公开(公告)号：US20110318840A1

公开(公告)日：2011-12-29

申请号：US13170058

申请日：2011-06-27

申请人： Federico Giovanni Ziglioli ,  Amedeo Maierna ,  Ubaldo Mastromatteo ,  Gabriele Barlocchi ,  Flavio Francesco Villa

发明人： Federico Giovanni Ziglioli ,  Amedeo Maierna ,  Ubaldo Mastromatteo ,  Gabriele Barlocchi ,  Flavio Francesco Villa

IPC分类号： G01N30/00

CPC分类号： B01L3/502715 ,  B01L2200/027 ,  B01L2300/044 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0672 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2300/1827 ,  B01L2400/0439 ,  Y10T436/11

摘要： A fluidic cartridge for detecting chemicals, formed by a casing, hermetically housing an integrated device having a plurality of detecting regions to bind with target chemicals; part of a supporting element, bearing the integrated device; a reaction chamber, facing the detecting regions; a sample feeding hole and a washing feeding hole, self-sealingly closed; fluidic paths, which connect the sample feeding and washing feeding holes to the reaction chamber; and a waste reservoir, which may be fluidically connected to the reaction chamber by valve elements that may be controlled from outside. The integrated device is moreover connected to an interface unit carried by the supporting element, electrically connected to the integrated device and including at least one signal processing stage and external contact regions.

摘要翻译： 一种用于检测由壳体形成的化学品的流体盒，其气密地容纳具有多个检测区域以与目标化学品结合的集成装置; 支撑元件的一部分，承载集成装置; 反应室，面对检测区域; 样品供给孔和洗涤进料孔，自密封; 流体路径，其将样品进料和洗涤进料孔连接到反应室; 以及可以通过可从外部控制的阀元件流体地连接到反应室的废物储存器。 此外，集成装置还连接到由支撑元件承载的接口单元，电连接到集成装置并且包括至少一个信号处理级和外部接触区域。

公开(公告)号：US07888589B2

公开(公告)日：2011-02-15

申请号：US12494838

申请日：2009-06-30

申请人： Ubaldo Mastromatteo

发明人： Ubaldo Mastromatteo

IPC分类号： H01L31/042

CPC分类号： H01L31/0232 ,  H01L31/0547 ,  Y02E10/52

摘要： A photovoltaic device may include a housing having a transparent pupil receiving a collimated beam of radiation, and photovoltaic cell arrays being positioned on respective inner surfaces of the housing, each photovoltaic cell array sensing a respective spectral range of the radiation different from the other photovoltaic cell arrays. The photovoltaic device may further include dichroic filters being positioned along an optical axis of the transparent pupil and splitting the collimated beam into a corresponding divided beams of different spectrums, and mirrors corresponding to the divided beams. Each mirror may have reflecting surfaces, receive a respective divided beam, subdivide the received divided beam into reflected beams from the reflecting surfaces, and illuminate an active area of a photovoltaic cell of the respective array.

摘要翻译： 光伏器件可以包括具有接收准直的辐射束的透明光瞳的壳体，以及位于壳体的相应内表面上的光伏电池阵列，每个光伏电池阵列感测到与其他光伏电池不同的辐射的相应光谱范围 阵列 光电器件还可以包括沿着透明光瞳的光轴定位的分色滤光器，并将准直光束分成对应于不同光谱的对应分割光束，以及对应于分割光束的反射镜。 每个反射镜可以具有反射表面，接收相应的分割光束，将接收到的划分光束细分成来自反射表面的反射光束，并照亮相应阵列的光伏电池的有效区域。

公开(公告)号：US20100170324A1

公开(公告)日：2010-07-08

申请号：US12648996

申请日：2009-12-29

申请人： Ubaldo Mastromatteo ,  Flavio Francesco Villa ,  Gabriele Barlocchi

发明人： Ubaldo Mastromatteo ,  Flavio Francesco Villa ,  Gabriele Barlocchi

IPC分类号： G01N29/02 ,  H04R17/00

CPC分类号： G01G3/13 ,  G01G3/16 ,  G01N29/036 ,  G01N2291/0256 ,  Y10T29/42

摘要： An electronic microbalance made in a semiconductor body accommodating an oscillating circuit adjacent to a diaphragm. A stack formed by a first electrode, a second electrode, and a piezoelectric region arranged between the first and the second electrode extends above the diaphragm. Any substance that deposits on the stack causes a change in the mass of the microbalance and thus in the resonance frequency of a resonator formed by the microbalance and by the oscillating circuit and can thus be detected electronically. A chemical sensor is obtained by forming a sensitive layer of a material suitable for binding to target chemicals on the stack. The sensitivity of the microbalance can be increased by making the first electrode of molybdenum so as to increase the piezoelectric characteristics of the piezoelectric region.

摘要翻译： 一种电子微量天平，其制造在容纳与隔膜相邻的振荡电路的半导体主体中。 由第一电极，第二电极和布置在第一和第二电极之间的压电区形成的堆叠在隔膜的上方延伸。 沉积在堆叠上的任何物质都会导致微量天平的质量的变化，从而导致由微量天平形成的谐振器和振荡电路的共振频率的变化，并且因此可以被电子地检测。 通过形成适合于与堆叠上的目标化学物质结合的材料的敏感层来获得化学传感器。 可以通过使钼的第一电极增加压电区域的压电特性来增加微量天平的灵敏度。

公开(公告)号：US07635454B2

公开(公告)日：2009-12-22

申请号：US10997235

申请日：2004-11-24

申请人： Ubaldo Mastromatteo ,  Flavio Francesco Villa ,  Gabriele Barlocchi

发明人： Ubaldo Mastromatteo ,  Flavio Francesco Villa ,  Gabriele Barlocchi

IPC分类号： B01J19/00

CPC分类号： B01L3/502715 ,  B01L3/5025 ,  B01L3/502707 ,  B01L7/52 ,  B01L2200/027 ,  B01L2200/12 ,  B01L2300/044 ,  B01L2300/0816 ,  B01L2300/1827

摘要： The microreactor is formed by a sandwich including a first body, an intermediate sealing layer and a second body. A buried channel extends in the first body and communicates with the surface of the first body through a first and a second apertures. A first and a second reservoirs are formed in the second body and are at least partially aligned with the first and second apertures. The sealing layer separates the first aperture from the first reservoir and the second aperture from the second reservoir, thereby avoiding contamination of liquids contained in the buried channel from the outside and from any adjacent buried channels. The sealing layer is perforated during use of the device, but a resilient plug can be used to reseal the device.

摘要翻译： 微反应器由包括第一主体，中间密封层和第二主体的夹层形成。 掩埋通道在第一主体中延伸并且通过第一和第二孔与第一主体的表面连通。 第一和第二储存器形成在第二主体中并且至少部分地与第一和第二孔对准。 密封层将第一孔与第一储存器和第二孔分隔开来自第二储存器，从而避免了从外部和任何相邻的埋入通道污染包含在掩埋通道中的液体。 在使用该装置期间密封层是穿孔的，但是可以使用弹性塞来重新密封装置。

公开(公告)号：US07208339B2

公开(公告)日：2007-04-24

申请号：US11063483

申请日：2005-02-22

申请人： Bruno Murari ,  Ubaldo Mastromatteo ,  Paolo Ferrari

发明人： Bruno Murari ,  Ubaldo Mastromatteo ,  Paolo Ferrari

IPC分类号： H01L21/00

CPC分类号： G02B27/0994

摘要： A micromachined device made of semiconductor material is formed by: a semiconductor body; an intermediate layer set on top of the semiconductor body; and a substrate, set on top of the intermediate layer. A cavity extends in the intermediate layer and is delimited laterally by bottom fixed regions, at the top by the substrate, and at the bottom by the semiconductor body. The bottom fixed regions form fixed electrodes, which extend in the intermediate layer towards the inside of the cavity. An oscillating element is formed in the substrate above the cavity and is separated from top fixed regions through trenches, which extend throughout the thickness of the substrate. The oscillating element is formed by an oscillating platform set above the cavity, and by mobile electrodes, which extend towards the top fixed regions in a staggered way with respect to the fixed electrodes. The fixed electrodes and mobile electrodes are thus comb-fingered in plan view but formed on different levels.

摘要翻译： 由半导体材料制成的微机械加工装置由半导体本体形成， 设置在半导体本体顶部的中间层; 以及设置在中间层顶部的基板。 空腔在中间层中延伸并且由底部固定区域在顶部限定，在顶部由衬底限定，并且在底部由半导体本体限定。 底部固定区域形成固定电极，其在中间层中延伸到空腔的内部。 振荡元件形成在空腔上方的衬底中，并且通过沟槽与顶部固定区域分离，其延伸贯穿衬底的厚度。 振荡元件由设置在空腔上方的振荡平台和通过相对于固定电极以交错方式朝着顶部固定区域延伸的移动电极形成。 因此，固定电极和移动电极在平面图中梳理，但形成在不同的水平上。

公开(公告)号：US07141871B2

公开(公告)日：2006-11-28

申请号：US10924014

申请日：2004-08-23

申请人： Ubaldo Mastromatteo ,  Andrea Pallotta ,  Pietro Montanini ,  Francesco Martini

发明人： Ubaldo Mastromatteo ,  Andrea Pallotta ,  Pietro Montanini ,  Francesco Martini

IPC分类号： H01L23/02

CPC分类号： G02B6/4228 ,  H01S5/02252 ,  H01S5/02272 ,  H01S5/02276 ,  H01S5/02284 ,  H01S5/02415 ,  H01S5/0683

摘要： A packaging structure for optoelectronic components is formed by a first body, of semiconductor material, and a second body, of semiconductor material, fixed to a first face of said first body. A through window is formed in the second body and exposes a portion of the first face of the first body, whereon at least one optoelectronic component is fixed. Through connection regions extend through the first body and are in electrical contact with the optoelectronic component. The through connection regions are insulated from the rest of the first body via through insulation regions. Contact regions are arranged on the bottom face of the first body and are connected to said optoelectronic component via the through connection regions.

摘要翻译： 用于光电子部件的封装结构由半导体材料的第一主体和半导体材料的第二主体形成，固定到所述第一主体的第一面。 在第二主体中形成通孔，并暴露出第一主体的第一面的一部分，其中固定有至少一个光电子部件。 通过连接区域延伸穿过第一主体并且与光电子部件电接触。 通过连接区域经由绝缘区域与第一体的其余部分绝缘。 接触区域布置在第一主体的底面上，并且经由贯穿连接区域连接到所述光电子部件。

公开(公告)号：US20050176037A1

公开(公告)日：2005-08-11

申请号：US11009171

申请日：2004-12-10

申请人： Ubaldo Mastromatteo ,  Flavio Villa ,  Gabriele Barlocchi

发明人： Ubaldo Mastromatteo ,  Flavio Villa ,  Gabriele Barlocchi

IPC分类号： B01J19/00 ,  B01L3/00 ,  B01L7/00 ,  B81B1/00 ,  G01N21/64 ,  C12Q1/68 ,  C12M1/34 ,  H01L21/00

CPC分类号： G01N21/6428 ,  B01J19/0093 ,  B01J2219/0097 ,  B01L3/502707 ,  B01L3/502715 ,  B01L7/52 ,  B01L2200/12 ,  B01L2300/0654 ,  B01L2300/0816 ,  G01N21/6454

摘要： An integrated semiconductor chemical microreactor for real-time polymerase chain reaction (PCR) monitoring, has a monolithic body of semiconductor material; a number of buried channels formed in the monolithic body; an inlet trench and an outlet trench for each buried channel; and a monitoring trench for each buried channel, extending between the inlet and outlet trenches thereof from the top surface of the monolithic body to the respective buried channel. Real-time PCR monitoring is carried out by channeling light beams into the buried channels, possibly through one of the inlet or outlet trenches, whereby the light beams impinge on the fluid therein and collecting the emergent light coming out from the monitoring trench.

摘要翻译： 一种用于实时聚合酶链反应（PCR）监测的集成半导体化学微反应器，具有半导体材料的整体; 形成在整体式主体中的多个埋入通道; 用于每个掩埋通道的入口沟槽和出口沟槽; 以及用于每个掩埋通道的监测沟槽，其在其入口和出口沟槽之间从单体主体的顶表面延伸到相应的掩埋通道。 通过将光束通过入口或出口沟槽中的一个引入到掩埋通道中，从而使光束照射在其中的流体并收集从监测沟槽出来的出射光，从而进行实时PCR监测。

公开(公告)号：US06759132B2

公开(公告)日：2004-07-06

申请号：US10295767

申请日：2002-11-14

申请人： Ubaldo Mastromatteo ,  Pietro Corona ,  Flavio Villa ,  Gabriele Barlocchi

发明人： Ubaldo Mastromatteo ,  Pietro Corona ,  Flavio Villa ,  Gabriele Barlocchi

IPC分类号： B32B900

CPC分类号： G11B7/1362 ,  G02B5/08 ,  G02B6/4214 ,  G11B7/123 ,  Y10T428/12528

摘要： Method for manufacturing electromagnetic radiation reflecting devices, said method comprising the steps of: a) providing a silicon substrate defined by at least one first free surface, b) forming on said first surface a layer of protective material provided with an opening which exposes a region of the first free surface, and c)etching the region of the free surface by means of an anisotropic agent to remove at least one portion of the substrate and define a second free surface of the substrate inclined in relation to said first surface. Furthermore, said first free surface is parallel to the crystalline planes {110} of silicon substrate and said step (c) comprises a progressing step of the anisotropic agent such that the second free surface resulting from the etching step is parallel to the planes {100} of said substrate.

摘要翻译： 用于制造电磁辐射反射装置的方法，所述方法包括以下步骤：a）提供由至少一个第一自由表面限定的硅衬底，b）在所述第一表面上形成一层保护材料，所述保护材料层具有暴露区域 的第一自由表面，以及c）借助于各向异性剂蚀刻所述自由表面的区域以去除所述衬底的至少一部分并且限定所述衬底相对于所述第一表面倾斜的第二自由表面。 此外，所述第一自由表面平行于硅衬底的晶面{110}，并且所述步骤（c）包括各向异性剂的进行步骤，使得由蚀刻步骤产生的第二自由表面平行于平面{100 }。

公开(公告)号：US06653655B2

公开(公告)日：2003-11-25

申请号：US10055029

申请日：2002-01-22

申请人： Ubaldo Mastromatteo

发明人： Ubaldo Mastromatteo

IPC分类号： H01L2358

CPC分类号： H01L23/5225 ,  H01L23/481 ,  H01L23/60 ,  H01L24/48 ,  H01L25/0657 ,  H01L25/074 ,  H01L29/0657 ,  H01L2223/6622 ,  H01L2224/05599 ,  H01L2224/16145 ,  H01L2224/45099 ,  H01L2224/48463 ,  H01L2224/85399 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06527 ,  H01L2225/06572 ,  H01L2924/00014 ,  H01L2924/14 ,  H01L2924/19041 ,  H01L2924/3025 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2924/00

摘要： The integrated semiconductor device includes a first chip of semiconductor material having first, high-voltage, regions at a first high-value voltage; a second chip of semiconductor material having second high-voltage regions connected to the first voltage; and a third chip of semiconductor material arranged between the first chip and the second chip and having at least one low-voltage region at a second, low-value, voltage. A through connection region is formed in the third chip and is connected to the first and second high-voltage regions; through insulating regions surround the through connection region and insulate it from the low-voltage region.

公开(公告)号：US06504253B2

公开(公告)日：2003-01-07

申请号：US09844180

申请日：2001-04-27

申请人： Ubaldo Mastromatteo ,  Fabrizio Ghironi ,  Roberto Aina ,  Mauro Bombonati

发明人： Ubaldo Mastromatteo ,  Fabrizio Ghironi ,  Roberto Aina ,  Mauro Bombonati

IPC分类号： H01L2348

CPC分类号： B81C1/00238 ,  B81C2201/019 ,  H01L21/76898 ,  H01L23/481 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/05571 ,  H01L2224/05573 ,  H01L2224/16145 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2924/01322

摘要： An electric connection structure connecting a first silicon body to conductive regions provided on the surface of a second silicon body arranged on the first body. The electric connection structure includes at least one plug region of silicon, which extends through the second body; at least one insulation region laterally surrounding the plug region; and at least one conductive electromechanical connection region arranged between the first body and the second body, and in electrical contact with the plug region and with conductive regions of the first body. To form the plug region, trenches are dug in a first wafer and are filled, at least partially, with insulating material. The plug region is fixed to a metal region provided on a second wafer, by performing a low-temperature heat treatment which causes a chemical reaction between the metal and the silicon. The first wafer is thinned until the trenches and electrical connections are formed on the free face of the first wafer.

摘要翻译： 电连接结构，其将第一硅体与设置在第一体上的第二硅体的表面上的导电区域连接。 电连接结构包括延伸穿过第二主体的硅的至少一个插塞区域; 横向围绕所述插塞区域的至少一个绝缘区域; 以及布置在第一主体和第二主体之间并且与插头区域和第一主体的导电区域电接触的至少一个导电机电连接区域。 为了形成插塞区域，在第一晶片中挖出沟槽，并且至少部分地用绝缘材料填充沟槽。 插塞区域通过进行导致金属与硅之间的化学反应的低温热处理而固定在设置在第二晶片上的金属区域上。 将第一晶片减薄直到沟槽和电连接形成在第一晶片的自由面上。