公开(公告)号：US06690010B1

公开(公告)日：2004-02-10

申请号：US09396548

申请日：1999-09-02

Applicant: David L. Adler

Inventor： David L. Adler

IPC: H01J3726

CPC classification number: G01N23/2251 ,  H01J37/252 ,  H01J2237/2561

Abstract: A technique for measuring the chemical composition of surface particles or other small features which may be present on semiconductor wafers or other substrates. A particle is irradiated with a variable energy, focused incident electron beam. X-ray or electron emissions from the particle are monitored to detect an increase in output indicating the ionization threshold of the materials in the particle. The incident beam energy is correlated with the thresholds detected to determine the species present in the particle.

Abstract translation: 用于测量可能存在于半导体晶片或其它基底上的表面颗粒或其它小特征的化学组成的技术。 用可变能量聚焦的入射电子束照射颗粒。 监测来自颗粒的X射线或电子发射，以检测指示颗粒中材料的电离阈值的输出增加。 入射光束能量与检测到的阈值相关，以确定颗粒中存在的物质。

公开(公告)号：US06642637B1

公开(公告)日：2003-11-04

申请号：US09537963

申请日：2000-03-28

Applicant: James P Spallas ,  Stuart L Friedman

Inventor： James P Spallas ,  Stuart L Friedman

IPC: H01J4300

CPC classification number: H01J37/252 ,  H01J37/244 ,  H01J43/24

Abstract: An electron multiplier having an access for allowing a beam to pass is presented. The electron multiplier collects particles traveling back along the beam and is capable of collecting the particles arbitrarily close to the beam. The electron multiplier includes at least two plates having secondary electron emitting surfaces, the at least two plates being separated by a small distance. The electron multiplier has a beam access through the at least two plates. Particles enter the electron multiplier in a direction opposite that of propagation of the beam and impact a secondary electron emitting surface, thereby being captured between the top plate and the bottom plate. In some embodiments of the invention, the electron multiplier is segmented so that azimuthal distributions of the particles can be determined. In some embodiments, the electron multiplier includes a stack of electron emitting surfaces arranged so that an angular distribution of the particles can be determined.

Abstract translation: 呈现具有允许光束通过的存取的电子倍增器。 电子倍增器收集沿着光束返回的颗粒，并且能够任意地收集靠近光束的颗粒。 电子倍增器包括具有二次电子发射表面的至少两个板，该至少两个板分开一小段距离。 电子倍增器具有通过至少两个板的光束通路。 颗粒以与光束的传播方向相反的方向进入电子倍增器，并撞击二次电子发射表面，从而被捕获在顶板和底板之间。 在本发明的一些实施例中，分割电子倍增器以便确定颗粒的方位角分布。 在一些实施例中，电子倍增器包括布置成使得可以确定颗粒的角分布的电子发射表面的堆叠。

公开(公告)号：US5990480A

公开(公告)日：1999-11-23

申请号：US964657

申请日：1997-11-05

Applicant: Hiroyuki Yamada ,  Masaki Saito

Inventor： Hiroyuki Yamada ,  Masaki Saito

IPC: G01N23/225 ,  H01J37/252 ,  H01J37/256

CPC classification number: G01N23/2252 ,  H01J37/252

Abstract: A KLM marker display controller for use with an electron probe microanalyzer or the like. This controller has a marker information table holding positional information about markers, line species and orders in tabular form for each element. When the human operator specifies an element, line species and orders through a marker-specifying portion to display markers, positional information about the line species of this element is read from the marker information table and the markers are displayed at positions determined by the positional information and the orders.

Abstract translation: 用于电子探针微量分析仪等的KLM标记显示控制器。 该控制器具有标记信息表，其保存关于每个元素的表格形式的关于标记，线种和顺序的位置信息。 当人类操作者通过标记指定部分指定元素，线种和订单以显示标记时，从标记信息表读取关于该元素的种类的位置信息，并且将标记显示在由位置信息确定的位置 和订单。

公开(公告)号：US5594246A

公开(公告)日：1997-01-14

申请号：US430535

申请日：1995-04-25

Applicant: Yoshimi Sudo ,  Tokuo Kure ,  Ken Ninomiya ,  Katsuhiro Kuroda ,  Takashi Nishida ,  Hideo Todokoro ,  Yasuhiro Mitsui ,  Hiroyasu Shichi

Inventor： Yoshimi Sudo ,  Tokuo Kure ,  Ken Ninomiya ,  Katsuhiro Kuroda ,  Takashi Nishida ,  Hideo Todokoro ,  Yasuhiro Mitsui ,  Hiroyasu Shichi

IPC: G01N23/225 ,  H01J37/252 ,  G01N23/223

CPC classification number: G01N23/2252 ,  H01J37/252 ,  H01J2237/2445

Abstract: An X-ray analyzing method includes the steps of applying an irradiated electron beam, converged by a condenser lens and an objective lens into a thin beam, to the inside of a fine hole existing on the surface of a sample; observing X-rays generated from a residual substance existing inside the fine hole; and performing a qualitative and quantitative analysis of the residual substance. The X-rays are observed by an X-ray detector installed in an internal space of the condenser lens, an internal space of the objective lens, or between the condenser lens and the objective lens, by detecting only the X-rays radiated within the angular range -.theta. to +.theta., where .theta. is an angle formed with a center axis of the electron beam, and so defined that tan .theta. is substantially equal to a/d, where a and d are the radius and the depth of the fine hole, respectively.

Abstract translation: X射线分析方法包括以下步骤：将由聚光透镜和物镜会聚的照射的电子束施加到薄的光束中，使其存在于样品表面上的细孔的内部; 观察由存在于细孔内的残留物质产生的X射线; 并对剩余物质进行定性和定量分析。 X射线由安装在聚光透镜的内部空间，物镜的内部空间或者聚光透镜与物镜之间的X射线检测器观测，仅检测在该透镜内辐射的X射线 角度范围-θ至+θ，其中θ是与电子束的中心轴形成的角度，并且如此定义为tanθ基本上等于a / d，其中a和d是微细的半径和深度 孔。

公开(公告)号：US5528034A

公开(公告)日：1996-06-18

申请号：US411992

申请日：1995-03-28

Applicant: Yasunori Yamazaki ,  Kenichiro Komaki ,  Toshiyuki Azuma ,  Nobukazu Kakutani ,  Kenro Kuroki

Inventor： Yasunori Yamazaki ,  Kenichiro Komaki ,  Toshiyuki Azuma ,  Nobukazu Kakutani ,  Kenro Kuroki

IPC: G01N1/00 ,  G01N23/22 ,  G01N23/225 ,  G01Q60/44 ,  H01J27/02 ,  H01J27/18 ,  H01J27/20 ,  H01J37/05 ,  H01J37/08 ,  H01J37/252 ,  H01J49/14 ,  H01J49/40

CPC classification number: H01J49/40 ,  G01N23/2258 ,  H01J27/18 ,  H01J37/252 ,  H01J2237/2527

Abstract: The present invention is to provide a method for detecting hydrogen with ultra high sensitivity based on slow multiply-charged ion wherein damages of a target surface can be remarkably reduced and a quantitative analysis of hydrogen atoms on a solid surface can be compactly realized with extremely high efficiency by employing slow multiply-charged ions derived from an ion source for efficiently generating multiply-charged ions. The present invention relate to a method of ultra high sensitivity hydrogen detection based on slow multiply-charged ions comprising: arranging an EBIS type slow multiply-charged ion source for generating slow multiply-charged ions having potential energy higher than kinetic energy, a Wien filter type mass analyzer, a deflector for producing a pulsed ion beam, an acceleration ring provided with apertures lenses and a secondary ion detector, a target on a Cu mesh provided on the acceleration ring and a secondary electron multiplier in order on a beam line for carrying ions from the ion source, detecting secondary ions generated upon the collision of slow multiply-charged ions with the target by accelerating the secondary ions toward the secondary ion detector, detecting secondary electrons in the secondary electron multiplier by repelling toward the mesh target and measuring a time difference between a secondary electron detection time on the secondary electron multiplier and a secondary ion detection time on the secondary ion detector, thereby effecting a quantitative analysis of hydrogen atoms on a solid surface of the target on the Cu mesh.

Abstract translation: 本发明提供一种基于慢倍增电离子检测超高灵敏度的方法，其中目标表面的损伤可以显着降低，固体表面上氢原子的定量分析可以用极高的压力实现 通过使用衍生自离子源的慢倍增电离子来有效地产生多电荷离子的效率。 本发明涉及一种基于慢倍增电离子的超高灵敏度氢检测方法，包括：设置EBIS型慢倍增电离子源，用于产生具有高于动能的势能的慢倍数带电离子，维恩滤波器 型质量分析器，用于产生脉冲离子束的偏转器，设置有孔透镜的加速环和二次离子检测器，设置在加速环上的Cu网上的靶和次级电子倍增器， 离子源，通过将二次离子加速到二次离子检测器，检测慢倍数带电离子与目标物碰撞时产生的二次离子，通过向二次电子倍增器中的二次电子排斥到网格目标上并测量一个 二次电子倍增器上的二次电子检测时间与二次电子倍数之间的时间差 y离子检测时间，从而对Cu网上目标物的固体表面上的氢原子进行定量分析。

公开(公告)号：US5266802A

公开(公告)日：1993-11-30

申请号：US994329

申请日：1992-12-21

Applicant: Toru Kasai

Inventor： Toru Kasai

IPC: H01J37/141 ,  G01Q30/20 ,  H01J37/02 ,  H01J37/252 ,  H01J37/26 ,  H01J37/244

CPC classification number: H01J37/252 ,  H01J37/02 ,  H01J2237/0213 ,  H01J2237/2442

Abstract: An electron microscope capable of performing accurate x-ray analysis is provided. An objective lens having a bottom polepiece from which unwanted x-rays are not produced is attached to the electron microscope. An EDS (energy-dispersive x-ray spectrometer) detector is also attached to the electron microscope to make an x-ray analysis. A film consisting of a light element such as beryllium is coated on the top surface and the tapering portion of the bottom polepiece to prevent the electron beam transmitted through the sample or the secondary electrons and the scattered electrons emanating from the sample from colliding against the surface of the bottom polepiece; otherwise x-rays characteristic of Fe and Co would be generated.

Abstract translation: 提供能够进行精确X射线分析的电子显微镜。 具有不产生不需要的X射线的底部磁极的物镜附着在电子显微镜上。 EDS（能量色散X射线光谱仪）检测器也附在电子显微镜上进行X射线分析。 由诸如铍等轻元素组成的薄膜涂覆在底部极片的上表面和锥形部分上，以防止通过样品或二次电子传播的电子束和从样品发出的散射电子与表面碰撞 的底端; 否则会产生Fe和Co特征的x射线。

公开(公告)号：US5229607A

公开(公告)日：1993-07-20

申请号：US714018

申请日：1991-06-12

Applicant: Hironobu Matsui ,  Mikio Ichihashi ,  Sumio Hosaka ,  Yoshinori Nakayama ,  Satoshi Haraichi ,  Fumikazu Itoh ,  Akira Shimase ,  Yoshimasa Kondo ,  Shigeyuki Hosoki ,  Masakazu Ichikawa ,  Yukio Honda ,  Tsuyoshi Hasegawa ,  Shiji Okazaki ,  Shunji Maeda ,  Hitoshi Kubota

Inventor： Hironobu Matsui ,  Mikio Ichihashi ,  Sumio Hosaka ,  Yoshinori Nakayama ,  Satoshi Haraichi ,  Fumikazu Itoh ,  Akira Shimase ,  Yoshimasa Kondo ,  Shigeyuki Hosoki ,  Masakazu Ichikawa ,  Yukio Honda ,  Tsuyoshi Hasegawa ,  Shiji Okazaki ,  Shunji Maeda ,  Hitoshi Kubota

IPC: G01Q10/04 ,  G01Q30/02 ,  G01Q30/12 ,  G01Q30/18 ,  G01Q60/00 ,  H01J37/252 ,  H01J37/28

CPC classification number: H01J37/28 ,  B82Y35/00 ,  G01Q30/02 ,  H01J37/252 ,  H01J37/3056

Abstract: A combination apparatus having a scanning electron microscope includes equipment for performing any of observing, measuring and processing operations on a sample placed in a sample chamber. The sample chamber contains a focused electron beam irradiating unit apart from the components for performing the observing, measuring and processing operations. The focused electron beam irradiating unit irradiates a finely focused electron beam onto the surface of the sample for electron microscopic observation in scanning fashion. This setup allows the observing, measuring or processing equipment to combine with the scanning electron microscope without appreciably enlarging the construction of the combination apparatus.

Abstract translation: 具有扫描电子显微镜的组合装置包括用于对放置在样品室中的样品进行观察，测量和处理操作的任何设备。 样品室包含聚焦电子束照射单元，与用于进行观察，测量和处理操作的部件分开。 聚焦电子束照射单元以扫描方式将精细聚焦的电子束照射到用于电子显微镜观察的样品表面上。 该设置允许观察，测量或处理设备与扫描电子显微镜组合，而不会明显地扩大组合装置的结构。

公开(公告)号：US5142149A

公开(公告)日：1992-08-25

申请号：US552456

申请日：1990-07-16

Applicant: Shigeto Isakozawa ,  Hiroyuki Kobayashi

Inventor： Shigeto Isakozawa ,  Hiroyuki Kobayashi

IPC: G01N23/00 ,  G01N23/22 ,  G01N23/225 ,  H01J37/252 ,  H01J37/26

CPC classification number: H01J37/252 ,  G01N23/2208

Abstract: A sample is irradiated with an electron beam and analyzed by detecting characteristics X-rays obtained from the sample and electron beams transmitted thereby. There is provided means, which collects analysis results obtained by this analysis to compare the analysis results thus collected.

公开(公告)号：US4967078A

公开(公告)日：1990-10-30

申请号：US474476

申请日：1990-02-02

Applicant: Kenneth H. Purser

Inventor： Kenneth H. Purser

IPC: G01Q30/20 ,  H01J37/252 ,  H01J49/30

CPC classification number: H01J37/252 ,  H01J49/30

Abstract: A Rutherford backscattering analyzer comprising in combination:a hollow electrode,a voltage source for impressing upon said hollow electrode a positive voltage of the order of 10.sup.6 volts,a first acceleration tube connected between said voltage source and ground,a second acceleration tube connected said voltage source and ground,a deflecting magnet within said terminal having pole pieces between which is supported an evacuated region connecting said acceleration tubes to each other,a source of positive helium ions,a lithium charge-exchange canal,means for analyzing said helium ions and directing them into said canal,an electron stripper within said terminal,said magnet being adapted to direct said stripped ions into said second acceleration tube for acceleration therethrough,a sample holder for holding a sample to be analyzed in the path of the ions emerging from said second acceleration tube, andmeans for analyzing the energy and yield of helium ions backscattered from said sample,said magnet including permanently magnetized members producing a magnetic flux of a least 3000 gauss and having a magnetic hardness no less than that of samarium cobalt.

Abstract translation: 一种卢瑟福背散射分析仪，包括：中空电极，用于在所述中空电极上施加约106伏的正电压的电压源，连接在所述电压源与地之间的第一加速管，连接所述电压的第二加速管 所述端子中的偏转磁体具有极片，在所述极片之间支撑有将所述加速管彼此连接的抽空区域，正氦离子源，锂电荷交换管，用于分析所述氦离子的装置和引导 它们进入所述管道，在所述端子内的电子剥离器，所述磁体适于将所述剥离的离子引导到所述第二加速管中以加速通过;用于将待分析样品保持在从所述第二 加速管，以及用于分析从所述背面散射的氦离子的能量和产率的装置 所述磁体包括永久磁化的构件，其产生至少3000高斯的磁通量并且具有不小于钐钴的磁性硬度。

公开(公告)号：US4670651A

公开(公告)日：1987-06-02

申请号：US779868

申请日：1985-09-25

Applicant: Stefan Meier ,  Karl-Heinz Muller

Inventor： Stefan Meier ,  Karl-Heinz Muller

IPC: A61B17/00 ,  G01N23/225 ,  G01N27/62 ,  G01Q10/04 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/252 ,  H01J49/06 ,  H01J49/14

CPC classification number: G01N23/2255 ,  H01J37/252 ,  H01J49/142 ,  A61B2017/00004

Abstract: An apparatus for the performance of the SNMS process, having a separate ion source, a sample holder, a system for the production of a radio-frequency plasma and a mass analyzer, in which the ion source and the mass analyzer are disposed side by side on the same side of the chamber provided for the radio-frequency plasma, and in which the sample mounted on the sample holder is situated within the chamber provided for the radio-frequency plasma. This apparatus can be used not only for the performance of the two kinds of SNMS operation (DMB and SBM) but also secondary ion mass spectroscopy (SIMS) under optimum spatial conditions.

Abstract translation: 用于执行SNMS工艺的装置，具有单独的离子源，样品架，用于生产射频等离子体的系统和质量分析器，其中离子源和质量分析器并排设置 在为射频等离子体提供的室的同一侧，并且其中安装在样品架上的样品位于为射频等离子体提供的室内。 该装置不仅可用于两种SNMS操作（DMB和SBM）的性能，而且可用于二次离子质谱（SIMS）在最佳空间条件下的运行。