公开(公告)号：US4024764A

公开(公告)日：1977-05-24

申请号：US679116

申请日：1976-04-22

Applicant: Johnson Shipman ,  Herbert L. Gilles

Inventor： Johnson Shipman ,  Herbert L. Gilles

IPC: B22D11/22 ,  C21B7/10 ,  G01J5/00 ,  G01K1/00

CPC classification number: G01J5/0022 ,  B22D11/225 ,  C21B7/10 ,  G01J5/02 ,  G01J5/0255 ,  G01J5/029 ,  G01J5/04 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/0875

Abstract: Strand surface temperature is measured accurately at multiple stations in spray cooling region of a continuous metal caster where environmental conditions are severe. Each station includes a pyrometer having a light pipe with a tip aimed at the strand and provided with both air and water wash streams. Control devices, operating in response to sequence timers, periodically resets measuring circuits, interrupts each strand cooling spray and light pipe wash water stream, and turns on the air wash stream, all during a short temperature sampling period. Selection of sampling period is governed by light pipe location, pyrometer response time, and strand reheat properties when spray is off. The peak temperature measured at each station is stored as the true strand temperature for that location. Thereafter strand and light pipe cooling are restored while the air wash is interrupted. Stored temperature signals may be recorded and analyzed to define caster operating parameters and cooling practices.

Abstract translation: 在环境条件严重的连续金属脚轮的喷雾冷却区域中，在多个站处准确测量绞线表面温度。 每个站包括一个高温计，其具有一个具有尖端的光管，瞄准股线并且设有空气和水洗流。 响应于顺序定时器操作的控制装置周期性地重置测量电路，中断每个绞线冷却喷雾和光管洗涤水流，并且在短的温度采样周期内打开空气洗涤流。 采样周期的选择由喷射关闭时的光管位置，高温计响应时间和绞线再热特性决定。 在每个站点测量的峰值温度被存储为该位置的真实温度。 此后，空气洗涤被中断时，钢索和光管冷却被恢复。 可以记录和分析存储的温度信号以定义脚轮操作参数和冷却实践。

公开(公告)号：US20170030847A1

公开(公告)日：2017-02-02

申请号：US15292225

申请日：2016-10-13

Applicant: Infineon Technologies AG

Inventor： Christoph WOLFGRUBER

IPC: G01N25/72 ,  G01J5/02

CPC classification number: G01N25/72 ,  G01J5/02 ,  G01J5/0205 ,  G01J5/0255 ,  G01J2005/0077 ,  G01J2005/0081

Abstract: A method of examining a substrate is provided. The method may include: generating a temperature gradient along a surface of the substrate; detecting a heat radiation emitted from the substrate; and determining as to whether the substrate is damaged based on the detected heat radiation.

Abstract translation: 提供了检查基板的方法。 该方法可以包括：沿衬底的表面产生温度梯度; 检测从所述基板发射的热辐射; 以及基于检测到的热辐射确定衬底是否被损坏。

公开(公告)号：US20160216157A1

公开(公告)日：2016-07-28

申请号：US14653288

申请日：2013-12-18

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - CNRS - ,  ECOLE NATIONALE SUPERIEURE D'ARTS ET METIERS (ENSAM)

Inventor： Christophe PRADERE ,  Jean-Pascal CAUMES ,  Sabri BEN KHEMIS

IPC: G01J5/02 ,  G01J5/08 ,  G01J5/10

CPC classification number: G01J5/0255 ,  G01J5/0896 ,  G01J5/10 ,  G01K11/006 ,  G01K11/125

Abstract: A method for the optical measurement of a variation in temperature of an object (O) includes: an emission step (S1) consisting of emitting, in the direction of the object (O), a first incident electromagnetic wave (W1_inc) of the terahertz type, and a measurement step (S2) including the measurement (S2_3), by a sensor sensitive to terahertz radiation (20), of a variation in amplitude of the electromagnetic radiation of a second electromagnetic wave (W2_ref, W2_tra) in order to determine the variation in temperature of the object (O).

Abstract translation: 用于对物体（O）的温度变化的光学测量的方法包括：发射步骤（S1），其包括在物体（O）的方向上发射太赫兹的第一入射电磁波（W1_inc） 以及包括通过对太赫兹辐射（20）敏感的传感器的第二电磁波（W2_ref，W2_tra）的电磁辐射的振幅变化的测量（S2_3）的测量步骤（S2），以便确定 物体（O）的温度变化。

公开(公告)号：US09002674B2

公开(公告)日：2015-04-07

申请号：US13478325

申请日：2012-05-23

Applicant: Masayuki Moroi ,  Hitoshi Kikuchi

Inventor： Masayuki Moroi ,  Hitoshi Kikuchi

IPC: C23C16/455 ,  C23C16/458 ,  C23C16/46 ,  C23C16/52 ,  G01J5/02 ,  G01J5/08 ,  G01J5/00

CPC classification number: C23C16/45525 ,  C23C16/4584 ,  C23C16/4585 ,  C23C16/46 ,  C23C16/52 ,  G01J5/0007 ,  G01J5/0022 ,  G01J5/025 ,  G01J5/0255 ,  G01J5/026 ,  G01J5/0809 ,  G01J5/0831 ,  G01J5/089 ,  G01J5/0893 ,  G01J2005/0085

Abstract: A temperature measurement apparatus for measuring a temperature profile of a substrate mounted on a rotating table, including a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; a temperature map generating unit that specifies the address of the temperature measurement area based on the number of the temperature measurement areas measured by the radiation temperature measurement unit for each of the scanning operations in the radius direction of the rotating table, and the rotating speed of the rotating table, and stores the temperature in correspondence with the corresponding address in a storing unit; and a temperature data display processing unit that displays a temperature profile of the rotating table.

Abstract translation: 一种用于测量安装在旋转台上的基板的温度分布的温度测量装置，包括辐射温度测量单元，其被配置为通过旋转台的半径方向测量旋转台的表面上的多个温度测量区域的温度 在半径方向上扫描旋转台的表面; 温度映射生成单元，其基于由所述辐射温度测量单元测量的针对所述旋转台的半径方向上的每个扫描操作的温度测量区域的数量来指定所述温度测量区域的地址，以及所述温度测量区域的旋转速度 旋转台，并将与对应的地址对应的温度存储在存储单元中; 以及温度数据显示处理单元，其显示所述旋转台的温度分布。

公开(公告)号：US20140319355A1

公开(公告)日：2014-10-30

申请号：US14215781

申请日：2014-03-17

Applicant: U.S.A., as represented by the Administrator of the National Aeronautics and Space Administration

Inventor： Russell W. Smith ,  H. Kevin Rivers ,  Joseph G. Sikora ,  Mark C. Roth ,  William M. Johnston

IPC: G01N3/06 ,  G01J5/02

CPC classification number: G01N3/06 ,  G01J5/0255 ,  G01N3/60

Abstract: An ultra-high temperature optical method incorporates speckle optics for sensing displacement and strain measurements well above conventional measurement techniques. High temperature pattern materials are used which can endure experimental high temperature environments while simultaneously having a minimum optical aberration. A purge medium is used to reduce or eliminate optical distortions and to reduce, and/or eliminate oxidation of the target specimen.

Abstract translation: 超高温光学方法包含散射光学元件，用于高于常规测量技术的位移和应变测量。 使用可以承受实验性高温环境同时具有最小光学像差的高温图案材料。 吹扫介质用于减少或消除光学变形并减少和/或消除目标样品的氧化。

公开(公告)号：US20100265988A1

公开(公告)日：2010-10-21

申请号：US12758206

申请日：2010-04-12

Applicant: JACOB NEWMAN ,  DINESH KANAWADE ,  HENRY BARANDICA ,  NIR MERRY

Inventor： JACOB NEWMAN ,  DINESH KANAWADE ,  HENRY BARANDICA ,  NIR MERRY

IPC: G01K13/00 ,  G01J5/00 ,  G01K7/02 ,  G01K11/12

CPC classification number: G01K13/00 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/02 ,  G01J5/0255 ,  G01K11/18 ,  H01L21/67103 ,  H01L21/67248

Abstract: Methods and apparatus for precise substrate cool down control are provided. Apparatus for measuring temperature of substrates may include a cool down plate to support a substrate; a sensor to provide data corresponding to a temperature of the substrate when disposed on the cool down plate; and a computer coupled to the sensor to determine the temperature of the substrate from the sensor data. A method for measuring the temperature of a substrate may include providing a substrate to be cooled to a chamber having a cool down plate disposed therein, a sensor to provide data corresponding to a temperature of the substrate, and a computer coupled to the sensor; sensing a first temperature of the substrate after a predetermined first time interval has elapsed; comparing the first temperature to a predetermined temperature; and determining whether the first temperature is greater than, equal to, or less than the predetermined temperature.

Abstract translation: 提供了精确的基板冷却控制的方法和装置。 用于测量衬底温度的装置可包括用于支撑衬底的冷却板; 传感器，当设置在所述冷却板上时，提供对应于所述基板的温度的数据; 以及耦合到所述传感器的计算机，以从所述传感器数据确定所述基板的温度。 用于测量衬底的温度的方法可以包括将待冷却的衬底设置到设置有冷却板的腔室，传感器以提供对应于衬底的温度的数据和耦合到传感器的计算机; 在经过预定的第一时间间隔之后感测衬底的第一温度; 将第一温度与预定温度进行比较; 以及确定所述第一温度是否大于，等于或小于所述预定温度。

公开(公告)号：US20080225925A1

公开(公告)日：2008-09-18

申请号：US12048881

申请日：2008-03-14

Applicant: Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

Inventor： Marc Laverdiere ,  Robert F. McLoughlin ,  Michael Clarke ,  Dale Maenke ,  Wiley James Wilkinson

IPC: G01J5/08

CPC classification number: G01J5/02 ,  G01J5/0037 ,  G01J5/0255 ,  G01J5/08 ,  G01J5/0893 ,  G01J5/12

Abstract: Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.

Abstract translation: 本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。 在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。 流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。 可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。 在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

公开(公告)号：US20080083269A1

公开(公告)日：2008-04-10

申请号：US11863966

申请日：2007-09-28

Applicant: Ralph SATTMANN

Inventor： Ralph SATTMANN

IPC: G01N1/00

CPC classification number: G01N1/125 ,  G01J5/0037 ,  G01J5/004 ,  G01J5/0255 ,  G01J5/0285 ,  G01J5/041 ,  G01J5/045 ,  G01J5/048 ,  G01J5/08 ,  G01N21/0332 ,  G01N21/718 ,  G01N21/8507 ,  G01N33/206 ,  G01N2201/024

Abstract: An immersion sensor for analysis of liquids or melts includes an immersion carrier, a detector and a radiation-guiding unit, and a sample chamber arranged in the immersion carrier. The sample chamber has an inlet opening for liquid or melt, and the sensing components for measurement of the liquid or melt act inside the sample chamber.

Abstract translation: 用于分析液体或熔体的浸没传感器包括浸没载体，检测器和辐射引导单元以及布置在浸没载体中的样品室。 样品室具有用于液体或熔体的入口，用于测量液体或熔体的感测部件在样品室内作用。

公开(公告)号：US20080002756A1

公开(公告)日：2008-01-03

申请号：US11477943

申请日：2006-06-30

Applicant: Michael J. Worrell ,  James Jay Cress

Inventor： Michael J. Worrell ,  James Jay Cress

IPC: G01J5/00

CPC classification number: G01J5/0003 ,  G01J5/0044 ,  G01J5/02 ,  G01J5/0255

Abstract: A system for enabling the measurement of a temperature in a furnace (30, 48) using a pyrometer (38) that includes a pallet support (32, 52) for supporting a pallet (40, 50) a given distance (c) above a furnace floor (31) and a pyrometer target (10, 60, 80) that includes a support member (12, 62, 82) and a target member (14, 68) separable from said support member (12, 62, 82) where the support member (12, 62, 82) has a height less than the given distance (c).

Abstract translation: 一种用于能够使用高温计（38）测量炉子（30,48）中的温度的系统，所述高温计（38）包括托盘支撑件（32,52），用于将托盘（40,50）支撑在给定距离（c）上方的给定距离 炉板（31）和高温计靶（10,60,80），其包括支撑构件（12,62,82）和可与所述支撑构件（12,62,82）分离的目标构件（14,68），其中 支撑构件（12,62,82）具有小于给定距离（c）的高度。

公开(公告)号：US06695886B1

公开(公告)日：2004-02-24

申请号：US10225590

申请日：2002-08-22

Applicant: Douglas Brown ,  Robert David Meadows ,  David Tao ,  Mathias Koch

Inventor： Douglas Brown ,  Robert David Meadows ,  David Tao ,  Mathias Koch

IPC: G01J508

CPC classification number: G01J5/08 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/02 ,  G01J5/0255 ,  G01J5/04 ,  G01J5/045 ,  G01J5/046 ,  G01J5/061 ,  G01J5/0806 ,  G01J5/084 ,  G01J5/0846 ,  G01J5/0875 ,  G01J5/0893 ,  H01L21/67248

Abstract: The present invention is directed to a pyrometer system and comprises an elevator tube. The elevator tube comprises an inner tube and an outer tube surrounding the inner tube in telescoping arrangement and extending from a top to a bottom thereof, the arrangement defining a fluid passageway therebetween. The elevator tube further comprises a port associated with the outer tube that is operable to transmit a cooling gas therethrough into the fluid passageway. A pyrometer head is coupled to the bottom of the inner tube and is operable to transmit and receive radiation through the inner tube. The system further comprises a spider collar coupled to at least one of a top of the inner tube or outer tube, and is operable to support a work piece for thermal measurement thereof.

Abstract translation: 本发明涉及一种高温计系统，包括电梯管。 电梯管包括内管和外管，其围绕内管以伸缩布置并从其顶部延伸到底部，该布置在其间限定了流体通道。 电梯管还包括与外管相关联的端口，其可操作以将冷却气体通过其传送到流体通道中。 高温计头部连接到内管的底部并且可操作以通过内管传送和接收辐射。 所述系统还包括联接到所述内管或外管的顶部中的至少一个的蜘蛛环，并且可操作以支撑用于其热测量的工件。