公开(公告)号：US20110220796A1

公开(公告)日：2011-09-15

申请号：US13127455

申请日：2009-11-06

申请人： Stavros Nicolopoulos ,  Daniel Bultreys ,  Edgard Rauch

发明人： Stavros Nicolopoulos ,  Daniel Bultreys ,  Edgard Rauch

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  G01N23/20058 ,  H01J37/05 ,  H01J37/222 ,  H01J37/256 ,  H01J37/2955 ,  H01J2237/226 ,  H01J2237/25 ,  H01J2237/2802

摘要： A method and device for electron diffraction tomography of a crystal sample, which employs scanning of the electron beam over a plurality of discrete locations of the sample, in combination with a beam scanning protocol as the beam converges at every discrete location (42, 43) of the sample (38) to obtain a series of electron diffraction patterns, use of template matching to determine crystal orientations and thickness maps to obtain a common intensity scaling factor.

摘要翻译： 一种晶体样品的电子衍射断层摄影的方法和装置，当束在每个离散位置（42,43）处会聚时，其结合光束扫描方案，在样本的多个离散位置上扫描电子束， 的样品（38）以获得一系列电子衍射图案，使用模板匹配来确定晶体取向和厚度图以获得共同的强度比例因子。

公开(公告)号：US07385198B2

公开(公告)日：2008-06-10

申请号：US11326399

申请日：2006-01-06

申请人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

发明人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

摘要翻译： 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。

公开(公告)号：US20070228277A1

公开(公告)日：2007-10-04

申请号：US11806120

申请日：2007-05-30

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G01N23/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.

摘要翻译： 扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。 扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元 通过扫描一次电子束。

公开(公告)号：US20060288797A1

公开(公告)日：2006-12-28

申请号：US10565034

申请日：2004-07-16

申请人： Jean-Luc Rouviere ,  Laurent Clement ,  Roland Pantel

发明人： Jean-Luc Rouviere ,  Laurent Clement ,  Roland Pantel

IPC分类号： G01N19/00

CPC分类号： H01J37/2955 ,  G01N23/2251

摘要： The invention relates to a method for determining at least one mechanical parameter of at least one material in a composite system comprising at least two distinct phases, characterized in that it comprises: a) the production of at least one specimen comprising a first part of a first phase and a second part of a second phase, the second part consisting of the material to be characterized, the specimen having at least one dimension small enough to allow the strains in said specimen to be relaxed; b) the measurement, on said specimen, of at least one deformation parameter of at least said first phase, in correspondence with a plurality of points lying at different distances from an interface between said first and second phases; and c) the determination, from at least said deformation parameter, of at least one mechanical parameter of said second phase.

摘要翻译： 本发明涉及一种用于确定复合系统中至少一种材料的至少一种机械参数的方法，所述组合系统包括至少两个不同的相，其特征在于，其包括：a）至少一个样品的产生，所述至少一个样品包含第一部分 第一相和第二相的第二部分，第二部分由要表征的材料组成，所述试样具有至少一个尺寸足够小以允许所述试样中的应变松弛; b）在所述样本上测量至少所述第一相的至少一个变形参数，对应于位于与所述第一和第二相之间的界面不同距离的多个点; 以及c）从至少所述变形参数确定所述第二相的至少一个机械参数。

公开(公告)号：US06750451B2

公开(公告)日：2004-06-15

申请号：US10183157

申请日：2002-06-28

申请人： Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

发明人： Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

IPC分类号： H01J3726

CPC分类号： H01J37/2955 ,  H01J2237/2802

摘要： Disclosed is an observation apparatus and method using an electron beam, capable of measuring stress and strain information on a crystal structure in a specimen using electron beam diffraction images. A method according to the invention includes mounting a specimen on a specimen stage; irradiating a predetermined area in the specimen with an electron beam while scanning the electron beam, and acquiring an enlarged image of a specimen internal structure in the predetermined area; irradiating a specific portion included in the predetermined area and acquiring a diffraction image showing the crystal structure in the specimen; extracting information on the crystal structure in the specimen; displaying the information of the crystal structure in the specimen so as to be superimposed on the acquired enlarged image. The observation method according to the invention can obtain information on the crystal structure in a specimen with a high degree of sensitivity and with a high level of resolution.

摘要翻译： 公开了一种使用电子束的观测装置和方法，其能够使用电子束衍射图像测量样品中的晶体结构的应力和应变信息。 根据本发明的方法包括将样品安装在样品台上; 在扫描电子束的同时用电子束照射样本中的预定区域，并获取预定区域中的样本内部结构的放大图像; 照射包含在预定区域中的特定部分，并获取示出样品中的晶体结构的衍射图像; 提取样品中晶体结构的信息; 在样本中显示晶体结构的信息，以便叠加在所获取的放大图像上。 根据本发明的观察方法可以以高灵敏度和高分辨率获得关于样品中的晶体结构的信息。

公开(公告)号：US4623783A

公开(公告)日：1986-11-18

申请号：US743015

申请日：1985-06-10

申请人： Yukihito Kondo

发明人： Yukihito Kondo

IPC分类号： H01J37/26 ,  H01J37/141 ,  H01J37/147 ,  H01J37/22 ,  H01J37/285 ,  H01J37/295

CPC分类号： H01J37/2955

摘要： A method for large-angle convergent-beam diffraction comprises selecting a portion of the diffraction pattern formed by an objective lens, by the use of a diaphragm. Then, a portion of the electron micrograph which is formed by the electron beam passed through the diaphragm is detected, thus producing a signal. This enables a large-angle convergent-beam electron diffraction method that permits one to examine a specimen region which is much narrower than conventional.

摘要翻译： 用于大角度会聚束衍射的方法包括通过使用隔膜来选择由物镜形成的衍射图案的一部分。 然后，检测由通过隔膜的电子束形成的电子显微照片的一部分，从而产生信号。 这使得能够检查比常规窄得多的样本区域的大角度会聚束电子衍射法。

公开(公告)号：US4211924A

公开(公告)日：1980-07-08

申请号：US7647

申请日：1979-01-29

申请人： Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

发明人： Karl-Heinz Muller ,  Burkhard Krisch ,  Volker Rindfleisch ,  Hans F. R. Neuendorff

IPC分类号： H01J37/22 ,  H01J37/295

CPC分类号： H01J37/28 ,  H01J37/224 ,  H01J37/2955

摘要： An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.

摘要翻译： 一种改进的透射型扫描带电粒子束显微镜，包括电视照相机管和用于产生和显示被检样本的衍射图像的电视显示管。 本发明的改进包括在显微镜中沿着光束路径设置在样品后面的光束的透射荧光屏中的光学装置，适于将荧光屏成像在电视摄像机管的目标上 以及用于整体地检测从荧光屏发出的辐射的检测器装置。

公开(公告)号：US3848126A

公开(公告)日：1974-11-12

申请号：US37172473

申请日：1973-06-20

申请人： NAT RES DEV

发明人： SWINDELLS N ,  BEVIS M

IPC分类号： G01N23/205 ,  H01J37/22 ,  H01J37/26

CPC分类号： H01J37/2955 ,  G01N23/205 ,  H01J37/224

摘要： A camera for photographing Kossel lines caused by irradiating crystalline specimens with electron beams is disclosed. Previously such photographs were taken either by back reflection or transmission methods with the plane of the photographic plate perpendicular to the beam axis. This causes numerous disadvantages. In the present embodiment the photographs are taken in a plane parallel to the electron beam, and technique for interpreting the photographs so taken is fully explained.

摘要翻译： 公开了一种用于用电子束照射结晶样品而拍摄Kossel线的相机。 以前，这样的照片是通过背景反射或透射方法拍摄的，其中照相板的平面垂直于光束轴线。 这导致许多缺点。

公开(公告)号：US20230145436A1

公开(公告)日：2023-05-11

申请号：US17905128

申请日：2021-03-01

申请人： DIRECT ELECTRON, LP

发明人： Benjamin BAMMES ,  Robert BILHORN

IPC分类号： H01J37/295

CPC分类号： H01J37/2955 ,  H01J2237/2803 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/24495

摘要： A method of, and a detector for, performing energy sensitive imaging of ionizing radiation are provided, including acquiring a first frame having a plurality of pixels, each pixel of the plurality having an energy of detection and a location; grouping, into a cluster, pixels of the plurality having an energy of detection above a predetermined threshold and a location along with at least one other pixel also having an energy of detection above the predetermined threshold and being within a predetermined distance of the location; summing the energy of detection of all pixels within the grouped cluster to determine a cluster energy; determining a location of the cluster based on a distribution and an intensity of the summed energy of detection; and generating an image of the cluster based on the determined cluster energy and the determined location of the cluster.

公开(公告)号：US09093246B2

公开(公告)日：2015-07-28

申请号：US12942477

申请日：2010-11-09

申请人： Dirk Preikszas

发明人： Dirk Preikszas

IPC分类号： G01K1/08 ,  H01J37/147 ,  H01J37/295

CPC分类号： H01J37/1478 ,  H01J37/2955 ,  H01J2237/1506 ,  H01J2237/1534

摘要： An SACP method includes directing a beam of charged particles onto an object surface of an object using a particle optical system, and detecting intensities of particles emanating from the object. The method further includes: (a1) adjusting an excitation of the second beam deflector for adjusting an impingement location of the beam on the object surface; (a2) adjusting an excitation of the first beam deflector for adjusting an angle of incidence of the beam on the object surface without changing the impingement location and detecting the intensity; and (a3) repeating the adjusting of the excitation of the first beam deflector for adjusting the angle of incidence without changing the impingement location such that a corresponding intensity is detected for each of at least 100 different angles of incidence at the same impingement location.

摘要翻译： SACP方法包括使用粒子光学系统将带电粒子束引导到物体的物体表面上，并且检测从物体发出的粒子的强度。 该方法还包括：（a1）调整第二光束偏转器的激发，用于调节光束在物体表面上的冲击位置; （a2）调整所述第一光束偏转器的激发，用于调整所述光束在所述物体表面上的入射角，而不改变所述撞击位置并检测所述强度; 和（a3）重复调节第一光束偏转器的激发以调节入射角而不改变冲击位置，使得在相同的撞击位置处对于至少100个不同入射角中的每一个检测到相应的强度。