Magnetic head having a hexagonal write pole tip
    21.
    发明申请
    Magnetic head having a hexagonal write pole tip 审中-公开
    具有六角形写入极尖的磁头

    公开(公告)号:US20080002309A1

    公开(公告)日:2008-01-03

    申请号:US11899513

    申请日:2007-09-05

    IPC分类号: G11B5/127

    摘要: A magnetic head is disclosed which includes a hexagonal write head pole tip, having a P3 pole tip having a rectangular portion in which the track width is established, and a beveled portion having beveled wall portions. Also disclosed is a disk drive having a magnetic head having a hexagonal pole tip.

    摘要翻译: 公开了一种磁头,其包括六边形写头磁极尖端,具有具有矩形部分的轨道宽度建立的P3极尖端和具有斜壁部分的斜面部分。 还公开了一种具有具有六角柱顶端的磁头的磁盘驱动器。

    Method for independent trackwidth and wall angle control and hexagonal write head
    23.
    发明申请
    Method for independent trackwidth and wall angle control and hexagonal write head 失效
    独立轨道宽度和角度控制和六角形写头的方法

    公开(公告)号:US20060152850A1

    公开(公告)日:2006-07-13

    申请号:US11035090

    申请日:2005-01-12

    IPC分类号: G11B5/127

    摘要: A method is disclosed for independently controlling track width and bevel angle of a write pole tip having a P3 pole tip for perpendicular recording. The method includes establishing the track width in a portion of the P3 layer material. A portion of this portion having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion having a bevel angle. The protected portion produces a rectangular portion which together with the beveled portion produce a hexagonal pole tip. Also disclosed is a magnetic head having a hexagonal pole tip, and a disk drive having a magnetic head having a hexagonal pole tip.

    摘要翻译: 公开了用于独立地控制具有用于垂直记录的P3极尖的写极尖的轨道宽度和斜角的方法。 该方法包括在P3层材料的一部分中建立轨道宽度。 通过提供临时掩蔽材料来制造具有已建立的轨道宽度的该部分的一部分来保护受保护的部分。 至少一个未保护的部分被暴露以成形。 然后将该未保护部分倾斜以产生至少一个具有斜角的倾斜部分。 保护部分产生矩形部分,其与斜切部分一起产生六角形极尖端。 还公开了一种具有六角极尖端的磁头和具有六角柱头的磁头的磁盘驱动器。

    Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors
    24.
    发明申请
    Methods of making magnetic write heads with use of a resist channel shrinking solution having corrosion inhibitors 审中-公开
    使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写入头的方法

    公开(公告)号:US20060096081A1

    公开(公告)日:2006-05-11

    申请号:US11312064

    申请日:2005-12-19

    IPC分类号: G11B5/127 H04R31/00

    摘要: One preferred method for use in making a magnetic write head with use of the resist channel shrinking solution includes the steps of forming a first pole piece layer of a first pole piece; forming a gap layer over the first pole piece layer; forming a patterned resist over the first pole piece layer and the gap layer; electroplating a first pedestal portion of a second pole piece over the gap layer within a channel of the patterned resist; forming an oxide layer over the first pedestal portion; applying the resist channel shrinking solution comprising the resist channel shrinking film and the corrosion inhibitors over the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel; removing the resist channel shrinking solution; electroplating a second pedestal portion of the second pole piece within the reduced-width channel of the patterned resist; removing the patterned resist; and milling the structure. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pole piece during the act of baking the resist channel shrinking solution.

    摘要翻译: 使用抗蚀剂通道收缩溶液制造磁性写入头的一种优选方法包括以下步骤:形成第一极片的第一极片层; 在所述第一极片层上形成间隙层; 在所述第一极片层和所述间隙层上形成图案化的抗蚀剂; 在图案化的抗蚀剂的通道内的间隙层上电镀第二极片的第一基座部分; 在所述第一基座部分上形成氧化物层; 在图案化的抗蚀剂上施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液,从而减小通道的宽度; 去除抗蚀剂通道收缩溶液; 在所述图案化抗蚀剂的所述减小宽度的通道内电镀所述第二极靴的第二基座部分; 去除图案化的抗蚀剂; 并研磨结构。 有利地,抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用期间减少极片中的腐蚀。

    Process of fabricating write pole in magnetic recording head using rhodium CMP stop layer
    25.
    发明授权
    Process of fabricating write pole in magnetic recording head using rhodium CMP stop layer 失效
    使用铑CMP停止层在磁记录头中制造写柱的过程

    公开(公告)号:US07029376B1

    公开(公告)日:2006-04-18

    申请号:US11225907

    申请日:2005-09-14

    IPC分类号: G11B5/127

    摘要: In the formation of the top magnetic write pole in a thin film magnetic recording head, a CMP stop layer comprising rhodium is deposited over the Al2O3 layer that overlies the top magnetic pole. A mixture of silicon dioxide, ammonium persulfate and benzotriazole is employed as a slurry in the CMP process that removes the portion of the Al2O3 layer covering the top magnetic pole. This eliminates the need for an extra thick layer of Al2O3 to be first deposited over the top pole and then removed to expose the top pole. The magnetic layer that forms the top pole can be plated to the target thickness of the top pole. As a result, the thickness of the photoresist layer that is used to define the size and shape of the top pole can be decreased to a desirable thickness, facilitating the use of DUV radiation to expose the photoresist layer.

    摘要翻译: 在薄膜磁记录头中形成顶磁写磁极时,包含铑的CMP停止层沉积在覆盖顶部的Al 2 O 3层上 磁极。 在CMP工艺中使用二氧化硅,过硫酸铵和苯并三唑的混合物作为浆料,其除去覆盖顶部磁极的部分Al 2 O 3 N 3层。 这样就不需要首先沉积在顶极上的另外一层较厚的Al 2 O 3 3 3层,然后去除以暴露顶极。 可以将形成顶极的磁性层电镀到顶极的目标厚度。 结果,用于限定顶极的尺寸和形状的光致抗蚀剂层的厚度可以减小到期望的厚度,便于使用DUV辐射来曝光光致抗蚀剂层。

    Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof
    27.
    发明授权
    Magnetic write head having a self aligned, steep shoulder pole structure and method of manufacture thereof 失效
    具有自对准陡肩极结构的磁写头及其制造方法

    公开(公告)号:US07612964B2

    公开(公告)日:2009-11-03

    申请号:US11228783

    申请日:2005-09-15

    IPC分类号: G11B5/187

    CPC分类号: G11B5/3116 G11B5/3163

    摘要: A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.

    摘要翻译: 一种磁写头及其制造方法,其具有第一极结构,其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。 写头还包括具有非常窄的宽度(轨道宽度)并且与第一极结构的窄垂直切口结构自对准的第二极结构(P2)。 写头提供优异的磁性,包括非常窄的轨道宽度和最小的侧面写入,同时避免极点的磁饱和。

    Magnetic recording head with overlaid leads
    29.
    发明申请
    Magnetic recording head with overlaid leads 有权
    带重叠导线的磁记录头

    公开(公告)号:US20080112090A1

    公开(公告)日:2008-05-15

    申请号:US11595186

    申请日:2006-11-09

    IPC分类号: G11B5/33

    摘要: A lead overlay design of a magnetic sensor is described with sensor and free layer dimensions such that the free layer is stabilized by the large demagnetization field due to the shape anisotropy. In one embodiment the giant magnetoresistive (GMR) effect under the leads is destroyed by removing the antiferromagnetic (AFM) and pinned layers above the free layer. The overlaid lead pads are deposited on the exposed spacer layer at the sides of the mask that defines the active region. In other embodiment a layer of electrically insulating material is deposited over the sensor to encapsulate it and thereby insulate it from contact with the hardbias structures. Various embodiments with self-aligned leads are also described. In a variation of the encapsulation embodiment, the insulating material is also deposited under the lead pads so the electrical current is channeled through the active region of the sensor and sidewall deposited lead pads.

    摘要翻译: 用传感器和自由层尺寸描述磁传感器的引线覆盖设计,使得由于形状各向异性,自由层由大的退磁场稳定。 在一个实施例中,引线下的巨磁阻(GMR)效应通过去除自由层上方的反铁磁(AFM)和固定层而被破坏。 覆盖的引线焊盘沉积在限定有源区的掩模侧面上的暴露间隔层上。 在另一个实施例中,电绝缘材料层沉积在传感器上以将其封装并由此使其与硬质合金结构的接触绝缘。 还描述了具有自对准引线的各种实施例。 在封装实施例的变型中,绝缘材料也沉积在引线焊盘下方,使得电流通过传感器的有源区域和侧壁沉积的引线焊盘。

    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby
    30.
    发明申请
    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby 失效
    用于形成磁写头和由此形成的写磁极的写极的剥离方法

    公开(公告)号:US20070236832A1

    公开(公告)日:2007-10-11

    申请号:US11399820

    申请日:2006-04-07

    IPC分类号: G11B5/147

    摘要: A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is -left to provide support to the sidewall fencing.

    摘要翻译: 公开了一种用于形成磁写头和由此形成的写磁极的写极的剥离方法。 形成在写入极的顶部包括硬掩模的写入极。 一层用于加强写柱的侧壁围栏的材料被沉积。 去除写磁极顶部的材料层的部分,同时侧壁围栏处的材料层是左侧,以向侧壁围栏提供支撑。