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公开(公告)号：US20050016271A1
公开(公告)日：2005-01-27
申请号：US10488490
申请日：2002-09-02
IPC分类号： B81B3/00 , B81B7/00 , G01C19/56 , G01C19/5719 , G01P15/08 , G01P15/12 , G01P15/18 , H01L49/00
CPC分类号： G01P15/18 , B81B3/0051 , B81B2201/0235 , B81B2201/0242 , B81B2203/0181 , B81B2203/053 , B81B2203/058 , G01C19/5719 , G01P15/0802 , G01P15/123 , G01P2015/0842
摘要： A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.
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公开(公告)号：US06373264B1
公开(公告)日：2002-04-16
申请号：US09402724
申请日：1999-10-08
IPC分类号： G01R2726
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： An apparatus for detecting an impedance variable in response to a sensed physical amount of a sensor is provided which comprises an impedance-frequency conversion unit and a counter. The impedance-frequency conversion unit converts the sensor impedance to an oscillation signal a frequency of which corresponds to the sensor impedance. The impedance-frequency conversion unit comprises an impedance-voltage converter for providing a voltage corresponding to the sensor impedance, and a Wien bridge oscillator including an element an impedance of which varies in response to the voltage from the impedance-voltage converter, for generating the oscillation signal. The Wien bridge oscillator is capable of generating a square wave signal as the oscillation signal. The counter counts the number of waves (or wave number) of the oscillation signal in a predetermined time period to output a count value which can be handled as a digital signal.
摘要翻译： 提供了一种用于响应于感测到的传感器的物理量来检测阻抗变量的装置，其包括阻抗 - 频率转换单元和计数器。 阻抗 - 频率转换单元将传感器阻抗转换为与传感器阻抗相对应的频率的振荡信号。 阻抗 - 频率转换单元包括用于提供与传感器阻抗相对应的电压的阻抗 - 电压转换器，以及包括响应于来自阻抗 - 电压转换器的电压而变化的阻抗的元件的维恩桥式振荡器，用于产生 振荡信号。 维恩桥式振荡器能够产生方波信号作为振荡信号。 该计数器在预定时间周期内对振荡信号的波数（或波数）进行计数，以输出可作为数字信号处理的计数值。
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公开(公告)号：US06326795B1
公开(公告)日：2001-12-04
申请号：US09402699
申请日：1999-10-08
IPC分类号： G01R2726
CPC分类号： G01D5/2417 , G01D5/24 , G01D5/2405 , G01H11/06 , H04R5/04
摘要： A detection circuit which is capable of outputting a voltage proportional to a static capacitance of a sensor is provided, which comprises a voltage input terminal connected to receive an input voltage and an operational amplifier. The input voltage received at the voltage input terminal is changed between two different reference voltages. An inverting input terminal of the amplifier is connected to the voltage input terminal through a resistor, and a non-inverting input terminal of the amplifier is connected to the voltage input terminal through the sensor capacitance and to one of the reference voltages through a switch. An output voltage of the amplifier is connected to the inverting input terminal through a feedback circuit including a resistor and a switch. The switches are closed and the one of the reference voltages is supplied to the input terminal during an initialization cycle. The switches are opened and the other reference voltage is supplied to the input terminal during a measurement cycle. The operational amplifier outputs an output voltage which linearly varies in response to the sensor capacitance.
摘要翻译： 提供能够输出与传感器的静态电容成比例的电压的检测电路，其包括连接以接收输入电压的电压输入端子和运算放大器。 在电压输入端子处接收的输入电压在两个不同的参考电压之间变化。 放大器的反相输入端子通过电阻连接到电压输入端子，放大器的非反相输入端子通过传感器电容连接到电压输入端子，并通过开关连接到参考电压之一。 放大器的输出电压通过包括电阻和开关的反馈电路连接到反相输入端子。 在初始化周期期间，开关闭合，并且将参考电压中的一个提供给输入端。 开关断开，另一个参考电压在测量周期内提供给输入端。 运算放大器输出响应于传感器电容线性变化的输出电压。
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公开(公告)号：US20130089983A1
公开(公告)日：2013-04-11
申请号：US13643102
申请日：2011-04-04
申请人： Kippei Sugita , Kenji Matsuda , Hiroyuki Hashimoto , Muneo Harada
发明人： Kippei Sugita , Kenji Matsuda , Hiroyuki Hashimoto , Muneo Harada
IPC分类号： H01L21/283
CPC分类号： H01L21/283 , H01L21/0206 , H01L21/02063 , H01L21/31058 , H01L21/31138 , H01L21/76826 , H01L21/76828 , H01L21/76831 , H01L21/76898
摘要： The method includes forming a hole penetrating from one surface of a substrate to an electrode formed on the other surface of the substrate; forming an organic insulating film in the hole; removing at least a part of the organic insulating film formed in a bottom portion of the hole and not the organic insulating film formed on a side wall portion of the hole, to expose the electrode; cleaning an exposed surface of the electrode by using plasma of an inert gas; filling a conductive metal in the hole; removing at least a part of a surface of the organic insulating film by the reaction of oxygen plasma; and annealing the substrate in a dysoxidative atmosphere.
摘要翻译： 该方法包括形成从衬底的一个表面穿透到形成在衬底的另一个表面上的电极的孔; 在孔中形成有机绝缘膜; 除去形成在孔的底部的有机绝缘膜的至少一部分，而不是形成在孔的侧壁部上的有机绝缘膜，以露出电极; 通过使用惰性气体的等离子体清洁电极的暴露表面; 在孔中填充导电金属; 通过氧等离子体的反应去除有机绝缘膜的至少一部分表面; 并在氧化性气氛中退火底物。
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25.发明授权公开(公告)号：US08159256B2
公开(公告)日：2012-04-17
申请号：US12576111
申请日：2009-10-08
IPC分类号： G01R31/02
CPC分类号： G01R1/06716 , G01R1/06727 , Y10T29/49002
摘要： A method for manufacturing a probe needle having beams and a contactor placed on tips of the beams comprises preparing a Si wafer 20, forming a seed layer 21 on the Si wafer 20, and forming grooves in a desired shape of the beams on the seed layer 21 by patterning a photoresist 23. Subsequently, the grooves are filled up with metal-plated layers 24a, 24b to form the desired shape of beams.
摘要翻译： 用于制造具有光束的探针的方法和放置在光束的尖端上的接触器包括准备Si晶片20，在Si晶片20上形成晶种层21，并且在晶种层上形成期望形状的光束的凹槽 接着，用金属镀层24a，24b填充凹槽以形成所需的光束形状。
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公开(公告)号：US20110003078A1
公开(公告)日：2011-01-06
申请号：US12921643
申请日：2009-03-13
申请人： Kippei Sugita , Hiroyuki Hashimoto , Muneo Harada
发明人： Kippei Sugita , Hiroyuki Hashimoto , Muneo Harada
CPC分类号： H01L21/312 , B05D1/60 , B05D3/007 , B05D5/10 , H01L21/02126 , H01L21/02312
摘要： An aqueous solution containing an adhesion promoter in an amount of 20 vol. % or more is heated and vaporized to a temperature of 80 to 100° C. to produce a water-containing adhesion promoter vapor, and the water-containing adhesion promoter vapor is adhered to and condensed on a surface of a substrate, to cause a heating and dehydrating reaction by which the adhesion promoter is adhered to the surface of the substrate.
摘要翻译： 含有20体积％的粘合促进剂的水溶液 加热并蒸发％以上至80〜100℃的温度，生成含水粘合促进剂蒸气，将含水粘合促进剂蒸气粘附于基板表面并冷凝， 加热和脱水反应，其中粘附促进剂通过其附着到基材的表面。
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公开(公告)号：US20090045039A1
公开(公告)日：2009-02-19
申请号：US11886856
申请日：2006-03-20
申请人： Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
发明人： Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
IPC分类号： H01H9/00
CPC分类号： H01H1/0036 , B81B3/0054 , B81B2201/014 , B81B2203/053 , H01H1/24 , H01H37/46 , H01H67/22 , H01H2001/0042 , H01H2037/008
摘要： A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13 three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17 and the second wiring layer 13, and therefore close the switch 10.
摘要翻译： 第一布线层16设置在上基板15的下表面上的绝缘膜14上，而在下基板11上的绝缘膜12上设置三维交叉第一布线层16的第二布线层13。 悬臂17的一端与第一配线层16连接，另一端与第二配线层13相对设置，其间具有间隔。 热塑片19被布置在上基板15上以覆盖通孔18.热塑片19被加热的销20压靠在悬臂17上并变形，从而保持悬臂17和 第二布线层13，因此闭合开关10。
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公开(公告)号：US07428841B2
公开(公告)日：2008-09-30
申请号：US10545088
申请日：2004-02-10
申请人： Muneo Harada , Naoki Ikeuchi , Hiroyuki Hashimoto
发明人： Muneo Harada , Naoki Ikeuchi , Hiroyuki Hashimoto
CPC分类号： G01C9/06 , G01P15/123 , G01P15/18 , G01P2015/084 , G01P2015/0842
摘要： In an acceleration sensor detecting inclined displacement of a predetermined article from a basic position, the acceleration sensor (10) includes a sensor chip having a detection plane including one detection axis or two crossing detection axes detecting the inclined displacement. An axis orthogonal to the detection plane of the sensor chip is disposed in parallel with a standard plane of the article in the basic position. Then, the sensor chip obtains an output signal according to the inclined displacement of the standard plane.
摘要翻译： 在加速度传感器检测预定物品从基本位置的倾斜位移时，加速度传感器（10）包括具有检测平面的传感器芯片，检测平面包括一个检测轴或检测倾斜位移的两个检测轴。 与传感器芯片的检测平面垂直的轴与基本位置的物品的标准平面平行设置。 然后，传感器芯片根据标准平面的倾斜位移获得输出信号。
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公开(公告)号：US06335642B1
公开(公告)日：2002-01-01
申请号：US09381673
申请日：1999-09-22
IPC分类号： H03D100
CPC分类号： G01R27/2605
摘要： A impedance-to-voltage converter for converting an impedance of a target to a voltage is described which comprises an operational amplifier (OP), a coaxial cable consisting a signal line and shielding element(s), and an AC signal generator. A feedback impedance circuit is connected between output and inverting terminals of the OP, and whereby a non-inverting terminal and the inverting terminal are an imaginal-short condition. One end of the signal line is connected to the inverting input terminal of the OP and the other end is connected to one electrode of the target and the AC signal generator is connected to the non-inverting input terminal of the OP. The shielding element comprises at least one shielding layer surrounding the signal line and is connected to the non-inverting input terminal of the OP, and thus the signal line and the shielding layer are the same voltage due to the imaginal-short of the input terminals of the OP, resulting in reduction of noise on the signal line.
摘要翻译： 描述了用于将目标的阻抗转换为电压的阻抗 - 电压转换器，其包括运算放大器（OP），由信号线和屏蔽元件组成的同轴电缆以及AC信号发生器。 反馈阻抗电路连接在OP的输出端和反相端之间，由此非反相端和反相端都是成像短路状态。 信号线的一端连接到OP的反相输入端子，另一端连接到目标的一个电极，并且AC信号发生器连接到OP的非反相输入端子。 屏蔽元件包括围绕信号线的至少一个屏蔽层，并且连接到OP的非反相输入端子，因此由于输入端子的想象缺陷，信号线和屏蔽层是相同的电压 的OP，导致信号线上的噪声降低。
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公开(公告)号：US06194888B1
公开(公告)日：2001-02-27
申请号：US09402385
申请日：1999-10-04
IPC分类号： H03H100
CPC分类号： G01R27/2605
摘要： An impedance-to-voltage converter utilizes an operational amplifier to convert an impedance into a voltage without suffering from the influence of stray capacitances. The impedance-to-voltage converter is formed of an operational amplifier which has an imaginary short-circuit state between an inverting input and a non-inverting input thereof when an impedance element is connected between an output and the inverting input, a shielding line for shielding a line for connecting the impedance element to the inverting input, an AC signal generator connected to the non-inverting input, and a shielding line for shielding the signal line. The shielding lines are connected to the non-inverting input.
摘要翻译： 阻抗 - 电压转换器利用运算放大器将阻抗转换成电压而不受杂散电容的影响。 阻抗 - 电压转换器由运算放大器形成，当在输出端和反相输入端之间连接有阻抗元件时，其运算放大器具有反相输入端和非反相输入端之间的假想短路状态， 屏蔽用于将阻抗元件连接到反相输入的线，连接到非反相输入的AC信号发生器和用于屏蔽信号线的屏蔽线。 屏蔽线连接到非反相输入。
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