公开(公告)号：US20230093910A1

公开(公告)日：2023-03-30

申请号：US17950929

申请日：2022-09-22

Applicant: ENTEGRIS, INC.

Inventor： Carlo Waldfried

IPC: A61L31/02 ,  A61L15/18 ,  A61L17/00 ,  A61L27/04 ,  A61L29/02 ,  H01L21/67 ,  B33Y40/20 ,  B33Y80/00 ,  C23C8/08

Abstract: Some embodiments relate to additive manufactured articles having passivated surfaces and related methods. The methods may comprise forming a three-dimensional (3D) article by additive manufacturing to obtain an additive manufactured 3D article comprising a magnesium component. The method may further comprise exposing the additive manufactured 3D article to a reactive gas phase comprising a fluorine component. The fluorine component from the reactive gas phase may react with the magnesium component of the additive manufactured 3D article to form a passivation layer at and below a surface of the additive manufacture 3D article.

公开(公告)号：US20190067069A1

公开(公告)日：2019-02-28

申请号：US16073648

申请日：2017-02-02

Applicant: ENTEGRIS, Inc.

Inventor： John Michael Glasko ,  I-Kuan Lin ,  Carlo Waldfried

IPC: H01L21/683

Abstract: An electrostatic chuck with a generally non-arcuate top surface shaped protrusions that has edge surfaces similar to a portion of a ellipse. The structure of the protrusions leads to the reduction of particulate material generated by interaction between the supported substrate and chuck. Reduced levels of scratching, abrasion, wear and particulate generation are achieved by improved smoothing and flattening of the protrusion surface.

公开(公告)号：US20240344195A1

公开(公告)日：2024-10-17

申请号：US18751650

申请日：2024-06-24

Applicant: ENTEGRIS, INC.

Inventor： Carlo Waldfried ,  Stephen Longo

IPC: C23C16/40 ,  C04B35/488 ,  C04B35/515 ,  C04B35/553 ,  C04B35/622 ,  C23C16/56

CPC classification number: C23C16/405 ,  C04B35/488 ,  C04B35/5156 ,  C04B35/553 ,  C04B35/62222 ,  C23C16/56 ,  C04B2235/3244 ,  C04B2235/445

Abstract: Described are coatings that contain of fluorinated yttrium oxide and a metal oxide; methods of preparing these coatings; substrates, surfaces, equipment, and components of equipment that include a coating that contains a combination of fluorinated yttrium oxide and a metal oxide; and methods of preparing and using the coatings and coated substrates.

公开(公告)号：US12018382B2

公开(公告)日：2024-06-25

申请号：US16123149

申请日：2018-09-06

Applicant: Entegris, Inc.

Inventor： Bryan C. Hendrix ,  David W. Peters ,  Weimin Li ,  Carlo Waldfried ,  Richard A. Cooke ,  Nilesh Gunda ,  I-Kuan Lin

IPC: C23C16/44 ,  B01D39/20 ,  B01D67/00 ,  C23C14/24 ,  C23C14/50 ,  C23C16/04 ,  C23C16/40 ,  C23C16/455 ,  C23C16/56 ,  C23C28/04

CPC classification number: C23C28/044 ,  B01D39/2027 ,  B01D67/00 ,  C23C14/243 ,  C23C14/50 ,  C23C16/042 ,  C23C16/403 ,  C23C16/404 ,  C23C16/405 ,  C23C16/4404 ,  C23C16/4412 ,  C23C16/45525 ,  C23C16/45555 ,  C23C16/56 ,  C23C28/042 ,  B01D2239/0478 ,  B01D2239/1216

Abstract: Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that deleterious to the substrate article, structure material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.

公开(公告)号：US20230416913A1

公开(公告)日：2023-12-28

申请号：US18215757

申请日：2023-06-28

Applicant: ENTEGRIS, INC.

Inventor： Bryan C. Hendrix ,  Carlo Waldfried ,  Scott L. Battle ,  Gavin Richards ,  Benjamin R. Garrett

IPC: C23C16/455 ,  C23C16/44

CPC classification number: C23C16/45544 ,  C23C16/4404 ,  C23C16/45561 ,  C23C16/52

Abstract: A system including a chemical supply cabinet (e.g., such as a chemical supply cabinet configured to contain an ampoule), a module configured to modify a surface, and a control unit connected to the module, wherein the control unit is configured to direct the modifying of the surface.

公开(公告)号：US20230042148A1

公开(公告)日：2023-02-09

申请号：US17867530

申请日：2022-07-18

Applicant: ENTEGRIS, INC.

Inventor： Yan Liu ,  Yuxuan Liu ,  Chandra Venkatraman ,  Carlo Waldfried

IPC: B05D3/06 ,  H01L21/683 ,  B05D3/02 ,  B05D1/02

Abstract: Described are techniques for applying a cured polymeric blanket coating onto a surface, specifically for applying a blanket-coated cured polymeric coating onto a surface of a substrate that is useful as an electrostatic chuck for processing semiconductor wafers.

公开(公告)号：US20200378011A1

公开(公告)日：2020-12-03

申请号：US16898149

申请日：2020-06-10

Applicant: Entegris, Inc.

Inventor： Bryan C. Hendrix ,  David W. Peters ,  Weimin Li ,  Carlo Waldfried ,  Richard A. Cooke ,  Nilesh Gunda ,  I-Kuan Lin

IPC: C23C28/04 ,  C23C16/44 ,  C23C16/455 ,  C23C16/56 ,  C23C16/04 ,  C23C14/24 ,  C23C14/50 ,  C23C16/40

Abstract: Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that is deleterious to the substrate article, structure, material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.

公开(公告)号：US20190100842A1

公开(公告)日：2019-04-04

申请号：US16123149

申请日：2018-09-06

Applicant: Entegris, Inc.

Inventor： Bryan C. Hendrix ,  David W. Peters ,  Weimin Li ,  Carlo Waldfried ,  Richard A. Cooke ,  Nilesh Gunda ,  I-Kuan Lin

IPC: C23C28/04 ,  C23C14/50 ,  C23C16/40 ,  C23C16/44 ,  C23C14/24 ,  C23C16/455

Abstract: Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that deleterious to the substrate article, structure material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.

公开(公告)号：US20180202047A1

公开(公告)日：2018-07-19

申请号：US15871425

申请日：2018-01-15

Applicant: Entegris, Inc.

Inventor： I-Kuan Lin ,  Carlo Waldfried ,  Jianan Hou

IPC: C23C16/56 ,  C23C16/40

CPC classification number: C23C16/56 ,  C23C16/405 ,  C23C16/4404 ,  C23C16/45525

Abstract: Articles and methods relating to coatings having superior chemical resistance and structural integrity, can be prepared via atomic layer deposition and fluoro-annealing at low process temperatures of between about 150° C. and less than 300° C. The film comprises a fluorinated metal oxide containing yttrium.

公开(公告)号：US20250034694A1

公开(公告)日：2025-01-30

申请号：US18780569

申请日：2024-07-23

Applicant: ENTEGRIS, INC.

Inventor： Carlo Waldfried ,  Surendra Maharjan ,  Stephen Longo

IPC: C23C8/08

Abstract: Surface modified substrates and related methods are provided. A substrate having a modified surface comprises a first region and a second region. The first region is located above the second region. The first region comprises an aluminum fluoride. The second region comprises an aluminum alloy. A concentration of the aluminum fluoride gradually decreases from the first region to the second region.