公开(公告)号：US20060118719A1

公开(公告)日：2006-06-08

申请号：US11290688

申请日：2005-12-01

申请人： Kenji Watanabe ,  Hirosi Sobukawa ,  Nobuharu Noji ,  Tohru Satake ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Mamoru Nakasuji ,  Masahiro Hatakeyama ,  Takeshi Murakami ,  Yuichiro Yamazaki ,  Ichirota Nagahama ,  Takamitsu Nagai ,  Kazuyoshi Sugihara

发明人： Kenji Watanabe ,  Hirosi Sobukawa ,  Nobuharu Noji ,  Tohru Satake ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Mamoru Nakasuji ,  Masahiro Hatakeyama ,  Takeshi Murakami ,  Yuichiro Yamazaki ,  Ichirota Nagahama ,  Takamitsu Nagai ,  Kazuyoshi Sugihara

IPC分类号： G21K7/00

CPC分类号： H01J37/28 ,  H01J37/224 ,  H01J37/244 ,  H01J2237/006 ,  H01J2237/20221 ,  H01J2237/2445 ,  H01J2237/2817

摘要： An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.

公开(公告)号：US5591970A

公开(公告)日：1997-01-07

申请号：US527583

申请日：1995-09-13

申请人： Haruki Komano ,  Akira Matsuura ,  Hiroko Nakamura ,  Kazuyoshi Sugihara

发明人： Haruki Komano ,  Akira Matsuura ,  Hiroko Nakamura ,  Kazuyoshi Sugihara

IPC分类号： G01Q30/08 ,  G03F1/30 ,  G03F1/72 ,  G03F1/74 ,  H01J37/305 ,  H01L21/203 ,  H01L21/302 ,  H01L21/31 ,  H01L21/316 ,  H01J37/30

CPC分类号： H01J37/3056 ,  H01J2237/006 ,  H01J2237/024 ,  H01J2237/31744

摘要： A charged beam apparatus of this invention comprises a sample table on which a sample is placed, a column for irradiating a charged beam on a surface of the sample, a gas supply mechanism having a gas supply opening for injecting a gas to an irradiated position of the charged beam, and a driving mechanism for moving the gas supply opening parallel to the surface of the sample in order to position the gas supply opening, and moving the gas supply opening perpendicularly to the surface of the sample in order to set a distance from the gas supply opening to a processing position. This allows the gas pressure to be stably held with a high accuracy at the processing position. Accordingly, desired deposition or etching can be performed with a high accuracy, and this further improves the quality of the mask.

摘要翻译： 本发明的充电光束装置包括：样品台，放置样品的样品台;用于在样品表面照射带电束的色谱柱;气体供给机构，具有用于将气体注入照射位置的气体供给口 带电束，以及用于使气体供给开口平行于样品表面移动以便定位气体供应开口的驱动机构，并且使气体供给开口垂直于样品的表面移动，以设定距离 气体供应开口到处理位置。 这样可以在加工位置高精度地稳定地保持气体压力。 因此，可以高精度地进行期望的沉积或蚀刻，这进一步提高了掩模的质量。

公开(公告)号：US5523576A

公开(公告)日：1996-06-04

申请号：US213041

申请日：1994-03-15

申请人： Tooru Koike ,  Ichiro Mori ,  Yuji Takigami ,  Kazuyoshi Sugihara ,  Atsushi Miyagaki ,  Hideo Kusakabe

发明人： Tooru Koike ,  Ichiro Mori ,  Yuji Takigami ,  Kazuyoshi Sugihara ,  Atsushi Miyagaki ,  Hideo Kusakabe

IPC分类号： H01J37/304 ,  G01N23/225

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/304 ,  H01J2237/3175

摘要： In a charged beam drawing apparatus for drawing a desired pattern on a sample by deflecting a charged beam on the sample while continuously moving a stage on which the sample is placed, a mark having a line-and-space pattern, in which a plurality of heavy metal marks each having a width equal to a side of the charged beam are arranged with spaces each equal to the width between them, is formed on the sample. The charged beam is radiated onto the mark while the position of the beam is fixed, and at the same time the stage is continuously moved in the longitudinal direction of the mark, thereby detecting a reflected beam from the mark. On the basis of the signal of the detected reflected beam, a relative vibration during the continuous movement of the stage is measured. This makes it possible to measure the relative vibration produced by the continuous movement of the stage, resulting in an increase in drawing accuracy.

摘要翻译： 在一种带电波束牵伸装置中，用于通过使样品上的带电波束偏转，同时连续移动放置样品的载物台，从而在样品上绘制所需图案，具有线间距图案的标记，其中多个 在样品上形成各自具有等于带电束侧的宽度的重金属标记，每个间隔均等于它们之间的宽度。 充电光束在光束的位置被固定的同时被放射到标记上，并且同时在标记的纵向方向上连续地移动平台，从而从标记检测反射光束。 基于检测到的反射光束的信号，测量在该阶段的连续运动期间的相对振动。 这使得可以测量由台的连续运动产生的相对振动，导致拉拔精度的提高。

公开(公告)号：US4945329A

公开(公告)日：1990-07-31

申请号：US260133

申请日：1988-10-19

申请人： Kazuyoshi Sugihara ,  Ichiro Arinobu

发明人： Kazuyoshi Sugihara ,  Ichiro Arinobu

IPC分类号： H01H71/48 ,  H01H83/20

CPC分类号： H01H71/48 ,  H01H83/20

摘要： A tripping device with burning prevention switch has a electromagnet 10 and a burning prevention switch 14 both of which are cased in each separate insulating bodies. The electromagnet 10 and the burning prevention switch 14 are combined by engagement of projections 15, 16, provided on the burning prevention switch 14 and a hollow 12 and a hole 13, respectively, that are provided on the electromagnet 10.

摘要翻译： 具有防止燃烧开关的脱扣装置具有两个电磁铁10和防燃开关14，两个电磁铁10和防火开关14都装在每个分开的绝缘体中。 电磁铁10和防燃烧开关14通过设置在防火开关14上的突起15,16和分别设置在电磁体10上的中空部12和孔13的卡合而组合。

公开(公告)号：US5949076A

公开(公告)日：1999-09-07

申请号：US804672

申请日：1997-02-25

申请人： Kenji Ohtoshi ,  Munehiro Ogasawara ,  Jun Takamatsu ,  Toru Koike ,  Kazuyoshi Sugihara

发明人： Kenji Ohtoshi ,  Munehiro Ogasawara ,  Jun Takamatsu ,  Toru Koike ,  Kazuyoshi Sugihara

IPC分类号： H01J37/02 ,  H01J37/147 ,  H01J49/22

CPC分类号： H01J37/02 ,  H01J37/1477 ,  H01J2237/022

摘要： A charged beam applying apparatus comprises a column at least having a charged beam generation section and optical system for controlling the charged beam and a chamber for holding a specimen in place which is exposed with the charged beam. At least one inner portion of the column is formed of a specific material whose an atomic number is equal or less than 22. When a contamination is cleaned off in the column through the utilization of an oxidation effect, an oxide film is sometimes formed inside the column. The electric charging of the oxide film causes a beam control error. The specific material such as the metal of the atomic number causes very much less such error. This is because such specific material involves less emission of secondary electrons and less electric charging in the oxide film formed.

摘要翻译： 带电波束施加装置包括至少具有带电波束产生部分和用于控制带电波束的光学系统的柱和用于将样本保持在用充电束暴露的适当位置的室。 柱的至少一个内部部分由原子序数等于或小于22的特定材料形成。当通过利用氧化效应在柱中清除污染物时，有时会在其内部形成氧化物膜 柱。 氧化膜的充电引起光束控制误差。 诸如原子序号的金属的具体材料导致非常少的这种误差。 这是因为这种具体材料在形成的氧化膜中涉及较少的二次电子的发射和较少的电荷。

公开(公告)号：US5539211A

公开(公告)日：1996-07-23

申请号：US365825

申请日：1994-12-29

申请人： Kenji Ohtoshi ,  Itsuko Sakai ,  Yuichiro Yamazaki ,  Jun Takamatsu ,  Munehiro Ogasawara ,  Kazuyoshi Sugihara

发明人： Kenji Ohtoshi ,  Itsuko Sakai ,  Yuichiro Yamazaki ,  Jun Takamatsu ,  Munehiro Ogasawara ,  Kazuyoshi Sugihara

IPC分类号： H01J37/18 ,  B08B7/00 ,  H01J37/30 ,  H01L21/027

CPC分类号： H01J37/32862 ,  B08B7/0035 ,  G03F7/70925 ,  H01J37/3002 ,  H01J2237/022

摘要： A charged beam apparatus comprises a source tank provided outside the column and containing a plasma source, a plasma generating apparatus for generating plasma from a plasma source supplied from the source tank, gate valves and an exhausting pump for introducing plasma generated by the plasma generating apparatus into the column and for exhausting the plasma therefrom, and an O-ring for restricting a passage of plasma in the column such that those portions of cleaning portions to be cleaned to which internal contaminants stick are mainly exposed to plasma. Therefore, it is possible to generation of an oxide film, a fluoride film, or the likes which cause drifting can be restricted.

摘要翻译： 带电波束装置包括：设置在该列外部并包含等离子体源的源极槽，用于从源极箱提供的等离子体源产生等离子体的等离子体产生装置，闸阀和用于引入由等离子体产生装置产生的等离子体的排气泵 并且用于排出等离子体的O形环和用于限制柱中等离子体通过的O形环，使得内部污染物粘附的待清洁的清洁部分的那些部分主要暴露于等离子体。 因此，可以限制产生漂移的氧化膜，氟化物膜等。

公开(公告)号：USD334174S

公开(公告)日：1993-03-23

申请号：US774284

申请日：1991-10-09

申请人： Setsuo Hosogai ,  Hiroshi Fujii ,  Yoshiaki Matsumoto ,  Kazuyoshi Sugihara ,  Shingo Maeda ,  Shinji Yokota ,  Masakatsu Suzuki

设计人： Setsuo Hosogai ,  Hiroshi Fujii ,  Yoshiaki Matsumoto ,  Kazuyoshi Sugihara ,  Shingo Maeda ,  Shinji Yokota ,  Masakatsu Suzuki

公开(公告)号：US4695814A

公开(公告)日：1987-09-22

申请号：US870326

申请日：1986-06-03

申请人： Matsumoto Yoshiaki ,  Shinji Yamagata ,  Kazuyoshi Sugihara

发明人： Matsumoto Yoshiaki ,  Shinji Yamagata ,  Kazuyoshi Sugihara

IPC分类号： H01H73/22 ,  H01H1/58 ,  H01H71/16 ,  H01H75/08

CPC分类号： H01H71/164 ,  H01H1/5822

摘要： A circuit breaker having a thermal tripping device comprising a bimetal element and a heater has a holding member attached to the stationary part of the bimetal element, for holding the bimetal element and the heater at respective first end parts thereof. The holding member has an arm connected to a flexible copper wire and generates heat when an over-current flows through it, the arm conducting this heat to the attached end part of the bimetal element to cause the bimetal element to bend and deflect a second end thereof to provide circuit breaking action.

摘要翻译： 具有包括双金属元件和加热器的热跳闸装置的断路器具有附接到双金属元件的固定部分的保持构件，用于将双金属元件和加热器保持在其相应的第一端部处。 保持构件具有连接到柔性铜线的臂并且当过电流流过其时产生热量，臂将该热量传导到双金属元件的附接端部，以使双金属元件弯曲并偏转第二端 以提供断路动作。

公开(公告)号：US4578607A

公开(公告)日：1986-03-25

申请号：US664964

申请日：1984-10-26

申请人： Toru Tojo ,  Kazuyoshi Sugihara

发明人： Toru Tojo ,  Kazuyoshi Sugihara

IPC分类号： H02N2/00 ,  H01L41/09 ,  H02N2/10 ,  H01L41/08

CPC分类号： H02N2/101

摘要： In a precise rotation mechanism for slightly rotating an object, a drive disk is placed on a flat and smooth surface of a base and rotating disk is mounted on the disk surface of the drive disk and rotatably supported by a pivot bearing on a coupling section of the drive disk. Fixed sections of the drive disk are fixed on the base and movable sections of the drive disk are tiltably coupled to the fixed sections through the coupling section by elastic hinges and also coupled to the fixed sections by driving members made of piezoelectric elements, which are elongated/contracted upon application of a voltage to slightly move the movable sections. Fixing members made of the piezoelectric elements are respectively fixed to the movable sections. When one of the fixing members is contracted, the rotating disk is urged by one of the fixing members against the movable sections and is movable together with the movable sections.

摘要翻译： 在用于稍微旋转物体的精确旋转机构中，驱动盘被放置在基座的平坦且平滑的表面上，并且旋转盘安装在驱动盘的盘表面上并且由枢转轴承可旋转地支撑在联接部分 驱动盘。 驱动盘的固定部分固定在基座上，驱动盘的可移动部分通过弹性铰链通过联接部分可转动地连接到固定部分，并且还通过由压电元件制成的驱动部件连接到固定部分 施加电压以稍微移动可动部分时收缩。 由压电元件制成的固定件分别固定在可动部分上。 当固定构件中的一个收缩时，旋转盘被固定构件中的一个推压到可动部分上，并且与可动部分一起移动。

公开(公告)号：US4532423A

公开(公告)日：1985-07-30

申请号：US495486

申请日：1983-05-17

申请人： Toru Tojo ,  Kazuyoshi Sugihara

发明人： Toru Tojo ,  Kazuyoshi Sugihara

IPC分类号： H01J37/28 ,  G01R1/073 ,  G01R31/26 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/02 ,  G01N23/00

CPC分类号： H01L22/00 ,  G01R31/305 ,  H01L2924/0002

摘要： An IC tester including a specimen chamber and an electron optical column for radiating an electron beam to a specimen placed in the specimen chamber, wherein a fixed table is attached to a Z table in the specimen chamber and includes downwardly protruding spring contact pins which are connected to lead wires led outside of the specimen chamber. A probe card unit for testing an IC wafer is provided on the upper surface of the fixed table and includes electric terminals having the same positional relation as that of the spring contact pins. A probe card unit fixing mechanism is attached to the undersurface of the fixed table and is so arranged that the probe card unit can be slid laterally along the undersurface of the fixed table and then upward to press the probe card unit against the undersurface of the fixed table and to bring the spring contact pins into electrical contact with their corresponding probe card terminals.

摘要翻译： 一种IC测试仪，包括用于向放置在样本室中的样本辐射电子束的样本室和电子光学柱，其中固定台附着在样品室中的Z台上，并且包括连接的向下突出的弹簧接触针 将导线引导到样品室外。 用于测试IC晶片的探针卡单元设置在固定台的上表面上，并且包括具有与弹簧接触针相同的位置关系的电端子。 探针卡单元固定机构安装在固定台的下表面上，并且布置成使得探针卡单元可沿着固定台的下表面横向滑动，然后向上以将探针卡单元压靠固定的下表面 并将弹簧触针与其相应的探针卡端子电接触。