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公开(公告)号：US20080290041A1
公开(公告)日：2008-11-27
申请号：US12126920
申请日：2008-05-25
Applicant: Daniel O. Clark , Robbert M. Vermeulen , Youssef A. Loldj , Belynda Flippo , Mehran Moalem , Shaun W. Crawford
Inventor： Daniel O. Clark , Robbert M. Vermeulen , Youssef A. Loldj , Belynda Flippo , Mehran Moalem , Shaun W. Crawford
IPC: G05B11/00
Abstract: A method of operating an electronic device manufacturing system is provided which includes the steps of receiving information with an interface, wherein the information relates to an abatement system, and shutting down a process tool and an abatement tool in response to the information.
Abstract translation: 提供了一种操作电子设备制造系统的方法，其包括以界面接收信息的步骤，其中所述信息涉及减排系统，以及响应于所述信息关闭处理工具和减排工具。
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22.发明申请METHODS AND APPARATUS FOR ASSEMBLING AND OPERATING ELECTRONIC DEVICE MANUFACTURING SYSTEMS 失效组装和操作电子设备制造系统的方法和装置公开(公告)号：US20080289167A1
公开(公告)日：2008-11-27
申请号：US12126922
申请日：2008-05-25
Applicant: Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , Jay J. Jung , Roger M. Johnson , Youssef A. Loldj , James L. Smith
Inventor： Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , Jay J. Jung , Roger M. Johnson , Youssef A. Loldj , James L. Smith
IPC: B23P11/00
CPC classification number: G05B19/4184 , G05B2219/31386 , G05B2219/45026 , Y02P90/04 , Y02P90/14 , Y10T29/49826 , Y10T29/53048
Abstract: A method for operating one or more electronic device manufacturing systems is provided, including the steps 1) performing a series of electronic device manufacturing process steps with a process tool, wherein the process tool produces effluent as a byproduct of performing the series of process steps; 2) abating the effluent with an abatement tool; 3) supplying an abatement resource to the abatement tool from a first abatement resource supply; 4) changing an abatement resource supply from the first abatement resource supply to a second abatement resource supply, wherein changing the abatement resource supply comprises: i) interrupting a flow of the abatement resource from the first abatement resource supply; and ii) beginning a flow of the abatement resource from the second abatement resource supply; and 5) continuing to perform the series of process steps with the process tool, while changing, and after changing, the abatement resource supply.
Abstract translation: 提供了一种用于操作一个或多个电子设备制造系统的方法，包括以下步骤：1）使用工艺工具执行一系列电子设备制造工艺步骤，其中所述工艺工具产生流出物作为执行所述一系列工艺步骤的副产品; 2）用减排工具减轻废水; 3）从第一减排资源提供给减排工具的减排资源; 4）将减排资源供应从第一减排资源供应改为第二减排资源供应，其中改变减排资源供应包括：i）中断来自第一减排资源供应的减排资源的流动; 和ii）从第二减排资源供应开始减排资源的流动; 5）在改变和改变减排资源供应的同时，继续与流程工具一起执行一系列流程步骤。
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23.发明授权Method for carbon monoxide reduction during thermal/wet abatement of organic compounds 失效在有机化合物的热/湿减轻过程中一氧化碳还原的方法公开(公告)号：US06551381B2
公开(公告)日：2003-04-22
申请号：US09911315
申请日：2001-07-23
Applicant: Belynda G. Flippo , Robbert Vermuellen , Daniel O. Clark
Inventor： Belynda G. Flippo , Robbert Vermuellen , Daniel O. Clark
IPC: B01D5000
CPC classification number: B01D53/0431 , B01D53/0438 , B01D53/0446 , B01D53/047 , B01D53/229 , B01D53/68 , B01D2253/202 , B01D2256/12 , B01D2257/502 , B01D2258/0216
Abstract: A method and system for retrofitting an integrated scrubber to provide maximum oxygen content in a controlled decomposition oxidation (CDO) abatement process. The system includes a thermal/wet integrated scrubber, and a compressed air supply for supplying air to an oxygen separation device that separates the air into a nitrogen-enriched component and an oxygen-enriched component. The oxygen separation device utilizes a ceramic oxide or polymeric material to separate from the supplied air an oxygen-enriched component for introduction into the integrated scrubber. The integrated scrubber is equipped with a mechanical scraping device for continuous or intermittent removal of combustion deposits formed during the controlled decomposition oxidation process.
Abstract translation: 用于改进综合洗涤器以在受控分解氧化（CDO）消除过程中提供最大氧含量的方法和系统。 该系统包括热/湿综合洗涤器和用于将空气供给到将空气分离成富氮组分和富氧组分的氧分离装置的压缩空气供应。 氧气分离装置利用陶瓷氧化物或聚合物材料与供应的空气分离出用于引入综合洗涤器的富氧组分。 集成洗涤器配备有用于连续或间歇地去除在受控分解氧化过程中形成的燃烧沉积物的机械刮擦装置。
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公开(公告)号：US06511641B2
公开(公告)日：2003-01-28
申请号：US09892729
申请日：2001-06-27
Applicant: Timothy L. Herman , Jack Ellis , Floris Y. Tsang , Daniel O. Clark , Belynda G. Flippo , David Inori , Keith Kaarup , Mark Morgenlaender , Aaron Mao
Inventor： Timothy L. Herman , Jack Ellis , Floris Y. Tsang , Daniel O. Clark , Belynda G. Flippo , David Inori , Keith Kaarup , Mark Morgenlaender , Aaron Mao
IPC: B01D5356
CPC classification number: B01D47/06 , B01D53/56 , B01D53/74 , B01D53/75 , F23G7/061 , F23J15/022 , F23J15/04 , F23J2217/105 , F23J2219/40
Abstract: An apparatus and method are provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture within a reaction chamber. The reaction chamber is heated by heating elements and has orifices through which cool or heated air enters into the central reaction chamber. A process is also provided whereby additional gases are added to the gaseous stream preferably within the temperature range of 650 C-950 C which minimizes or alleviates the production of NOx.
Abstract translation: 提供了一种用于处理气流中的污染物的装置和方法。 该装置包括用于将气流与用于混合物的反应室内的其它氧化和惰性气体混合的管状入口。 反应室由加热元件加热，并具有通过冷却或加热空气进入中央反应室的孔口。 还提供了一种方法，其中优选在650C-950℃的温度范围内将额外的气体加入到气流中，其最小化或减轻NOx的产生。
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公开(公告)号：US5202023A
公开(公告)日：1993-04-13
申请号：US908905
申请日：1992-07-02
Applicant: Johnny L. Trimmer , George E. Mahley, III , Stephen A. Dunning , Daniel O. Clark
Inventor： Johnny L. Trimmer , George E. Mahley, III , Stephen A. Dunning , Daniel O. Clark
CPC classification number: B01D53/22 , B01D63/02 , B01D63/024 , B01D63/046 , B01D2313/42
Abstract: The present invention is a fluid separation module having improved permeate flow characteristics and improved space/volume requirements. Such modules comprise a hollow fiber bundle, a first and optional second tubesheet, an optional casing, a feed inlet, a permeate outlet, and a non-permeate outlet. The module is coiled, curved or bent into a useful non-linear shape which reduces the space requirements for the module essentially without diminishing the effectiveness of the fluid separation. The feed fluid is introduced to the module either in a boreside or a shellside manner. Coil, french horn, spiral or U-shaped configuration or combinations thereof are useful.
Abstract translation: 本发明是具有改善的渗透流特性和改进的空间/体积要求的流体分离模块。 这样的模块包括中空纤维束，第一和任选的第二管板，可选的壳体，进料入口，渗透物出口和非渗透物出口。 模块被卷绕，弯曲或弯曲成有用的非线性形状，其基本上减少了模块的空间要求，而不降低流体分离的有效性。 将进料流体以钻孔或壳体方式引入模块。 线圈，法国喇叭，螺旋或U形配置或其组合是有用的。
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Patent Agency Ranking26.发明授权
公开(公告)号：US4664990A
公开(公告)日：1987-05-12
申请号：US843544
申请日：1986-03-25
Applicant: Daniel O. Clark , Floris Y. Tsang , Paul A. Damrow
Inventor： Daniel O. Clark , Floris Y. Tsang , Paul A. Damrow
CPC classification number: H01M10/3909 , C03C3/064 , Y10T29/49108
Abstract: Several advantages as to ease of cell fabrication, maximum cell size, fiber breakage, tubesheet tightness, resistance to tubesheet deformation in prolonged service, safety, etc., can be realized by using as the tubesheet in a hollow fiber type battery cell one which is elongated in shape, has a substantially smaller diameter than the fiber "bundle" depending from it and in which the fiber ends passing through it are closely packed.
Abstract translation: 可以通过在中空纤维型电池单元中使用管板来实现电池制造的容易性，最大电池尺寸，纤维断裂，管板密封性，长期使用中的管板变形的耐受性，安全性等的几个优点， 细长的形状，具有与纤维“束”相比基本上更小的直径，并且其中通过它的纤维末端被紧密地包装。
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27.发明授权Methods and apparatus for assembling and operating electronic device manufacturing systems 失效组装和操作电子设备制造系统的方法和装置公开(公告)号：US08455368B2
公开(公告)日：2013-06-04
申请号：US12126922
申请日：2008-05-25
Applicant: Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , Jay J. Jung , Roger M. Johnson , Youssef A. Loldj , James L. Smith
Inventor： Phil Chandler , Daniel O. Clark , Robbert M. Vermeulen , Jay J. Jung , Roger M. Johnson , Youssef A. Loldj , James L. Smith
IPC: H01L21/00
CPC classification number: G05B19/4184 , G05B2219/31386 , G05B2219/45026 , Y02P90/04 , Y02P90/14 , Y10T29/49826 , Y10T29/53048
Abstract: A method for operating one or more electronic device manufacturing systems is provided, including the steps 1) performing a series of electronic device manufacturing process steps with a process tool, wherein the process tool produces effluent as a byproduct of performing the series of process steps; 2) abating the effluent with an abatement tool; 3) supplying an abatement resource to the abatement tool from a first abatement resource supply; 4) changing an abatement resource supply from the first abatement resource supply to a second abatement resource supply, wherein changing the abatement resource supply comprises: i) interrupting a flow of the abatement resource from the first abatement resource supply; and ii) beginning a flow of the abatement resource from the second abatement resource supply; and 5) continuing to perform the series of process steps with the process tool, while changing, and after changing, the abatement resource supply.
Abstract translation: 提供了一种用于操作一个或多个电子设备制造系统的方法，包括以下步骤：1）使用工艺工具执行一系列电子设备制造工艺步骤，其中所述工艺工具产生流出物作为执行所述一系列工艺步骤的副产品; 2）用减排工具减轻废水; 3）从第一减排资源提供给减排工具的减排资源; 4）将减排资源供应从第一减排资源供应改为第二减排资源供应，其中改变减排资源供应包括：i）中断来自第一减排资源供应的减排资源的流动; 和ii）从第二减排资源供应开始减排资源的流动; 5）在改变和改变减排资源供应的同时，继续与流程工具一起执行一系列流程步骤。
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公开(公告)号：US08095240B2
公开(公告)日：2012-01-10
申请号：US12257888
申请日：2008-10-24
Applicant: Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
Inventor： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
CPC classification number: F23G5/50 , B01D2258/0216 , F23G7/065 , F23K5/005 , F23N5/08 , F23N5/242 , F23N2027/02 , F23N2027/04 , F23N2029/02 , F23N2031/08 , F23N2031/18
Abstract: A flame sensor apparatus for use with a flame heated thermal abatement reactor is provided, including a flame sensor adapted to sense a flame within the thermal abatement reactor; and a shutter adapted to selectively block the transmission of radiation from the flame to the flame sensor.
Abstract translation: 提供了一种与火焰加热的热消除反应器一起使用的火焰传感器装置，其包括适于感测热消除反应器内的火焰的火焰传感器; 以及适于选择性地阻挡从火焰到火焰传感器的辐射传输的快门。
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公开(公告)号：US20100192773A1
公开(公告)日：2010-08-05
申请号：US12696808
申请日：2010-01-29
Applicant: Daniel O. Clark , Colin John Dickinson , Jay J. Jung , Daniel Stephan Brown , Mehran Moalem , Frank F. Hooshdaran , Morteza Farnia , Barry Page , Gary Sypherd , Jonathan Dahm , Phil Chandler
Inventor： Daniel O. Clark , Colin John Dickinson , Jay J. Jung , Daniel Stephan Brown , Mehran Moalem , Frank F. Hooshdaran , Morteza Farnia , Barry Page , Gary Sypherd , Jonathan Dahm , Phil Chandler
CPC classification number: B01D47/027 , B01D47/06 , B01D53/185 , B01D53/40 , B01D53/78 , B01D2251/604 , B01D2251/80 , B01D2258/0216
Abstract: Embodiments of an abatement apparatus are disclosed herein. In some embodiments, an abatement apparatus may include a scrubber configured to receive an effluent stream from a process chamber and further configured to remove first particles from the effluent stream; a scrubber conduit coupled to the scrubber to receive the effluent stream therefrom and configured to remove second particles from the effluent stream, the scrubber conduit having one or more inlets configured to provide a fluid to sufficiently wet an interior surface of the scrubber conduit to trap the second particles thereon and to wash the second particles therealong; and a central scrubber coupled to the scrubber via the scrubber conduit. In some embodiments, the scrubber conduit is downward sloping from the scrubber to the central scrubber. In some embodiments, a plurality of scrubbers may be coupled to the central scrubber via a plurality of scrubber conduits.
Abstract translation: 减轻装置的实施例在此公开。 在一些实施例中，减排装置可以包括洗涤器，其构造成从处理室接收流出物流，并进一步构造成从排出物流中除去第一颗粒; 洗涤器管道，其耦合到洗涤器以接收来自其的流出物流，并被配置为从流出物流中除去第二颗粒，洗涤器管道具有一个或多个入口，其配置成提供流体以充分地润湿洗涤器管道的内表面， 第二颗粒在其上并在其上洗涤第二颗粒; 以及通过洗涤器管道耦合到洗涤器的中央洗涤器。 在一些实施例中，洗涤器导管从洗涤器向下倾斜到中央洗涤器。 在一些实施例中，多个洗涤器可以经由多个洗涤器管道耦合到中央洗涤器。
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30.发明申请METHODS AND APPARATUS FOR ABATING ELECTRONIC DEVICE MANUFACTURING PROCESS EFFLUENT 审中-公开电子设备制造工艺流程的方法和装置公开(公告)号：US20100008838A1
公开(公告)日：2010-01-14
申请号：US12500257
申请日：2009-07-09
Applicant: Allen Fox , Daniel O. Clark , Frank F. Hooshdaran , Belynda Flippo
Inventor： Allen Fox , Daniel O. Clark , Frank F. Hooshdaran , Belynda Flippo
CPC classification number: G05D21/02 , B01D53/005 , B01D53/68 , B01D2251/102 , B01D2251/202 , B01D2251/208 , B01D2257/108 , B01D2257/11 , B01D2257/2027 , B01D2257/204 , B01D2257/2047 , B01D2257/2066 , B01D2257/706 , B01D2258/0216
Abstract: A thermal abatement system is provided, including: a thermal abatement reactor; an inlet in fluid communication with the reactor; a process chamber in fluid communication with the inlet; a first sheathing fluid source in fluid communication with the inlet; a first flow control device, adapted to regulate a flow of a first sheathing fluid from the first sheathing fluid source; and a controller, in signal communication with the first flow control device, adapted to regulate the sheathing fluid by operating the first flow control device; wherein the inlet is adapted to receive an effluent stream from the process chamber and the first sheathing fluid from the first sheathing fluid source, to sheathe the effluent stream with the first sheathing fluid to form a sheathed effluent stream, and to introduce the sheathed effluent stream into the reactor.
Abstract translation: 提供了一种减热系统，包括：热消除反应器; 与反应器流体连通的入口; 与入口流体连通的处理室; 与入口流体连通的第一护套流体源; 第一流量控制装置，适于调节来自第一护套流体源的第一护套流体的流动; 以及与第一流量控制装置进行信号通信的控制器，适于通过操作第一流量控制装置来调节护套流体; 其中所述入口适于接收来自所述处理室的流出物流和来自所述第一护套流体源的所述第一护套流体，以将所述流出物流与所述第一护套流体包裹以形成护套流出物流，并且将所述护套流出物流 进入反应堆。
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