公开(公告)号：US06717650B2

公开(公告)日：2004-04-06

申请号：US10137086

申请日：2002-05-01

申请人： Kanti Jain

发明人： Kanti Jain

IPC分类号： G03B2742

CPC分类号： G03F7/70466 ,  G03F7/70291

摘要： Maskless microlithography provides a sub-pixel voting system using multiple, slightly-offset, digitally-controlled, unit-pixel, partial exposures with cumulative voting to identify regions of full exposure for sub-pixel-selection. Computer control of a virtual-mask pixel-selection device of unit-pixel resolution usually provides pixel-resolution patterns. To achieve sub-pixel resolution, the virtual mask, after a first partial exposure, is offset by less than a pixel-width and a second partial exposure is made. If the offset is ½ pixel-width, the result is a half-pixel size image region of full exposure. Finer voting can be defined by number of pulses, by significantly changing the offset, by offset in another dimension, and by increasing the multiplicity of exposures, thus enabling resolution enhancement by large multiples. The offsetting techniques can also be used to drill controlled-depth vias or to provide topography controls for laser-milling.

摘要翻译： 无掩模微光刻提供了使用多个稍微偏移的数字控制的单位像素部分曝光的子像素投票系统，其具有累积投票以识别用于子像素选择的全曝光区域。 单位像素分辨率的虚拟屏幕像素选择装置的计算机控制通常提供像素分辨率图案。 为了实现子像素分辨率，在第一部分曝光之后，虚拟掩模被偏移小于像素宽度，并且进行第二部分曝光。 如果偏移量为1/2像素宽度，则结果是全曝光的半像素大小图像区域。 更精确的投票可以通过脉冲数来定义，通过显着地改变偏移量，通过另一个维度的偏移量，以及增加曝光次数，从而实现大倍数的分辨率增强。 偏移技术也可用于钻入受控深孔或为激光铣削提供地形控制。

公开(公告)号：US06224912B1

公开(公告)日：2001-05-01

申请号：US09188476

申请日：1998-11-09

申请人： Shirin Asina ,  Kanti Jain ,  Albert L. Rubin ,  Barry Smith ,  Kurt Stenzel

发明人： Shirin Asina ,  Kanti Jain ,  Albert L. Rubin ,  Barry Smith ,  Kurt Stenzel

IPC分类号： A61K3512

CPC分类号： A61K35/13 ,  A61K35/36 ,  C12N5/0693 ,  C12N11/04

摘要： A material for suppressing proliferation of cancer cells is produced by entrapping cancer cells in a selectively-permeable structure such as a bead, and culturing the entrapped cells in a culture medium. Entrapment restricts growth of the cancel cells during culturing and causes the cells to produce in the culture medium a material having a molecular weight of at least about 30 kd that suppresses proliferation of cancer cells. The material is separated from the culture medium by filtering the medium through a filter that separates material having a molecular weight of at least about 30 kd from material having a molecular weight of less than 30 kd. The structure that entraps the cells may contain 10,000 to 500,000 cells.

摘要翻译： 用于抑制癌细胞增殖的材料是通过将癌细胞包埋在选择性可渗透的结构如珠中产生的，并在培养基中培养包埋的细胞。 包埋限制培养过程中消除细胞的生长，并使细胞在培养基中产生抑制癌细胞增殖的至少约30kd分子量的材料。 通过过滤器将培养基与培养基分离，该过滤器将具有至少约30kd分子量的材料与分子量小于30kd的材料分离。 截留细胞的结构可能含有10,000至500,000个细胞。

公开(公告)号：US5643569A

公开(公告)日：1997-07-01

申请号：US483728

申请日：1995-06-07

申请人： Kanti Jain ,  Albert L. Rubin ,  Barry H. Smith

发明人： Kanti Jain ,  Albert L. Rubin ,  Barry H. Smith

IPC分类号： A61K9/16 ,  A61K9/50 ,  A61K35/12 ,  A61K35/28 ,  A61K35/39 ,  A61K38/00 ,  A61K47/26 ,  A61K47/36 ,  A61P3/10 ,  C12N5/00 ,  C12N5/07 ,  C12N5/071 ,  C12N11/04 ,  C12N11/10 ,  C12N11/02

CPC分类号： A61K9/1652 ,  A61K35/39 ,  A61K9/1658 ,  A61K9/5036 ,  C12N11/04 ,  C12N5/0012 ,  C12N5/0677 ,  A61K2035/126 ,  A61K38/00 ,  C12N2533/54 ,  C12N2533/76

摘要： Biological agents such as secretory cells are encapsulated in a hydrophilic gel made of agarose or collagen-agarose and gelatin sponge-agarose combinations. In a preferred embodiment, semi-solid beads are formed from a suspension containing collagen, agarose and secretory cells such as pancreatic islets, the collagen is polymerized to form solid, agarose-collagen beads and the solid beads are coated with agarose. Coating is preferably by rolling the solid beads in about 5-10% agarose, contacting the rolled beads with mineral oil and washing oil from the beads. Beads containing secretory cells can be transplanted into a mammal to treat a condition caused by impaired secretory cell function.

摘要翻译： 生物制剂如分泌细胞被包封在由琼脂糖或胶原 - 琼脂糖和明胶海绵 - 琼脂糖组合制成的亲水凝胶中。 在优选的实施方案中，半固体珠粒由含有胶原蛋白，琼脂糖和分泌细胞例如胰岛的悬浮液形成，胶原聚合形成固体，琼脂糖胶原珠粒，固体珠粒用琼脂糖涂覆。 涂覆优选通过在约5-10％的琼脂糖中滚动固体珠粒，使滚珠与矿物油接触并从珠粒洗涤油。 含有分泌细胞的珠可以移植到哺乳动物中以治疗由分泌细胞功能受损引起的病症。

公开(公告)号：US5565729A

公开(公告)日：1996-10-15

申请号：US158421

申请日：1993-11-29

申请人： Sadeg M. Faris ,  Kanti Jain

发明人： Sadeg M. Faris ,  Kanti Jain

IPC分类号： B01J19/00 ,  G02B6/08 ,  H01J43/04

CPC分类号： B01J19/0093 ,  G02B6/08 ,  H01J43/246 ,  Y10T29/49117

摘要： A process for fabricating microchannel plates produces large area microchannel plates that have channel exit openings as small as 0.5 micron, MTF.about.1, pitch-limited resolution (a factor of 10 potential improvement in resolution) and at a cost of $0.40/sq. centimeter, and with funneling controlled as to configuration and exit opening size and shape. Microchannels may be rectangular in cross section, or rectangular, or trapezoidal, or other configuration, including straight sided, chevron or balloon sided. Microchannels of differing configurations may be interspersed, for reasons of alignment or to control pixel characteristics. Material choice may include glass, ceramic, metal, alloy and plastics, plus dopants. This materials flexibility, and the improved geometrical uniformity lead to higher signal-to-noise ratio and lower outgassing, and to a significant improvement in performance. Microchannels are formed in `green` glass/ceramic ribbons using high-precision, low-cost and versatile planar process steps, eliminating the need for the fiber-drawing and chemical-etching. The ribbon of green glass/ceramic powder in a binder and solvent slurry is configured in complementary partial microchannel forming grooves and partially dried to a safe handling condition, then carefully stacked upon a takeup device with precise alignment. The stack is cut into segments for final solidification by heat fusing and curing and sliced, then smoothed and equipped with appropriate ion barrier and electrode layers for use as microchannel plates.

摘要翻译： 制造微通道板的方法产生大面积的微通道板，其具有小至0.5微米的通道出口，MTF差异1，倾斜限制分辨率（分辨率可能提高10倍），成本为0.40美元/平方。 厘米，并且配置和排出开口尺寸和形状的漏斗控制。 微通道可以是矩形的横截面，或矩形或梯形或其他构造，包括直边，人字纹或气球双面。 由于对准或控制像素特性的原因，不同配置的微通道可以散置。 材料选择可能包括玻璃，陶瓷，金属，合金和塑料，以及掺杂剂。 这种材料灵活性和改进的几何均匀性导致更高的信噪比和更低的除气，并且显着提高性能。 微通道使用高精度，低成本和通用的平面工艺步骤以“绿色”玻璃/陶瓷带形成，无需进行拉丝和化学蚀刻。 粘合剂和溶剂浆料中的绿色玻璃/陶瓷粉末带构造成互补的部分微通道形成槽，并部分干燥至安全的处理条件，然后仔细地堆叠在具有精确对准的卷取装置上。 通过热熔和固化将切片切成段以进行最终凝固，然后切片，然后平滑并配备有用作微通道板的合适的离子屏障和电极层。

公开(公告)号：US5473408A

公开(公告)日：1995-12-05

申请号：US269670

申请日：1994-07-01

申请人： Jeffrey M. Hoffman ,  Kanti Jain

发明人： Jeffrey M. Hoffman ,  Kanti Jain

IPC分类号： B23K26/06 ,  G02B27/09 ,  G03F7/20 ,  G03B27/42

CPC分类号： G02B27/0927 ,  B23K26/066 ,  G02B27/09 ,  G02B27/0988 ,  G02B27/0994 ,  G03F7/70058 ,  G03F7/70075 ,  G03F7/7035 ,  G03F7/70358

摘要： A system is described for recycling radiation reflected by an illuminated patterning mask in a via-hole drilling or exposure tool. The mask is illuminated by high-energy laser radiation, and the illuminated region is imaged onto a substrate by a projection, proximity, or contact method. The source radiation is suitably shaped by a lens assembly and focused into an optical intensity homogenizer with the desired numerical aperture. The homogenizer has the base function of converting the focused beam to self-luminous light required for drilling of via-holes or other processes accomplished by the tool, while maintaining the numerical aperture of the beam. The homogenizer also participates in the radiation-recycling function. An apertured reflector allows radiation from the source to enter the homogenizer. The radiation passing through and exiting the homogenizer is image by a lens to illuminate a portion of the mask. Radiation incident on transparent areas of the mask coming propagates to the substrate, but radiation incident upon reflective regions of the mask coating is reflected back into the homogenizer. The apertured reflector at the entry port of the homogenizer has a reflective back surface which returns the majority of the light re-entering the homogenizer to the patterning mask. The effective illumination intensity is greatly increased by the recycling of the back-reflected radiation, allowing for a reduction in source power or decrease in exposure time for the drilling of via-holes or other exposure processes.

摘要翻译： 描述了一种用于在通孔钻孔或曝光工具中回收由照明图案掩模反射的辐射的系统。 通过高能量激光辐射照射掩模，并且通过投影，接近或接触方法将照射区域成像到基板上。 源辐射适当地由透镜组件成形并聚焦成具有所需数值孔径的光强度均化器。 均化器具有将聚焦光束转换成钻孔通孔所需的自发光或通过工具实现的其它工艺的基本功能，同时保持光束的数值孔​​径。 均化器也参与辐射回收功能。 有孔反射器允许来自源的辐射进入均化器。 通过并离开均质器的辐射是通过透镜照射面罩的一部分的图像。 掩模的透明区域上的辐射入射传播到基板，但入射到掩模涂层的反射区域的辐射被反射回到均化器中。 均质器入口处的有孔反射器具有反射背面，其使大部分再次进入匀化器的光返回到图案化掩模。 通过反射辐射的再循环，有效的照明强度大大增加，允许源功率的降低或者用于钻孔通孔或其它曝光过程的曝光时间的减少。

公开(公告)号：US08652763B2

公开(公告)日：2014-02-18

申请号：US11847134

申请日：2007-08-29

申请人： Kanti Jain ,  Uttam Reddy

发明人： Kanti Jain ,  Uttam Reddy

IPC分类号： G03F7/20

CPC分类号： H05K3/107 ,  H01L21/0277 ,  H01L21/31144 ,  H01L21/76807 ,  H01L21/76813 ,  H01L2221/1021

摘要： This invention provides processing steps, methods and materials strategies for making patterns of structures for integrated electronic devices and systems. Processing methods of the present invention are capable of making micro- and nano-scale structures, such as Dual Damascene profiles, recessed features and interconnect structures, having non-uniform cross-sectional geometries useful for establishing electrical contact between device components of an electronic device. The present invention provides device fabrication methods and processing strategies using sub pixel-voting lithographic patterning of a single layer of photoresist useful for fabricating and integrating multilevel interconnect structures for high performance electronic or opto-electronic devices, particularly useful for Very Large Scale Integrated (VLSI) and Ultra large Scale Integrated (ULSI) devices. Processing methods of the present invention are complementary to conventional microfabrication and nanofabrication methods for making integrated electronics, and can be effectively integrated into existing photolithographic, etching, and thin film deposition patterning systems, processes and infrastructure.

摘要翻译： 本发明提供了用于制造集成电子设备和系统的结构图案的处理步骤，方法和材料策略。 本发明的加工方法能够制造具有非均匀横截面几何形状的微米和纳米级结构，例如双镶嵌型材，凹形特征和互连结构，其用于建立电子装置的装置部件之间的电接触 。 本发明提供了使用用于制造和集成用于高性能电子或光电子器件的多层互连结构的单层光致抗蚀剂的子像素投影光刻图案的器件制造方法和处理策略，特别适用于超大规模集成（VLSI ）和超大规模集成（ULSI）设备。 本发明的加工方法与用于制造集成电子学的常规微细加工和纳米制造方法互补，并且可以有效地集成到现有的光刻，蚀刻和薄膜沉积图案化系统，工艺和基础设施中。

公开(公告)号：US08420978B2

公开(公告)日：2013-04-16

申请号：US11624505

申请日：2007-01-18

申请人： Kanti Jain ,  Junghun Chae ,  Sreeram Appasamy

发明人： Kanti Jain ,  Junghun Chae ,  Sreeram Appasamy

IPC分类号： B23K26/16 ,  H01L21/44 ,  B29C35/08 ,  G21H5/00

CPC分类号： H01L21/0272 ,  H01L21/0275 ,  H01L27/124 ,  H01L27/1288

摘要： A high-throughput, low cost, patterning platform is provided that is an alternative to conventional photolithography and direct laser ablation patterning techniques. The processing methods are useful for making patterns of microsized and/or nanosized structures having accurately selected physical dimensions and spatial orientation that comprise active and passive components of a range of microelectronic devices. Processing provided by the methods is compatible with large area substrates, such as device substrates for semiconductor integrated circuits, displays, and microelectronic device arrays and systems, and is useful for fabrication applications requiring patterning of layered materials, such as patterning thin film layers in thin film electronic devices.

摘要翻译： 提供了高通量，低成本的图形化平台，其是常规光刻和直接激光烧蚀图案化技术的替代。 这些处理方法对于制造具有精确选择的物理尺寸和空间取向的微尺寸和/或纳米尺寸结构的图案是有用的，其包括一系列微电子器件的有源和无源部件。 通过该方法提供的处理与诸如半导体集成电路的器件衬底，显示器和微电子器件阵列和系统的大面积衬底兼容，并且可用于需要图案化层状材料的制造应用，例如薄的薄膜层 电影电子设备。

公开(公告)号：US07940457B2

公开(公告)日：2011-05-10

申请号：US12201522

申请日：2008-08-29

申请人： Kanti Jain ,  Linus Jang ,  Yoon Soo Han

发明人： Kanti Jain ,  Linus Jang ,  Yoon Soo Han

IPC分类号： G02B5/18 ,  G02B27/44 ,  G02F1/1335

CPC分类号： G02B5/1871 ,  E06B9/24 ,  E06B2009/2464 ,  G02F1/13306 ,  G02F1/1334 ,  G02F2201/086 ,  G02F2201/305 ,  G02F2202/40 ,  G02F2203/11

摘要： In an aspect, described herein is a dynamically controllable optoelectronic smart window which utilizes a diffraction grating for selective transmission or rejection of a specific region of the electromagnetic spectrum, for example the infrared, near-infrared and/or visible regions. Window embodiments described herein may further utilize a selectively controlled and/or patterned total internal reflection layer to assist with the selective rejection of a specific spectral region while allowing for transmission of another specific spectral region. In another aspect, the present invention provides methods for dynamically controlling the transmission or rejection of solar near-infrared and/or visible radiation.

摘要翻译： 在一方面，本文所描述的是动态可控的光电智能窗，其利用衍射光栅来选择性地传输或拒绝电磁光谱的特定区域，例如红外线，近红外和/或可见光区域。 本文描述的窗口实施例可以进一步利用选择性控制和/或图案化的全内反射层来辅助特定光谱区域的选择性抑制，同时允许另一个特定光谱区域的传输。 另一方面，本发明提供了用于动态地控制太阳能近红外和/或可见光辐射的传输或抑制的方法。

公开(公告)号：USRE39542E1

公开(公告)日：2007-04-03

申请号：US10336442

申请日：2003-01-02

申请人： Kanti Jain ,  Albert L. Rubin ,  Barry Smith

发明人： Kanti Jain ,  Albert L. Rubin ,  Barry Smith

IPC分类号： A61K35/12 ,  C12N11/02 ,  C12N11/10 ,  C12N5/00 ,  C12N5/08

CPC分类号： C12N11/04 ,  A61K9/1652 ,  A61K9/1658 ,  A61K9/5036 ,  A61K35/39 ,  A61K38/00 ,  A61K2035/126 ,  C12N5/0012 ,  C12N5/0677 ,  C12N2533/54 ,  C12N2533/76

摘要： Biological agents such as secretory cells are encapsulated in a hydrophilic gel made of agarose or collagen-agarose and gelatin sponge-agarose combinations. In a preferred embodiment, semi-solid beads are formed from a suspension containing collagen, agarose and secretory cells such as pancreatic islets, the collagen is polymerized to form solid, agarose-collagen beads and the solid beads are coated with agarose. Coating is preferably by rolling the solid beads in about 5-10% agarose, contacting the rolled beads with mineral oil and washing oil from the beads. Beads containing secretory cells can be transplanted into a mammal to treat a condition caused by impaired secretory cell function.

摘要翻译： 生物制剂如分泌细胞被包封在由琼脂糖或胶原 - 琼脂糖和明胶海绵 - 琼脂糖组合制成的亲水凝胶中。 在优选的实施方案中，半固体珠粒由含有胶原蛋白，琼脂糖和分泌细胞例如胰岛的悬浮液形成，胶原聚合形成固体，琼脂糖胶原珠粒，固体珠粒用琼脂糖涂覆。 涂覆优选通过在约5-10％的琼脂糖中滚动固体珠粒，使滚珠与矿物油接触并从珠粒洗涤油。 含有分泌细胞的珠可以移植到哺乳动物中以治疗由分泌细胞功能受损引起的病症。

公开(公告)号：US07195375B2

公开(公告)日：2007-03-27

申请号：US10766406

申请日：2004-01-28

申请人： Kanti Jain

发明人： Kanti Jain

IPC分类号： F21V7/00

CPC分类号： G02B27/0927 ,  G02B27/0994 ,  H04N9/315

摘要： A compact light-beam homogenizer is realized by multiple reflections within internally-reflecting optical channels which are arranged in a folded configuration. The optical channels may be hollow with mirrored walls, or made of a solid transparent optical material. Light enters through an apertured mirror whose internally reflective surface sends back-reflected rays forward for recycling. Multiple entry ports may be provided for combining several beams or for reducing the intensity in the channels. The homogenizer may be used in reverse as a beam divider. Different shapes of the optical channels are provided for obtaining an effective emission surface of different shapes. Due to reflections from surfaces that are parallel to the optical axis, the numerical aperture of the input beams is preserved.

摘要翻译： 内部反射光学通道中的多个反射实现了紧凑的光束均化器，其被布置成折叠构型。 光通道可以是中空的，具有镜面壁，或由固体透明光学材料制成。 光通过孔径反射镜进入，其内部反射表面向前发射反射光线以进行再循环。 可以提供多个进入端口用于组合若干波束或用于降低通道中的强度。 均质器可以相反地用作分束器。 提供不同形状的光通道用于获得不同形状的有效发射表面。 由于与光轴平行的表面的反射，保留了输入光束的数值孔​​径。