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公开(公告)号：US20110041605A1
公开(公告)日：2011-02-24
申请号：US12923971
申请日：2010-10-19
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
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公开(公告)号：US20110041604A1
公开(公告)日：2011-02-24
申请号：US12923970
申请日：2010-10-19
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
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公开(公告)号：US20070019406A1
公开(公告)日：2007-01-25
申请号：US11528611
申请日：2006-09-28
IPC分类号： F21V7/00
CPC分类号： H01L27/14625 , G02B6/4249 , H01L27/14627 , H01L27/14685
摘要： An optical device includes a semiconductor substrate and an optical part having a plurality of columnar members disposed on the substrate. Each columnar member is disposed in a standing manner and adhered each other so that the optical part is provided. The optical part is integrated with the substrate. This optical part has high design freedom.
摘要翻译： 光学器件包括半导体衬底和具有设置在衬底上的多个柱状构件的光学部件。 每个柱状构件以立式的方式设置并彼此粘合，从而设置光学部件。 光学部件与基板一体化。 该光学部件具有高设计自由度。
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公开(公告)号：US06415664B2
公开(公告)日：2002-07-09
申请号：US09778737
申请日：2001-02-08
申请人： Takao Iwaki , Kazuhiko Kano , Toshiki Isogai
发明人： Takao Iwaki , Kazuhiko Kano , Toshiki Isogai
IPC分类号： G01P900
CPC分类号： G01C19/5719
摘要： An angular velocity sensor has a weight portion that can be drive-oscillated in a driving direction and be oscillated in a detecting direction when an angular velocity is applied, and unnecessary oscillation suppressing electrodes that can generate an electrostatic force to be applied to the weight portion in the detecting direction. The electrostatic force prevents the weight portion from being drive-oscillated in a direction other than the driving direction. As a result, unnecessary oscillation of the weight portion can be prevented even when the angular velocity sensor has a processing error.
摘要翻译： 角速度传感器具有可以沿着驱动方向驱动振荡并且当施加角速度时沿检测方向振动的重量部分，以及可产生施加到重物部分的静电力的不必要的振动抑制电极 在检测方向。 静电力防止重物部分沿除驱动方向以外的方向驱动振荡。 结果，即使当角速度传感器具有处理误差时也可以防止重量部分的不必要的振动。
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公开(公告)号：US6028332A
公开(公告)日：2000-02-22
申请号：US106018
申请日：1998-06-29
申请人： Kazuhiko Kano , Makiko Fujita , Yoshinori Ohtsuka
发明人： Kazuhiko Kano , Makiko Fujita , Yoshinori Ohtsuka
IPC分类号： G01L1/18 , G01C19/56 , G01P15/00 , G01P15/08 , G01P15/12 , G01P15/14 , H01L29/84 , H01L29/82
CPC分类号： G01C19/5719 , G01P15/0802 , G01P2015/0814 , Y10S73/01
摘要： A semiconductor type yaw rate sensor has a substrate, a beam structure formed from a semiconductor material and having at least one anchor portion disposed on the substrate, a weighted portion located above the substrate a predetermined gap therefrom, and a beam portion which extends from the anchor portion and supports the weighted portion. A movable electrode is formed onto the weighted portion, and a fixed electrode is formed on the substrate in such a manner that the fixed electrode faces the movable electrode. When a drive voltage is applied between the movable electrode and the fixed electrode, the beam structure is forcibly caused to vibrate in a direction that is horizontal relative to a substrate surface plane. In this yaw rate sensor, a strain gauge to monitor forced vibration of the beam structure is formed in the beam portion. As a result, the forced vibration of the beam structure can be monitored with a simple structure.
摘要翻译： 半导体型偏航率传感器具有基板，由半导体材料形成的梁结构，并且具有设置在基板上的至少一个锚固部分，位于基板上方的预定间隙的加权部分以及从基板延伸的梁部分 锚固部分并支撑加权部分。 可移动电极形成在加权部分上，并且固定电极以固定电极面向可动电极的方式形成在基板上。 当在可动电极和固定电极之间施加驱动电压时，梁结构被强制地沿相对于基板表面的水平方向振动。 在该横摆率传感器中，在梁部形成有用于监视梁结构的强制振动的应变仪。 结果，可以以简单的结构监视梁结构的强制振动。
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公开(公告)号：US5627397A
公开(公告)日：1997-05-06
申请号：US402949
申请日：1995-03-13
申请人： Kazuhiko Kano , Yukihiro Takeuchi , Takamoto Watanabe , Kenichi Ao , Masakazu Kanosue , Hirofumi Uenoyama , Kenichi Nara
发明人： Kazuhiko Kano , Yukihiro Takeuchi , Takamoto Watanabe , Kenichi Ao , Masakazu Kanosue , Hirofumi Uenoyama , Kenichi Nara
CPC分类号： G01P15/124 , G01P1/006 , Y10S73/01
摘要： A semiconductor acceleration sensor according to the present invention performs acceleration detection by means of detecting increase or decrease in electrical current flowing between fixed electrodes formed on a semiconductor substrate taking a movable section in a movable state supported on the semiconductor substrate as a gate electrode. Two transistor structures are utilized in this detection. Current between fixed electrodes in one transistor structure increases when the movable section is subjected to acceleration and is displaced. At that time, current between fixed electrodes in the other transistor structure decreases. These two transistor structures are disposed proximately. By means of this proximate disposition, fluctuations in characteristics of both transistors are reduced, and by means of acceleration detection by differential type, temperature characteristics of the two transistors can be canceled favorably.
摘要翻译： 根据本发明的半导体加速度传感器通过检测形成在半导体衬底上的固定电极之间的电流的增加或减少来执行加速度检测，该半导体衬底以可移动状态支撑在作为栅电极的半导体衬底上的可移动状态。 在该检测中使用两个晶体管结构。 一个晶体管结构中的固定电极之间的电流在可移动部分受到加速并被移位时增加。 此时，另一晶体管结构中的固定电极之间的电流降低。 这两个晶体管结构靠近地设置。 通过这种接近的配置，两个晶体管的特性波动减小，并且通过差分类型的加速度检测，可以有利地消除两个晶体管的温度特性。
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公开(公告)号：US20130193087A1
公开(公告)日：2013-08-01
申请号：US13878904
申请日：2011-10-07
IPC分类号： C02F1/02
CPC分类号： C02F1/02 , B01J3/006 , B01J19/006 , B01J19/0066 , B01J19/121 , B01J19/1812 , B01J19/2415 , B01J2219/00153 , B01J2219/0877 , C02F1/30 , C02F1/441 , C02F11/086 , C02F2101/30 , C02F2301/066 , C02F2303/08
摘要： Provided is a water treatment device with which organic substances contained in raw water to be treated are decomposed to thereby alleviate the load to be imposed on a downstream filter and with which it is possible to avoid corrosion of the piping or the like.The water treatment device 12 includes a large-bore channel 22, a small-bore channel 23, and a pressure pump 24 which pressurize raw water 15a to a given pressure, the raw water containing organic substances, and further includes a laser light source 25 and a condensing lens 26 which irradiates laser light 37 upon the pressurized raw water 15a to heat the raw water to a given temperature, wherein the laser light 27 emitted from the laser light source 25 is condensed by the condensing lens 26 on a region 29 that is located in the small-bore channel 23 through which the pressurized raw water 15a flows and that is separated from the wall of the channel, thereby heating the raw water 15a present in this region 29 and yielding supercritical water or subcritical water to decompose the organic substances contained in the raw water 15a.
摘要翻译： 本发明提供一种水处理装置，将待处理的原水中含有的有机物质分解，从而减轻施加在下游过滤器上的负荷，能够避免管道等的腐蚀。 水处理装置12包括大孔通道22，小孔通道23和将原水15a加压至给定压力的压力泵24，原水含有有机物质，还包括激光光源25 以及将激光37照射在加压原水15a上以将原水加热至给定温度的聚光透镜26，其中从激光光源25发射的激光27由聚光透镜26会聚在区域29上，区域29 位于小孔通道23中，加压原水15a流过该通道23，并且与通道的壁分离，从而加热存在于该区域29中的原水15a，并产生超临界水或亚临界水以分解有机物 包含在原水15a中的物质。
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28.发明申请公开(公告)号：US20100201458A1
公开(公告)日：2010-08-12
申请号：US12656523
申请日：2010-02-02
申请人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
发明人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
IPC分类号： H03H9/02
CPC分类号： H03H9/02645 , H03H9/02685 , H03H9/02708 , H03H9/02724 , H03H9/02748 , H03H9/02803
摘要： A surface acoustic wave element includes a piezoelectric member, a comb-teeth electrode, and a reflector. The comb-teeth electrode is arranged on the piezoelectric member. The reflector is arranged on the piezoelectric member. The reflector reflects a surface acoustic wave transmitted from the comb-teeth electrode. The reflector has a plurality of areas, and each of the areas has a frequency to make a reflection efficiency the largest. At least two of the frequencies of the areas are made different from each other.
摘要翻译： 表面声波元件包括压电元件，梳齿电极和反射器。 梳齿电极配置在压电元件上。 反射器设置在压电元件上。 反射器反射从梳齿电极传播的表面声波。 反射器具有多个区域，并且每个区域具有使反射效率最大的频率。 这些区域的至少两个频率彼此不同。
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29.发明授权公开(公告)号：US07758979B2
公开(公告)日：2010-07-20
申请号：US12155015
申请日：2008-05-29
申请人： Morito Akiyama , Toshihiro Kamohara , Naohiro Ueno , Kazuhiko Kano , Akihiko Teshigahara , Yukihiro Takeuchi , Nobuaki Kawahara
发明人： Morito Akiyama , Toshihiro Kamohara , Naohiro Ueno , Kazuhiko Kano , Akihiko Teshigahara , Yukihiro Takeuchi , Nobuaki Kawahara
IPC分类号： B32B9/00
CPC分类号： B81B3/0021 , B81B2201/0271 , B81B2201/032 , H01L41/0815 , H01L41/094 , H01L41/1136 , H01L41/187 , H01L41/316 , H03H9/02015 , H03H9/02574 , H03H9/173
摘要： A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has.
摘要翻译： 本发明的压电薄膜包括含有钪的氮化铝薄膜。 假设钪原子的总数和铝原子数为100原子％，则氮化铝薄膜中的钪的含有比例为0.5原子％〜50原子％。 根据该结构，本发明的压电薄膜能够在保持氮化铝薄膜的弹性波传播速度，Q值和频率 - 温度系数的特性的同时提高压电响应。
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公开(公告)号：US20090133495A1
公开(公告)日：2009-05-28
申请号：US12292709
申请日：2008-11-25
CPC分类号： G01C19/5698
摘要： A yaw rate sensor has two sets of exciting electrodes, perturbative weights and two sets of detecting electrodes on a surface of a piezoelectric substrate. The exciting electrodes excite first surface acoustic waves transmitted through the surface of the substrate in a propagation direction. The weights are oscillated by the waves and excite a second surface acoustic wave, transmitted through the surface of the substrate in a detection direction orthogonal to the propagation direction, in response to a yaw applied to the weights. The detecting electrodes measure an intensity of the second surface acoustic wave to detect the yaw rate. The sets of exciting electrodes are symmetrically placed with respect to a driving axis extending straight along the propagation direction. The group of weights is symmetric with respect to the driving axis.
摘要翻译： 横摆率传感器在压电基板的表面上具有两组激励电极，扰动重量和两组检测电极。 励磁电极在传播方向上激发透过基板表面的第一表面声波。 权重由波振荡，并且响应于施加到权重的偏航，激发在与传播方向正交的检测方向上透射通过基板的表面的第二表面声波。 检测电极测量第二声表面波的强度以检测横摆率。 激励电极组相对于沿着传播方向直线延伸的驱动轴对称地放置。 重量组相对于驱动轴对称。
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