公开(公告)号：US20050031004A1

公开(公告)日：2005-02-10

申请号：US10699763

申请日：2003-11-03

申请人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

发明人： Dirk Basting ,  Sergei Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Andreas Targsdorf

IPC分类号： H01S3/00 ,  H01S3/0971 ,  H01S3/22 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/225 ,  H01S3/073 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/2258

摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. The timing of discharges in discharge chambers of the MO and PA can be precisely controlled using a common pulser to drive the respective chambers. The timing of the discharges further can be controlled through the timing of the pre-ionization in the chambers, or through control of the reset current in the final compression stages of the pulser. A common pulser, or separate pulser circuits, also can be actively controlled in time using a feedback loop, with precision timing being achieved through control of the pre-ionization in each individual discharge chamber. Yet another system provides for real-time compensation of time delay jitter of discharge pulses in the chambers.

摘要翻译： 主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求 光刻扫描仪系统。 可以使用公共脉冲发生器来精确地控制MO和PA的放电室中的放电定时以驱动各个室。 放电的时间进一步可以通过室内预电离的定时或通过控制脉冲发生器的最终压缩级中的复位电流来控制。 公共脉冲发生器或单独的脉冲发生器电路也可以使用反馈回路在时间上有效地控制，通过在每个单独的放电室中控制预电离来实现精确时序。 另一个系统提供对腔室中的放电脉冲的时间延迟抖动的实时补偿。

公开(公告)号：US06618422B2

公开(公告)日：2003-09-09

申请号：US09863931

申请日：2001-05-22

申请人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

发明人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

IPC分类号： H01S300

CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.

摘要翻译： 用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。 介电壳体包括具有不同外部曲率半径的两个圆柱形区域。 外壳的开口端具有比封闭的另一端更大的曲率半径。 内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。 外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。 与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。 外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。 半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

公开(公告)号：US06987790B2

公开(公告)日：2006-01-17

申请号：US10776137

申请日：2004-02-11

申请人： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

发明人： Sergei V. Govorkov ,  Rainer Paetzel ,  Igor Bragin ,  Rainer Desor ,  Andreas Targsdorf ,  Andriy Knysh

IPC分类号： H01S3/22 ,  H01S3/223 ,  H01S3/097

CPC分类号： H01S3/225 ,  H01S3/09713 ,  H01S3/2366

摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.

摘要翻译： 使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。 代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲 的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。 由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。 触发电离也可用于同步MOPA配置中双室的时序。 在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

公开(公告)号：US07158553B2

公开(公告)日：2007-01-02

申请号：US10776404

申请日：2004-02-11

申请人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

发明人： Sergei V. Govorkov ,  Alexander O. Wiessner ,  Rainer Paetzel ,  Igor Bragin

IPC分类号： H01S3/22

CPC分类号： H01S3/2366 ,  H01S3/10 ,  H01S3/225 ,  H01S3/2333

摘要： Pulse parameters of a gas discharge laser system can be optimized and controlled for precision applications such as microlithography. Important laser pulse parameters typically vary in the beginning of a pulse burst, and the directionality of the output beam typically varies throughout the burst. In order to improve the performance of the laser system, the variation at the beginning of a pulse burst can be eliminated by extending the pulse pattern and shuttering the output during periods of significant parameter variation. A fast shutter such as an acousto-optical modulator can be used to prevent output during the burst transition processes. Elements such as acousto-optical cells also can be used in combination with a fast position sensor to steer the direction of the output beam, in order to adjust for variations in the direction of the beam between pulses in a burst.

摘要翻译： 可以优化和控制气体放电激光系统的脉冲参数，用于精密应用，如微光刻。 重要的激光脉冲参数通常在脉冲脉冲串的开始时变化，并且输出光束的方向性通常在整个脉冲串中变化。 为了提高激光系统的性能，可以通过在显着的参数变化期间延长脉冲模式并对输出进行快门来消除脉冲脉冲串开始时的变化。 诸如声光调制器之类的快门可用于在突发转换过程期间防止输出。 诸如声光单元的元件也可以与快速位置传感器组合使用以控制输出光束的方向，以便调整在脉冲串中的脉冲之间的波束方向上的变化。

公开(公告)号：US06570901B2

公开(公告)日：2003-05-27

申请号：US09791430

申请日：2001-02-22

申请人： Uwe Stamm ,  Juergen Kleinschmidt ,  Igor Bragin

发明人： Uwe Stamm ,  Juergen Kleinschmidt ,  Igor Bragin

IPC分类号： H01S322

CPC分类号： H01S3/0385 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/223 ,  H01S3/225

摘要： An excimer or molecular fluorine laser system includes a laser tube filled with a gas mixture including fluorine and a buffer gas, and multiple electrodes within the laser tube connected with a pulsed discharge circuit for energizing the gas mixture. At least one of the electrodes is longer than 28 inches in length, preferably two main electrodes are each extended to greater than 28 inches in length. The laser system further includes a resonator including the laser tube for generating a pulsed laser beam having a desired energy. The laser system is configured such that an output beam would be emitted having an energy below the desired energy if each of the electrodes were 28 inches in length or less, and the laser system outputs a beam at the desired energy due to the length of the electrodes being extended to a length greater than 28 inches.

公开(公告)号：US08192790B2

公开(公告)日：2012-06-05

申请号：US12792625

申请日：2010-06-02

申请人： Igor Bragin ,  Rustem Osmanow ,  Jürgen Bäumler ,  Michael Semling

发明人： Igor Bragin ,  Rustem Osmanow ,  Jürgen Bäumler ,  Michael Semling

IPC分类号： H01S3/097 ,  H01S3/03 ,  H01S3/00 ,  H01S3/083

CPC分类号： H01S3/225 ,  H01S3/0384 ,  H01S3/0388

摘要： Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.

摘要翻译： 通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电，在气体激光器系统的放电室中使电弧最小化， 肩部位于表面部分的任一侧并暴露于气体混合物，以及由电绝缘材料制成的涂层，其中涂层通过冷喷涂法附着到肩部。

公开(公告)号：US06714577B1

公开(公告)日：2004-03-30

申请号：US09513025

申请日：2000-02-25

申请人： Uwe Stamm ,  Igor Bragin ,  Wolfgang Zschocke

发明人： Uwe Stamm ,  Igor Bragin ,  Wolfgang Zschocke

IPC分类号： H01S322

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/104 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251

摘要： An excimer or molecular fluorine laser, such as a KrF- or ArF-laser, or a molecular fluorine (F2) laser, particularly for photolithography applications, has a gas mixture including a trace amount of a gas additive. The concentration of the gas additive in the gas mixture is optimized for improving energy stability and/or the overshoot control of the laser output beam. The concentration is further determined and adjusted at new fills and/or during laser operation based on its effect on the output pulse energy in view of constraints and/or aging on the discharge circuit and/or other components of the laser system. Attenuation control is also provided for increasing the lifetimes of components of the laser system by controlling the concentration of the gas additive over time. A specific preferred concentration of xenon is more than 100 ppm for improving the energy stability and/or overshoot control. The laser system may be equipped with an internal gas supply unit including an internal xenon gas supply, or a xenon generator for supplying xenon gas from condensed matter xenon.

摘要翻译： 特别是用于光刻应用的激发子或分子氟激光，例如KrF-或ArF激光，或分子氟（F2）激光，具有包含微量气体添加剂的气体混合物。 气体混合物中气体添加剂的浓度被优化以改善激光输出光束的能量稳定性和/或过冲控制。 考虑到放电电路和/或激光系统的其他部件的约束和/或老化，基于其对输出脉冲能量的影响，在新填充和/或激光操作期间进一步确定和调整浓度。 还提供衰减控制，用于通过控制气体添加剂随时间的浓度来增加激光系统的部件的寿命。 氙的特定优选浓度大于100ppm以改善能量稳定性和/或过冲控制。 激光系统可以配备有内部气体供给单元，该内部气体供给单元包括内部氙气供应源或用于从凝结物质氙提供氙气的氙气发生器。

公开(公告)号：US06650679B1

公开(公告)日：2003-11-18

申请号：US09247887

申请日：1999-02-10

申请人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

发明人： Igor Bragin ,  Ulrich Rebhan ,  Uwe Stamm ,  Dirk Basting

IPC分类号： H01S3097

CPC分类号： G03F7/70025 ,  H01S3/0384 ,  H01S3/0385

摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.

摘要翻译： 用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。 介电壳体包括具有不同外部曲率半径的两个圆柱形区域。 外壳的开口端具有比封闭的另一端更大的曲率半径。 内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。 外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。 与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。 外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。 半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

公开(公告)号：US07756184B2

公开(公告)日：2010-07-13

申请号：US11711193

申请日：2007-02-27

申请人： Igor Bragin ,  Rustem Osmanow ,  Jürgen Bäumler ,  Michael Semling

发明人： Igor Bragin ,  Rustem Osmanow ,  Jürgen Bäumler ,  Michael Semling

IPC分类号： H01S3/097

CPC分类号： H01S3/225 ,  H01S3/0384 ,  H01S3/0388

摘要： Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.

摘要翻译： 通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电，在气体激光器系统的放电室中使电弧最小化， 肩部位于表面部分的任一侧并暴露于气体混合物，以及由电绝缘材料制成的涂层，其中涂层通过冷喷涂法附着到肩部。

公开(公告)号：US20080205474A1

公开(公告)日：2008-08-28

申请号：US11711193

申请日：2007-02-27

申请人： Igor Bragin ,  Rustem Osmanow ,  Jurgen Baumler ,  Michael Semling

发明人： Igor Bragin ,  Rustem Osmanow ,  Jurgen Baumler ,  Michael Semling

IPC分类号： H01S3/097

CPC分类号： H01S3/225 ,  H01S3/0384 ,  H01S3/0388

摘要： Arcing is minimized in a discharge chamber of a gas laser system by utilizing an electrode which comprises a surface portion capable of functioning as one of an anode and a cathode in order to energize a gas mixture in a discharge chamber of the gas discharge laser system, a shoulder portion being positioned on either side of the surface portion and being exposed to the gas mixture, and a coating layer made of electrically insulating material, wherein the coating layer is attached to the shoulder portion by a cold spraying method.

摘要翻译： 通过利用包括能够用作阳极和阴极之一的表面部分的电极以便对气体放电激光系统的放电室中的气体混合物通电，在气体激光器系统的放电室中使电弧最小化， 肩部位于表面部分的任一侧并暴露于气体混合物，以及由电绝缘材料制成的涂层，其中涂层通过冷喷涂法附着到肩部。