公开(公告)号：US20110157596A1

公开(公告)日：2011-06-30

申请号：US13042672

申请日：2011-03-08

Applicant: Adam Wax ,  John W. Pyhtila

Inventor： Adam Wax ,  John W. Pyhtila

IPC: G01J3/45 ,  G01B9/02

CPC classification number: A61B5/0084 ,  A61B1/00165 ,  A61B1/00172 ,  A61B5/0066 ,  A61B5/0075 ,  G01B9/02043 ,  G01B9/02044 ,  G01B9/02084 ,  G01B9/02087 ,  G01B9/0209 ,  G01B9/02091 ,  G01J3/45 ,  G01N21/31 ,  G01N21/4795 ,  G01N2021/4704 ,  G01N2021/4709 ,  G01N2021/4735 ,  G01N2201/08

Abstract: Fourier domain a/LCI (faLCI) system and method which enables in vivo data acquisition at rapid rates using a single scan. Angle-resolved and depth-resolved spectra information is obtained with one scan. The reference arm can remain fixed with respect to the sample due to only one scan required. A reference signal and a reflected sample signal are cross-correlated and dispersed at a multitude of reflected angles off of the sample, thereby representing reflections from a multitude of points on the sample at the same time in parallel. Information about all depths of the sample at each of the multitude of different points on the sample can be obtained with one scan on the order of approximately 40 milliseconds. From the spatial, cross-correlated reference signal, structural (size) information can also be obtained using techniques that allow size information of scatterers to be obtained from angle-resolved data.

Abstract translation: 傅里叶域a / LCI（faLCI）系统和方法，使用单次扫描能够以快速的速率进行体内数据采集。 通过一次扫描获得角度分辨和深度分辨的光谱信息。 由于仅需要一次扫描，参考臂可以相对于样品保持固定。 参考信号和反射的采样信号以相对于样本的多个反射角度相互相关并分散，从而同时并行地表示来自样品上的多个点的反射。 可以通过大约40毫秒量级的一次扫描获得关于样本上多个不同点的每个样本的所有深度的信息。 从空间相互关联的参考信号，也可以使用允许从角度分辨数据获得散射体的尺寸信息的技术来获得结构（尺寸）信息。

公开(公告)号：US07903252B2

公开(公告)日：2011-03-08

申请号：US11845580

申请日：2007-08-27

Applicant: David W. Larsen ,  Zhi Xu

Inventor： David W. Larsen ,  Zhi Xu

IPC: G01B9/02 ,  G01J3/45 ,  G01N21/00

CPC classification number: G01J3/02 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/42 ,  G01J3/45 ,  G01J2003/425 ,  G01N21/274 ,  G01N21/31 ,  G01N2021/3137 ,  G01N2201/0227 ,  G01N2201/127

Abstract: Increasing signal to noise ratio in optical spectra obtained by spectrophotometers. An interferometer introduces interference effects into a source light beam. A dual beam configuration splits the source beam having the interference effects into a reference beam and a sample beam. The reference beam interacts with a reference substance and is detected by a reference detector. The sample beam interacts with a sample substance and is detected by a sample detector. An optical spectra of the sample is based on the difference between the detected reference beam and the detected sample beam.

Abstract translation: 通过分光光度计获得的光谱增加信噪比。 干涉仪将干扰效应引入源光束。 双光束配置将具有干涉效应的源光束分解成参考光束和样本光束。 参考光束与参考物质相互作用，并由参考检测器检测。 样品束与样品物质相互作用，并由样品检测器检测。 样品的光谱基于检测到的参考光束和检测到的样品光束之间的差异。

公开(公告)号：US20110043815A1

公开(公告)日：2011-02-24

申请号：US12664887

申请日：2008-06-26

Applicant: Philippe Giaccari ,  Jerome Genest ,  Pierre Tremblay

Inventor： Philippe Giaccari ,  Jerome Genest ,  Pierre Tremblay

IPC: G01J3/45 ,  G02B27/00

CPC classification number: G01J3/45 ,  G01J3/453 ,  G01J3/457 ,  G01J9/04

Abstract: There is provided a method for referencing and correcting the beating spectrum generated by the interference of the components of a frequency comb source. The proposed method allows monitoring of variations of a mapping between the source and the beating replica. This can then be used to compensate small variations of the source in Fourier transform spectroscopy or in any other interferometry application in order to overcome the accuracy and measurement time limitations of the prior art. Constraints on source stability are consequently reduced.

Abstract translation: 提供了一种用于参考和校正由频率梳源的分量的干扰产生的拍频的方法。 所提出的方法允许监视源和跳动副本之间的映射的变化。 这可以用于补偿傅立叶变换光谱学或任何其他干涉测量应用中源的小变化，以克服现有技术的精度和测量时间限制。 因此，源稳定性的限制因此减少。

公开(公告)号：US20110032530A1

公开(公告)日：2011-02-10

申请号：US12852492

申请日：2010-08-08

Applicant: Christophe Buisset ,  Denis Simeoni ,  Patrick Astruc ,  Cyril Degrelle

Inventor： Christophe Buisset ,  Denis Simeoni ,  Patrick Astruc ,  Cyril Degrelle

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/4531

Abstract: A static interferometer comprises an entrance pupil, a splitter plate, a first mirror and a second mirror which are arranged in such a way that light beams originating from a collimated source are divided on the splitter plate, reflect on each of the mirrors and recombine while interfering at the output of the interferometer. The interferometer comprises a prismatic plate of index n comprising a variable thickness ej, the first beam passing through the prismatic plate before reflecting on a reflecting surface of the first mirror, the reflecting surface comprising a plurality of zones, each zone j being situated at a mean distance Δj from a reference plane. The reference plane being perpendicular to an optical axis and corresponding to a position of a plane mirror for which the optical path difference between the two interfering reflected beams is zero, each thickness ej being substantially equal to Δj·n/(n−1).

Abstract translation: 静态干涉仪包括入射光瞳，分离板，第一反射镜和第二反射镜，这些方式使得源自准直光源的光束在分离板上分开，在每个反射镜上反射并重新组合，同时 干扰了干涉仪的输出。 干涉仪包括索引n的棱镜板，其包括可变厚度ej，第一光束在第一反射镜的反射表面上反射之前通过棱镜板，反射表面包括多个区域，每个区域j位于 平均距离＆Dgr; j从参考平面。 参考平面垂直于光轴并对应于两个干涉反射光束之间的光程差为零的平面镜的位置，每个厚度ej基本上等于＆Dgr; j·n /（n-1） ）。

公开(公告)号：US20110032529A1

公开(公告)日：2011-02-10

申请号：US12849046

申请日：2010-08-03

Applicant: Xiaoke WAN ,  Jian Ge

Inventor： Xiaoke WAN ,  Jian Ge

IPC: G01J3/45 ,  G01J1/10

CPC classification number: G01J3/02 ,  G01B9/02051 ,  G01J3/0259 ,  G01J3/28 ,  G01J3/45 ,  G01J3/4531 ,  G01J3/4532 ,  G01J2003/2866

Abstract: Calibration of an arbitrary spectrometer can use a stable monolithic interferometer as a wavelength calibration standard. Light from a polychromatic light source is input to the monolithic interferometer where it undergoes interference based on the optical path difference (OPD) of the interferometer. The resulting wavelength-modulated output beam is analyzed by a reference spectrometer to generate reference data. The output beam from the interferometer can be provided to an arbitrary spectral instrument. Wavelength calibration of the arbitrary spectral instrument may then be performed based on a comparison of the spectral instrument output with the reference data. By appropriate choice of materials for the monolithic interferometer, a highly stable structure can be fabricated that has a wide field and/or is thermally compensated. Because the interferometer is stable, the one-time generated reference data can be used over an extended period of time without re-characterization.

Abstract translation: 任意光谱仪的校准可以使用稳定的单片干涉仪作为波长校准标准。 来自多色光源的光被输入到单片干涉仪，其中它基于干涉仪的光程差（OPD）而受到干扰。 所得到的波长调制输出光束由参考光谱仪分析以产生参考数据。 来自干涉仪的输出光束可以提供给任意的光谱仪器。 然后可以基于光谱仪器输出与参考数据的比较来执行任意光谱仪器的波长校准。 通过适当选择用于单片干涉仪的材料，可以制造具有宽场和/或热补偿的高度稳定的结构。 因为干涉仪是稳定的，所以一次性生成的参考数据可以在延长的时间段内被使用，而无需重新表征。

公开(公告)号：US07720526B1

公开(公告)日：2010-05-18

申请号：US10770699

申请日：2004-02-03

Applicant: Mark D. Modell

Inventor： Mark D. Modell

IPC: A61B5/05 ,  G01J3/45 ,  G01B9/02 ,  G01B11/02

CPC classification number: G01B9/02097 ,  A61B5/0066 ,  A61B5/6852 ,  G01B9/02091 ,  G01J3/45

Abstract: Light from a tissue sample undergoes self-interference on a detector. A low coherence light source may illuminate the sample, and an interferometer receives light from the sample, divides and directs the received light along two paths, phase-delaying one and recombining the beams on a detector to form a signal. A processor coordinated with the phase delay and optionally with spatial scanning or detector array addresses, converts the signal to a tomographic image. Using self-interfering radiation from the sample, rather than interference of a reference source and a return signal, permits imaging with light naturally emitted by the sample, or with wavelength-shifted, delayed or induced light signals, allowing new diagnostic imaging modalities. The processor may create images in registry from different (for example, close but separable) wavelengths. Systems may also operate without an illumination source or may apply other stimuli to evoke emission from the sample.

Abstract translation: 来自组织样本的光在检测器上经受自身干扰。 低相干光源可以照亮样品，并且干涉仪从样品接收光，沿着两条路径分割并引导接收的光，相位延迟一个并在检测器上重组光束以形成信号。 与相位延迟协调的处理器和可选地具有空间扫描或检测器阵列地址的处理器将信号转换为断层图像。 使用来自样品的自干扰辐射，而不是参考源和返回信号的干扰，允许用样品自然发射的光或波长漂移，延迟或感应的光信号进行成像，从而允许新的诊断成像模式。 处理器可以从不同的（例如，可接近但可分离的）波长创建注册表中的图像。 系统也可以在没有照明源的情况下操作，或者可以施加其他刺激来引起来自样品的发射。

公开(公告)号：US07684046B2

公开(公告)日：2010-03-23

申请号：US11973599

申请日：2007-10-08

Applicant: Robert J. Rafac

Inventor： Robert J. Rafac

IPC: G01B9/02 ,  G01J3/45 ,  H01S3/13

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.

Abstract translation: 公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽测量仪方法和装置，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数指示 从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用第一输出和第二输出的实际带宽计算装置作为使用光带宽监视器特有的预定校准变量的多变量方程的一部分来计算实际带宽参数。 实际带宽参数可以包括在从激光器发射的光的光谱的全宽度内的最大值的百分之几处的光谱全宽度，或包含光谱的全光谱的一定百分比的能量的光谱上的两个点之间的宽度 从激光发射的光谱。 该装置和方法可以在激光光刻光源和/或集成电路光刻工具中实现。

公开(公告)号：US20090236528A1

公开(公告)日：2009-09-24

申请号：US12361664

申请日：2009-01-29

Applicant: Isaac Shpantzer ,  Jacob Khurgin ,  Arkady Kaplan ,  Pak Shing Cho ,  Yaakov Achiam

Inventor： Isaac Shpantzer ,  Jacob Khurgin ,  Arkady Kaplan ,  Pak Shing Cho ,  Yaakov Achiam

IPC: G01J5/02 ,  G01J3/44

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0218 ,  G01J3/45 ,  G01J9/04 ,  G01N21/171 ,  G01N21/636 ,  G01N21/65 ,  G01N2021/1793 ,  G01N2021/655 ,  G02B26/06

Abstract: A photo-thermal, interferometric spectroscopy system is disclosed that provides information about a chemical, such as explosives and the like, at a remote location. It may be used for solid residue detection on a surface. The system includes a novel light detector system with a matrix of optical elements focusing portions of a received light beam on input waveguides of an optical combiner. The combiner adjusts the phases of the received beam portions and combines them together to maximize the intensity of an output beam. The output beam is detected by a detector, and information about at least one of, absorption spectrum and concentration of the chemical is recovered. In the preferred embodiment the detector is a coherent detector based on 90-degrees optical hybrid.

Abstract translation: 公开了一种光热干涉光谱系统，其在远程位置提供关于化学物质（例如爆炸物等）的信息。 它可用于表面上的固体残留物检测。 该系统包括具有光学元件矩阵的新型光检测器系统，将接收光束的部分聚焦在光合并器的输入波导上。 组合器调整接收的光束部分的相位并将它们组合在一起以最大化输出光束的强度。 输出光束由检测器检测，并且回收关于化学物质的吸收光谱和浓度中的至少一个的信息。 在优选实施例中，检测器是基于90度光学混合的相干检测器。

公开(公告)号：US07593112B2

公开(公告)日：2009-09-22

申请号：US11542465

申请日：2006-10-02

Applicant: George G. He ,  Diane E. Deterline

Inventor： George G. He ,  Diane E. Deterline

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/45 ,  G01J3/02 ,  G01J3/0264

Abstract: A system for comparative interferogram spectrometry includes an interferometer configured to generate interferograms from incident radiation from a target region, an interferogram database containing stored interferograms, and a processing subsystem configured to receive the generated interferograms and compare the received interferograms to the stored interferograms.

Abstract translation: 用于比较干涉图谱的系统包括：干涉仪，被配置为从目标区域的入射辐射产生干涉图，包含存储的干涉图的干涉图数据库;以及处理子系统，被配置为接收生成的干涉图并将接收的干涉图与所存储的干涉图进行比较。

公开(公告)号：US20080252897A1

公开(公告)日：2008-10-16

申请号：US11596141

申请日：2005-05-17

Applicant: Borkur Arnvidarson ,  Hans Larsen

Inventor： Borkur Arnvidarson ,  Hans Larsen

IPC: G01J3/45 ,  G01B9/02

CPC classification number: G01J3/45 ,  G01J3/0202 ,  G01J3/453 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/3577 ,  G01N21/359 ,  G01N2021/3595 ,  G01N2201/0691 ,  G01N2201/129

Abstract: The present invention offers an alternative strategy for the correlation of interference information to chemical and/or physical properties of a sample. This strategy can be implemented in a method and a system, which offer substantial technical and commercial advantages over state of the art techniques based on interference spectroscopy. The invention further provides a method for standardizing an interferometer, as well as a method and a system using the standardized

Abstract translation: 本发明提供了用于将干扰信息与样品的化学和/或物理性质相关的替代策略。 该策略可以在与基于干涉光谱技术的现有技术相比提供实质的技术和商业优势的方法和系统中实现。 本发明还提供了一种用于标准化干涉仪的方法，以及使用标准化的方法和系统