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公开(公告)号：US20090225399A1
公开(公告)日：2009-09-10
申请号：US12042252
申请日：2008-03-04
Applicant: Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
Inventor： Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
CPC classification number: G01N21/9501 , G01N21/8806 , G01N2201/10 , G01N2201/104 , G02B26/123 , Y10S359/90
Abstract: A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.
Abstract translation: 使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供大量斑点的可扩展性以及消除通道之间的串扰。 多点扫描技术可以选择点阵列（1D或2D）的多个斑点，确定斑点之间的间隔以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。 执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。 这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。 在一个实施例中，扫描开始并在晶片上期望的扫描区域外部结束以确保全扫描覆盖。
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公开(公告)号：US07528958B2
公开(公告)日：2009-05-05
申请号：US11323715
申请日：2005-12-30
Applicant: Michael K Y Hughes , Sebastien Tixier
Inventor： Michael K Y Hughes , Sebastien Tixier
IPC: G01B9/02
CPC classification number: G01J3/02 , G01J3/021 , G01N21/86 , G01N21/8901 , G01N33/34 , G01N2021/3595 , G01N2021/8917 , G01N2201/104
Abstract: An optical scanner for use in conjunction with an infrared spectrometer is disclosed. The optical scanner translates a beam of radiation to a stationary spot on a traveling sheet of material so that ample integration time within the spectrometer is achieved. The beam path impinges on the traveling web and the radiation is reflected off the traveling web back through the optical scanner and recombined at an interferometer. The beam of radiation is kept stationary with respect to both the traveling sheet and the carriage which houses the spectrometer.
Abstract translation: 公开了一种与红外光谱仪一起使用的光学扫描仪。 光学扫描器将辐射束转换成行进的材料片上的固定点，从而实现光谱仪内的充足的积分时间。 光束路径撞击行进网，并且辐射通过光学扫描器反射回行进网，并在干涉仪上重新组合。 辐射束相对于移动片和容纳光谱仪的托架保持静止。
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公开(公告)号：US07190447B2
公开(公告)日：2007-03-13
申请号：US11372556
申请日：2006-03-11
Applicant: Steven W. Meeks
Inventor： Steven W. Meeks
IPC: G01N21/00
CPC classification number: G01N21/9506 , G01B11/0616 , G01B11/0641 , G01B11/065 , G01B11/303 , G01B11/306 , G01N21/21 , G01N21/47 , G01N21/9501 , G01N21/958 , G01N2021/8427 , G01N2021/8841 , G01N2201/103 , G01N2201/104 , G01N2201/1045 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.
Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。
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公开(公告)号：US20030210885A1
公开(公告)日：2003-11-13
申请号：US10163153
申请日：2002-06-04
Inventor： Dennis Chi Zhou , Kai Zhang , Shou-Jong Sheih
IPC: G02B006/00
CPC classification number: G01J1/4257 , G01J1/04 , G01J1/0418 , G01N2021/95676 , G01N2201/10 , G01N2201/104 , G02B6/266 , G02B6/4215 , G02B6/4286 , H04B10/077 , H04B10/07955
Abstract: The present invention is directed towards a channel power monitor for monitoring channel power levels for each of N signal channels. The value of each channel power level is designated as p(nulli), where nulll is a channel parameter that characterizes each channel. An embodiment of the invention includes a variable channel attenuator having M attenuation profiles where MnullN, and where a k-th attenuation profile is characterized as a function of the channel parameter nulll by Ak(nulll). This embodiment also includes a detector for measuring a k-th integrated attenuated power level, the value of which is represented by Pk. An analysis unit receives all of the values Pk of the integrated attenuated power levels and thereupon derives the values p(nulll) of the channel power levels by solving a set of linear equations.
Abstract translation: 本发明涉及用于监视N个信号信道中的每一个的信道功率电平的信道功率监视器。 每个通道功率电平的值被指定为p（lambdai），其中lambdal是表示每个通道的通道参数。 本发明的实施例包括具有M衰减分布的可变信道衰减器，其中M> = N，其中第k衰减分布被Ak（lambdal）的信道参数lambdal的函数表征。 该实施例还包括用于测量第k个积分衰减功率电平的检测器，其值由Pk表示。 分析单元接收积分衰减功率电平的所有值Pk，并且通过求解一组线性方程式导出信道功率电平的值p（lambdal）。
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25.发明公开公开(公告)号：US20240302274A1
公开(公告)日：2024-09-12
申请号：US18599288
申请日：2024-03-08
Applicant: Leica Microsystems NC, Inc.
Inventor： Robert H. HART , Hansford HENDARGO
IPC: G01N21/45
CPC classification number: G01N21/45 , G01N2201/104 , G01N2201/127
Abstract: A method for three-dimensional (3D) image calibration for a spectral domain optical coherence tomography (OCT) system, the OCT system including a scanning arrangement for laterally scanning a sample light beam across a surface of a sample, an optical detection system for detecting light reflected back from the sample to obtain an optical image of the sample, and a reference light beam, the OCT system generating axially resolved optical information from the sample as the sample light beam is scanned laterally across the sample using optical path length differences (OPLD) between the reference light beam and the sample light beam, the method including: providing a calibration sample having a substrate having laterally arranged structural elements providing optical contrast, the structural elements having at least one of known dimensions or known position values on the substrate; scanning, using a first set of scanner parameters for the scanning arrangement, the sample light beam.
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Patent Agency Ranking
公开(公告)号：US20230178582A1
公开(公告)日：2023-06-08
申请号：US17843649
申请日：2022-06-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Heejin CHOI
IPC: H01L27/146 , G01N21/84
CPC classification number: H01L27/14645 , G01N21/84 , G01N2021/845 , G01N2201/104
Abstract: Provided is an image sensor including a plurality of pixels provided in an array, wherein each of the plurality of pixels includes a plurality of sub-pixels, and wherein the plurality of sub-pixels are provided such that electric charges, generated from pixels among the plurality of pixels provided perpendicular to a moving direction of an object, accumulate while moving in the moving direction of the object at a same speed as the object.
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公开(公告)号：US09651503B2
公开(公告)日：2017-05-16
申请号：US14665748
申请日：2015-03-23
Applicant: GENERAL ELECTRIC COMPANY
Inventor： Manuel Kenneth Bueno , Robert Martin Roney, Jr.
CPC classification number: G01N21/8851 , G01N21/88 , G01N21/954 , G01N2021/9544 , G01N2021/9546 , G01N2021/9548 , G01N2201/06113 , G01N2201/104 , G01N2201/1045 , G01S7/4815 , G01S7/4817 , G01S7/4818 , G01S17/88 , G01S17/89
Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.
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28.发明申请公开(公告)号：US20160327493A1
公开(公告)日：2016-11-10
申请号：US14982747
申请日：2015-12-29
Applicant: KLA-Tencor Corporation
Inventor： Jamie M. Sullivan , Yevgeniy Churin
CPC classification number: G01N21/8806 , G01N21/9501 , G01N2201/0635 , G01N2201/104 , G01N2201/105 , G01N2201/106 , G02B26/101 , G02B27/1086 , G02B27/123 , G02F1/33
Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.
Abstract translation: 在斜角多光束点扫描晶片检查系统中产生多个光束线的系统包括：束扫描装置，被配置为扫描照射束;物镜相对于样品的表面以倾斜角度定向;以及 垂直于样品上的第一扫描方向的光轴和位于物镜和束扫描装置之间的一个或多个光学元件。 一个或多个光学元件将光束分成两个或更多个偏移光束，使得两个或更多个偏移光束在垂直于第一方向的至少第二方向上分离。 一个或多个光学元件进一步修改两个或多个偏移光束的相位特性，使得两个或更多个偏移光束在扫描期间同时聚焦在样本上。
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公开(公告)号：US08222615B2
公开(公告)日：2012-07-17
申请号：US12666035
申请日：2009-02-13
Applicant: Alois Schausberger , Andreas Gfrörer , Wolfgang Fuchs
Inventor： Alois Schausberger , Andreas Gfrörer , Wolfgang Fuchs
IPC: G01J1/58
CPC classification number: G02B21/26 , G01N21/278 , G01N21/6458 , G01N2021/6419 , G01N2201/104 , G01N2201/11 , G02B21/0076
Abstract: Method has laser scanner for pixel-precise imaging of fluorescent samples having fluorescent dyes. The scanner has sample table, laser and first optical system providing laser beam for exciting the samples, scanner head with deflecting element for scanning sample, first lens, second optical system for forwarding emission beams triggered by the laser beam and deflected by first lens and deflecting element to a detector, position encoder emitting position signals indicating location of the scanner head, electronic element for filtering the detector signals with a time constant and an A/D converter for digitizing the filtered detector signals. The filtered detector signals and the position encoder signals are acquired independently, in parallel and continuously by a computer and are related to a common time base, the A/D conversion being carried out often so that each pixel of an image is always assigned more than one data point.
Abstract translation: 方法具有用于具有荧光染料的荧光样品的像素精确成像的激光扫描仪。 扫描仪具有样品台，激光和第一光学系统，提供用于激发样品的激光束，扫描头具有用于扫描样品的偏转元件，第一透镜，用于转发由激光束触发并由第一透镜偏转的发射光束的第二光学系统 发送位置信号的位置编码器，用于指示扫描仪头部的位置，用于对时间常数进行检测器信号的滤波的电子元件和用于数字化滤波的检测器信号的A / D转换器。 经滤波的检测器信号和位置编码器信号由计算机并行并连续地获取并且与公共时基相关，经常执行A / D转换，使得图像的每个像素总是被分配多于 一个数据点。
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公开(公告)号：US08194301B2
公开(公告)日：2012-06-05
申请号：US12042252
申请日：2008-03-04
Applicant: Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
Inventor： Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
IPC: G02B26/08
CPC classification number: G01N21/9501 , G01N21/8806 , G01N2201/10 , G01N2201/104 , G02B26/123 , Y10S359/90
Abstract: A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.
Abstract translation: 使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供大量斑点的可扩展性以及消除通道之间的串扰。 多点扫描技术可以为斑点阵列（1D或2D）选择多个斑点，确定斑点之间的距离以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。 执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。 这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。 在一个实施例中，扫描开始并在晶片上期望的扫描区域外部结束以确保全扫描覆盖。
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