Planar polymer transistor
    23.
    发明授权
    Planar polymer transistor 失效
    平面聚合物晶体管

    公开(公告)号:US06864504B2

    公开(公告)日:2005-03-08

    申请号:US10453381

    申请日:2003-06-03

    摘要: A structure and method of forming a fully planarized polymer thin-film transistor by using a first planar carrier to process a first portion of the device including gate, source, drain and body elements. Preferably, the thin-film transistor is made with all organic materials. The gate dielectric can be a high-k polymer to boost the device performance. Then, the partially-finished device structures are flipped upside-down and transferred to a second planar carrier. A layer of wax or photo-sensitive organic material is then applied, and can be used as the temporary glue. The device, including its body area, is then defined by an etching process. Contacts to the devices are formed by conductive material deposition and chemical-mechanical polish.

    摘要翻译: 通过使用第一平面载体来形成包括栅极,源极,漏极和主体元件的器件的第一部分来形成完全平坦化的聚合物薄膜晶体管的结构和方法。 优选地,薄膜晶体管由所有有机材料制成。 栅极电介质可以是高k聚合物,以提高器件性能。 然后,部分完成的装置结构被颠倒翻转并转移到第二平面载体。 然后施加一层蜡或光敏有机材料,并且可以用作临时胶。 然后通过蚀刻工艺限定该装置,包括其身体区域。 与器件的接触通过导电材料沉积和化学机械抛光形成。

    Method of integrating volatile and non-volatile memory cells on the same substrate and a semiconductor memory device thereof
    25.
    发明授权
    Method of integrating volatile and non-volatile memory cells on the same substrate and a semiconductor memory device thereof 失效
    将易失性和非易失性存储单元集成在同一衬底上的方法及其半导体存储器件

    公开(公告)号:US06670234B2

    公开(公告)日:2003-12-30

    申请号:US09887403

    申请日:2001-06-22

    IPC分类号: H01L2100

    摘要: A method for fabricating DRAM and flash memory cells on a single chip includes providing a silicon substrate, forming a trench capacitor for each of the DRAM cells in the silicon substrate, forming isolation regions in the silicon substrate which are electrically isolated from each other, forming first type wells for DRAM and flash memory cells at first predetermined regions of the silicon substrate by implanting a first type impurity in the first predetermined regions, forming second type wells for DRAM and flash memory cells at second predetermined regions in the first type wells by implanting a second type impurity in the second predetermined regions, forming oxide layers for DRAM and flash memory cells on the second type wells, forming gate electrodes for DRAM and flash memory cells on the oxide layers for DRAM and flash memory cells, and forming source and drain regions for DRAM and flash memory cells in the respective second type wells for DRAM and flash memory cells, in which the source and drain regions are associated with each of the gate electrodes for DRAM and flash memory cells.

    摘要翻译: 在单个芯片上制造DRAM和闪存单元的方法包括提供硅衬底,为硅衬底中的每个DRAM单元形成沟槽电容器,形成硅衬底中彼此电隔离的隔离区域,形成 通过在第一预定区域中注入第一种类型的杂质,在第一种类型的阱中的第二预定区域形成用于DRAM和闪速存储单元的第二类型阱,通过植入 在第二预定区域中形成第二类型杂质,在第二类型阱上形成用于DRAM和闪存单元的氧化物层,在DRAM和闪存单元的氧化物层上形成用于DRAM的闪存存储单元的栅电极,以及形成源极和漏极 用于DRAM和闪速存储器单元的相应的第二类型阱中的用于DRAM和闪存单元的区域 e源极和漏极区域与用于DRAM和闪存单元的每个栅电极相关联。

    Polymer thin-film transistor with contact etch stops
    26.
    发明授权
    Polymer thin-film transistor with contact etch stops 失效
    具有接触蚀刻的聚合物薄膜晶体管停止

    公开(公告)号:US06664576B1

    公开(公告)日:2003-12-16

    申请号:US10254739

    申请日:2002-09-25

    IPC分类号: H01L27148

    CPC分类号: H01L51/057 H01L51/0021

    摘要: A method and structure of forming a vertical polymer transistor structure is disclosed having a first conductive layer, filler structures co-planar with the first conductive layer, a semiconductor body layer above the first conductive layer, a second conductive layer above the semiconductor body layer, and an etch stop strip positioned between a portion of the first conductive layer and the semiconductor body layer.

    摘要翻译: 公开了形成垂直聚合物晶体管结构的方法和结构,其具有第一导电层,与第一导电层共平面的填充结构,在第一导电层上方的半导体本体层,半导体本体层上方的第二导电层, 以及位于第一导电层的一部分和半导体本体层之间的蚀刻停止带。

    Pad system for an integrated circuit or device
    28.
    发明授权
    Pad system for an integrated circuit or device 失效
    用于集成电路或器件的Pad系统

    公开(公告)号:US06621294B2

    公开(公告)日:2003-09-16

    申请号:US10037660

    申请日:2002-01-03

    IPC分类号: H03K1920

    CPC分类号: H03K19/1737

    摘要: The present invention provides a pad system for an integrated circuit or device. The pad system includes logic circuitry having at least one pad input terminal for connecting to at least one pad and at least two output terminals for connecting to the at least one circuit system of the integrated circuit or device. The logic circuitry is configurable to selectively connect the at least one pad between at least two points of the at least one circuit system of the integrated circuit or device.

    摘要翻译: 本发明提供了一种用于集成电路或装置的焊盘系统。 垫系统包括具有至少一个焊盘输入端子的逻辑电路,用于连接至少一个焊盘和至少两个用于连接到集成电路或设备的至少一个电路系统的输出端子。 逻辑电路可配置为在集成电路或器件的至少一个电路系统的至少两个点之间选择性地连接至少一个焊盘。

    Fuse latch array system for an embedded DRAM having a micro-cell architecture
    29.
    发明授权
    Fuse latch array system for an embedded DRAM having a micro-cell architecture 有权
    用于具有微小区架构的嵌入式DRAM的保险丝锁存阵列系统

    公开(公告)号:US06469949B1

    公开(公告)日:2002-10-22

    申请号:US09854049

    申请日:2001-05-11

    IPC分类号: G11C700

    CPC分类号: G11C29/802 G11C29/789

    摘要: A fuse latch array system for an embedded DRAM (eDRAM) having a micro-cell architecture, a wide data bandwidth and wide internal bus width is disclosed for locatizing all the fuse information for redundancy replacement purposes. The fuse latch array system includes a fuse latch array having a plurality of memory cells where fuse information is scanned therein sequentially or parallel, or a combination thereof to be compatible with conventional fuse latch scanning protocols, during power-on. When the fuse information is stored in the fuse latch array, it is accessed as a page during a page mode operation. The accessed page contains column redundancy information corresponding to the active bank. The fuse latch array is decoded by row and column, so that the memory cell corresponding to the active bank can be easily located, even if there are thousands of banks within the eDRAM. Once the memory cell corresponding to the active bank is located, the column redundancy information is retrieved for use in identifying the defective column of the active bank using a redundant decoder. If more than one group of datalines are provided for repair, multiple parallel decoding is utilized to locate multiple defective columns simultaneously and replace them simultaneously during a redundancy operation using a conventional multiplexer circuit. The page mode operation of the fuse latch array system ensures the redundancy operation is performed within one clock cycle.

    摘要翻译: 公开了一种用于具有微小区架构,宽数据带宽和宽内部总线宽度的嵌入式DRAM(eDRAM)的熔丝锁存阵列系统,用于定位所有熔丝信息用于冗余替换目的。 保险丝锁存阵列系统包括具有多个存储单元的熔丝锁存阵列,其中熔丝信息依次或并行扫描,或其组合,以在通电期间与常规熔丝锁定扫描协议兼容。 当保险丝信息存储在熔丝锁存器阵列中时,在页模式操作期间将其作为页访问。 被访问的页面包含对应于活动库的列冗余信息。 熔丝锁存器阵列由行和列进行解码,使得即使在eDRAM内有数千个存储体,也可以容易地定位对应于活动存储体的存储单元。 一旦与活动组相对应的存储单元被定位,则使用冗余解码器来检索列冗余信息以用于识别活动存储体的缺陷列。 如果提供了多组数据库进行修复,则使用多个并行解码同时定位多个有缺陷的列,并在使用常规多路复用器电路的冗余操作期间同时替换它们。 保险丝闩锁阵列系统的页面模式操作确保在一个时钟周期内执行冗余操作。

    Patterning microelectronic features without using photoresists
    30.
    发明授权
    Patterning microelectronic features without using photoresists 失效
    图案化微电子特征,而不使用光致抗蚀剂

    公开(公告)号:US06452110B1

    公开(公告)日:2002-09-17

    申请号:US09897889

    申请日:2001-07-05

    IPC分类号: H05K109

    摘要: A method and structure for producing metallic polymer conductor lines comprising of an alternative methodology to a traditional damascene approach, called a cloisonne or inverse damascene approach. The cloisonne approach comprises the steps of coating a photosensitive polymer such as pyrrole or aniline with a silver salt on a semiconductor substrate. Using standard photolithography and resist developing techniques, the conducting polymer is exposed to a wet chemical developer, removing a portion of the exposed conducting polymer region, leaving only conducting polymer lines on top of the substrate. Next, an insulating dielectric layer is deposited over the entire structure and a chemical mechanical polish planarization of the insulator is performed creating the conducting polymer lines. Included in another aspect of the invention is a method and structure for a self-planarizing interconnect material comprising a conductive polymer thereby reducing the number of processing steps relative to the prior art.

    摘要翻译: 一种用于生产金属聚合物导体线的方法和结构,其包括传统大马士革方法的替代方法,称为景泰蓝或逆大马士革方法。 景泰蓝方法包括在半导体衬底上用银盐将光敏聚合物如吡咯或苯胺涂覆的步骤。 使用标准光刻和抗蚀显影技术,将导电聚合物暴露于湿化学显影剂,除去暴露的导电聚合物区域的一部分,仅在基底顶部留下导电聚合物线。 接下来,在整个结构上沉积绝缘电介质层,并进行绝缘体的化学机械抛光平面化,产生导电聚合物线。 包括在本发明的另一方面中的是一种用于自平坦化互连材料的方法和结构,其包括导电聚合物,从而减少相对于现有技术的加工步骤的数量。