is stationary, a roller conveyor which transports a vehicle to be washed is provided with wheel guides to maintain a spacing between a lateral surface of the vehicle and one side brush at a given value. Thus, there has been a problem that it is difficult to drive the vehicle to move itself onto the required position on the roller conveyor. The present invention which is intended to solve the problem provides a car washing machine comprising a stationary car washing machine body in which a pair of side brushes (8a, 8b) are disposed to be retractable in the transverse direction at a right angle with the direction of transport of a vehicle in order for washing at least the lateral surfaces of the vehicle (2), and a conveyor device (3) for transporting the vehicle (2) which is free of wheel guides and has a sufficient width to accommodate a plurality of different car widths.
摘要翻译： 根据常规连续洗车机，其中右侧和右侧电刷中的一个是静止的，用于输送要洗涤的车辆的辊式输送机设置有轮导向器，以保持车辆侧面和一侧之间的间隔 刷一个给定的值。 因此，存在难以驾驶车辆将其自身移动到辊式输送机上的所需位置的问题。 旨在解决问题的本发明提供了一种洗衣机，其包括固定式洗车机主体，其中一对侧刷（8a，8b）设置成能够沿与横向方向成直角的方向在横向方向上缩回 车辆的至少移动部件的运送装置，以及用于输送车辆（2）的输送装置（3），所述输送装置（3）不具有轮导向件，并且具有足够的宽度以容纳多个 不同车宽。
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7.发明申请ION BEAM IRRADIATING APPARATUS, AND METHOD OF PRODUCING SEMICONDUCTOR DEVICE 有权离子束辐射装置，以及生产半导体器件的方法公开(公告)号：US20090203199A1
公开(公告)日：2009-08-13
申请号：US12304241
申请日：2007-06-12
申请人： Junzo Ishikawa , Dan Nicolaescu , Yasuhito Gotoh , Shigeki Sakai
发明人： Junzo Ishikawa , Dan Nicolaescu , Yasuhito Gotoh , Shigeki Sakai
IPC分类号： H01L21/425 , H01J37/08 , H01J27/00
CPC分类号： H01J37/026 , H01J2237/0041 , H01J2237/31701
摘要： An ion beam irradiating apparatus has a field emission electron source 10 which is disposed in a vicinity of a path of the ion beam 2, and which emits electrons 12. The field emission electron source 10 is placed in a direction along which an incident angle formed by the electrons 12 emitted from the electron source 10 and a direction parallel to the traveling direction of the ion beam 2 is in the range from −15 deg. to +45 deg. (an inward direction of the ion beam 2 is +, and an outward direction is −).
摘要翻译： 离子束照射装置具有设置在离子束2的路径附近并发射电子的场致发射电子源10.场致发射电子源10沿着形成的入射角的方向 由电子源10发射的电子12和与离子束2的行进方向平行的方向在-15度的范围内。 至+45度 （离子束2的向内方向为+，向外方向为 - ）。
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8.发明授权公开(公告)号：US08461548B2
公开(公告)日：2013-06-11
申请号：US13377253
申请日：2010-04-27
申请人： Dan Nicolaescu , Shigeki Sakai , Junzo Ishikawa , Yasuhito Gotoh
发明人： Dan Nicolaescu , Shigeki Sakai , Junzo Ishikawa , Yasuhito Gotoh
IPC分类号： H01J3/26
CPC分类号： H01J37/3171 , H01J2237/004 , H01J2237/0041 , H01J2237/0048 , H01J2237/06341 , H01J2237/083 , H01J2237/1538 , H01J2237/24535 , H01J2237/24542
摘要： To improve an efficiency of utilizing electrons and efficiently suppress an ion beam spread by a space charge effect while eliminating a need for a special magnetic pole structure by effectively using a space in the vicinity of a magnet, there are provided an ion source, a collimating magnet and a plurality of electron sources, wherein the electron sources are arranged in a magnetic field gradient region formed on an ion beam upstream side or ion beam downstream side of the collimating magnet and arranged outside a region passed by the ion beam, and an irradiation direction of the electrons is directed to supply the electrons to the magnetic field gradient region.
摘要翻译： 为了提高利用电子的效率，有效地抑制通过空间电荷效应扩散的离子束，同时通过有效地利用磁体附近的空间来消除对专用磁极结构的需要，提供离子源，准直 磁体和多个电子源，其中电子源被布置在形成在准直磁体的离子束上游侧或离子束下游侧的磁场梯度区域中，并且布置在通过离子束的区域的外侧， 电子的方向被引导以将电子提供给磁场梯度区域。
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公开(公告)号：US06861790B1
公开(公告)日：2005-03-01
申请号：US09537723
申请日：2000-03-30
申请人： Takashi Iwasa , Junzo Ishikawa
发明人： Takashi Iwasa , Junzo Ishikawa
CPC分类号： H01J1/3044 , H01J1/304 , Y10T428/30
摘要： An electric element is formed of a deposited film containing cesium (Cs) and has a plurality of conical projections on its surface. The projections are formed of cesium oxide and have an average height h in a range of 10 nm≦h≦500 nm. The electronic element is used as a cold cathode element, and has a high practicality, and for example, emits electrons sufficiently even with a low voltage applied thereto.
摘要翻译： 电元件由含有铯（Cs）的沉积膜形成，并且在其表面上具有多个锥形突起。 突起由氧化铯形成，平均高度h在10nm <= h <= 500nm的范围内。 电子元件用作冷阴极元件，并且具有高的实用性，例如即使施加低电压也能充分发射电子。
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公开(公告)号：US06268686B1
公开(公告)日：2001-07-31
申请号：US09237844
申请日：1999-01-27
申请人： Takashi Iwasa , Junzo Ishikawa
发明人： Takashi Iwasa , Junzo Ishikawa
IPC分类号： H01J102
CPC分类号： H01J1/304 , H01J2201/30457
摘要： A cold cathode element for emitting an electron on application of an electric field. The element includes a diamond carbon film having a half width Hw of a photoelectron spectrum of a C1S electron using an X-ray photoelectron spectroscopy, of 1.72 eV or more. The cold cathode element has the function of sufficiently emitting electrons even by applying a low voltage, and thus the element has high practical utility.
摘要翻译： 用于在施加电场时发射电子的冷阴极元件。 该元件包括具有1.72eV以上的具有C1S电子的光电子光谱的半峰宽度Hw的金刚石碳膜，其使用X射线光电子能谱。 冷阴极元件具有通过施加低电压而充分发射电子的功能，因此该元件具有很高的实用性。
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