公开(公告)号：US4725736A

公开(公告)日：1988-02-16

申请号：US895200

申请日：1986-08-11

Applicant: Albert V. Crewe

Inventor： Albert V. Crewe

IPC: H01J3/02 ,  H01J37/30 ,  H01J3/18 ,  H01J3/32

CPC classification number: H01J37/3007 ,  H01J3/027

Abstract: An ultra-compact electrostatic electron gun includes integrated beam-modifying means for use in electron beam memory systems, electron microscopes, electron lithographic devices and the like. The gun is illustrated as comprising means forming a point source of electrons and means receiving electrons from the point source for defining an electron beam. Electrostatic lens means receives the beam and forms a beam focus. An integrated magnetic field-generating means establishes a field of magnetic flux through the electrostatic lens for modifying the position, cross-sectional shape or other characteristic of the beam. The magnetic field-generating means is adapted to receive static or dynamic control signals and is characterized by comprising means positioned axially coincident with and surrounding the electrostatic lens to effectively immerse substantially the entire lens in the beam-modifying magnetic field, whereby due to the axial coincidence of the magnetic field-generating means with the lens, a characteristic of the electron beam may be modified without the magnetic field-generating adding significantly, if at all, to the axial length of the gun.

Abstract translation: 超小型静电电子枪包括用于电子束存储系统，电子显微镜，电子光刻设备等的集成光束修改装置。 枪被示出为包括形成电子点源的装置，以及从点源接收电子的装置，用于限定电子束。 静电透镜装置接收光束并形成光束聚焦。 集成磁场产生装置建立通过静电透镜的磁通场，用于改变光束的位置，横截面形状或其他特性。 磁场产生装置适于接收静态或动态控制信号，其特征在于包括与轴向重合并围绕静电透镜的装置，以有效地将整个透镜有效地浸入光束修正磁场中，由此由于轴向 磁场产生装置与透镜的一致性，可以改变电子束的特性，而不会对枪的轴向长度显着增加磁场产生。

公开(公告)号：US4682074A

公开(公告)日：1987-07-21

申请号：US793883

申请日：1985-11-01

Applicant: Arthur M. E. Hoeberechts ,  Gerardus G. P. van Gorkom

Inventor： Arthur M. E. Hoeberechts ,  Gerardus G. P. van Gorkom

IPC: H01J29/04 ,  H01J1/308 ,  H01J3/02 ,  H01J3/18 ,  H01J29/48

CPC classification number: H01J29/481 ,  H01J3/021

Abstract: A device for recording or displaying images or for electron lithographic or electron microscopic uses, comprising in an evacuated envelope (1) a target (7) on which at least one electron beam (6) is focussed. This beam is generated by means of a semiconductor device (10) which comprises an electrically insulating layer (42) having an aperture (38) through which the beam passes. The layer carries at least four beam-forming electrodes (43 through 50) which are situated at regular intervals around the aperture (38). Each of the electrodes has such a potential that an n-pole field or a combination of n-pole fields is generated, where n is an even integer from 4 through 16. A suitable choice of the n-pole field will make it possible to impart substantially any desired shape to the beam (6) and thus the focus on the target.

Abstract translation: 一种用于记录或显示图像或电子光刻或电子显微镜用途的装置，包括在真空的外壳（1）中聚焦有至少一个电子束（6）的靶（7）。 该光束通过半导体器件（10）产生，该半导体器件（10）包括具有光束通过的孔（38）的电绝缘层（42）。 该层承载至少四个波束形成电极（43至50），其围绕孔（38）以规则的间隔设置。 每个电极具有产生n极场或n极场的组合的电位，其中n是从4到16的偶数整数.n极场的适当选择将使得可以 将基本上任何期望的形状赋予梁（6），从而将焦点赋予目标。

公开(公告)号：US4665297A

公开(公告)日：1987-05-12

申请号：US851650

申请日：1986-04-14

Applicant: Siegfried Schiller ,  Guenter Jaesch ,  Alexander von Ardenne

Inventor： Siegfried Schiller ,  Guenter Jaesch ,  Alexander von Ardenne

IPC: H01J37/06 ,  H01J3/02 ,  H01J37/065 ,  B23K15/00

CPC classification number: H01J37/065

Abstract: A high beam power electron gun of the axial type, particularly useful in large-scale vacuum metallurgy plants for melting, vaporizing and heat treating. The electron gun is controllable over its entire power range, i.e., from 10% to 100% of its nominal power, while the focal length of its beam guidance lens is maintained unchanged. This lens is downstream of a cathode, a focusing electrode and a movable anode, and is provided on its upstream side with a pole shoe to which the anode is fastened and which, together with the anode, is movable as a single unit in the axial direction for controlling the power.

Abstract translation: 一种轴向型的高光束电子枪，特别适用于用于熔化，蒸发和热处理的大型真空冶金设备。 电子枪在其整个功率范围内是可控的，即其标称功率的10％至100％，而其光束引导透镜的焦距保持不变。 该透镜在阴极，聚焦电极和可动阳极的下游，并且在其上游侧设置有极靴，阳极被固定到该极靴，并且阳极与阳极一起作为单个单元在轴向上移动 控制电源的方向。

公开(公告)号：US4644219A

公开(公告)日：1987-02-17

申请号：US667753

申请日：1984-11-02

Applicant: Erwin Huebner

Inventor： Erwin Huebner

IPC: H01J23/02 ,  H01J1/28 ,  H01J3/02 ,  H01J23/04 ,  H01J23/06 ,  H01J1/14

CPC classification number: H01J3/026 ,  H01J23/04

Abstract: A beam generating system for electron tubes, particularly travelling wave tubes, is formed of a beam shaping electrode and a dispenser cathode supported therein having an emission disk at its end face. A positional change of the dispenser cathode in the beam shaping electrode at different ambient temperatures is suppressed with the beam generating system, and thus a beam defocussing is avoided. According to the invention, the dispenser cathode is directly connected to the beam shaping electron and is connected below the emission disk by means of a radial cathode support. The beam generating system of this type is particularly employed in travelling wave tubes.

Abstract translation: 用于电子管，特别是行波管的光束产生系统由束形成电极和支撑在其中的分配器阴极形成，其端面具有发射盘。 波束形成电极在不同环境温度下的分配器阴极的位置变化被光束产生系统抑制，因此避免了光束聚焦。 根据本发明，分配器阴极直接连接到光束成形电子，并且通过径向阴极支撑件连接在发射盘下方。 这种波束发生系统特别适用于行波管。

公开(公告)号：US4622453A

公开(公告)日：1986-11-11

申请号：US624987

申请日：1984-06-27

Applicant: Helmut Spruck

Inventor： Helmut Spruck

IPC: H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/18 ,  H01J37/305 ,  B23K15/00

CPC classification number: H01J37/18 ,  H01J37/065 ,  H01J37/305

Abstract: An electron beam gun comprising a beam generator (4), an acceleration chamber (7) and a beam-guide chamber (10). The beam-guide chamber is formed by a jacket tube (19) and a beam-guide tube (18), which extends to the work chamber (1) and is surrounded by a focusing lens (15) and a deflecting device (17). For the purpose of readily adapting the equipment to suit various objective distances and for making cleaning and inspection easier, the jacket tube (19) takes the form of a hollow cylinder and is secured between two connecting flanges (20, 21) in a manner whereby it can be replaced. The upper connecting flange (20) carries a centering flange (28), on which the beam-guide tube is suspended, a shut-off valve (11) being optionally provided between the centering flange and the beam-guide tube. The lower connecting flange (21) surrounds a vacuum-connecting flange (34) in which is fitted the lower end of the beam-guide tube (18). Thus, when the beam generator (4) is removed, the beam-guide tube (18) can be extracted from the focusing lens (15) and from the deflector unit (17) through the acceleration chamber (7), together with the centering flange (28). The boundary between the vacuum and the atmosphere lies in the zone of the beam-guide tube (18) and of its various sealing elements.

Abstract translation: 一种包括光束发生器（4），加速室（7）和光束引导室（10）的电子束枪。 光束引导室由延伸到工作室（1）并被聚焦透镜（15）和偏转装置（17）包围的护套管（19）和光束引导管（18）形成， 。 为了容易地使设备适应各种客观距离并使得清洁和检查变得更容易，套管（19）采用中空圆柱体的形式并且以如下方式固定在两个连接凸缘（20,21）之间，从而 它可以更换。 上连接凸缘（20）承载定中心凸缘（28），梁导向管悬挂在该中心凸缘（28）上，可选地设置在定心凸缘和导梁之间的截止阀（11）。 下连接法兰（21）围绕真空连接法兰（34），其中安装有引导管（18）的下端。 因此，当光束发生器（4）被移除时，可以将引导管（18）与聚焦透镜（15）和偏转器单元（17）通过加速室（7）一起从中心位置 法兰（28）。 真空和大气之间的边界位于导光管（18）及其各种密封元件的区域中。

公开(公告)号：US4583023A

公开(公告)日：1986-04-15

申请号：US633602

申请日：1984-07-23

Applicant: Herbert W. Friedman ,  Dennis A. Reilly

Inventor： Herbert W. Friedman ,  Dennis A. Reilly

IPC: H01J3/02 ,  H01J11/04

CPC classification number: H01J3/024

Abstract: A preferably fully impregnated dispenser cathode member or the like forming part of an electron tube, electron beam generator or the like is initially heated by any suitable means to a temperature sufficient for low level electron emission from its rear surface. A hot plate member of preferably equal size is disposed behind the cathode and can either be part of or the means for initially heating the cathode member or it can be heated with the cathode member to the aforementioned cathode member's rear surface low level emission temperature. A sustainer voltage is applied between the cathode member and the hot plate member sufficient to draw a current comprising electron flow from the cathode member to the hot plate member across the space separating them. This current flow or back electron beam results in heating of the hot plate member to a temperature sufficient to raise the closely spaced cathode member to, and then maintain it at, the desired emission temperature and simultaneously allow timely termination of the initial heating process since it is needed only initially.

Abstract translation: 形成电子管，电子束发生器等的一部分的优选的完全浸渍的分配器阴极部件等最初被任何合适的装置加热至足以从其后表面进行低电平发射的温度。 优选地相同尺寸的热板构件设置在阴极的后面，并且可以是用于初始加热阴极构件的一部分或者用于初始加热阴极构件的装置，或者它可以被阴极构件加热到上述阴极构件的背面低水平发射温度。 在阴极构件和热板构件之间施加足够的持续电压，以将包括电子流的电流从阴极构件拉出到热板构件，并跨越隔开它们的空间。 该电流或背电子束导致热板构件的加热到足以使紧密排列的阴极构件升高并随后保持在所需发射温度的温度，并同时允许及时终止初始加热过程，因为它 仅在最初才需要

公开(公告)号：US4486685A

公开(公告)日：1984-12-04

申请号：US378240

申请日：1982-05-14

Applicant: John R. Hale ,  Robert J. Alexander

Inventor： John R. Hale ,  Robert J. Alexander

IPC: H01J29/50 ,  H01J3/02 ,  H01J29/48 ,  H01J29/82

CPC classification number: H01J29/82 ,  H01J29/485

Abstract: The present invention is an improvement in an electron gun assembly. Such a gun assembly includes a plurality of indirectly heated cathode assemblies and at least two spaced successive electrodes having aligned apertures therein for passage of a plurality of electron beams. The cathode assemblies include a plurality of cathode heaters which are attached to at least two electrically insulating support rods by a plurality of heater bead straps. Each of the heater bead straps includes a main body portion having a distal end and a proximal end. The proximal end has a bifurcated portion comprising a pair of closely spaced apart grasping members for embedment into one of the insulating support rods. At least one member of the pair of grasping members is angulated with respect to the main body portion to increase the retention of the heater bead straps to the insulating support rods.

Abstract translation: 本发明是电子枪组件的改进。 这种枪组件包括多个间接加热的阴极组件和至少两个间隔开的连续电极，其中具有对准的孔以供多个电子束通过。 阴极组件包括多个阴极加热器，其通过多个加热器珠带附接到至少两个电绝缘支撑杆。 每个加热器珠带包括具有远端和近端的主体部分。 近端具有分叉部分，其包括一对紧密间隔的把持部件，用于嵌入绝缘支撑杆之一中。 所述一对把持构件中的至少一个构件相对于主体部分成角度，以增加加热器带束带到绝缘支撑杆的保持力。

公开(公告)号：US4366415A

公开(公告)日：1982-12-28

申请号：US140953

申请日：1980-05-30

Applicant: Shigeo Takenaka ,  Eiji Kamohara

Inventor： Shigeo Takenaka ,  Eiji Kamohara

IPC: H01J3/02 ,  H01J29/48 ,  H01J29/50 ,  H01J29/96 ,  H01J29/56

CPC classification number: H01J29/484 ,  H01J29/503 ,  H01J2229/966

Abstract: The invention is directed to a picture tube comprising an electron gun installed within an evacuated envelope which receives various potentials supplied from a potential source. The electron gun comprises a cathode for generating an electron beam and a plurality of successively arranged electrodes for focusing and accelerating the electron beam. One or more supporting rod secures the electrodes. Each of the supporting rods comprises an insulator portion and a glass resistance portion. The glass resistance portion acts as a solid bulk resistor and secures in direct connection with at least one electrode of the electron gun. Consequently, potentials from the potential source are applied to certain electrodes through the glass resistance body. In a further embodiment the entire supporting rod consists of a homogeneous glass resistance body.

Abstract translation: 本发明涉及一种显像管，其包括安装在真空外壳内的电子枪，其接收从潜在源提供的各种电位。 电子枪包括用于产生电子束的阴极和用于聚焦和加速电子束的多个连续布置的电极。 一个或多个支撑杆固定电极。 每个支撑杆包括绝缘体部分和玻璃电阻部分。 玻璃电阻部分用作固体体电阻并且与电子枪的至少一个电极直接连接。 因此，来自电位源的电位通过玻璃电阻体施加到某些电极。 在另一实施例中，整个支撑杆由均匀的玻璃阻力体构成。

公开(公告)号：US4322622A

公开(公告)日：1982-03-30

申请号：US136820

申请日：1980-04-03

Applicant: Dominique Tronc

Inventor： Dominique Tronc

IPC: H01J3/02 ,  A61N5/10 ,  G21K1/093 ,  G21K5/04 ,  H01J3/26 ,  H01J49/20 ,  H05H7/00 ,  G21K1/08

CPC classification number: G21K1/093 ,  A61N5/10 ,  H01J49/20 ,  A61N2005/1089

Abstract: An achromatic magnetic deflection device for deflecting by an angle .phi. between .pi. and 2.pi. a beam of charged accelerated particles having different momentum. This device comprises an electromagnet provided with pole pieces delimiting three contiguous sectors, the whole of these sectors, having an axis of symmetry XX, presenting flat input E and output S faces and common faces F.sub.1 and F.sub.2 in an arc of a circle, the position, the radius of curvature of these faces F.sub.1, F.sub.2 as well as the value of the magnetic induction in the sectors being chosen so that the different paths are substantially orthogonal both to faces F.sub.1, F.sub.2 and to axis XX.

Abstract translation: 一种消色差磁偏转装置，用于通过π和2π之间的角度phi偏转具有不同动量的带电加速颗粒束。 该装置包括电磁铁，其具有限定三个相邻扇区的极片，整个这些扇区具有对称轴线XX，呈平坦的输入E和输出S面以及共同的面F1和F2为圆弧，位置 ，这些面F1，F2的曲率半径以及扇区中的磁感应值被选择，使得不同的路径基本上与面F1，F2和轴线XX正交。

公开(公告)号：US4305018A

公开(公告)日：1981-12-08

申请号：US83010

申请日：1979-10-09

Applicant: Cornelius J. H. Paridaens

Inventor： Cornelius J. H. Paridaens

IPC: H01J3/02 ,  H01J29/50 ,  H01J29/92 ,  H01J29/02

CPC classification number: H01J29/503 ,  H01J29/92 ,  H01J2229/4872

Abstract: In a color television display tube the electron gun system constructed from three electron guns comprises a first group of corresponding electrodes and a second group of corresponding electrodes to be operated at a higher electrical potential than the first group. The electrodes in each group are positioned relative to each other by means of metal braces connected thereto. The ends of the braces are secured to insulating support rods. At least one group of corresponding electrodes is interconnected by means of one or more conductive contact springs surrounding the support rods and touching the surface of each electrode or of the brace connected thereto.

Abstract translation: 在彩色电视显示管中，由三个电子枪构成的电子枪系统包括第一组对应的电极和第二组对应的电极，其操作电位高于第一组电位。 每组中的电极通过与其连接的金属支架相对于彼此定位。 支架的端部固定到绝缘支撑杆上。 至少一组相应的电极通过围绕支撑杆的一个或多个导电接触弹簧互相连接，并接触每个电极或连接到其上的支架的表面。