Charged particle beam apparatus
    31.
    发明申请
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号:US20060016990A1

    公开(公告)日:2006-01-26

    申请号:US11183906

    申请日:2005-07-19

    IPC分类号: H01J37/28 H01J37/256

    摘要: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.

    摘要翻译: 带电粒子束装置通过检测包含从样本产生的二次电子的生成信号来获得图像。 该装置具有用于输入要施加到带电粒子光束通过的带电粒子光学系统的电流和电压值的输入单元,用于存储带电粒子光学系统的形状,位置和物理特性的存储单元以及 施加电流或电压的电磁场计算单元,用于计算带电粒子束路径附近的电磁场的电磁场计算单元,用于计算计算出的电磁场中的带电粒子束的轨迹的带电粒子轨迹计算单元,存储 轨迹计算的结果和基于轨迹计算结果来控制带电粒子光学系统的控制器。

    Nuclear fuel reprocessing plant
    33.
    发明授权
    Nuclear fuel reprocessing plant 失效
    核燃料代用厂

    公开(公告)号:US5190623A

    公开(公告)日:1993-03-02

    申请号:US335661

    申请日:1989-03-29

    IPC分类号: G21F9/22 B01D61/44 G21C19/46

    摘要: In a nuclear fuel reprocessing plant for processing a used nuclear fuel by a nitric acid solution, the present invention provides a nuclear fuel reprocessing plant characterized by including electrolytic reduction means for reducing the valence of oxidizing metal ions consisting of the nuclear fuel and dissolved in the nitric acid solution while they are kept under the ionic state. In a processing method of a nuclear fuel reprocessing plant for processing a used nuclear fuel by a nitric acid solution, the present invention provides also a corrosion-proofing method of a nuclear fuel reprocessing plant characterized in that electrolytic reduction is carried out so that the valence of oxidizing metal ions consisting of the nuclear fuel and dissolved in the nitric acid solution is reduced while the metal ions are kept under the ionic state and NOx gas is also generated. The invention is directed to provide a nuclear fuel reprocessing plant and its corrosion-proofing method which prevents corrosion of equipment without allowing the precipitation of corrosive metal ions in a nitric acid solution as the metals.

    摘要翻译: PCT No.PCT / JP88 / 00694 Sec。 371日期:1989年3月29日 102(e)日期1989年3月29日PCT提交1988年7月13日PCT公布。 出版物WO89 / 0122400 日本1989年2月9日。在通过硝酸溶液处理使用的核燃料的核燃料后处理装置中,本发明提供了一种核燃料后处理装置,其特征在于包括用于降低氧化金属离子的价态的电解还原装置, 核燃料并在硝酸溶液中溶解,同时保持在离子状态。 在利用硝酸溶液处理使用的核燃料的核燃料后处理装置的处理方法中,本发明还提供了核燃料后处理装置的防腐蚀方法,其特征在于,进行电解还原, 氧化由核燃料组成的金属离子并溶解在硝酸溶液中的金属离子被还原,同时金属离子保持在离子状态并且还产生NOx气体。 本发明旨在提供一种核燃料后处理装置及其防腐蚀方法,其防止设备的腐蚀,而不允许将硝酸溶液中的腐蚀性金属离子沉淀为金属。

    Method of inhibiting corrosion of zirconium or its alloy
    34.
    发明授权
    Method of inhibiting corrosion of zirconium or its alloy 失效
    抑制锆或其合金腐蚀的方法

    公开(公告)号:US4610732A

    公开(公告)日:1986-09-09

    申请号:US714398

    申请日:1985-03-21

    IPC分类号: C23C22/54 C23C22/58

    CPC分类号: C23C22/58 C23C22/54

    摘要: The invention is to provide zirconium or its alloy used as a material for a chemical device and a nuclear reactor etc. is surface-treated with an oxidizing acid containing an oxidizing metal ion. The oxidizing acid is at least one member or a mixture of two or more selected from the group consisting of, for example, nitric acid (HNO.sub.3), hydrogen peroxide (H.sub.2 O.sub.2), hypochlorous acid (HClO) and potassium permanganate (K.sub.2 MnO.sub.4) solution, among which nitric acid is most preferred. The oxidizing metal ion is at least one member selected from the group consisting of, for example, ruthenium, rhodium, palladium, osmium, iridium, platinum, chromium, vanadium and cerium ions. Particularly preferred treatment conditions comprise a nitric acid concentration of 14 mol/l (65%) which is close to an azeotropic concentration, a ruthenium ion concentration of at least 1.times.10.sup.-3 mol/l and a treatment temperature of a boiling temperature (120.degree. C.). The surface of zirconium or its alloy to be treated may be washed previously with an aqueous acid solution containing hydrofluoric acid. The method of inhibiting corrosion of zirconium or its alloy by surface-treating it with an oxidizing acid containing an oxidizing metal ion can be formed easily a uniform protective film on the surface thereof.

    摘要翻译: 本发明提供用作化学装置的材料的锆或其合金,核反应堆等用含有氧化性金属离子的氧化酸进行表面处理。 氧化酸是选自例如硝酸(HNO 3),过氧化氢(H 2 O 2),次氯酸(HClO)和高锰酸钾(K2MnO4)溶液中的至少一种或两种以上的混合物, 其中硝酸是最优选的。 氧化金属离子是选自例如钌,铑,钯,锇,铱,铂,铬,钒和铈离子中的至少一种。 特别优选的处理条件包括硝酸浓度为14mol / l(65%),其接近共沸浓度,至少1×10 -3 mol / l的钌离子浓度和沸点温度(120℃)的处理温度 C。)。 锆或其待处理合金的表面可以预先用含有氢氟酸的酸性水溶液洗涤。 通过用含有氧化性金属离子的氧化酸进行表面处理来抑制锆或其合金的腐蚀的方法可以在其表面上容易地形成均匀的保护膜。

    Photo-curable nanoimprint composition, method for formatting pattern using the composition, and nanoimprint replica mold comprising cured product of the composition
    35.
    发明授权
    Photo-curable nanoimprint composition, method for formatting pattern using the composition, and nanoimprint replica mold comprising cured product of the composition 有权
    光固化型纳米压印组合物,使用该组合物制作图案的方法,以及纳米压印复制模具,其包含组合物的固化产物

    公开(公告)号:US09228035B2

    公开(公告)日:2016-01-05

    申请号:US13822024

    申请日:2011-10-19

    摘要: Provided is a photo-curable nanoimprint composition that has excellent properties in terms of etching resistance, dispersibility, and productivity. In addition, the photo-curable nanoimprint composition enables easy transcription of patterns even when a mold is pressed with a relatively low pressure. The photo-curable nanoimprint composition includes: (A) partial hydrolysate obtained by hydrolyzing a mixture of an organic silicon compound and a silicon compound containing (meth)acrylic groups with water in the molar amount of not less than 0.1 times but less than 1.0 times with respect to the number of moles of all alkoxy groups present in the mixture; (B) polymerizable monomer containing (meth)aclyic groups; and (C) pothopolymerization initiator. In addition, the mixture of partial hydrolysate (A) may include further partial hydrolysate of fluorinated silicone compound and/or metal oxide.

    摘要翻译: 提供一种光刻固化纳米压印组合物,其耐蚀性,分散性和生产率方面具有优异的性能。 此外,即使在以相对低的压力压制模具的情况下,光固化型纳米压印组合物也能够容易地转印图案。 光固化型纳米压印组合物包括:(A)通过将有机硅化合物和含有(甲基)丙烯酸基团的硅化合物的混合物与水的摩尔量不小于0.1倍但小于1.0倍的水分而得到的部分水解产物 相对于混合物中存在的全部烷氧基的摩尔数; (B)含有(甲基)丙烯酸基团的可聚合单体; 和(C)釜聚合引发剂。 此外,部分水解产物(A)的混合物可以包括氟化硅氧烷化合物和/或金属氧化物的进一步部分水解产物。

    CHARGED PARTICLE BEAM APPARATUS
    37.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 有权
    充电颗粒光束装置

    公开(公告)号:US20100051806A1

    公开(公告)日:2010-03-04

    申请号:US12615955

    申请日:2009-11-10

    IPC分类号: G01N23/225

    摘要: A charged particle beam apparatus is provided which has high resolving power and a wide scanning region (observation field of view). The apparatus has a unit for adjusting the focus, a unit for adjusting astigmatism, a unit for controlling and detecting scanning positions and a controller operative to control the focus adjustment and astigmatism adjustment at a time in interlocked relation to the scanning positions, thereby assuring compatibility between the high resolving power and the observation view field of a wide area.

    摘要翻译: 提供具有高分辨率和宽扫描区域(观察视场)的带电粒子束装置。 该装置具有用于调节焦点的单元,用于调节散光的单元,用于控制和检测扫描位置的单元,以及控制器,用于与扫描位置互锁地控制焦点调节和像散调整,由此确保相容性 在高分辨率和广域的观察视野之间。

    Charged particle beam apparatus
    38.
    发明申请
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号:US20080272300A1

    公开(公告)日:2008-11-06

    申请号:US12155347

    申请日:2008-06-03

    IPC分类号: G01N23/00

    摘要: When conditions for an electron gun mainly represented by extraction voltage V1 and accelerating voltage V0 are changed, a charged particle beam is once focused on a fixed position by means of a condenser lens and a virtual cathode position is calculated from a lens excitation of the condenser lens at that time and the mechanical positional relation of the electron gun to set an optical condition. For more accurate setting of the optical condition, a deflecting electrode device is provided at a crossover position of the condenser lens and a voltage is applied to the deflecting electrode device at a constant period so as to control the lens excitation of the condenser lens such that the amount of movement of an image is minimized on an image display unit such as CRT.

    摘要翻译: 当主要由提取电压V 1和加速电压V 0表示的电子枪的条件改变时,通过聚光透镜将带电粒子束一次聚焦在固定位置,并且从透镜激发计算虚拟阴极位置 此时的聚光透镜和电子枪的机械位置关系来设定光学条件。 为了更精确地设置光学条件,在聚光透镜的交叉位置处设置偏转电极装置,并且将电压以恒定周期施加到偏转电极装置,以便控制聚光透镜的透镜激发,使得 在诸如CRT的图像显示单元上图像的移动量​​最小化。

    Charged particle beam apparatus
    40.
    发明申请

    公开(公告)号:US20070241278A1

    公开(公告)日:2007-10-18

    申请号:US11808376

    申请日:2007-06-08

    IPC分类号: G01N23/00

    摘要: A charged particle beam apparatus obtains an image by detecting a generation signal inclusively indicative of secondary electrons generated from a specimen. The apparatus has an input unit for inputting current and voltage values to be applied to a charged particle optical system through which the charged particle beam travels, a memory unit for storing shape, position and physical properties of the charged particle optical system and accuracy of the applied current or voltage, an electromagnetic field calculation unit for calculating an electromagnetic field near a path of the charged particle beam, a charged particle trajectory calculation unit for calculating a trajectory of the charged particle beam in the calculated electromagnetic field, a memory unit for storing a result of the trajectory calculation and a controller for controlling the charged particle optical system on the basis of the result of the trajectory calculation.