公开(公告)号：US06688731B1

公开(公告)日：2004-02-10

申请号：US09701856

申请日：2000-12-01

申请人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

发明人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/313 ,  H01L41/316

摘要： A piezoelectric thin film element D, in which a piezoelectric thin film 1 with first and second electrode films 2 and 3 respectively formed on its opposite surfaces in the thickness direction is held by a hold film 5, is fabricated by forming each film 1, 2, 3, and 5 on a film formation substrate 11 and removing the film formation substrate 11 by etching. Even when the hold film 5 is made of material such as resin and therefore exhibits relatively poor adhesion with respect to the other films, the piezoelectric thin film 1 is protected from damage by etchant because the first electrode film 2 which comes into contact with the film formation substrate 11 is formed such that the overall circumference of a peripheral edge portion of the first electrode film 2 laterally extends beyond the lateral surface of the piezoelectric thin film 1 and closely adheres to the hold film 5.

摘要翻译： 通过形成每个膜1,2制造压电薄膜元件D，其中分别在其厚度方向的相对表面上形成有第一和第二电极膜2和3的压电薄膜1由保持膜5保持 ，3和5在成膜基板11上，并通过蚀刻去除成膜基板11。 即使当保持膜5由诸如树脂的材料制成并且因此相对于其它膜显示相对较差的粘合力时，由于与膜接触的第一电极膜2，保护了压电薄膜1免受腐蚀剂损伤 形成基板11形成为使得第一电极膜2的周边部分的整个周边横向延伸超过压电薄膜1的侧表面并且紧密地附着到保持膜5。

公开(公告)号：US07024738B2

公开(公告)日：2006-04-11

申请号：US10116096

申请日：2002-04-04

申请人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Takeshi Kamada

发明人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Takeshi Kamada

IPC分类号： H04R17/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H02N2/00

CPC分类号： G01P15/0802 ,  B41J2/14233 ,  B41J2002/14258 ,  G01P15/09 ,  H01L41/094 ,  H01L41/1132 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49147

摘要： To manufacture a compact and high-performance thin-film piezoelectric bimorph element at low cost, first and second piezoelectric thin films (2, 3) are formed by sputtering on the both surfaces of a metal thin plate (1) which are opposing relation to each other along the thickness thereof, while the respective states of polarizations of the first and second piezoelectric thin films (2, 3) are controlled. A pair of electrode films (5) are formed on the respective surfaces of the first and second piezoelectric thin films (2, 3) opposite to the metal thin plate (1).

摘要翻译： 为了以低成本制造紧凑且高性能的薄膜压电双晶片元件，通过溅射在金属薄板（1）的两个表面上形成第一和第二压电薄膜（2,3），所述两个表面与 彼此沿着其厚度，同时控制第一和第二压电薄膜（2,3）的各自的极化状态。 在与金属薄板（1）相对的第一和第二压电薄膜（2,3）的各个表面上形成一对电极薄膜（5）。

公开(公告)号：US06347862B1

公开(公告)日：2002-02-19

申请号：US09202419

申请日：1998-12-14

申请人： Isaku Kanno ,  Satoru Fujii ,  Ryoichi Takayama ,  Takeshi Kamada

发明人： Isaku Kanno ,  Satoru Fujii ,  Ryoichi Takayama ,  Takeshi Kamada

IPC分类号： B41J2045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  B41J2002/14258 ,  B41J2002/14379 ,  B41J2202/03

摘要： There is provided an ink-jet head having ink outlets formed at a high density for use in an ink-jet recorder. The ink-jet head comprises ink outlets, compression chambers communicating with the ink outlets, and piezoelectric vibration sections, each being provided on a part of each of the compression chambers and including a piezoelectric film containing Pb, Ti and Zr, and electrodes provided on both sides of the piezoelectric film. The piezoelectric film comprises a first layer and a second layer which each have a perovskite structure and are formed in contact with each other, wherein the first layer is formed as a layer containing no Zr or as a layer containing a smaller amount of Zr than that contained in the second layer.

摘要翻译： 提供一种喷墨头，其具有以高密度形成的用于喷墨记录器的墨水出口。 喷墨头包括墨出口，与墨出口连通的压缩室和压电振动部分，每个压电振动部分设置在每个压缩室的一部分上，并且包括含有Pb，Ti和Zr的压电膜，以及设置在 压电薄膜的两面。 压电膜包括第一层和第二层，它们各自具有钙钛矿结构并且彼此接触，其中第一层形成为不含Zr的层或作为含有少量Zr的层， 包含在第二层。

公开(公告)号：US06263734B1

公开(公告)日：2001-07-24

申请号：US09289936

申请日：1999-04-13

申请人： Satoru Fujii ,  Isaku Kanno ,  Takeshi Kamada ,  Ryoichi Takayama

发明人： Satoru Fujii ,  Isaku Kanno ,  Takeshi Kamada ,  Ryoichi Takayama

IPC分类号： G01P1509

CPC分类号： G01P15/0907 ,  G01P15/0922 ,  G01P15/18

摘要： An acceleration sensor 201 comprises a longitudinal effect type detection unit 203 and a lateral effect type detection unit 204. The longitudinal effect type detection unit 203 comprises a longitudinal effect type piezoelectric element 211 comprising a piezoelectric body 211a of a thin film, an electrode 211b and an electrode 211c, which is formed on a deposition substrate 221 serving also as a weight. The lateral effect type detection unit 204 is constituted by providing a lateral effect type piezoelectric element 213 comprising a piezoelectric body 213a of a thin film, an electrode 213b and an electrode 213c, which is formed on the deposition substrate 221 and is cantilevered above a groovy recessed part 105a on a substrate 105. A detection circuit 116 detects an acceleration in a predetermined direction, based on an output of both the longitudinal effect type detection unit 203 and the lateral effect type detection unit 204. Consequently, it is possible to detect an acceleration in a predetermined direction and to make a wider dynamic range and a wider band.

摘要翻译： 加速度传感器201包括纵向效应型检测单元203和横向效果型检测单元204.纵向效应型检测单元203包括纵向效应型压电元件211，其包括薄膜的压电体211a，电极211b和 电极211c，其形成在也用作重量的沉积基板221上。 横向效果型检测单元204通过提供一种横向效应型压电元件213构成，该横向效应型压电元件213包括薄膜压电体213a，电极213b和电极213c，其形成在沉积基板221上并且悬臂上方 检测电路116基于纵向效应型检测单元203和横向效果型检测单元204的输出，检测预定方向的加速度。因此，可以检测到 加速度在一个预定的方向上，并且形成更宽的动态范围和更宽的频带。

公开(公告)号：US06909341B2

公开(公告)日：2005-06-21

申请号：US10168284

申请日：2001-10-23

申请人： Ryoichi Takayama ,  Hidekazu Nakanishi ,  Tetsuo Kawasaki ,  Toru Sakuragawa ,  Yasuhiko Yokota

发明人： Ryoichi Takayama ,  Hidekazu Nakanishi ,  Tetsuo Kawasaki ,  Toru Sakuragawa ,  Yasuhiko Yokota

IPC分类号： H03H3/08 ,  H03H9/02 ,  H03H9/145 ,  H03H9/64

CPC分类号： H03H9/02661 ,  H03H3/08 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/14541 ,  Y10T29/42

摘要： In a surface acoustic wave (SAW) filter including a substrate and an electrode formed on the substrate, the electrode includes a base layer, a first metal layer made of a metal consisting of Al or consisting mainly of Al, and having a given orientation relative to the substrate, a second layer for preventing the first metal layer from migration of Al atoms occurring in vertical to the substrate, and a third layer for adjusting a thickness of the layer. In this SAW filter having an arbitrary layer thickness, the layer hardly causes grain boundary diffusion, and grains of the layer can be made fine for effective resistance to stress. Thus, in this SAW filter, the migration of the Al atoms of the electrode that is associated with the SAW propagation-induced stress imposed on the electrode is inhibited. Accordingly, the filter exhibits excellent resistance against electric power.

摘要翻译： 在包括基板和形成在基板上的电极的表面声波（SAW）滤波器中，电极包括基底层，由Al组成的金属或主要由Al组成的金属构成的第一金属层，并且具有给定的取向相对 向基板施加用于防止第一金属层垂直于基板发生的Al原子迁移的第二层，以及用于调整该层厚度的第三层。 在具有任意层厚度的SAW滤波器中，该层几乎不引起晶界扩散，并且可以使该层的晶粒细微地产生有效的抗应力。 因此，在这种SAW滤波器中，与施加在电极上的SAW传播引起的应力有关的电极的Al原子的迁移被抑制。 因此，过滤器表现出优异的电力抵抗性。

公开(公告)号：US5844347A

公开(公告)日：1998-12-01

申请号：US704209

申请日：1996-08-29

申请人： Ryoichi Takayama ,  Keizaburo Kuramasu ,  Toshio Sugawa

发明人： Ryoichi Takayama ,  Keizaburo Kuramasu ,  Toshio Sugawa

IPC分类号： H03H3/08 ,  H03H9/02 ,  H03H9/145 ,  H03H9/25

CPC分类号： H03H9/6483 ,  H03H3/08 ,  H03H9/02897 ,  H03H9/02929 ,  H03H9/14538

摘要： A SAW device comprising an inter-digital electrode capable of withstanding application of excessive electric power, while preventing an increase of insertion loss. The SAW device has an inter-digital electrode formed by alternating layers of aluminum films and conductive films, where the conductive films have an elastic constant greater than that of the aluminum films.

摘要翻译： 一种SAW器件，其包括能够耐受过大电力施加的数字间电极，同时防止插入损耗的增加。 SAW器件具有通过铝膜和导电膜的交替层形成的数字间电极，其中导电膜的弹性常数大于铝膜的弹性常数。

公开(公告)号：US5672252A

公开(公告)日：1997-09-30

申请号：US483835

申请日：1995-06-15

申请人： Shigenori Hayashi ,  Kazuki Komaki ,  Takeshi Kamada ,  Masatoshi Kitagawa ,  Takashi Deguchi ,  Ryoichi Takayama ,  Takashi Hirao

发明人： Shigenori Hayashi ,  Kazuki Komaki ,  Takeshi Kamada ,  Masatoshi Kitagawa ,  Takashi Deguchi ,  Ryoichi Takayama ,  Takashi Hirao

IPC分类号： C23C14/00 ,  C23C14/08 ,  C23C14/58 ,  G02F1/00 ,  H01L21/314 ,  H01L21/316 ,  H01L37/02 ,  H01L41/316 ,  C23C14/34

CPC分类号： C23C14/5853 ,  C23C14/0078 ,  C23C14/088 ,  H01L21/02197 ,  H01L21/02266 ,  H01L21/314 ,  H01L21/31691 ,  H01L37/025 ,  H01L41/1875 ,  H01L41/316 ,  G02F1/0027

摘要： A method whereby perovskite type oxide dielectric thin films with ABO.sub.3 structure are able to be formed with such features as good stability, uniformity, reproducibility, or the like, with high through-put by having a deposition process, wherein the thin films are deposited on a substrate, and a stabilization process, where no deposition of the thin films takes place, repeated alternatingly while the substrate temperature being kept near the temperature at which perovskite type oxide dielectric thin films are formed. Also, by employing (i) a processing method wherein a decomposing excitation of a reactive gas due to plasma takes place on or near the deposition surface in a gaseous atmosphere comprising a gas that reacts with the elements composing the thin films, (ii) a processing method wherein an oxidation reaction takes place on the deposition surface in a gaseous atmosphere comprising at least ozone (O.sub.3), and (iii) a processing method wherein light of short wave length is irradiated on the deposition surface in a gaseous atmosphere comprising at least reactive elements in the non-deposition process, the oxygen concentration in the deposited thin films is adjusted and dielectric thin films of good quality and an extremely low defect content are realized.

摘要翻译： 具有ABO3结构的钙钛矿型氧化物电介质薄膜能够通过具有沉积工艺的高通量形成具有良好的稳定性，均匀性，再现性等特性的方法，其中薄膜沉积在 基板和稳定化处理，其中不存在薄膜的沉积，在衬底温度保持接近形成钙钛矿型氧化物电介质薄膜的温度的同时交替重复。 此外，通过采用以下处理方法：（i）在包含与组成薄膜的元素反应的气体的气体气氛中，在等离子体发生的反应性气体的分解激发发生在沉积表面上或其附近的处理方法，（ii） 处理方法，其中在至少包含臭氧（O 3）的气体气氛中在沉积表面上发生氧化反应，和（iii）其中在至少包括至少包含臭氧（O 3）的气体气氛中在沉积表面上照射短波长的光的处理方法 在非沉积工艺中的非活性元素，沉积的薄膜中的氧浓度被调节，并且实现了良好质量和极低缺陷含量的介电薄膜。

公开(公告)号：US5333554A

公开(公告)日：1994-08-02

申请号：US873182

申请日：1992-04-24

申请人： Toshihisa Yamada ,  Toshiharu Miyamoto ,  Kazuo Hayashi ,  Ryoichi Takayama ,  Shinji Kobayashi ,  Keizi Ohmura

发明人： Toshihisa Yamada ,  Toshiharu Miyamoto ,  Kazuo Hayashi ,  Ryoichi Takayama ,  Shinji Kobayashi ,  Keizi Ohmura

IPC分类号： B61D17/04 ,  B62D25/07 ,  B62D31/02 ,  B61D17/08 ,  B61D17/12

CPC分类号： B62D25/07 ,  B61D17/043 ,  Y10T29/49622 ,  Y10T29/49904

摘要： A vehicle such as a railroad car is constructed by connecting together side and roof blocks, each equipped with interior components, in a manner to improve the outer appearance of the connections between the side and roof blocks. Longitudinal beams of the side blocks are in contact with the under surfaces of gutters formed by the outer plate of the roof block. The side and roof blocks, equipped with the interior components, are connected together at the gutter portions by a welding which can be conducted solely from an exterior side of the vehicle. In the interior of the vehicle, the longitudinal beams and joints secured to the side blocks are connected to lateral beams of the roof block by rivets. Thereafter, a third interior plate is provided between interior plates of the side and roof blocks. Since the connections are formed at the gutter portions, the connecting operations can easily be conducted outside the vehicle and in a manner to assure a good from an exterior of appearance.

摘要翻译： 将铁路车辆等车辆通过连接在一起的侧板和车顶块（每个配备有内部部件）的方式构成，以改善侧板和屋顶块之间的连接的外观。 侧块的纵向梁与由屋顶块的外板形成的槽的下表面接触。 配备有内部部件的侧部和车顶块通过可以仅从车辆的外侧进行的焊接在沟槽部分处连接在一起。 在车辆的内部，固定到侧块的纵向梁和接头通过铆钉与屋顶块的横向梁连接。 此后，在侧板和屋顶块的内板之间设置第三内板。 由于连接件形成在沟槽部分处，所以连接操作可以容易地在车辆外部进行并且以从外观的外部确保良好的方式。

公开(公告)号：US06759924B2

公开(公告)日：2004-07-06

申请号：US10049257

申请日：2002-06-14

申请人： Toru Sakuragawa ,  Yuki Satoh ,  Kozo Murakami ,  Ryoichi Takayama

发明人： Toru Sakuragawa ,  Yuki Satoh ,  Kozo Murakami ,  Ryoichi Takayama

IPC分类号： H01L4100

CPC分类号： H03H9/706 ,  H03H9/0571 ,  H03H9/0576 ,  H03H9/72 ,  H03H9/725 ,  H03H2250/00

摘要： A small-sized multi-frequency antenna duplexer using surface acoustic wave filters to be applicable to a plurality of frequencies. This antenna duplexer includes two surface acoustic wave (SAW) filters for transmission and reception having passing bands of mutually different frequencies, a phase shift substrate, and a package for accommodating them. The passing band of each antenna duplexer is mutually different from other's passing band. This multi-frequency antenna duplexer includes a plurality of antenna duplexers. In one package, transmitter surface acoustic wave filters, receiver surface acoustic filters, and phase shift substrates are mounted. Thus, the multi-frequency antenna duplexer are reduced in size.

摘要翻译： 使用表面声波滤波器适用于多个频率的小型多频天线双工器。 该天线双工器包括用于具有相互不同频率的通带的发射和接收的两个表面声波（SAW）滤波器，相移衬底和用于容纳它们的封装。 每个天线双工器的通带与其他通带相互不同。 该多频天线双工器包括多个天线双工器。 在一个封装中，安装了发射器表面声波滤波器，接收器表面声学滤波器和相移衬底。 因此，多频天线双工器的尺寸减小。

公开(公告)号：US06554408B1

公开(公告)日：2003-04-29

申请号：US09506751

申请日：2000-02-18

申请人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

发明人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

IPC分类号： B41J2045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14387

摘要： A fluid ejection device, such as for an ink jet printer or the like, having increased increasing nozzle density. A through-hole (15) is provided in a glass substrate (18) to which a second silicon substrate (19) is directly bonded to form an ink outlet (14). The first silicon substrate (17) is etched to form a pressure chamber (12), an ink channel (13) and an ink inlet (16), and bonded directly to the glass substrate (18). A piezoelectric thin film (11), having a conductive, elastic body (20), is bonded to the first substrate covering the pressure chamber (12). The elastic body (20) is sandwiched between the piezoelectric thin film (11) and a resin layer (25). The second substrate (19) has a thickness of less than about 0.8 mm in a range of thickness comprising about 1.2 to about 1.9 times (rg-rs), wherein rg is the diameter of the wide end of the through-hole (15) and rs is the diameter of the narrow end of the through-hole (15).

摘要翻译： 诸如用于喷墨打印机等的流体喷射装置具有增加的喷嘴密度的增加。 在玻璃基板（18）上设置有通孔（15），第二硅基板（19）直接接合在该玻璃基板（18）上形成出墨口（14）。 蚀刻第一硅衬底（17）以形成压力室（12），墨水通道（13）和墨水入口（16），并直接粘合到玻璃基底（18）上。 具有导电弹性体（20）的压电薄膜（11）与覆盖压力室（12）的第一基板接合。 弹性体（20）夹在压电薄膜（11）和树脂层（25）之间。 第二基板（19）的厚度小于约0.8mm，其厚度范围为约1.2至约1.9倍（rg-rs），其中rg是通孔（15）的宽端的直径， 并且rs是通孔（15）的窄端的直径。