公开(公告)号：US20100327891A1

公开(公告)日：2010-12-30

申请号：US12492177

申请日：2009-06-26

Applicant: Eric D. Hobbs

Inventor： Eric D. Hobbs

IPC: G01R31/02

CPC classification number: G01R31/2874

Abstract: Embodiments of probe cards and methods for fabricating and using same are provided herein. In some embodiments, an apparatus for testing a device (DUT) may include a probe card configured for testing a DUT; a thermal management apparatus disposed on the probe card to heat and/or cool the probe card; a sensor disposed on the probe card and coupled to the thermal management apparatus to provide data to the thermal management apparatus corresponding to a temperature of a location of the probe card; a first connector disposed on the probe card and coupled to the thermal management apparatus for connecting to a first power source internal to a tester; and a second connector, different than the first connector, disposed on the probe card and coupled to the thermal management apparatus for connecting to a second power source external to the tester.

Abstract translation: 本文提供了探针卡及其制造和使用方法的实施例。 在一些实施例中，用于测试设备（DUT）的设备可以包括配置用于测试DUT的探针卡; 设置在探针卡上以加热和/或冷却探针卡的热管理装置; 传感器，设置在所述探针卡上并耦合到所述热管理装置，以向与所述探针卡的位置的温度相对应的所述热管理装置提供数据; 第一连接器，其设置在所述探针卡上并且耦合到所述热管理装置，用于连接到测试仪内部的第一电源; 以及与第一连接器不同的第二连接器，其设置在探针卡上并且耦合到热管理装置，用于连接到测试仪外部的第二电源。

公开(公告)号：US20100164323A1

公开(公告)日：2010-07-01

申请号：US12345292

申请日：2008-12-29

Applicant: Eric D. Hobbs ,  Gaetan L. Mathieu

Inventor： Eric D. Hobbs ,  Gaetan L. Mathieu

IPC: H02N11/00

CPC classification number: H02N1/006

Abstract: A gap-closing actuator includes a stator having one or more first electrodes, a mover having one or more second electrodes interposed among the first electrodes, and a biasing mechanism for applying a non-capacitive bias to the mover for urging the mover to move in a desired direction with respect to the stator. The non-capacitive bias is different from a capacitive force generated between the first and second electrodes when the gap-closing actuator is in operation.

Abstract translation: 间隙关闭致动器包括具有一个或多个第一电极的定子，具有插入在第一电极中的一个或多个第二电极的移动器，以及用于向移动器施加非电容性偏压以推动移动器移动的偏置机构 相对于定子的期望方向。 当间隙关闭致动器运行时，非电容性偏压不同于在第一和第二电极之间产生的电容性力。

公开(公告)号：US07746089B2

公开(公告)日：2010-06-29

申请号：US11537164

申请日：2006-09-29

Applicant: Eric D. Hobbs ,  Alexander H. Slocum

Inventor： Eric D. Hobbs ,  Alexander H. Slocum

IPC: G01R31/02

CPC classification number: G01R1/07364

Abstract: Methods and apparatus for indirect planarization of a substrate are provided herein. In one embodiment, an apparatus for indirectly planarizing a probe card assembly includes an adjustment portion for controlling a force applied to a probe substrate of the probe card assembly; a force application portion configured to apply the force to the probe substrate at a location that is laterally offset from the adjustment portion; and a mechanism coupling the adjustment portion to the force application portion.

Abstract translation: 本文提供了用于衬底的间接平面化的方法和装置。 在一个实施例中，用于间接平面化探针卡组件的装置包括用于控制施加到探针卡组件的探针基板的力的调节部分; 力施加部，其构造成在从所述调节部侧向偏移的位置处向所述探针基板施加力; 以及将调节部联接到力施加部的机构。

公开(公告)号：US07622935B2

公开(公告)日：2009-11-24

申请号：US11551545

申请日：2006-10-20

Applicant: Eric D. Hobbs ,  Alexander H. Slocum ,  Benjamin N. Eldridge ,  Keith J. Breinlinger ,  Shawn Powell

Inventor： Eric D. Hobbs ,  Alexander H. Slocum ,  Benjamin N. Eldridge ,  Keith J. Breinlinger ,  Shawn Powell

IPC: G01R31/02 ,  G01R31/28

CPC classification number: G01R31/2893

Abstract: A probe card assembly can comprise a probe head assembly and a wiring substrate. The probe head assembly can comprise a plurality of probes disposed to contact an electronic device disposed on a holder in a test housing. The wiring substrate can include an electrical interface to a test controller and a plurality of electrical wiring composing electrical paths between the electrical interface and ones of the probes, and the wiring substrate can comprise a first portion on which the electrical interface is disposed and a second portion composing the probe head assembly. The second portion of the wiring substrate can be moveable with respect to the first portion of the wiring substrate.

Abstract translation: 探针卡组件可以包括探针头组件和布线衬底。 探针头组件可以包括多个探针，其设置成接触设置在测试壳体中的保持器上的电子设备。 布线基板可以包括与测试控制器的电接口以及构成电接口和探针之间的电气路径的多个电线，并且布线基板可以包括其上设置有电接口的第一部分和第二部分 组成探头组件的部分。 布线基板的第二部分能够相对于布线基板的第一部分移动。

公开(公告)号：US20090079452A1

公开(公告)日：2009-03-26

申请号：US11861559

申请日：2007-09-26

Applicant: Benjamin N. Eldridge ,  Eric D. Hobbs ,  Gaetan L. Mathieu

Inventor： Benjamin N. Eldridge ,  Eric D. Hobbs ,  Gaetan L. Mathieu

IPC: G01R1/073 ,  G01R31/02 ,  H01L21/68

CPC classification number: G01R31/2891 ,  G01R1/06716 ,  G01R1/07342 ,  G11C29/56 ,  G11C29/56016 ,  G11C2029/5602 ,  H01L21/682 ,  Y10T29/49002

Abstract: A method or an apparatus for aligning a plurality of structures can include applying a first force in a first plane to a first structure. The method can also include constraining in the first plane the first structure with respect to a second structure such that the first structure is in a position with respect to the second structure that aligns first features on the first structure with second features on the second structures. The second feature can be in a second plane that is generally parallel to the first plane. The first and second structures can be first and second electronic components, which can be components of a probe card assembly.

Abstract translation: 用于对准多个结构的方法或设备可以包括将第一平面中的第一力施加到第一结构。 该方法还可以包括在第一平面中约束相对于第二结构的第一结构，使得第一结构相对于将第一结构上的第一特征与第二结构上的第二特征对准的第二结构处于相对位置。 第二特征可以在通常平行于第一平面的第二平面中。 第一和第二结构可以是第一和第二电子部件，其可以是探针卡组件的部件。

公开(公告)号：US07471094B2

公开(公告)日：2008-12-30

申请号：US11165833

申请日：2005-06-24

Applicant: Eric D. Hobbs ,  Benjamin N. Eldridge ,  Lunyu Ma ,  Gaetan L. Mathieu ,  Steven T. Murphy ,  Makarand S. Shinde ,  Alexander H. Slocum

Inventor： Eric D. Hobbs ,  Benjamin N. Eldridge ,  Lunyu Ma ,  Gaetan L. Mathieu ,  Steven T. Murphy ,  Makarand S. Shinde ,  Alexander H. Slocum

IPC: G01R31/02

CPC classification number: G01R31/2886 ,  G01R1/073 ,  G01R31/31905 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49147 ,  Y10T29/49208 ,  Y10T29/49222

Abstract: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.

Abstract translation: 探针卡组件包括附接到安装组件的多个探针基板。 每个探针衬底包括一组探针，并且每个探针衬底上的探针组合在一起组成一组探针，用于接触待测试的器件。 调整机构构造成赋予每个探针基板以相对于安装组件分别移动每个基板的力。 调节机构可以将每个探针基板转换成“x”，“y”和/或“z”方向，并且可以进一步围绕前述方向上的任何一个或多个旋转每个探针基板。 调节机构可以进一步改变一个或多个探针基板的形状。 因此，探针可以相对于要测试的装置上的触点对准和/或平坦化。

公开(公告)号：US20080203268A1

公开(公告)日：2008-08-28

申请号：US12116032

申请日：2008-05-06

Applicant: Eric D. Hobbs ,  Christopher D. McCoy ,  James M. Porter ,  Alexander H. Slocum

Inventor： Eric D. Hobbs ,  Christopher D. McCoy ,  James M. Porter ,  Alexander H. Slocum

IPC: G01R31/02 ,  F16M13/00

CPC classification number: G01R31/2891 ,  G01R31/31905

Abstract: A probe card assembly can comprise a support structure to which a plurality of probes can be directly or indirectly attached. The probes can be disposed to contact an electronic device to be tested. The probe card assembly can further comprise actuators, which can be configured to change selectively an attitude of the support structure with respect to a reference structure. The probe card assembly can also comprise a plurality of lockable compliant structures. While unlocked, the lockable compliant structures can allow the support structure to move with respect to the reference structure. While locked, however, the compliant structures can provide mechanical resistance to movement of the support structure with respect to the reference structure.

Abstract translation: 探针卡组件可以包括支撑结构，多个探针可以直接或间接附接到支撑结构。 可以将探针设置成接触要测试的电子设备。 探针卡组件还可以包括致动器，其可以被配置为相对于参考结构选择性地改变支撑结构的姿态。 探针卡组件还可以包括多个可锁定的柔顺结构。 当解锁时，可锁定的柔性结构可以允许支撑结构相对于参考结构移动。 然而，当锁定时，柔性结构可以提供对支撑结构相对于参考结构的移动的机械阻力。

公开(公告)号：US12162006B2

公开(公告)日：2024-12-10

申请号：US15634097

申请日：2017-06-27

Applicant: Keith Joseph Breinlinger ,  Eric D. Hobbs ,  Dorian Liepmann ,  Joshua Tanner Nevill ,  Mark P. White ,  Maria Jimena Loureiro

Inventor： Keith Joseph Breinlinger ,  Eric D. Hobbs ,  Dorian Liepmann ,  Joshua Tanner Nevill ,  Mark P. White ,  Maria Jimena Loureiro

IPC: B01L3/00 ,  C12M3/06

Abstract: Some configurations of a microfluidic apparatus can comprise a fluidic circuit of interconnected fluidic structures into which a plurality of different media can be introduced or extracted. A variety of operations can be performed with the different media including isolating with a second medium one or more of the fluidic structures that is filled partially or fully with a first medium. Discrete volumes of a medium can be moved through the isolating second medium to deliver materials or micro-objects to or remove micro-objects or materials from a fluidic structure that is otherwise isolated by the second medium. Some configurations of a microfluidic apparatus can isolate microfluidic structures in a microfluidic apparatus using flow rates or blocking structures, and some configurations can manage bubbles in fluidic structures.

公开(公告)号：US08400173B2

公开(公告)日：2013-03-19

申请号：US12492177

申请日：2009-06-26

Applicant: Eric D. Hobbs

Inventor： Eric D. Hobbs

IPC: G01R31/00 ,  G01R31/10

CPC classification number: G01R31/2874

Abstract: Embodiments of probe cards and methods for fabricating and using same are provided herein. In some embodiments, an apparatus for testing a device (DUT) may include a probe card configured for testing a DUT; a thermal management apparatus disposed on the probe card to heat and/or cool the probe card; a sensor disposed on the probe card and coupled to the thermal management apparatus to provide data to the thermal management apparatus corresponding to a temperature of a location of the probe card; a first connector disposed on the probe card and coupled to the thermal management apparatus for connecting to a first power source internal to a tester; and a second connector, different than the first connector, disposed on the probe card and coupled to the thermal management apparatus for connecting to a second power source external to the tester.

Abstract translation: 本文提供了探针卡及其制造和使用方法的实施例。 在一些实施例中，用于测试设备（DUT）的设备可以包括配置用于测试DUT的探针卡; 设置在探针卡上以加热和/或冷却探针卡的热管理装置; 传感器，设置在所述探针卡上并耦合到所述热管理装置，以向与所述探针卡的位置的温度相对应的所述热管理装置提供数据; 第一连接器，其设置在所述探针卡上并且耦合到所述热管理装置，用于连接到测试仪内部的第一电源; 以及与第一连接器不同的第二连接器，其设置在探针卡上并且耦合到热管理装置，用于连接到测试仪外部的第二电源。

公开(公告)号：US08138859B2

公开(公告)日：2012-03-20

申请号：US12106364

申请日：2008-04-21

Applicant: John K. Gritters ,  Eric D. Hobbs ,  Sangtae Park ,  Jun Jason Yao

Inventor： John K. Gritters ,  Eric D. Hobbs ,  Sangtae Park ,  Jun Jason Yao

IPC: H01H51/22 ,  H01H57/00

CPC classification number: H01H1/60 ,  H01H1/0036 ,  H01H59/0009 ,  H01H2001/0047 ,  H01H2001/0052 ,  H01H2001/0078

Abstract: Embodiments of the present invention provide microelectromechanical systems (MEMS) switching methods and apparatus having improved performance and lifetime as compared to conventional MEMS switches. In some embodiments, a MEMS switch may include a resilient contact element comprising a beam and a tip configured to wipe a contact surface; and a MEMS actuator having an open position that maintains the tip and the contact surface in a spaced apart relation and a closed position that brings the tip into contact with the contact surface, wherein the resilient contact element and the MEMS actuator are disposed on a substrate and are movable in a plane substantially parallel to the substrate. In some embodiments, various contact elements are provided for the MEMS switch. In some embodiments, various actuators are provided for control of the operation of the MEMS switch.

Abstract translation: 与常规MEMS开关相比，本发明的实施例提供了具有改进的性能和寿命的微机电系统（MEMS）开关方法和装置。 在一些实施例中，MEMS开关可以包括弹性接触元件，其包括梁和构造成擦拭接触表面的尖端; 以及MEMS致动器，其具有将尖端和接触表面保持间隔开的关闭位置和使尖端与接触表面接触的闭合位置，其中弹性接触元件和MEMS致动器设置在基板上 并且可以在基本上平行于基板的平面中移动。 在一些实施例中，为MEMS开关提供各种接触元件。 在一些实施例中，提供各种致动器用于控制MEMS开关的操作。