摘要:
A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.
摘要:
An electronic timepiece has a wheel train mounted for undergoing rotation and a transmission wheel for undergoing rotation in accordance with rotation of the wheel train. A contact point spring is connected to the transmission wheel for rotation therewith. The contact point spring extends substantially linearly through a rotational center of the transmission wheel. First and second detection patterns contact the contact point spring during rotation of the transmission wheel to generate a rotational position detecting signal corresponding to a rotational position of the transmission wheel. The first and second detection patterns are disposed at an angle of substantially 180 degree relative to the rotational center of the transmission wheel.
摘要:
In a nuclear fuel reprocessing plant for processing a used nuclear fuel by a nitric acid solution, the present invention provides a nuclear fuel reprocessing plant characterized by including electrolytic reduction means for reducing the valence of oxidizing metal ions consisting of the nuclear fuel and dissolved in the nitric acid solution while they are kept under the ionic state. In a processing method of a nuclear fuel reprocessing plant for processing a used nuclear fuel by a nitric acid solution, the present invention provides also a corrosion-proofing method of a nuclear fuel reprocessing plant characterized in that electrolytic reduction is carried out so that the valence of oxidizing metal ions consisting of the nuclear fuel and dissolved in the nitric acid solution is reduced while the metal ions are kept under the ionic state and NOx gas is also generated. The invention is directed to provide a nuclear fuel reprocessing plant and its corrosion-proofing method which prevents corrosion of equipment without allowing the precipitation of corrosive metal ions in a nitric acid solution as the metals.
摘要:
The invention is to provide zirconium or its alloy used as a material for a chemical device and a nuclear reactor etc. is surface-treated with an oxidizing acid containing an oxidizing metal ion. The oxidizing acid is at least one member or a mixture of two or more selected from the group consisting of, for example, nitric acid (HNO.sub.3), hydrogen peroxide (H.sub.2 O.sub.2), hypochlorous acid (HClO) and potassium permanganate (K.sub.2 MnO.sub.4) solution, among which nitric acid is most preferred. The oxidizing metal ion is at least one member selected from the group consisting of, for example, ruthenium, rhodium, palladium, osmium, iridium, platinum, chromium, vanadium and cerium ions. Particularly preferred treatment conditions comprise a nitric acid concentration of 14 mol/l (65%) which is close to an azeotropic concentration, a ruthenium ion concentration of at least 1.times.10.sup.-3 mol/l and a treatment temperature of a boiling temperature (120.degree. C.). The surface of zirconium or its alloy to be treated may be washed previously with an aqueous acid solution containing hydrofluoric acid. The method of inhibiting corrosion of zirconium or its alloy by surface-treating it with an oxidizing acid containing an oxidizing metal ion can be formed easily a uniform protective film on the surface thereof.
摘要:
Provided is a photo-curable nanoimprint composition that has excellent properties in terms of etching resistance, dispersibility, and productivity. In addition, the photo-curable nanoimprint composition enables easy transcription of patterns even when a mold is pressed with a relatively low pressure. The photo-curable nanoimprint composition includes: (A) partial hydrolysate obtained by hydrolyzing a mixture of an organic silicon compound and a silicon compound containing (meth)acrylic groups with water in the molar amount of not less than 0.1 times but less than 1.0 times with respect to the number of moles of all alkoxy groups present in the mixture; (B) polymerizable monomer containing (meth)aclyic groups; and (C) pothopolymerization initiator. In addition, the mixture of partial hydrolysate (A) may include further partial hydrolysate of fluorinated silicone compound and/or metal oxide.
摘要:
In a method of scanning a charged particle beam which can position the scan position to a proper location inside a deflectable range of the scan position of charged particle beam, the scan position of charged particle beam is deflected to a plurality of target objects inside a scan position deflectable region and on the basis of a shift of a target object at a scan location after deflection, the deflection amount at the scan location is corrected.
摘要:
A charged particle beam apparatus is provided which has high resolving power and a wide scanning region (observation field of view). The apparatus has a unit for adjusting the focus, a unit for adjusting astigmatism, a unit for controlling and detecting scanning positions and a controller operative to control the focus adjustment and astigmatism adjustment at a time in interlocked relation to the scanning positions, thereby assuring compatibility between the high resolving power and the observation view field of a wide area.
摘要:
When conditions for an electron gun mainly represented by extraction voltage V1 and accelerating voltage V0 are changed, a charged particle beam is once focused on a fixed position by means of a condenser lens and a virtual cathode position is calculated from a lens excitation of the condenser lens at that time and the mechanical positional relation of the electron gun to set an optical condition. For more accurate setting of the optical condition, a deflecting electrode device is provided at a crossover position of the condenser lens and a voltage is applied to the deflecting electrode device at a constant period so as to control the lens excitation of the condenser lens such that the amount of movement of an image is minimized on an image display unit such as CRT.
摘要:
In a method of scanning a charged particle beam which can position the scan position to a proper location inside a deflectable range of the scan position of charged particle beam, the scan position of charged particle beam is deflected to a plurality of target objects inside a scan position deflectable region and on the basis of a shift of a target object at a scan location after deflection, the deflection amount at the scan location is corrected.
摘要:
A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.