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1.发明授权Method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head 失效用于将台阶缺口和间隙凸起集成在写头中的极尖处的方法和装置公开(公告)号：US07536774B2
公开(公告)日：2009-05-26
申请号：US11399821
申请日：2006-04-07
申请人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
发明人： Daniel Wayne Bedell , Wen-Chien David Hsiao , Ming Jiang , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo , Aron Pentek
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , Y10T29/49043
摘要： A method and apparatus for integrating a stair notch and a gap bump at a pole tip in a write head is disclosed. A protective plated layer is formed over the bump to prevent the bump form being damaged during formation of the notch at the pole tip. The flux from the second pole outside of the track will be effectively channeled to the first pole piece under the alumina bump.
摘要翻译： 公开了一种用于将写入头中的极尖处的台阶缺口和间隙凸起集成的方法和装置。 在凸起之上形成保护镀层，以防止在极尖处形成凹口期间凸起形状被损坏。 来自轨道外部的第二极的磁通将有效地引导到氧化铝凸块下方的第一极靴。
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2.发明申请Methods Of Making Magnetic Write Heads With Use Of A Resist Channel Shrinking Solution Having Corrosion Inhibitors 失效使用具有腐蚀抑制剂的抗蚀剂通道收缩溶液制造磁性写头的方法公开(公告)号：US20100107402A1
公开(公告)日：2010-05-06
申请号：US12685455
申请日：2010-01-11
申请人： Christian Rene Bonhote , Jila Tabib , Dennis Richard Mckean , Daniel Wayne Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Y. Lee
发明人： Christian Rene Bonhote , Jila Tabib , Dennis Richard Mckean , Daniel Wayne Bedell , Jyh-Shuey Lo , Hieu Lam , Kim Y. Lee
CPC分类号： G11B5/3116 , G11B5/3163 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052
摘要： One preferred method for use in making a device structure with use of the resist channel shrinking solution includes the steps of forming a first pedestal portion within a channel of a patterned resist; applying a resist channel shrinking solution comprising a resist channel shrinking film and corrosion inhibitors within the channel of the patterned resist; baking the resist channel shrinking solution over the patterned resist to thereby reduce a width of the channel of the patterned resist; removing the resist channel shrinking solution; and forming a second pedestal portion within the reduced-width channel of the patterned resist. Advantageously, the oxide layer and the corrosion inhibitors of the resist channel shrinking solution reduce corrosion in the pedestal during the act of baking the resist channel shrinking solution.
摘要翻译： 用于制造使用抗蚀剂通道收缩溶液的器件结构的一种优选方法包括在图案化抗蚀剂的通道内形成第一基座部分的步骤; 在图案化的抗蚀剂的通道内施加包含抗蚀剂通道收缩膜和腐蚀抑制剂的抗蚀剂通道收缩溶液; 在图案化的抗蚀剂上烘烤抗蚀剂通道收缩溶液，从而减小图案化抗蚀剂的通道的宽度; 去除抗蚀剂通道收缩溶液; 以及在所述图案化抗蚀剂的所述减小宽度的通道内形成第二基座部分。 有利地，抗蚀剂通道收缩溶液的氧化物层和腐蚀抑制剂在烘烤抗蚀剂通道收缩溶液的作用下降低了基座中的腐蚀。
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3.发明授权公开(公告)号：US07612964B2
公开(公告)日：2009-11-03
申请号：US11228783
申请日：2005-09-15
申请人： Daniel Wayne Bedell , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo
发明人： Daniel Wayne Bedell , Hieu Lam , Kim Y. Lee , Jyh-Shuey Lo
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/3163
摘要： A magnetic write head and method of manufacture thereof that has a first pole structure having a notched structure configured with a steep shoulder portion and a narrow vertical notch portion extending from the top of the steep shoulder portion. The write head also includes a second pole structure (P2) that has a very narrow width (track width) and that is self aligned with the narrow vertical notch structure of the first pole structure. The write head provides excellent magnetic properties including a very narrow track width and minimal side writing, while avoiding magnetic saturation of the poles.
摘要翻译： 一种磁写头及其制造方法，其具有第一极结构，其具有构造为具有陡峭肩部的切口结构和从陡峭肩部的顶部延伸的窄垂直切口部。 写头还包括具有非常窄的宽度（轨道宽度）并且与第一极结构的窄垂直切口结构自对准的第二极结构（P2）。 写头提供优异的磁性，包括非常窄的轨道宽度和最小的侧面写入，同时避免极点的磁饱和。
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4.发明授权Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask 有权使用电子束抗蚀剂掩模制造用于磁头的磁写磁极的方法公开(公告)号：US07716813B2
公开(公告)日：2010-05-18
申请号：US11634667
申请日：2006-12-05
申请人： Kim Y. Lee , Jyh-Shuey Lo
发明人： Kim Y. Lee , Jyh-Shuey Lo
CPC分类号： G11B5/3163 , G11B5/127 , G11B5/3116 , Y10T29/49021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052
摘要： A method is disclosed for independently controlling track width and bevel angle of a write pole tip of a magnetic recording head. The method includes establishing the track width in the pole tip layer material utilizing E-beam lithography. A portion of this pole tip material having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion. The protected portion produces an upper pole tip portion which together with the beveled portion produce an improved pole tip. Also disclosed is a magnetic head having the improved pole tip, and a disk drive having a magnetic head having the improved pole tip.
摘要翻译： 公开了一种用于独立地控制磁记录头的写极尖的轨道宽度和斜角的方法。 该方法包括利用电子束平版印刷法在极尖层材料中建立轨道宽度。 通过提供临时掩蔽材料来制造具有已建立的轨道宽度的该极尖材料的一部分，以形成受保护的部分。 至少一个未保护的部分被暴露以成形。 然后将该未保护部分倾斜以产生至少一个倾斜部分。 受保护部分产生上极尖部分，其与斜面部分一起产生改进的极尖。 还公开了具有改进的极尖的磁头和具有具有改进的极尖的磁头的磁盘驱动器。
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5.发明申请Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask 有权使用电子束抗蚀剂掩模制造用于磁头的磁写磁极的方法公开(公告)号：US20080127481A1
公开(公告)日：2008-06-05
申请号：US11634667
申请日：2006-12-05
申请人： Kim Y. Lee , Jyh-Shuey Lo
发明人： Kim Y. Lee , Jyh-Shuey Lo
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/127 , G11B5/3116 , Y10T29/49021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052
摘要： A method is disclosed for independently controlling track width and bevel angle of a write pole tip of a magnetic recording head. The method includes establishing the track width in the pole tip layer material utilizing E-beam lithography. A portion of this pole tip material having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion. The protected portion produces an upper pole tip portion which together with the beveled portion produce an improved pole tip. Also disclosed is a magnetic head having the improved pole tip, and a disk drive having a magnetic head having the improved pole tip.
摘要翻译： 公开了一种用于独立地控制磁记录头的写极尖的轨道宽度和斜角的方法。 该方法包括利用电子束平版印刷法在极尖层材料中建立轨道宽度。 通过提供临时掩蔽材料来制造具有已建立的轨道宽度的该极尖材料的一部分，以形成受保护的部分。 至少一个未保护的部分被暴露以成形。 然后将该未保护部分倾斜以产生至少一个倾斜部分。 受保护部分产生上极尖部分，其与斜面部分一起产生改进的极尖。 还公开了具有改进的极尖的磁头和具有具有改进的极尖的磁头的磁盘驱动器。
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公开(公告)号：US07652855B2
公开(公告)日：2010-01-26
申请号：US11595186
申请日：2006-11-09
申请人： James Mac Freitag , David Eugene Heim , Kuok San Ho , Wipul Pemsiri Jayasekara , Kim Y. Lee , Tsann Lin , Jyh-Shuey Lo , Mustafa Michael Pinarbasi , Ching Hwa Tsang
发明人： James Mac Freitag , David Eugene Heim , Kuok San Ho , Wipul Pemsiri Jayasekara , Kim Y. Lee , Tsann Lin , Jyh-Shuey Lo , Mustafa Michael Pinarbasi , Ching Hwa Tsang
IPC分类号： G11B5/39
CPC分类号： G11B5/3932 , B82Y10/00 , B82Y25/00 , G11B2005/3996
摘要： A lead overlay design of a magnetic sensor is described with sensor and free layer dimensions such that the free layer is stabilized by the large demagnetization field due to the shape anisotropy. In one embodiment the giant magnetoresistive (GMR) effect under the leads is destroyed by removing the antiferromagnetic (AFM) and pinned layers above the free layer. The overlaid lead pads are deposited on the exposed spacer layer at the sides of the mask that defines the active region. In other embodiment a layer of electrically insulating material is deposited over the sensor to encapsulate it and thereby insulate it from contact with the hardbias structures. Various embodiments with self-aligned leads are also described. In a variation of the encapsulation embodiment, the insulating material is also deposited under the lead pads so the electrical current is channeled through the active region of the sensor and sidewall deposited lead pads.
摘要翻译： 用传感器和自由层尺寸描述磁传感器的引线覆盖设计，使得由于形状各向异性，自由层由大的退磁场稳定。 在一个实施例中，引线下的巨磁阻（GMR）效应通过去除自由层上方的反铁磁（AFM）和固定层而被破坏。 覆盖的引线焊盘沉积在限定有源区的掩模侧面上的暴露间隔层上。 在另一个实施例中，电绝缘材料层沉积在传感器上以将其封装并由此使其与硬质合金结构的接触绝缘。 还描述了具有自对准引线的各种实施例。 在封装实施例的变型中，绝缘材料也沉积在引线焊盘下方，使得电流通过传感器的有源区域和侧壁沉积的引线焊盘。
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公开(公告)号：US20080112090A1
公开(公告)日：2008-05-15
申请号：US11595186
申请日：2006-11-09
申请人： James Mac Freitag , David Eugene Heim , Kuok San Ho , Wipul Pemsiri Jayasekara , Kim Y. Lee , Tsann Lin , Jyh-Shuey Lo , Mustafa Michael Pinarbasi , Ching Hwa Tsang
发明人： James Mac Freitag , David Eugene Heim , Kuok San Ho , Wipul Pemsiri Jayasekara , Kim Y. Lee , Tsann Lin , Jyh-Shuey Lo , Mustafa Michael Pinarbasi , Ching Hwa Tsang
IPC分类号： G11B5/33
CPC分类号： G11B5/3932 , B82Y10/00 , B82Y25/00 , G11B2005/3996
摘要： A lead overlay design of a magnetic sensor is described with sensor and free layer dimensions such that the free layer is stabilized by the large demagnetization field due to the shape anisotropy. In one embodiment the giant magnetoresistive (GMR) effect under the leads is destroyed by removing the antiferromagnetic (AFM) and pinned layers above the free layer. The overlaid lead pads are deposited on the exposed spacer layer at the sides of the mask that defines the active region. In other embodiment a layer of electrically insulating material is deposited over the sensor to encapsulate it and thereby insulate it from contact with the hardbias structures. Various embodiments with self-aligned leads are also described. In a variation of the encapsulation embodiment, the insulating material is also deposited under the lead pads so the electrical current is channeled through the active region of the sensor and sidewall deposited lead pads.
摘要翻译： 用传感器和自由层尺寸描述磁传感器的引线覆盖设计，使得由于形状各向异性，自由层由大的退磁场稳定。 在一个实施例中，引线下的巨磁阻（GMR）效应通过去除自由层上方的反铁磁（AFM）和固定层而被破坏。 覆盖的引线焊盘沉积在限定有源区的掩模侧面上的暴露间隔层上。 在另一个实施例中，电绝缘材料层沉积在传感器上以将其封装并由此使其与硬质合金结构的接触绝缘。 还描述了具有自对准引线的各种实施例。 在封装实施例的变型中，绝缘材料也沉积在引线焊盘下方，使得电流通过传感器的有源区域和侧壁沉积的引线焊盘。
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8.发明授权Methods for improving positioning performance of electron beam lithography on magnetic wafers 失效改善电子束光刻在磁晶片上的定位性能的方法公开(公告)号：US07172786B2
公开(公告)日：2007-02-06
申请号：US10845956
申请日：2004-05-14
IPC分类号： B05D5/12
摘要： The present invention discloses a method for the production of sub-micron structures on magnetic materials using electron beam lithography. A subtractive process is disclosed wherein a portion of a magnetic material layer is removed from the substrate using conventional lithography, and the remaining portion of the magnetic material layer is patterned by e-beam lithography. A additive process is also disclosed wherein a thin magnetic seed layer is deposited on the substrate, a portion of which is removed by conventional lithography and replaced with a non-magnetic conducting layer. The remaining portion of magnetic seed layer is patterned by e-beam lithography and the final magnetic structure produced by electroplating.
摘要翻译： 本发明公开了一种使用电子束光刻在磁性材料上生产亚微米结构的方法。 公开了一种消减方法，其中使用常规光刻将磁性材料层的一部分从衬底上除去，并且通过电子束光刻将磁性材料层的剩余部分图案化。 还公开了一种添加方法，其中将薄的磁性种子层沉积在基底上，其一部分通过常规的光刻法被去除并被非磁性导电层代替。 通过电子束光刻和通过电镀产生的最终磁性结构对磁性种子层的剩余部分进行构图。
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公开(公告)号：US20080093336A1
公开(公告)日：2008-04-24
申请号：US11583845
申请日：2006-10-20
申请人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
发明人： Kim Y. Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S. Kuo , Dieter K. Weller
摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。
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公开(公告)号：US20080085362A1
公开(公告)日：2008-04-10
申请号：US11542129
申请日：2006-10-04
申请人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
发明人： Bing K. Yen , David S. Kuo , Dieter K. Weller , Kim Y. Lee , Koichi Wago
CPC分类号： G11B5/732 , G11B5/656 , G11B5/7325 , G11B5/855
摘要： A method of fabricating a patterned perpendicular magnetic recording medium comprises steps of: (a) providing a layer stack including a magnetically soft underlayer (“SUL”) and an overlying non-magnetic interlayer; (b) forming a masking layer on the non-magnetic interlayer; (c) forming a resist layer on the masking layer; (d) forming a pattern of recesses extending through the resist layer and exposing spaced apart surface portions of the masking layer; (e) extending the pattern of recesses through the masking layer to expose spaced apart surface portions of the interlayer; and (f) at least partially filling the pattern of recesses with a magnetically hard material to form a perpendicular magnetic recording layer.
摘要翻译： 制造图案化的垂直磁记录介质的方法包括以下步骤：（a）提供包括磁软底层（“SUL”）和上覆非磁性中间层的层堆叠; （b）在非磁性中间层上形成掩模层; （c）在掩模层上形成抗蚀剂层; （d）形成延伸穿过抗蚀剂层并露出掩模层的间隔开的表面部分的凹陷图案; （e）将凹槽的图案延伸穿过掩模层以暴露中间层的间隔开的表面部分; 和（f）至少部分地用磁性硬的材料填充凹槽的图案以形成垂直的磁记录层。
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