公开(公告)号：US5567880A

公开(公告)日：1996-10-22

申请号：US60832

申请日：1993-05-14

Applicant: Yoshihiro Yokota ,  Shotaro Naito ,  Toshihiko Suzuki ,  Akira Koide

Inventor： Yoshihiro Yokota ,  Shotaro Naito ,  Toshihiko Suzuki ,  Akira Koide

IPC: G01P15/12 ,  G01P15/125 ,  G01P15/18 ,  H01L27/20 ,  G01P15/08

CPC classification number: H01L27/20 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/084 ,  G01P2015/0842

Abstract: A semiconductor accelerometer includes a mass portion formed at a center of a silicon plate, a frame portion formed around the circumference of the silicon plate so as to surround the mass portion and a diaphragm portion formed in the silicon plate between the mass portion and the frame portion so as to bridge the mass portion with the frame portion, one of major surfaces of the silicon plate serving as a common continuous major surface for the mass portion, frame portion and diaphragm portion. Piezoresistance elements are formed on the common continuous major surface at the diaphraqm portion and an additional Au film is formed on the common continuous major surface at the mass portion. The additional Au film constitutes in combination with the mass portion a weight which responds to an acceleration acting thereon. The mass of the additional Au film is selected in such a manner that the center of gravity of the weight is located within an area in the mass portion having a depth corresponding to the thickness of the diaphragm portion.

Abstract translation: 半导体加速度计包括形成在硅板的中心的质量部分，围绕质量部分形成在硅板的周围的框架部分，以及形成在质量部分和框架之间的硅板中的膜部分 为了将质量部分与框架部分桥接，硅板的主表面之一用作质量部分，框架部分和隔膜部分的共同的连续主表面。 压电元件形成在引线部分的公共连续主表面上，并且在质量部分的公共连续主表面上形成附加的Au膜。 附加的Au膜与质量部分组合构成对作用在其上的加速度作出响应的重量。 选择附加Au膜的质量使得重量的重心位于质量部分中具有与膜部分的厚度相对应的深度的区域内。

公开(公告)号：US5559358A

公开(公告)日：1996-09-24

申请号：US247911

申请日：1994-05-23

Applicant: David W. Burns ,  Henry Guckel ,  James D. Zook

Inventor： David W. Burns ,  Henry Guckel ,  James D. Zook

IPC: G01D21/00 ,  G01J1/02 ,  G01J5/44 ,  G01K7/32 ,  G01K11/26 ,  G01L9/00 ,  G01P15/093 ,  G01P15/097 ,  G01P15/10 ,  G02B26/00 ,  G02B26/08 ,  H01L31/00 ,  H01L31/10 ,  H01L29/82

CPC classification number: H01L31/00 ,  G01J5/44 ,  G01L9/002 ,  G01P15/093 ,  G01P15/097 ,  G02B26/001 ,  G02B26/0833 ,  G01P2015/0828

Abstract: The present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance and in which such resonance is read optically. By coupling the microstructure to a surface or material of interest, a drive means will excite the flexible member into a characteristic resonance which when read optically gives indication of certain physical phenomena influencing the surface or material of interest. The microstructures of the present invention may be configured to self-resonate, as a so-called active device, under certain conditions. Many different physical phenomena may be quantified using the device of the present invention.

Abstract translation: 本发明涉及由半导体材料制成的微结构，并且具有被激发成各种谐振模式并且其中这种共振被光学读出的柔性元件。 通过将微结构耦合到感兴趣的表面或材料，驱动装置将使柔性构件激发成特征共振，其在光学读出时指示影响感兴趣的表面或材料的某些物理现象。 本发明的微结构可以被配置为在某些条件下作为所谓的有源器件自谐振。 可以使用本发明的装置量化许多不同的物理现象。

公开(公告)号：US5506454A

公开(公告)日：1996-04-09

申请号：US059069

申请日：1993-05-10

Applicant: Keiji Hanzawa ,  Tetsuo Matsukura ,  Hirokazu Fujita ,  Masayoshi Suzuki ,  Masahiro Matsumoto

Inventor： Keiji Hanzawa ,  Tetsuo Matsukura ,  Hirokazu Fujita ,  Masayoshi Suzuki ,  Masahiro Matsumoto

IPC: B60R21/01 ,  G01P15/04 ,  G01P15/125 ,  G01P21/00 ,  G01R31/00 ,  B60R21/08

CPC classification number: B60R21/0173 ,  B60R21/01 ,  G01P15/04 ,  G01P15/125 ,  G01P21/00 ,  G01R31/007 ,  G01P2015/0828

Abstract: An apparatus for diagnosing the characteristic of an acceleration sensor and a method for diagnosis thereof are disclosed. The acceleration sensor includes a movable electrode (or mass part) displaced in accordance with an acceleration and a fixed electrode disposed opposite to the movable electrode. In a diagnosis mode, a signal for diagnosis is applied to the fixed electrode so that an electrostatic force as a force corresponding to a predetermined acceleration is generated between the fixed electrode and the movable electrode. In the case where the acceleration sensor is sound, the movable electrode or mass part is normally displaced. A failure of the acceleration sensor, the deterioration thereof in performance, a change in characteristic thereof caused from the lapse of time, or the like is self-diagnosed by detecting a change in capacitance between the movable electrode and the fixed electrode upon generation of the diagnosis signal. The force corresponding to the predetermined acceleration may be an electromagnetic force or a mechanical oscillation based on a piezoelectric element.

Abstract translation: 公开了一种用于诊断加速度传感器的特性的装置及其诊断方法。 加速度传感器包括根据加速度移位的可移动电极（或质量部分）和与可动电极相对设置的固定电极。 在诊断模式中，用于诊断的信号被施加到固定电极，使得在固定电极和可动电极之间产生作为与预定加速度相对应的力的静电力。 在加速度传感器是声音的情况下，可移动电极或质量部分通常位移。 通过检测可动电极和固定电极之间的电容变化，可以自诊断加速度传感器的故障，其性能的劣化，由于时间的流失引起的特性变化等 诊断信号。 对应于预定加速度的力可以是基于压电元件的电磁力或机械振荡。

公开(公告)号：US5493470A

公开(公告)日：1996-02-20

申请号：US993096

申请日：1992-12-18

Applicant: Paul M. Zavracky ,  Richard H. Morrison, Jr.

Inventor： Paul M. Zavracky ,  Richard H. Morrison, Jr.

IPC: G01L9/04 ,  G01L9/00 ,  G01P15/08 ,  G01P15/12 ,  H01G7/00 ,  H01L27/02

CPC classification number: G01L9/0055 ,  G01L9/0042 ,  G01L9/0073 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  Y10T29/435

Abstract: The present invention relates to the fabrication of diaphragm pressure sensors utilizing silicon-on-insulator technology where recrystallized silicon forms a diaphragm which incorporates electronic devices used in monitoring pressure. The diaphragm is alternatively comprised of a silicon nitride having the necessary mechanical properties with a recrystallized silicon layer positioned thereon to provide sensor electronics.

公开(公告)号：US5490034A

公开(公告)日：1996-02-06

申请号：US27249

申请日：1993-03-05

Applicant: Paul M. Zavracky ,  Richard H. Morrison, Jr.

Inventor： Paul M. Zavracky ,  Richard H. Morrison, Jr.

IPC: G01L9/00 ,  G01P15/08 ,  G01P15/12 ,  H01G7/00

CPC classification number: G01L9/0055 ,  G01L9/0042 ,  G01L9/0073 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828 ,  Y10T29/43

Abstract: The present invention relates to the fabrication of diaphragm pressure sensors utilizing silicon-on-insulator technology where recrystallized silicon forms a diaphragm which may incorporate electronic devices used in monitoring pressure. The diaphragm is alternatively comprised of a silicon nitride having the necessary mechanical properties with a recrystallized silicon layer positioned thereon to provide sensor electronics.

公开(公告)号：US5476819A

公开(公告)日：1995-12-19

申请号：US251902

申请日：1994-06-01

Applicant: Keith O. Warren

Inventor： Keith O. Warren

IPC: G01P15/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L21/306 ,  H01L29/84 ,  H01L21/465

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0828

Abstract: An accelerometer is fabricated by forming a proofmass and at least one associated hinge in a silicon substrate through a variety of a etching and bonding processes is disclosed. The processes entail ion implantation and formation of an oxide support layer below the proofmass, integrally bonding two complementary proofmass and substrate structures together, and then removing the oxide support layer to leave the proofmass supported by the hinge within the body of silicon material. The proofmass may be electrically connected to a lead extending through an etched recess in one of the substrates, and the proofmass may be electrically isolated or separated from the substrates by an oxide layer and by a change in conductivity type of the semiconductor material wherein the hinge is structurally mounted to the substrates. In a bond and etch back process, the wafer is processed, sawed in half, and then bonded together again wherein the complementary halves are joined to obtain the finished accelerometer. As part of the bond and etch-back process, an anchor for bridging the silicon substrate to an oxide support substrate includes using a selective epitaxy or non-selective epitaxy process to grow the polysilicon anchors.

Abstract translation: 通过各种蚀刻和粘合工艺公开了通过在硅衬底中形成校样和至少一个相关联的铰链来制造加速度计。 这些过程需要离子注入和在校样下方形成氧化物载体层，将两个互补的校正材料和衬底结构整体地结合在一起，然后去除氧化物载体层，以将由硅材料体内的铰链支撑的校准物留下。 校样物可以电连接到延伸穿过其中一个衬底中的蚀刻凹槽的引线，并且校样物可以通过氧化物层与衬底电隔离或分离，并且通过半导体材料的导电类型的变化，其中铰链 结构上安装在基板上。 在接合和回蚀工艺中，将晶片加工成锯片，然后再次粘合在一起，其中互补的半部分连接以获得成品的加速度计。 作为粘结和回蚀工艺的一部分，用于将硅衬底桥接到氧化物支撑衬底的锚固件包括使用选择性外延或非选择性外延工艺来生长多晶硅锚定件。

公开(公告)号：US5396797A

公开(公告)日：1995-03-14

申请号：US987906

申请日：1992-12-08

Applicant: Rand H. Hulsing, II

Inventor： Rand H. Hulsing, II

IPC: F02G1/044 ,  F16L37/24 ,  G01C19/56 ,  G01C19/5719 ,  G01P15/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/18 ,  G01P9/04

CPC classification number: G01P15/18 ,  F02G1/044 ,  F02G1/0445 ,  F16L37/24 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/097 ,  G01P2015/0828

Abstract: A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes. In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration may be used. Each substrate includes three accelerometers that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes of the accelerometers of the first substrate are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes. Similarly, the sensing axes of the accelerometers of the second substrate are canted at an angle with respect to the plane of the second substrate away from the central portion thereof so that they lie along same three but oppositely directed axes. The sensing axes of the first and second substrates are aligned to prevent angular acceleration sensitivity.

公开(公告)号：US5391283A

公开(公告)日：1995-02-21

申请号：US985654

申请日：1992-12-07

Applicant: Satoshi Shimada ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Seiichi Ugai ,  Masayoshi Kaneyasu ,  Hiroshi Kuroiwa ,  Yoshihiro Yokota

Inventor： Satoshi Shimada ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Seiichi Ugai ,  Masayoshi Kaneyasu ,  Hiroshi Kuroiwa ,  Yoshihiro Yokota

IPC: G01N27/00 ,  G01D5/241 ,  G01D18/00 ,  G01N27/22 ,  G01P15/125 ,  G01P21/00 ,  G01L1/14 ,  G01P15/08

CPC classification number: G01D5/2417 ,  G01D18/006 ,  G01P21/00 ,  G01P2015/0828

Abstract: A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.

Abstract translation: 用于检测作为电量的物理量的检测器具有检测部分，用于刺激检测部分的部分和信号处理部分，其中经由刺激部分从信号处理部分向检测部分提供校准信号， 为了测量检测部分的特定响应，由此根据响应的变化量执行检测器的特性的自校准和校正。

公开(公告)号：US5387819A

公开(公告)日：1995-02-07

申请号：US852662

申请日：1992-03-17

Applicant: Sadayasu Ueno ,  Seikou Suzuki ,  Hirokazu Fujita ,  Kazuo Sato

Inventor： Sadayasu Ueno ,  Seikou Suzuki ,  Hirokazu Fujita ,  Kazuo Sato

IPC: B60R21/16 ,  B60R21/01 ,  G01P15/00 ,  G01P15/04 ,  G01P15/125 ,  G01P15/13 ,  G01P21/00 ,  G01R31/00 ,  B60R21/08

CPC classification number: B60R21/0134 ,  G01P15/04 ,  G01P15/125 ,  G01P21/00 ,  G01R31/007 ,  G01P2015/0828

Abstract: A crash detection apparatus of an air bag system comprises a detection unit for detecting acceleration caused therein by an automobile and outputting electric signals corresponding to the acceleration, a discrimination unit for discriminating, from the signals from the detection unit, a crash signal which is outputted on the basis of the acceleration caused by crash of the automobile, the crash signal being inputted into an inflator to inflate an air bag. The detection unit is a capacitance type semiconductor detector comprising a pair of fixed electrodes and a cantilevered movable electrode disposed between the fixed electrodes and fixed at an end thereof, and a servo control unit is electrically connected to the detection unit so as to form a negative feedback loop, of a detection signal. The servo control unit serves for applying electric energy temporarily to the detection unit to cause electrostatic force in the detection means for restricting movement of the movable electrode caused by acceleration at an initial position thereof. A diagnostic unit is provided for diagnosing the crash detection apparatus on whether or not the crash detection apparatus functions correctly, the diagnostic unit being electrically connected to the servo control unit to input a diagnostic signal to the negative feedback loop thereby to apply electrostatic force for diagnosis between the fixed electrode and the movable electrode.

Abstract translation: 气囊系统的碰撞检测装置包括：检测单元，用于检测由汽车引起的加速度，并输出与加速度对应的电信号;识别单元，用于从检测单元的信号中识别输出的碰撞信号 基于由汽车碰撞引起的加速度，将碰撞信号输入到充气机中以使气囊膨胀。 检测单元是电容型半导体检测器，其包括一对固定电极和设置在固定电极之间并固定在其一端的悬臂可动电极，并且伺服控制单元电连接到检测单元以形成负 反馈回路，检测信号。 伺服控制单元用于临时向检测单元施加电能，使得检测装置中的静电力限制在其初始位置由加速度引起的可移动电极的移动。 提供诊断单元，用于诊断碰撞检测装置关于碰撞检测装置是否正常工作，诊断单元电连接到伺服控制单元以将诊断信号输入到负反馈环路，从而施加用于诊断的静电力 在固定电极和可动电极之间。

公开(公告)号：US5381300A

公开(公告)日：1995-01-10

申请号：US20079

申请日：1993-02-19

Applicant: Isabelle Thomas ,  Pierre O. LeFort ,  Christophe Legoux

Inventor： Isabelle Thomas ,  Pierre O. LeFort ,  Christophe Legoux

IPC: G01L9/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01L9/0073 ,  G01P15/0802 ,  G01P2015/0828

Abstract: A capacitive micro-sensor includes a sandwich of three silicon wafers, a peripheral stripe of each surface of the central plate being assembled to a corresponding stripe of an opposing external plate through an insulating layer. At least one of the external plates forms a first electrode, the central plate forms a second electrode and at least one portion of the central plate forms a variable capacity with at least one of the external layers. At least one of the insulating layers is formed by a sandwich of a first insulating layer, a conductive layer and a second insulating layer, the conductive layer being associated with connection means.

Abstract translation: 电容微传感器包括三个硅晶片的夹层，中心板的每个表面的周边条被组装成通过绝缘层的相对的外部板的对应条纹。 外部板中的至少一个形成第一电极，中心板形成第二电极，并且中心板的至少一部分与至少一个外部层形成可变容量。 绝缘层中的至少一个由第一绝缘层，导电层和第二绝缘层的夹层形成，导电层与连接装置相关联。