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公开(公告)号：US20220371138A1
公开(公告)日：2022-11-24
申请号：US17680633
申请日：2022-02-25
Applicant: Samsung Display Co., LTD.
Inventor： Doo Seon YU , Gyung Min BAEK , Hyun Eok SHIN , You Jong LEE , Myung Soo HUH
Abstract: An in-line manufacturing apparatus includes a carrier that transports a substrate, a plurality of process chambers subjected to a manufacturing process on the substrate transported through the carrier, and a cooling part disposed adjacent to the carrier and movable with the carrier.
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公开(公告)号：US20220024213A1
公开(公告)日：2022-01-27
申请号：US17213076
申请日：2021-03-25
Applicant: Samsung Display Co., Ltd.
Inventor： Jeong Won HAN , Myung Soo HUH
Abstract: An inkjet printing apparatus includes a surface acoustic wave module including an inner passage and a surface acoustic wave generator around the inner passage; and an outflow passage connected to the surface acoustic wave module to discharge ink, where the outflow passage includes a first outflow passage connected to the inner passage to discharge first ink particles and a second outflow passage connected to the inner passage to discharge second ink particles having an average diameter smaller than that of the first ink particles, and the surface acoustic wave generator is closer to the second outflow passage than the first outflow passage.
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公开(公告)号：US20190326122A1
公开(公告)日：2019-10-24
申请号：US16163629
申请日：2018-10-18
Applicant: Samsung Display Co., Ltd.
Inventor： Dong Kyun KO , Woo Jin KIM , Myung Soo HUH , In Kyo KIM , Keun Hee PARK
IPC: H01L21/28 , H01L29/51 , C23C16/452 , C23C16/455 , C23C16/448
Abstract: A deposition apparatus includes a chamber, a susceptor that supports a substrate in the chamber, an upper electrode facing the susceptor, a showerhead defining a gas inlet space between the upper electrode and the susceptor, a metal source storage to store a metal source supplied to the chamber, a vaporizer to vaporize the metal source, a first gas source to supply a first gas to move the metal source toward the vaporizer, a second gas source to supply a second gas to move the metal source in the vaporizer toward the chamber, a third gas source connected to the chamber to supply a third gas into a reaction space defined between the susceptor and the upper electrode such that the third gas reacts with the metal source, and a fourth gas source connected to the chamber to supply a fourth gas used to clean an inside of the chamber.
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24.发明申请公开(公告)号：US20150275362A1
公开(公告)日：2015-10-01
申请号：US14531170
申请日：2014-11-03
Applicant: Samsung Display Co., Ltd.
Inventor： Choel Min JANG , Suk Won JUNG , Myung Soo HUH
IPC: C23C16/455 , C23C16/458
CPC classification number: C23C16/45544 , C23C16/4409 , C23C16/45525 , C23C16/45563 , C23C16/45565 , C23C16/45574 , C23C16/458 , C23C16/4585
Abstract: An atomic layer deposition apparatus includes: a substrate support supporting a substrate; a first divider including a plurality of first division modules provided on the substrate support and selectively spraying a source gas, a reaction gas, and a purge gas to each of predetermined areas; and a second divider including a plurality of second division modules provided on the first divider and supplying the gases to the respective first division modules, wherein each of the plurality of second division modules is formed of a first through-hole and a second through-hole, and the gas passed through the first and second through-holes moves to the first division modules.
Abstract translation: 原子层沉积设备包括：支撑衬底的衬底支撑件; 第一分隔器，包括设置在所述基板支撑件上的多个第一分割模块，并且选择性地将源气体，反应气体和吹扫气体喷射到每个预定区域; 以及第二分隔器，其包括设置在所述第一分隔器上的多个第二分割模块，并将气体供应到相应的第一分割模块，其中所述多个第二分割模块中的每一个由第一通孔和第二通孔 并且通过第一和第二通孔的气体移动到第一分割模块。
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公开(公告)号：US20150190832A1
公开(公告)日：2015-07-09
申请号：US14288959
申请日：2014-05-28
Applicant: Samsung Display Co., Ltd.
Inventor： Jeong Ho YI , Sun Ho KIM , Cheol Rae JO , Myung Soo HUH
CPC classification number: B05C9/12 , B05D1/02 , B05D3/067 , B05D7/546 , H01L51/0005
Abstract: A thin film forming apparatus comprises a first storage unit, a first nozzle unit, a first light-irradiating unit, a second storage unit, a second nozzle unit, and a second light-irradiating unit. The first storage unit is configured to store a first organic material. The first nozzle unit is connected to the first storage unit and is configured to spray the first organic material stored in the first storage unit. The first light-irradiating unit is disposed adjacent to the first nozzle unit and is configured to irradiate light having a wavelength that cures the first organic material. The second storage unit is configured to store a second organic material. The second nozzle unit is disposed adjacent to the first nozzle unit, is connected to the second storage unit, and is configured to spray the second organic material stored in the second storage unit. The second light-irradiating unit is disposed adjacent to the second nozzle unit and is configured to irradiate light having a wavelength that cures the second organic material.
Abstract translation: 薄膜形成装置包括第一存储单元，第一喷嘴单元，第一光照单元，第二存储单元，第二喷嘴单元和第二光照单元。 第一存储单元被配置为存储第一有机材料。 第一喷嘴单元连接到第一存储单元，并被配置为喷射存储在第一存储单元中的第一有机材料。 第一光照射单元设置成与第一喷嘴单元相邻，并且被配置为照射具有固化第一有机材料的波长的光。 第二存储单元被配置为存储第二有机材料。 第二喷嘴单元设置成与第一喷嘴单元相邻，连接到第二存储单元，并且被配置为喷射存储在第二存储单元中的第二有机材料。 第二光照射单元与第二喷嘴单元相邻设置，并且被配置为照射具有固化第二有机材料的波长的光。
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Patent Agency Ranking
公开(公告)号：US20250135792A1
公开(公告)日：2025-05-01
申请号：US18800309
申请日：2024-08-12
Applicant: Samsung Display Co., LTD.
Inventor： Hee Jung LEE , Hong Gi MIN , Jong Sung KIM , Sang Jin LEE , Myung Soo HUH
Abstract: An ink-jet printing apparatus includes: a stage on which a substrate including first and second alignment marks is mounted; an ink-jet head part discharging ink; a mark measuring part measuring a first coordinate of each of the first and second alignment marks during a first compensation period, the mark measuring part measuring a second coordinate of the first alignment mark during a second compensation period; and a substrate fixing part holding the substrate. The substrate fixing part performs a first operation to move the substrate such that the first coordinates of the first and second alignment marks in a first direction align with each other during the first compensation period, and performs a second operation to move the substrate according to a result obtained by comparing the second coordinate of the first alignment mark with a reference coordinate of the first alignment mark during the second compensation period.
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公开(公告)号：US20250029819A1
公开(公告)日：2025-01-23
申请号：US18910046
申请日：2024-10-09
Applicant: Samsung Display Co., LTD.
Inventor： You Jong LEE , Nam Wook KANG , Cheol Lae ROH , Doo Seon YU , Jeong Il LEE , Myung Soo HUH
Abstract: A sputtering apparatus includes: a first cylindrical target and a second cylindrical target, which are arranged in a first direction and parallel to each other; a first magnet disposed in the first cylindrical target; a second magnet disposed in the second cylindrical target; and a substrate holder spaced apart from the first and second cylindrical targets in a second direction which is perpendicular to the first direction, wherein each of a first angle formed by a first imaginary straight line from a center of the first magnet to a cylindrical axis of the first cylindrical target with a first perpendicular line and a second angle formed by a second imaginary straight line from a center to of the second magnet to a cylindrical axis of the second cylindrical target with a second perpendicular line is in a range of about 30 degrees to about 180 degrees.
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公开(公告)号：US20240042780A1
公开(公告)日：2024-02-08
申请号：US18138236
申请日：2023-04-24
Applicant: Samsung Display Co., LTD.
Inventor： Sang Jin LEE , Hong Gi MIN , Sang Hyoung RYU , Myung Soo HUH
IPC: B41J29/393
CPC classification number: B41J29/393 , B41J2029/3935
Abstract: An ink-jet printing apparatus includes an ink-jet head unit including an ink-jet head, and a control device which controls an ink ejection timing of the ink-jet head and includes a comparator comparing first printing pattern information that is stored and second printing pattern information that is input with each other, a control signal generator generating a first head control signal based on the first printing pattern information when a difference between the first printing pattern information and the second printing pattern information is a reference value or less and generating a second head control signal different from the first head control signal based on the second printing pattern information when the difference between the first printing pattern information and the second printing pattern information exceeds the reference value, and a data output unit providing the first head control signal or the second head control signal to the ink-jet head unit.
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公开(公告)号：US20230356529A1
公开(公告)日：2023-11-09
申请号：US18353819
申请日：2023-07-17
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Jeong Won HAN , Myung Soo HUH
CPC classification number: B41J2/1707 , B05B15/52 , B41J2/17513 , H10K71/13
Abstract: An inkjet printing apparatus includes a surface acoustic wave module including an inner passage and a surface acoustic wave generator around the inner passage; and an outflow passage connected to the surface acoustic wave module to discharge ink, where the outflow passage includes a first outflow passage connected to the inner passage to discharge first ink particles and a second outflow passage connected to the inner passage to discharge second ink particles having an average diameter smaller than that of the first ink particles, and the surface acoustic wave generator is closer to the second outflow passage than the first outflow passage.
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公开(公告)号：US20230311404A1
公开(公告)日：2023-10-05
申请号：US17989758
申请日：2022-11-18
Applicant: Samsung Display Co., LTD.
Inventor： Kangwon LEE , Soo Beom JO , Dong Kyun KO , Kyungjoo MIN , Eun Chan LIM , Myung Soo HUH
CPC classification number: B29C59/002 , B29C59/046
Abstract: An imprint device according to an embodiment includes: a stage, which supports a substrate; a press roller, which presses a film with respect to the substrate; a first load cell and a second load cell, which are disposed corresponding to opposite ends of the press roller, respectively; and a controller, which monitors a release state of the film based on an output of the first load cell and an output of the second load cell.
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