Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
    31.
    发明授权
    Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same 有权
    适用于酸产生剂的盐和含有它的化学放大型正性抗蚀剂组合物

    公开(公告)号:US07439006B2

    公开(公告)日:2008-10-21

    申请号:US11889353

    申请日:2007-08-10

    IPC分类号: G03F7/004 C07C69/00

    摘要: A salt represented by the formula (I): wherein X represents a C1-C12 divalent linear or branched chain hydrocarbon group, Y represents a C1-C30 hydrocarbon group which may be substituted with at least one substituent, and at least one —CH2— in the C1-C30 hydrocarbon group may be substituted with —O— or —CO—, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A+ represents an organic counter ion. The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).

    摘要翻译: 由式(I)表示的盐:其中X表示C1-C12二价线性或支链烃基,Y表示可以被至少一个取代基取代的C 1 -C 30烃基,并且至少一个-CH- C1-C30烃基可以被-O-或-CO-取代,Q 1和Q 2各自独立地表示 氟原子或C1-C6全氟烷基,A0 +表示有机抗衡离子。 本发明还提供一种包含由上述式(I)表示的盐的化学放大抗蚀剂组合物。

    Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same

    公开(公告)号:US20080081293A1

    公开(公告)日:2008-04-03

    申请号:US11882084

    申请日:2007-07-30

    IPC分类号: G03C1/73 C07C69/00 C07D307/77

    摘要: The present invention provides a salt represented by the formula (I): wherein P1, P2 and P3 each independently represent a C1-C30 alkyl group which may be substituted with at least one selected from a hydroxyl group, a C3-C12 cyclic hydrocarbon group and a C1-C12 alkoxy group, or a C3-C30 cyclic hydrocarbon group which may be substituted with at least one selected from a hydroxyl group and a C1-C12 alkoxy group, provided that all of P1, P2 and P3 are not simultaneously phenyl groups which may be substituted, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and R represents a group represented by the formula: wherein A1 represents —OH or —Y1—OH, n represents an integer of 1 to 9, and Y1 represents a divalent C1-C6 saturated aliphatic hydrocarbon group; a group represented by the formula: wherein ring X1 represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which one —CH2— group is substituted with —CO—, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group; a group represented by the formula: wherein ring X2 represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which a hydrogen atom of one —CH2— group is substituted with a hydroxyl group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group; a group represented by the formula: wherein ring X3 represents a C3-C30 monocyclic or polycyclic hydrocarbon group in which one —CH2— group is substituted with —COO—, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group, and m represents an integer of 0 to 12; or a group represented by the formula: wherein ring X4 represents a C6-C30 polycyclic hydrocarbon group having tricycle or more, and at least one hydrogen atom in the polycyclic hydrocarbon group may be substituted with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group or a cyano group, and l represents an integer of 1 to 12. The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).

    METHOD AND APPARATUS FOR EVALUATING LENGTH OF DEFECT IN EDDY CURRENT TESTING
    33.
    发明申请
    METHOD AND APPARATUS FOR EVALUATING LENGTH OF DEFECT IN EDDY CURRENT TESTING 有权
    用于评估EDDY电流测试中缺陷长度的方法和装置

    公开(公告)号:US20080004817A1

    公开(公告)日:2008-01-03

    申请号:US11771436

    申请日:2007-06-29

    IPC分类号: G06F19/00

    CPC分类号: G01N27/9046

    摘要: The surface length of a metal subject to be inspected is evaluated by detecting an eddy current without using a combination of a scale and visual or liquid penetrant inspection. An exciting coil and a detecting coil are scanned above the subject in a length direction. An eddy current detector measures an output voltage corresponding to scanning positions based on an output from the detecting coil. Based on an output voltage distribution curve indicating a distribution of output voltages corresponding to the scanning positions, position information is extracted corresponding to values which are within a differential voltage range and lower by 12 dB than a maximum value of the output voltages on the left and right sides of the distribution. A distance between the positions included in the extracted information is calculated to evaluate the length of a slit which is a defect present on the subject surface.

    摘要翻译: 要检查的金属的表面长度通过检测涡流来评估,而不使用水垢和视觉或液体渗透剂检查的组合。 激光线圈和检测线圈在长度方向上扫描被检体的上方。 涡电流检测器基于来自检测线圈的输出来测量对应于扫描位置的输出电压。 基于表示与扫描位置对应的输出电压分布的输出电压分布曲线,对应于在差分电压范围内并且比左侧的输出电压的最大值低12dB的值提取位置信息, 右侧分配。 计算提取的信息中包含的位置之间的距离,以评估作为被摄体表面上存在的缺陷的狭缝的长度。

    Salt suitable for an acid generator and a chemically amplified resist composition containing the same
    34.
    发明授权
    Salt suitable for an acid generator and a chemically amplified resist composition containing the same 有权
    适用于酸产生剂的盐和含有它的化学放大抗蚀剂组合物

    公开(公告)号:US07262321B2

    公开(公告)日:2007-08-28

    申请号:US11516644

    申请日:2006-09-07

    IPC分类号: C07C69/00

    摘要: The present invention provides a salt of the formula (I): wherein X represents divalent or trivalent residue of acyclic hydrocarbon having 1 to 30 carbon atoms or divalent or trivalent residue of hydrocarbon having 3 to 30 carbon atoms which contains monocyclic or bicyclic ring, wherein —CH2— in the hydrocarbon may be substituted with —O— and one or more hydrogen atom in X is optionally substituted with alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1 and Q2 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+ represents organic counter ion; Y represents hydroxyl group, cyano group or methoxy group; and n shows 1 or 2. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).

    摘要翻译: 本发明提供式(I)的盐:其中X表示碳原子数1〜30的无环烃的二价或三价残基或含有单环或双环的碳原子数3〜30的二价或三价残基,其中, 在烃中的-CH 2 - 2可以被-O-取代,X中的一个或多个氢原子任选被具有1至6个碳原子的烷氧基,具有1至4个碳原子的全氟烷基取代 ,具有1-6个碳原子的羟基烷基,羟基或氰基; Q 1和Q 2各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; A + 代表有机抗衡离子; Y表示羟基,氰基或甲氧基; 并且n表示1或2.本发明还提供包含式(I)的盐的化学放大抗蚀剂组合物。

    Chemical amplification type positive resist composition and a resin therefor
    35.
    发明授权
    Chemical amplification type positive resist composition and a resin therefor 有权
    化学扩增型正型抗蚀剂组合物及其树脂

    公开(公告)号:US07175963B2

    公开(公告)日:2007-02-13

    申请号:US10952793

    申请日:2004-09-30

    IPC分类号: G03C1/73 G03F7/039

    摘要: A resin which comprises (1) at least one structural unit selected from the group consisting of a structural unit derived from 3-hydroxy-1-adamantyl (meth)acrylate, a structural unit derived from 3,5-dihydroxy-1-adamantyl (meth)acrylate, a structural unit derived from (meth)acryloyloxy-γ-butyrolactone having a lactone ring optionally substituted by alkyl, a structural unit of the formula (Ia) and a structural unit of the formula and (2) a structural unit of the formula (II) and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid; and also provides a chemical amplification type positive resist composition comprising a resin defined above and an acid generator.

    摘要翻译: 一种树脂,其包含(1)至少一种选自由(甲基)丙烯酸3-羟基-1-金刚烷基酯衍生的结构单元的结构单元,衍生自3,5-二羟基-1-金刚烷基( (甲基)丙烯酸酯,具有任选被烷基取代的内酯环的(甲基)丙烯酰氧基-γ-丁内酯的结构单元,式(Ia)的结构单元和式的结构单元和(2)结构单元 式(II),其本身在碱性水溶液中不溶或难溶,但通过酸作用而溶于碱性水溶液中; 并且还提供包含上述树脂和酸发生剂的化学放大型正性抗蚀剂组合物。

    Method of quantifying protective ratio of hydroxyl groups of polymer compound
    36.
    发明授权
    Method of quantifying protective ratio of hydroxyl groups of polymer compound 失效
    定量聚合物化合物羟基保护率的方法

    公开(公告)号:US06624257B2

    公开(公告)日:2003-09-23

    申请号:US09931769

    申请日:2001-08-20

    IPC分类号: C08F800

    摘要: A method of quantifying the protection ratio of a hydroxyl group of a polymer compound, comprising calculating the protection ratio of a hydroxyl group of a polymer compound using a multiple regression calibration curve obtained by regression-analyzing main components of near infrared absorption spectra of a plurality of standards samples, from near infrared absorption spectra of samples containing a polymer compound composed of the following first structural unit and second structural unit: first structural unit: a structural unit of a structure having a hydroxyl group, second structural unit: a structural unit of a structure obtained by introducing a protective group into a hydroxyl group in the first structural unit. By this method, the protection ratio of a hydroxyl group of the polymer compound contained in a sample can be quantified with high precision in a short period of time without isolating the polymer compound.

    摘要翻译: 一种量化高分子化合物的羟基的保护率的方法,包括使用多元回归校准曲线计算高分子化合物的羟基的保护比,该多元回归校准曲线通过回归分析多个红外线吸收光谱的主要成分 标准样品,来自包含由以下第一结构单元和第二结构单元组成的高分子化合物的样品的近红外吸收光谱:第一结构单元:具有羟基的结构的结构单元,第二结构单元: 通过在第一结构单元中将保护基引入羟基而获得的结构。 通过该方法,可以在不分离高分子化合物的情况下,在短时间内高精度地定量样品中所含的高分子化合物的羟基的保护率。

    High frequency power amplifying module and wireless communication apparatus
    37.
    发明授权
    High frequency power amplifying module and wireless communication apparatus 有权
    高频功率放大模块和无线通信设备

    公开(公告)号:US06492872B1

    公开(公告)日:2002-12-10

    申请号:US09657237

    申请日:2000-09-07

    IPC分类号: H03G310

    CPC分类号: H03F1/301 H03G3/3042

    摘要: A high frequency power amplifier module is provided for improving output controllability. A wireless communication apparatus incorporates a high frequency power amplifier module in a multi-stage configuration including a plurality of cascaded MOSFETS. The power amplifier module comprises a bias circuit for generating a gate voltage in response to a power control voltage (vapc) generated based on a power control signal of the wireless communication apparatus. The gate voltage has a bias pattern which presents smaller fluctuations in output power in response to a control voltage (Vapc) in a region near a threshold voltage (Vth) of the MOSFETs in respective amplification stages. In this way, the controllability for the output power is improved. More specifically, the power amplifier module has a gate bias circuit for generating the gate voltage (Vg) which follows a gate voltage pattern. The gate voltage (Vg) supplied to a control terminal in response to the control voltage (Vapc) largely changes in a region where the gate voltage (Vg) is lower than the threshold voltage (Vth) of the respective MOSFETs, and slightly changes near the threshold voltage (Vth). Also, the gate voltage (Vg) presents desired characteristics from the vicinity of the threshold voltage (Vth) to a high Vapc voltage region.

    摘要翻译: 提供了一种用于提高输出可控性的高频功率放大器模块。 无线通信装置将包括多个级联MOSFET的多级配置的高频功率放大器模块结合在一起。 功率放大器模块包括用于响应于基于无线通信设备的功率控制信号产生的功率控制电压(vapc)产生栅极电压的偏置电路。 栅极电压具有偏置图案,其响应于在各个放大级中的MOSFET的阈值电压(Vth)附近的区域中的控制电压(Vapc),输出功率的波动较小。 以这种方式,提高了输出功率的可控性。 更具体地,功率放大器模块具有用于产生跟随栅极电压图案的栅极电压(Vg)的栅极偏置电路。 响应于控制电压(Vapc)而提供给控制端的栅极电压(Vg)在栅极电压(Vg)低于各个MOSFET的阈值电压(Vth)的区域内大大变化,并且稍微改变 阈值电压(Vth)。 此外,栅极电压(Vg)从阈值电压(Vth)附近到高Vapc电压区域呈现期望的特性。

    Roofing tile having photovoltaic module to generate power
    38.
    发明授权
    Roofing tile having photovoltaic module to generate power 有权
    屋顶瓦具有光伏模块以发电

    公开(公告)号:US06453629B1

    公开(公告)日:2002-09-24

    申请号:US09620688

    申请日:2000-07-20

    IPC分类号: F24J236

    摘要: A roofing tile for performing solar-light power generation includes a roofing tile main body set tilted on a roof, and a photovoltaic module fixed to the main body. The roofing tile main body has a recess open upward. The photovoltaic module is stored and fixed in the recess. The roofing tile main body has an eaves-side edge portion. This edge portion has a plurality of drain ditches. Each drain ditch crosses the upper portion of the eaves-side edge portion and communicates with the recess. The level of the bottom surface of each drain ditch is equal to or lower than that of the bottom surface of the recess. With this construction, rainwater that has entered the recess is discharged through the drain ditches. Rainwater is drained by running the rainwater downward on the upper surface side of the eaves-side edge portion along the tilt direction of the roofing tile.

    摘要翻译: 用于执行太阳能发电的屋顶瓦包括倾斜在屋顶上的屋顶瓦主体和固定到主体的光伏模块。 屋顶瓦主体具有向上开口的凹部。 光伏模块被储存并固定在凹槽中。 屋顶瓦主体具有檐侧边缘部分。 该边缘部分具有多个排水沟。 每个排水沟跨越屋檐侧边缘部分的上部并与凹槽连通。 每个排水沟的底面水平等于或低于凹槽底面的水平面。 通过这种结构,进入凹槽的雨水通过排水沟排出。 通过沿屋顶瓦的倾斜方向在屋檐侧边缘部分的上表面侧向下运行雨水来排水雨水。