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公开(公告)号：US08094306B2
公开(公告)日：2012-01-10
申请号：US12487735
申请日：2009-06-19
Applicant: Yeonjoon Park , Glen C. King , James R. Elliott , Sang H. Choi
Inventor： Yeonjoon Park , Glen C. King , James R. Elliott , Sang H. Choi
IPC: G01J3/28
CPC classification number: G01J3/18 , G01J3/02 , G01J3/0229 , G01J3/0237 , G01J3/0256 , G02B5/005 , G02B5/1876
Abstract: A spectrometer includes a micro-ring grating device having coaxially-aligned ring gratings for diffracting incident light onto a target focal point, a detection device for detecting light intensity, one or more actuators, and an adjustable aperture device defining a circular aperture. The aperture circumscribes a target focal point, and directs a light to the detection device. The aperture device is selectively adjustable using the actuators to select a portion of a frequency band for transmission to the detection device. A method of detecting intensity of a selected band of incident light includes directing incident light onto coaxially-aligned ring gratings of a micro-ring grating device, and diffracting the selected band onto a target focal point using the ring gratings. The method includes using an actuator to adjust an aperture device and pass a selected portion of the frequency band to a detection device for measuring the intensity of the selected portion.
Abstract translation: 光谱仪包括具有用于将入射光衍射到目标焦点的同轴对准环形光栅的微环格栅装置，用于检测光强度的检测装置，一个或多个致动器以及限定圆形孔径的可调节孔径装置。 光圈限定目标焦点，并将光引导到检测装置。 使用致动器可选择性地调节孔径装置，以选择频带的一部分以传输到检测装置。 检测入射光的所选频带的强度的方法包括将入射光引导到微环光栅装置的同轴对准的环形光栅上，并使用环形光栅将所选择的带衍射到目标焦点上。 该方法包括使用致动器来调节孔径装置并将频带的选定部分传递到用于测量所选部分的强度的检测装置。
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32.发明申请X-ray diffraction wafer mapping method for rhombohedral super-hetero-epitaxy 有权用于菱面体超异质外延的X射线衍射晶片测绘方法公开(公告)号：US20100027746A1
公开(公告)日：2010-02-04
申请号：US12288380
申请日：2008-10-20
Applicant: Yeonjoon PARK , Sang Hyouk Choi , Glen C. King , James R. Elliott , Albert L. Dimarcantonio
Inventor： Yeonjoon PARK , Sang Hyouk Choi , Glen C. King , James R. Elliott , Albert L. Dimarcantonio
IPC: G01N23/207 , G01N23/20
CPC classification number: G01N23/207
Abstract: A new X-ray diffraction (XRD) method is provided to acquire XY mapping of the distribution of single crystals, poly-crystals, and twin defects across an entire wafer of rhombohedral super-hetero-epitaxial semiconductor material. In one embodiment, the method is performed with a point or line X-ray source with an X-ray incidence angle approximating a normal angle close to 90°, and in which the beam mask is preferably replaced with a crossed slit. While the wafer moves in the X and Y direction, a narrowly defined X-ray source illuminates the sample and the diffracted X-ray beam is monitored by the detector at a predefined angle. Preferably, the untilted, asymmetric scans are of {440} peaks, for twin defect characterization.
Abstract translation: 提供了一种新的X射线衍射（XRD）方法，以获得在整个菱面体超异质外延半导体材料晶圆上单晶，多晶和双缺陷分布的XY映射。 在一个实施例中，该方法用具有接近90°的法线角的X射线入射角的点或线X射线源进行，其中光束掩模优选地被交叉的狭缝代替。 当晶片在X和Y方向上移动时，狭窄定义的X射线源照射样品，并且由检测器以预定角度监测衍射的X射线束。 优选地，对于双缺陷表征，直到不对称扫描为{440}峰。
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公开(公告)号：US07379231B2
公开(公告)日：2008-05-27
申请号：US11470771
申请日：2006-09-07
Applicant: Yeonjoon Park , Sang H. Choi , Glen C. King , Jae-Woo Kim , James R. Elliott, Jr.
Inventor： Yeonjoon Park , Sang H. Choi , Glen C. King , Jae-Woo Kim , James R. Elliott, Jr.
CPC classification number: G02F1/29 , G02F1/05 , G02F2201/122
Abstract: A light control device is formed by ferroelectric material and N electrodes positioned adjacent thereto to define an N-sided regular polygonal region or circular region therebetween where N is a multiple of four.
Abstract translation: 光控制装置由铁电材料和与其相邻的N个电极形成，以限定其间N为四倍的N侧正多边形区域或其间的圆形区域。
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34.发明授权公开(公告)号：US07342290B2
公开(公告)日：2008-03-11
申请号：US10981232
申请日：2004-11-04
Applicant: Jay S. Burnham , James R. Elliott , Kenneth R. Gault , Mousa H. Ishaq , Steven M. Shank , Mary A. St. Lawrence
Inventor： Jay S. Burnham , James R. Elliott , Kenneth R. Gault , Mousa H. Ishaq , Steven M. Shank , Mary A. St. Lawrence
CPC classification number: H01L21/28194 , H01L21/02046 , H01L21/28202 , H01L21/823857 , H01L29/513 , H01L29/517 , H01L29/518 , Y10S257/913
Abstract: A bilayer dielectric structure for substantially reducing or eliminating metal contaminants formed during subsequent polysilicon deposition is provided. The bilayer dielectric structure includes an upper surface region that is rich in chlorine located atop a bottom surface region. The upper surface region that is rich in chlorine removes metal contaminates that are present atop the structure during subsequent formation of a polysilicon layer. A method of forming the bilayer structure is also provided.
Abstract translation: 提供了用于大大减少或消除随后的多晶硅沉积期间形成的金属污染物的双层电介质结构。 双层电介质结构包括位于底表面区域顶部富含氯的上表面区域。 富含氯的上表面区域除去在随后形成多晶硅层期间存在于结构顶部的金属污染物。 还提供了形成双层结构的方法。
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公开(公告)号：US20080014621A1
公开(公告)日：2008-01-17
申请号：US11827567
申请日：2007-07-12
Applicant: Jae-Woo Kim , Sang H. Choi , Peter T. Lillehei , Sang-Hyon Chu , Yeonjoon Park , Glen C. King , James R. Elliott
Inventor： Jae-Woo Kim , Sang H. Choi , Peter T. Lillehei , Sang-Hyon Chu , Yeonjoon Park , Glen C. King , James R. Elliott
IPC: C12P3/00
CPC classification number: B01J13/02 , B82Y30/00 , Y10S977/729
Abstract: Metal nanoshells are fabricated by admixing an aqueous solution of metal ions with an aqueous solution of apoferritin protein molecules, followed by admixing an aqueous solution containing an excess of an oxidizing agent for the metal ions. The apoferritin molecules serve as bio-templates for the formation of metal nanoshells, which form on and are bonded to the inside walls of the hollow cores of the individual apoferritin molecules. Control of the number of metal atoms which enter the hollow core of each individual apoferritin molecule provides a hollow metal nonparticle, or nanoshell, instead of a solid spherical metal nanoparticle.
Abstract translation: 通过将金属离子的水溶液与脱铁铁蛋白分子的水溶液混合，然后混合含有过量的氧化剂的水溶液作为金属离子来制造金属纳米壳。 脱铁铁蛋白分子用作用于形成金属纳米壳的生物模板，其形成在并结合到单个脱铁铁蛋白分子的中空核心的内壁上。 控制进入每个脱铁铁蛋白分子的中空芯的金属原子的数量提供中空金属非粒子，或纳米壳，而不是固体球形金属纳米颗粒。
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Patent Agency Ranking
36.发明授权Bilayer ultra-thin gate dielectric and process for semiconductor metal contamination reduction 失效双层超薄栅极电介质和工艺，用于半导体金属污染的降低公开(公告)号：US06838396B2
公开(公告)日：2005-01-04
申请号：US10249292
申请日：2003-03-28
Applicant: Jay S. Burnham , James R. Elliott , Kenneth R. Gault , Mousa H. Ishaq , Steven M. Shank , Mary A. St. Lawrence
Inventor： Jay S. Burnham , James R. Elliott , Kenneth R. Gault , Mousa H. Ishaq , Steven M. Shank , Mary A. St. Lawrence
IPC: H01L21/28 , H01L21/306 , H01L21/8238 , H01L29/51 , H01L21/31 , H01L21/469
CPC classification number: H01L21/28194 , H01L21/02046 , H01L21/28202 , H01L21/823857 , H01L29/513 , H01L29/517 , H01L29/518 , Y10S257/913
Abstract: A bilayer dielectric structure for substantially reducing or eliminating metal contaminants formed during subsequent polysilicon deposition is provided. The bilayer dielectric structure includes an upper surface region that is rich in chlorine located atop a bottom surface region. The upper surface region that is rich in chlorine removes metal contaminates that are present atop the structure during subsequent formation of a polysilicon layer. A method of forming the bilayer structure is also provided.
Abstract translation: 提供了用于大大减少或消除随后的多晶硅沉积期间形成的金属污染物的双层电介质结构。 双层电介质结构包括位于底表面区域顶部富含氯的上表面区域。 富含氯的上表面区域除去在随后形成多晶硅层期间存在于结构顶部的金属污染物。 还提供了形成双层结构的方法。
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公开(公告)号：US09446953B2
公开(公告)日：2016-09-20
申请号：US12315519
申请日：2008-12-04
Applicant: Jae-Woo Kim , Sang H. Choi, Sr. , Peter T. Lillehei , Sang-Hyon Chu , Yeonjoon Park , Glen C. King , James R. Elliott
Inventor： Jae-Woo Kim , Sang H. Choi, Sr. , Peter T. Lillehei , Sang-Hyon Chu , Yeonjoon Park , Glen C. King , James R. Elliott
CPC classification number: C01B19/007 , B01J13/02 , B01J13/203 , B22F1/0018 , B22F9/24 , B22F2001/0029 , B32B15/02 , B82Y5/00 , B82Y30/00 , H01L21/02428
Abstract: Metal and semiconductor nanoshells, particularly transition metal nanoshells, are fabricated using dendrimer molecules. Metallic colloids, metallic ions or semiconductors are attached to amine groups on the dendrimer surface in stabilized solution for the surface seeding method and the surface seedless method, respectively. Subsequently, the process is repeated with additional metallic ions or semiconductor, a stabilizer, and NaBH4 to increase the wall thickness of the metallic or semiconductor lining on the dendrimer surface. Metallic or semiconductor ions are automatically reduced on the metallic or semiconductor nanoparticles causing the formation of hollow metallic or semiconductor nanoparticles. The void size of the formed hollow nanoparticles depends on the dendrimer generation. The thickness of the metallic or semiconductor thin film around the dendrimer depends on the repetition times and the size of initial metallic or semiconductor seeds.
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公开(公告)号：US08913124B2
公开(公告)日：2014-12-16
申请号：US13020194
申请日：2011-02-03
Applicant: Yeonjoon Park , Sang Hyouk Choi , Glen C. King , James R. Elliott , Albert L. Dimarcantonio
Inventor： Yeonjoon Park , Sang Hyouk Choi , Glen C. King , James R. Elliott , Albert L. Dimarcantonio
Abstract: A lock-in imaging system is configured for detecting a disturbance in air. The system includes an airplane, an interferometer, and a telescopic imaging camera. The airplane includes a fuselage and a pair of wings. The airplane is configured for flight in air. The interferometer is operatively disposed on the airplane and configured for producing an interference pattern by splitting a beam of light into two beams along two paths and recombining the two beams at a junction point in a front flight path of the airplane during flight. The telescopic imaging camera is configured for capturing an image of the beams at the junction point. The telescopic imaging camera is configured for detecting the disturbance in air in an optical path, based on an index of refraction of the image, as detected at the junction point.
Abstract translation: 锁定成像系统被配置为检测空气中的干扰。 该系统包括飞机，干涉仪和伸缩成像相机。 飞机包括机身和一对机翼。 飞机配置为在空中飞行。 干涉仪可操作地设置在飞机上并且被配置用于通过沿着两条路径将光束分成两束而产生干涉图案，并且在飞行中在飞机的前飞行路径中的接合点处重新组合两个波束。 伸缩成像照相机被配置为在接合点捕获光束的图像。 所述伸缩成像照相机被配置为基于在所述连接点检测到的所述图像的折射率来检测光路中的空气中的干扰。
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39.发明授权公开(公告)号：US08529825B2
公开(公告)日：2013-09-10
申请号：US12928128
申请日：2010-12-03
Applicant: Sang-Hyon Chu , Sang H. Choi , Jae-Woo Kim , Yeonjoon Park , James R. Elliott , Glen C. King , Diane M. Stoakley
Inventor： Sang-Hyon Chu , Sang H. Choi , Jae-Woo Kim , Yeonjoon Park , James R. Elliott , Glen C. King , Diane M. Stoakley
IPC: B28B1/00
CPC classification number: B64B1/06 , B64B1/20 , B64B1/30 , B64C2201/022 , B64C2201/042 , B64C2201/122 , B64C2201/125 , B64C2201/127 , H01L35/16 , H01L35/22 , H01L35/26
Abstract: A new fabrication method for nanovoids-imbedded bismuth telluride (Bi—Te) material with low dimensional (quantum-dots, quantum-wires, or quantum-wells) structure was conceived during the development of advanced thermoelectric (TE) materials. Bismuth telluride is currently the best-known candidate material for solid-state TE cooling devices because it possesses the highest TE figure of merit at room temperature. The innovative process described here allows nanometer-scale voids to be incorporated in Bi—Te material. The final nanovoid structure such as void size, size distribution, void location, etc. can be also controlled under various process conditions.
Abstract translation: 在先进的热电（TE）材料的开发中，设计了一种新型的纳米复合碲化铋（Bi-Te）材料，具有低维（量子点，量子线或量子阱）结构。 碲化铋目前是固态TE冷却装置最有名的候选材料，因为它在室温下具有最高的TE品质因数。 这里描述的创新工艺允许将纳米尺度的空隙纳入Bi-Te材料。 最终的纳米结构如空隙尺寸，尺寸分布，空隙位置等也可以在各种工艺条件下进行控制。
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公开(公告)号：US08217143B2
公开(公告)日：2012-07-10
申请号：US11827567
申请日：2007-07-12
Applicant: Jae-Woo Kim , Sang H. Choi , Peter T. Lillehei , Sang-Hyon Chu , Yeonjoon Park , Glen C. King , James R. Elliott, Jr.
Inventor： Jae-Woo Kim , Sang H. Choi , Peter T. Lillehei , Sang-Hyon Chu , Yeonjoon Park , Glen C. King , James R. Elliott, Jr.
IPC: C07K14/00
CPC classification number: B01J13/02 , B82Y30/00 , Y10S977/729
Abstract: Metal nanoshells are fabricated by admixing an aqueous solution of metal ions with an aqueous solution of apoferritin protein molecules, followed by admixing an aqueous solution containing an excess of an oxidizing agent for the metal ions. The apoferritin molecules serve as bio-templates for the formation of metal nanoshells, which form on and are bonded to the inside walls of the hollow cores of the individual apoferritin molecules. Control of the number of metal atoms which enter the hollow core of each individual apoferritin molecule provides a hollow metal nonparticle, or nanoshell, instead of a solid spherical metal nanoparticle.
Abstract translation: 通过将金属离子的水溶液与脱铁铁蛋白分子的水溶液混合，然后混合含有过量的氧化剂的水溶液作为金属离子来制造金属纳米壳。 脱铁铁蛋白分子用作用于形成金属纳米壳的生物模板，其形成在并结合到单个脱铁铁蛋白分子的中空核心的内壁上。 控制进入每个脱铁铁蛋白分子的中空芯的金属原子的数量提供中空金属非粒子，或纳米壳，而不是固体球形金属纳米颗粒。
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