公开(公告)号：US20140110800A1

公开(公告)日：2014-04-24

申请号：US14058806

申请日：2013-10-21

申请人： Johannes CLASSEN ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner

发明人： Johannes CLASSEN ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner

IPC分类号： B81C1/00 ,  B81B3/00

CPC分类号： B81C1/00015 ,  B81B3/0018 ,  B81B7/0058

摘要： A manufacturing method for a cap, for a hybrid vertically integrated component having a MEMS component a relatively large cavern volume having a low cavern internal pressure, and a reliable overload protection for the micromechanical structure of the MEMS component. A cap structure is produced in a flat cap substrate in a multistep anisotropic etching, and includes at least one mounting frame having at least one mounting surface and a stop structure, on the cap inner side, having at least one stop surface, the surface of the cap substrate being masked for the multistep anisotropic etching with at least two masking layers made of different materials, and the layouts of the masking layers and the number and duration of the etching steps being selected so that the mounting surface, the stop surface, and the cap inner side are situated at different surface levels of the cap structure.

摘要翻译： 一种用于具有MEMS部件的混合垂直集成部件的盖的制造方法，具有较低的洞穴内部压力的相对较大的洞穴体积以及用于MEMS部件的微机械结构的可靠的过载保护。 在多步骤各向异性蚀刻中，在平盖基板中制造盖结构，并且包括至少一个安装框架，该安装框架具有至少一个安装表面和止动结构，在盖内侧具有至少一个止动表面， 掩模基板被掩模用于具有由不同材料制成的至少两个掩模层的多步各向异性蚀刻，并且选择掩模层的布局以及蚀刻步骤的数量和持续时间，使得安装表面，止动表面和 帽内侧位于帽结构的不同表面水平处。

公开(公告)号：US20130327163A1

公开(公告)日：2013-12-12

申请号：US13992136

申请日：2011-10-14

申请人： Tjalf Pirk ,  Thomas Wagner ,  Ando Feyh ,  Georg Bischopink ,  Axel Franke

发明人： Tjalf Pirk ,  Thomas Wagner ,  Ando Feyh ,  Georg Bischopink ,  Axel Franke

IPC分类号： G01D21/02

CPC分类号： G01D21/02 ,  G01C19/5783 ,  G01P1/023 ,  H01L25/0657 ,  H01L2224/16145 ,  H01L2224/16245 ,  H01L2224/48145 ,  H01L2224/48245 ,  H01L2224/48247 ,  H01L2224/73257 ,  H01L2225/06506 ,  H01L2225/06513 ,  Y10T29/49128 ,  H01L2924/00012

摘要： A microelectromechanical sensor module includes a sensing mechanism for measuring an acceleration, pressure, air humidity or the like, a control mechanism for controlling the sensing mechanism, an energy supply mechanism for supplying the sensor module with energy, and a transmission mechanism for transmitting signals of the sensing mechanism. At least three of the mechanisms are integrated at the chip level in at least one chip in each case. A corresponding method is implemented to produce the microelectromechanical sensor module.

摘要翻译： 微机电传感器模块包括用于测量加速度，压力，空气湿度等的感测机构，用于控制感测机构的控制机构，用于向传感器模块提供能量的能量供应机构，以及用于传送信号的传输机构 传感机构。 在每种情况下，至少有三个机构在芯片级集成在至少一个芯片中。 实现相应的方法来产生微机电传感器模块。

公开(公告)号：US08492188B2

公开(公告)日：2013-07-23

申请号：US13296923

申请日：2011-11-15

申请人： Heiko Stahl ,  Christina Leinenbach ,  Axel Franke ,  Jochen Reinmuth ,  Ando Feyh ,  Christian Rettig

发明人： Heiko Stahl ,  Christina Leinenbach ,  Axel Franke ,  Jochen Reinmuth ,  Ando Feyh ,  Christian Rettig

IPC分类号： H01L21/00

CPC分类号： B81C1/00777

摘要： A method for producing a micromechanical component is described. The method includes providing a substrate having a layer system including an insulating material situated on the substrate, a conductive layer section and a protective layer structure connected to the conductive layer section, which borders a section of the insulating material. The method furthermore includes carrying out an isotropic etching process for removing a part of the insulating material, the conductive layer section and the protective layer structure preventing the removal of the bordered section of the insulating material; and a structural element being developed, which includes the conductive layer section, the protective layer structure and the bordered section of the insulating material.

摘要翻译： 对微机械部件的制造方法进行说明。 该方法包括提供具有包括位于基板上的绝缘材料的层系统的基板，与导电层部分连接的导电层部分和保护层结构，其与绝缘材料的一部分相接触。 该方法还包括进行用于去除绝缘材料的一部分，导电层部分和保护层结构的各向同性蚀刻工艺，以防止去除绝缘材料的边界部分; 以及正在开发的结构元件，其包括导电层部分，保护层结构和绝缘材料的边界部分。

公开(公告)号：US08381570B2

公开(公告)日：2013-02-26

申请号：US12927345

申请日：2010-11-12

申请人： Torsten Ohms ,  Axel Franke

发明人： Torsten Ohms ,  Axel Franke

IPC分类号： G01P21/00 ,  G01P15/18

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082

摘要： A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.

摘要翻译： 一种用于调整加速度传感器的方法，所述加速度传感器包括基板和地震块，所述加速度传感器具有在第一侧上附接到所述基板的第一和另外的第一电极，所述地震质量块的对电极位于所述第一和第二电极之间 加速度传感器在第二侧具有另外的第二电极，在与第二侧相反的第四侧具有另外的第四电极，在第一步骤中将基本上相等的第一激励电压施加到第一和第二电极，用于激发第一偏转 所述地震质量沿着第一方向，所述第一偏转在第二步骤中通过向所述另外的第二和第四电极施加第一补偿电压来补偿。

公开(公告)号：US20120291543A1

公开(公告)日：2012-11-22

申请号：US13558772

申请日：2012-07-26

申请人： Christian RETTIG ,  Axel Franke ,  Ando Feyh

发明人： Christian RETTIG ,  Axel Franke ,  Ando Feyh

IPC分类号： B81B3/00 ,  G01P15/00

CPC分类号： G01C19/56 ,  B81B7/0041 ,  B81B7/02 ,  B81C2203/0109 ,  G01P15/0802 ,  Y10T29/49144 ,  Y10T29/49146 ,  Y10T428/13

摘要： A microsystem, e.g., a micromechanical sensor, has a first cavity which is sealed off from the surroundings and a second cavity which is sealed off from the surroundings. The first cavity is bounded by a first bond joint and the second cavity is bounded by a second bond joint. Either the first bond joint or the second bond joint is a eutectic bond joint or a diffusion-soldered joint.

摘要翻译： 微系统，例如微机械传感器，具有与周围环境密封的第一空腔和与周围环境密封的第二空腔。 第一腔体由第一接合接头限定，第二腔体由第二接合接头限定。 第一接合接头或第二接合接头是共晶接合接头或扩散焊接接头。

公开(公告)号：US20110192229A1

公开(公告)日：2011-08-11

申请号：US12703516

申请日：2010-02-10

申请人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

发明人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

IPC分类号： G01P15/125 ,  H05K13/00

CPC分类号： G01R33/0286 ,  Y10T29/49002

摘要： A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

摘要翻译： 公开了一种微机电系统（MEMS）。 MEMS包括基板，从基板向上延伸的第一枢轴，第一杠杆臂，第一纵向轴线在基板上方延伸并且可枢转地安装到第一枢轴上，用于围绕第一枢转轴线枢转，第一电容器层形成在第一枢转轴上 基板，位于第一杠杆臂的第一电容器部分下方的位置处;第二电容器层，形成在第一杠杆臂的第二电容器部分下方的位置处的基板上，其中第一枢轴在第一杠杆臂之间的位置处支撑第一杠杆臂， 所述第一电容器部分和所述第二电容器部分沿着所述第一纵向轴线延伸，以及第一导体部件，其延伸穿过所述第一纵向轴线并与所述第一枢转轴线间隔开。

公开(公告)号：US20110174076A1

公开(公告)日：2011-07-21

申请号：US12308632

申请日：2007-11-14

申请人： Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

发明人： Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

IPC分类号： G01P15/02

CPC分类号： G01P15/18 ,  G01P15/125 ,  G01P2015/084

摘要： A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.

摘要翻译： 微机械加速度传感器包括基板，平行于基板平面延伸并且部分地连接到基板的弹性隔膜，并且具有可以垂直于基板平面偏转的表面区域，以及地震块的中心 重力位于弹性隔膜的平面之外。 地震质量在位于弹性膜片的区域之外的衬底区域上延伸一段距离，其包括由多个电极组成的系统，每个电极与地震质量体的相对定位的区域在电路中形成电容器。 在其中心区域，抗震块附着在弹性隔膜的表面区域中的弹性隔膜，弹性隔膜可能垂直于基板平面偏转。

公开(公告)号：US20110088469A1

公开(公告)日：2011-04-21

申请号：US12513834

申请日：2007-11-08

申请人： Reinhard Neul ,  Johannes Classen ,  Sebastian Gracki ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Kersten Kehr ,  Christian Gerhardt

发明人： Reinhard Neul ,  Johannes Classen ,  Sebastian Gracki ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Kersten Kehr ,  Christian Gerhardt

IPC分类号： G01C19/56

CPC分类号： G01C19/5712

摘要： A method and system are provided including a rotation-rate sensor having a substrate, a bearing, a vibrating structure suspended on the bearing by springs in a rotatable manner for performing a planar driving vibration motion, and drive means for producing the planar driving vibration motion of the vibrating structure. The rotation-rate sensor has first evaluation means for detecting a rotation in a first axis of rotation and second evaluation means for detecting a rotation in a second axis of rotation.

摘要翻译： 提供了一种方法和系统，其包括旋转速率传感器，其具有基板，轴承，以可旋转的方式由弹簧悬挂在轴承上的振动结构，用于执行平面驱动振动运动;以及驱动装置，用于产生平面驱动振动运动 的振动结构。 旋转速率传感器具有用于检测第一旋转轴线的旋转的第一评估装置和用于检测第二旋转轴线的旋转的第二评估装置。

公开(公告)号：US20130327147A1

公开(公告)日：2013-12-12

申请号：US13880388

申请日：2011-09-19

申请人： Ando Feyh ,  Christina Leinenbach ,  Axel Franke ,  Gary O'Brien

发明人： Ando Feyh ,  Christina Leinenbach ,  Axel Franke ,  Gary O'Brien

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0831

摘要： A micromechanical device measures an acceleration, a pressure or the like. It comprises a substrate having at least one fixed electrode, a seismic mass moveably arranged on the substrate, at least one ground electrode, which is arranged on the seismic mass, and resetting means for returning the seismic mass into an initial position, wherein the fixed electrode and the ground electrode are configured in one measurement plane for measuring an acceleration, a pressure or the like in the measurement plane, and wherein the fixed electrode and the ground electrode are configured for measuring an acceleration, pressure or the like acting on the seismic mass perpendicular to the measurement plane. The disclosure likewise relates to a corresponding method and a corresponding use.

摘要翻译： 微机械装置测量加速度，压力等。 它包括具有至少一个固定电极的基板，可移动地布置在基板上的地震块，布置在地震块上的至少一个接地电极，以及用于使地震块返回初始位置的复位装置，其中固定 电极和接地电极被配置在一个测量平面中，用于测量测量平面中的加速度，压力等，并且其中固定电极和接地电极被配置为测量作用在地震上的加速度，压力等 质量垂直于测量平面。 本公开同样涉及相应的方法和相应的用途。

公开(公告)号：US08566057B2

公开(公告)日：2013-10-22

申请号：US12806316

申请日：2010-08-09

申请人： Axel Franke ,  Alexander Buhmann

发明人： Axel Franke ,  Alexander Buhmann

IPC分类号： G01P21/00

CPC分类号： G01P21/00

摘要： A method for self-adjustment of a triaxial acceleration sensor during operation includes: calibrating the sensor; checking the self-adjustment for an interfering acceleration, with the aid of a measurement equation and estimated values for sensitivity and offset; repeating the adjustment if an interfering acceleration is recognized; and accepting the estimated values for sensitivity and offset as calibration values if an interfering acceleration is not recognized. The step of checking the self-adjustment includes: estimating sensitivity and/or offset and the variance thereof; determining an innovation as the difference between a measured value of the measurement equation and an estimated value of the measurement equation; testing the innovation for a normal distribution; and recognizing the interfering acceleration in the event of a deviation from the normal distribution.

摘要翻译： 在运行过程中三轴加速度传感器的自调节方法包括：校准传感器; 通过测量方程和灵敏度和偏移的估计值来检查干扰加速度的自调整; 如果识别到干扰加速度则重复该调整; 并且如果不识别到干扰加速度，则接受灵敏度和偏移的估计值作为校准值。 检查自我调整的步骤包括：估计灵敏度和/或偏移及其方差; 将创新确定为测量方程的测量值与测量方程式的估计值之差; 测试创新正常分配; 并且在偏离正态分布的情况下识别干扰加速度。