公开(公告)号：US20110223698A1

公开(公告)日：2011-09-15

申请号：US12948418

申请日：2010-11-17

Applicant: Seong-Hyun JIN ,  Young-Jin CHANG ,  Jae-Hwan OH ,  Won-Kyu LEE

Inventor： Seong-Hyun JIN ,  Young-Jin CHANG ,  Jae-Hwan OH ,  Won-Kyu LEE

IPC: H01L33/00 ,  H01L21/20 ,  B05C9/08 ,  B05D3/06 ,  F21S4/00 ,  H05B41/16

CPC classification number: C30B29/06 ,  C30B1/023 ,  H01L21/02422 ,  H01L21/02425 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02667

Abstract: Provided are a crystallization apparatus and method, which prevent cracks from being generated, a method of manufacturing a thin film transistor (TFT), and a method of manufacturing an organic light emitting display apparatus. The crystallization apparatus includes a chamber for receiving a substrate, a first flash lamp and a second flash lamp, which are disposed facing each other within the chamber, wherein amorphous silicon layers are disposed on a first surface of the substrate facing the first flash lamp and a second surface of the substrate facing the second flash lamp, respectively.

Abstract translation: 提供了防止产生裂纹的结晶装置和方法，制造薄膜晶体管（TFT）的方法和制造有机发光显示装置的方法。 结晶装置包括用于容纳衬底的腔室，第一闪光灯和第二闪光灯，其在腔室内相互面对地布置，其中非晶硅层设置在面向第一闪光灯的衬底的第一表面上， 分别面向第二闪光灯的基板的第二表面。

公开(公告)号：US20110146574A1

公开(公告)日：2011-06-23

申请号：US12975899

申请日：2010-12-22

Applicant: Oleg N. GRATCHEV ,  Robert TAFF ,  David ALBERTALLI

Inventor： Oleg N. GRATCHEV ,  Robert TAFF ,  David ALBERTALLI

IPC: B05C9/08 ,  B05B1/00 ,  B05C11/00 ,  B08B13/00

CPC classification number: B41J2/16552 ,  B41J2002/16567

Abstract: A microdeposition system includes a printhead carriage that includes N rows of nozzles and that moves along a first axis; a stage that holds a substrate; and a maintenance station located at a position along the first axis that is past an edge of the substrate. The N rows of nozzles selectively deposit droplets of fluid manufacturing material onto the substrate. The maintenance station includes a capping station and an ultrasonic cleaning station located in a middle of the capping station. N is an integer greater than one.

Abstract translation: 微沉积系统包括一个包括N排喷嘴并沿第一轴线移动的打印头托架; 保持底物的阶段; 以及位于沿着所述第一轴线的位于所述基板的边缘的位置的维护站。 N排喷嘴选择性地将流体制造材料的液滴沉积到基底上。 维修站包括一个封盖站和位于封盖站中间的超声波清洗站。 N是大于1的整数。

公开(公告)号：US20110030614A1

公开(公告)日：2011-02-10

申请号：US12641581

申请日：2009-12-18

Applicant: CHIEN-HAO HUANG ,  SHAO-KAI PEI

Inventor： CHIEN-HAO HUANG ,  SHAO-KAI PEI

IPC: B05C9/14 ,  B05C11/00 ,  B05C9/08

CPC classification number: B05C3/10 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67742 ,  H01L21/67751

Abstract: An exemplary wet coating system includes a coating chamber, an annealing chamber, an unloading chamber, and a mechanical arm. The coating chamber is configured for allowing a substrate being wet coated therein. The unloading chamber is configured for allowing the substrate being unloaded therein. The annealing chamber is interposed between and communicated with the coating chamber and the unloading chamber and is configured for allowing the substrate being annealed therein. The communicated coating chamber, annealing chamber, and unloading chamber are vacuumized. The mechanical arm is configured for holding the substrate and moving the substrate across the coating chamber, the annealing chamber, and the unloading chamber.

Abstract translation: 示例性的湿涂层系统包括涂覆室，退火室，卸载室和机械臂。 涂覆室被配置为允许衬底被湿涂覆在其中。 卸载室构造成允许衬底被卸载在其中。 退火室介于涂覆室和卸载室之间并与其连通并被配置为允许衬底在其中退火。 将连通的涂布室，退火室和卸料室抽真空。 机械臂构造成用于保持基板并使基板移动穿过涂覆室，退火室和卸载室。

公开(公告)号：US20100326354A1

公开(公告)日：2010-12-30

申请号：US12877881

申请日：2010-09-08

Applicant: Tsutomu SAHODA ,  Futoshi SHIMAI ,  Akihiko SATO

Inventor： Tsutomu SAHODA ,  Futoshi SHIMAI ,  Akihiko SATO

IPC: H01L21/67 ,  B25J21/00 ,  B25J11/00 ,  B25J15/00 ,  B05C13/00 ,  B05C11/00 ,  B05C9/08 ,  B05C9/14 ,  B05C9/10 ,  B05C9/12 ,  B25J15/06 ,  B05B13/02 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67051 ,  H01L21/67161 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/67751 ,  H01L21/67766 ,  H01L21/67778 ,  Y10S269/903

Abstract: A substrate processing system includes a processing unit, a substrate loading unit, a substrate unloading unit, and a carrying unit. A carrying device has a constitution in which a suction portion suctioning and holding a substrate is rotatable about an arm portion provided in a base portion and the substrate is rotated in the state where the substrate is held by a holding portion. A coating device has a constitution in which a liquid material is ejected from a nozzle to both surfaces of the substrate rotating in an upright state.

Abstract translation: 基板处理系统包括处理单元，基板装载单元，基板卸载单元和承载单元。 携带装置具有这样一种构造，其中吸引和保持基板的吸附部分可以围绕设置在基部中的臂部分旋转，并且基板在通过保持部保持基板的状态下旋转。 涂布装置具有液体材料从喷嘴喷射到以直立状态旋转的基板的两个表面的构造。

公开(公告)号：US20090252933A1

公开(公告)日：2009-10-08

申请号：US12062595

申请日：2008-04-04

Applicant: M. Benton Free ,  Daniel W. Hennen ,  Gregory G. Jager

Inventor： M. Benton Free ,  Daniel W. Hennen ,  Gregory G. Jager

IPC: B32B33/00 ,  B05D5/06 ,  B05C9/08

CPC classification number: B41M3/00 ,  B05B7/2483 ,  Y10T428/24802

Abstract: A printer for digital printing in which ink is deposited in metered amounts on a substrate. The printer includes a wheel rotatable by a shaft of a motor, an idler disposed in a paint reservoir, and a segment of wire disposed around the wheel and the idler. A computer controls movement of the wire by controlling the rotation of the wheel. As the motor rotates the wheel, electroluminescent material contained within the paint reservoir coats the wire and is drawn by the wire in front of an air stream, which pulls the electroluminescent material from the wire and carries it toward the substrate to make an electroluminescent sign.

Abstract translation: 一种用于数字印刷的打印机，其中油墨以定量的量沉积在基材上。 打印机包括可由电动机的轴旋转的轮，设置在油漆储存器中的惰轮以及围绕车轮和惰轮设置的线段。 计算机通过控制车轮的旋转来控制线的移动。 当电动机旋转车轮时，包含在油漆储存器内的电致发光材料涂覆线，并且被空气流前面的金属丝牵引，该气流从电线中拉出电致发光材料并将其传送到衬底以形成电致发光符号。

公开(公告)号：US20090226598A1

公开(公告)日：2009-09-10

申请号：US12363979

申请日：2009-02-02

Applicant: James Feng ,  Frank Genovese ,  James Lee Shippy

Inventor： James Feng ,  Frank Genovese ,  James Lee Shippy

IPC: B05D3/10 ,  B05C9/08

CPC classification number: B05D1/02 ,  B01L3/502707 ,  B05B7/066 ,  B05B15/50 ,  B05B15/55 ,  B05C5/001 ,  B05D3/0486

Abstract: An apparatus for depositing coating onto a substrate including a housing having a nozzle including a nozzle orifice, a fluid source configured to deliver coating fluid to the nozzle, and a solvent vapor emitter. The solvent vapor emitter can be located proximate to the nozzle, for example, such as behind the nozzle orifice and/or in a direction substantially parallel to a central axis of the housing. During coating, coating fluid may exit the nozzle and is deposited onto the substrate while the solvent vapor emitter emits solvent vapor proximate to the nozzle orifice.

Abstract translation: 一种用于将涂层沉积到基底上的装置，包括具有喷嘴的壳体，所述喷嘴包括喷嘴孔，被配置为将喷射流体输送到喷嘴的流体源和溶剂蒸气发射器。 溶剂蒸汽发射器可以位于喷嘴附近，例如位于喷嘴孔的后面和/或基本上平行于壳体的中心轴线的方向上。 在涂覆期间，涂布流体可以离开喷嘴并沉积到衬底上，同时溶剂蒸汽发射器在喷嘴孔附近发射溶剂蒸气。

公开(公告)号：US20090095420A1

公开(公告)日：2009-04-16

申请号：US12327428

申请日：2008-12-03

Applicant: Tadashi Sawayama ,  Yasushi Fujioka ,  Masahiro Kanai ,  Shotaro Okabe ,  Yuzo Kohda ,  Tadashi Hori ,  Koichiro Moriyama ,  Hiroyuki Ozaki ,  Yukito Aota ,  Atsushi Koike ,  Mitsuyuki Niwa ,  Yasuyoshi Takai ,  Hidetoshi Tsuzuki

Inventor： Tadashi Sawayama ,  Yasushi Fujioka ,  Masahiro Kanai ,  Shotaro Okabe ,  Yuzo Kohda ,  Tadashi Hori ,  Koichiro Moriyama ,  Hiroyuki Ozaki ,  Yukito Aota ,  Atsushi Koike ,  Mitsuyuki Niwa ,  Yasuyoshi Takai ,  Hidetoshi Tsuzuki

IPC: H01L21/3065 ,  B05C9/08 ,  H01L21/302

CPC classification number: H01L21/67017 ,  C23C16/24 ,  C23C16/4412 ,  C23C16/545 ,  H01J37/3244 ,  H01J37/32834 ,  H01J37/32844 ,  Y02C20/30 ,  Y02P70/605

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

公开(公告)号：US20080282974A1

公开(公告)日：2008-11-20

申请号：US12150664

申请日：2008-04-30

Applicant: Toshiharu Takemata

Inventor： Toshiharu Takemata

IPC: B05C9/08

CPC classification number: B41F23/0443 ,  B41F23/0409 ,  F26B3/28 ,  F26B25/004

Abstract: A liquid curing apparatus for a liquid transfer device includes a liquid transfer unit and a plurality of ultraviolet-emitting diodes. The liquid transfer unit transfers an ultraviolet curing liquid to a transfer target body. The plurality of ultraviolet-emitting diodes are arranged to oppose the transfer target body and emit only ultraviolet-wavelength light to irradiate the transfer target body to which the liquid has been transferred by the liquid transfer unit, thereby curing the transferred liquid.

Abstract translation: 液体转移装置的液体固化装置包括液体转移单元和多个紫外线发射二极管。 液体转移单元将紫外线固化液转移到转印体上。 多个紫外线发光二极管被配置为与转印体相对，仅发射紫外线波长的光，以对通过液体转印单元传送液体的转印体进行照射，从而固化转印液体。

公开(公告)号：US20050257741A1

公开(公告)日：2005-11-24

申请号：US11190883

申请日：2005-07-28

Applicant: Shunpei Yamazaki

Inventor： Shunpei Yamazaki

IPC: H01L31/12 ,  H01L21/77 ,  H01L27/32 ,  H01L51/40 ,  H01L51/56 ,  B05C9/08 ,  H05B33/10

CPC classification number: H01L51/0004 ,  H01L27/1214 ,  H01L27/1259 ,  H01L27/32 ,  H01L51/0013 ,  H01L51/56

Abstract: The problem regarding volatileness of a solvent in an EL forming material, which occurs in adopting printing, are solved. An EL layer is formed in a pixel portion of a light emitting device by printing. Upon formation of the EL layer, a printing chamber is pressurized to reach a pressure equal to or higher than the atmospheric pressure, and the printing chamber is filled with inert gas or set to a solvent atmosphere. Thus the difficulty in forming an EL layer by printing is eliminated.

Abstract translation: 解决了在采用印刷中发生的EL形成材料中的溶剂挥发性的问题。 通过印刷在发光器件的像素部分中形成EL层。 在形成EL层时，对印刷室进行加压以达到等于或大于大气压的压力，并且将印刷室填充惰性气体或设置在溶剂气氛中。 因此消除了通过印刷形成EL层的困难。

公开(公告)号：US20050079276A1

公开(公告)日：2005-04-14

申请号：US10898992

申请日：2004-07-27

Applicant: Tooru Inoue ,  Akihiro Goto

Inventor： Tooru Inoue ,  Akihiro Goto

IPC: B05B5/025 ,  B05C9/08 ,  C23C26/00

CPC classification number: C23C26/00 ,  B05D1/62 ,  B05D3/141 ,  C25D5/18 ,  C25D17/00 ,  C25D21/12

Abstract: An apparatus has a green compact electrode including a material of a coating formed on a workpiece by a discharge, a power source for supplying a first voltage, a voltage detector for detecting a voltage between the workpiece and the electrode, and a pulse current generator for generating and outputting a pulse current from the first voltage, and for cutting off the output when a predetermined period of time has passed after the voltage is detected to be less than a detection voltage. The pulse current is supplied between the workpiece and the electrode, and the detection voltage is less than the first voltage by 5% to 20% of the first voltage.

Abstract translation: 一种装置具有包括通过放电在工件上形成的涂层的材料的绿色紧凑型电极，用于提供第一电压的电源，用于检测工件和电极之间的电压的电压检测器，以及用于 从第一电压产生和输出脉冲电流，并且在检测到电压小于检测电压之后经过预定时间段时切断输出。 在工件与电极之间提供脉冲电流，检测电压小于第一电压的5％〜20％。