Abstract:
A photoresist composition for extreme ultraviolet (EUV) radiation and a method of manufacturing a semiconductor device, the photoresist composition includes a polymer resin; a photoacid generator; and a photoreactive additive that includes at least two diazonaphthoquinone (DNQ) groups, wherein the at least two DNQ groups are represented by Formula 1 or Formula 2 described herein.
Abstract:
A brush polymer for a photoresist, a photoresist composition, and a method of manufacturing an integrated circuit device, the brush polymer including a core and a plurality of side polymer chains, the plurality of side polymer chains being bonded to the core and extending from the core to form a bottle-brush polymer or a star-brush polymer, together with the core, wherein each of the plurality of side polymer chains includes a first repeating unit represented by Formula 1 and a second repeating unit represented by Formula 2:
Abstract:
A photo-decomposable compound includes an anion component including an adamantyl group and a cation component including a C5 to C40 cyclic hydrocarbon group and forming a complex with the anion component. At least one of the adamantyl group and the cyclic hydrocarbon group has a substituent, which decomposes by acid and generates an alkali soluble group. The substituent includes an acid-labile protecting group. A photoresist composition includes a chemically amplified polymer, the photo-decomposable compound, and a solvent. To manufacture an integrated circuit (IC) device, a photoresist film is formed using the photoresist composition on a feature layer, a first area of the photoresist film is exposed to generate a plurality of acids from the photo-decomposable compound in the first area, the chemically amplified polymer is deprotected due to the plurality of acids, and the first area is removed to form a photoresist pattern.
Abstract:
A photo-decomposable compound includes an anion component including an adamantyl group and a cation component including a C5 to C40 cyclic hydrocarbon group and forming a complex with the anion component. At least one of the adamantyl group and the cyclic hydrocarbon group has a substituent, which decomposes by acid and generates an alkali soluble group. The substituent includes an acid-labile protecting group. A photoresist composition includes a chemically amplified polymer, the photo-decomposable compound, and a solvent. To manufacture an integrated circuit (IC) device, a photoresist film is formed using the photoresist composition on a feature layer, a first area of the photoresist film is exposed to generate a plurality of acids from the photo-decomposable compound in the first area, the chemically amplified polymer is deprotected due to the plurality of acids, and the first area is removed to form a photoresist pattern.
Abstract:
A method and an apparatus for group communication in a mobile communication system are provided. The method includes receiving a first message including information related to a discontinuous reception (DRX) cycle from a network device, transmitting a second message based on the first message to at least one terminal, and transmitting data to the at least one terminal based on the information related to the DRX cycle.
Abstract:
A method and an apparatus for reducing delay in enhanced multimedia broadcast multicast services (eMBMS)-based group communication are provided. The method includes receiving the user packet, including information of a time stamp assigned by a broadcast/multicast service centre (BM-SC), from the BM-SC, and transmitting the user packet to a terminal through a physical multicast channel based on information of the time stamp, wherein the time stamp is assigned at an interval set to a value less than a multimedia broadcast multicast services (MBMS) scheduling period.
Abstract:
A method for group communication of a broadcasting server in a wireless communication system is provided. The method for group communication of a broadcasting server includes receiving a data packet from a content server, generating a transmission packet by copying the data packet, and transmitting the generated transmission packet to a base station.
Abstract:
An air sterilization module according to an example embodiment includes: a housing including an intake port and an exhaust port, a main body module provided inside the housing and including a fan configured to generate airflow, a display module including a display configured to be exposed to outside of the housing, and a fixing assembly comprising a fastener configured to separably fix the display module to the main body module, wherein the fixing assembly may include a fixing member comprising a guide rail or protrusion fixed to the main body module and a support member comprising a support configured to be assembled to the fixing member while supporting the display module, any one of the fixing member and the support member may include a guide rail extending in a direction in which the support member is assembled, and an other of the fixing member and the support member may include a guide protrusion that is inserted into the guide rail and is movable along the guide rail.
Abstract:
A dryer including a main body; a drum inside the main body to receive an object for drying; a heat pump to supply hot and dry air to the drum, and including an evaporator, compressor, and condenser, wherein the evaporator, compressor, and condenser are configured to circulate a refrigerant through the evaporator, the compressor, and the condenser; a condensate tank to store condensate generated by the evaporator; and a connection pipe between the condenser and the evaporator, with at least a portion of the connection pipe being in the condensate tank, wherein the dryer is configured so that refrigerant that has been heat-exchanged with external air in the condenser, and discharged from the condenser, then passes through the connection pipe so as to additionally exchange heat with the condensate in the condensate tank while passing through the at least a portion of the connection pipe in the condensate tank.
Abstract:
Provided is a photoresist composition including a chemically amplified polymer, a photoacid generator, a photo-decomposable quencher including a pyridinium-based material that generates a neutral material by exposure and acts as a base to neutralize an acid before exposure, and a solvent.