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公开(公告)号：US08293557B2
公开(公告)日：2012-10-23
申请号：US13012104
申请日：2011-01-24
申请人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
发明人： Hiroaki Inoue , Tadashi Nakatani , Satoshi Ueda
IPC分类号： H01L21/00
CPC分类号： H01H59/0009 , Y10T428/24521 , Y10T428/24562
摘要： A method for manufacturing a MEMS device, includes: preparing a substrate provided with a first substrate in which a cavity is formed, and a second substrate that is bonded to a side of the first substrate on which the cavity is formed and includes a slit to delimit a movable portion in a position corresponding to the cavity, the second substrate, including a first surface thereof facing the first substrate, being provided with a thermally-oxidized film selectively formed on the first surface in a position corresponding to the movable portion; forming a first electrode layer on a second surface opposite to the first surface on which the thermally-oxidized film for the movable portion is formed; forming a sacrifice layer on the first electrode layer and the second substrate; forming a second electrode layer on the sacrifice layer; and removing the sacrifice layer and the thermally-oxidized film after the second electrode layer is formed.
摘要翻译： 一种MEMS器件的制造方法，包括：准备具有形成有空腔的第一基板的基板和与形成有所述空腔的所述第一基板的一侧接合的第二基板，所述第二基板具有狭缝， 在与空腔相对应的位置限定可移动部分，所述第二基板包括其面向所述第一基板的第一表面，所述第二基板具有在对应于所述可动部分的位置中选择性地形成在所述第一表面上的热氧化膜; 在形成有用于可动部分的热氧化膜的第一表面相对的第二表面上形成第一电极层; 在所述第一电极层和所述第二基板上形成牺牲层; 在牺牲层上形成第二电极层; 并且在形成第二电极层之后去除牺牲层和热氧化膜。
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公开(公告)号：US08186030B2
公开(公告)日：2012-05-29
申请号：US12537962
申请日：2009-08-07
申请人： Tadashi Nakatani
发明人： Tadashi Nakatani
CPC分类号： H03H9/0222 , H03H3/08 , H03H9/02818 , Y10T29/42 , Y10T29/49155
摘要： A method for manufacturing an elastic wave device includes forming a lower resist layer on the piezoelectric substrate; forming an upper resist layer on the lower resist layer; patterning the upper and lower resist layers with a developer with respect to which a solubility of the lower resist layer is higher than that of the upper resist layer to form a lower resist pattern and an upper resist pattern on the lower resist pattern so that a periphery of the lower resist pattern lies within a periphery of the upper resist pattern; depositing an electrode material over an entire surface of the piezoelectric substrate that has the upper resist pattern and the lower resist pattern formed thereon; and removing the upper resist pattern and the lower resist pattern to pattern the electrode material, thereby forming a comb-shaped electrode by lift-off.
摘要翻译： 弹性波装置的制造方法包括在压电基板上形成下层抗蚀剂层; 在下抗蚀剂层上形成上抗蚀剂层; 用显影剂图案化上下抗蚀剂层，下层抗蚀剂层的溶解度高于上抗蚀剂层的溶解度，以在下抗蚀剂图案上形成下抗蚀剂图案和上抗蚀剂图案，使得周边 下抗蚀剂图案位于上抗蚀剂图案的周边内; 在其上形成有上抗蚀剂图案和下抗蚀剂图案的压电基板的整个表面上沉积电极材料; 并且去除上抗蚀剂图案和下抗蚀剂图案以图案化电极材料，从而通过剥离形成梳状电极。
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公开(公告)号：US08106730B2
公开(公告)日：2012-01-31
申请号：US11699378
申请日：2007-01-30
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda
IPC分类号： H01H51/22
CPC分类号： H01H59/0009
摘要： A microswitching device includes a base, a fixed portion joined to the base, a movable portion extending along the base and having a fixed end fixed to the fixed portion, a movable contact electrode film provided on a side of the movable portion opposite the base, a pair of fixed contact electrodes joined to the fixed portion and having a region opposing the movable contact electrode film, a movable driving electrode film provided on a side of the movable portion opposite the base, and a fixed driving electrode having a region opposing the movable driving electrode film. The movable driving electrode film is thinner than the movable contact electrode film. The fixed driving electrode is joined to the fixed portion joined to the base.
摘要翻译： 一种微动开关装置，包括基座，与基座连接的固定部分，沿着基座延伸并具有固定在固定部分上的固定端的可动部分，设置在与基座相对的可动部分的一侧的可动接点电极膜， 一对固定接触电极，其连接到固定部分并且具有与可动接触电极膜相对的区域;可动驱动电极膜，设置在与基座相对的可动部分的一侧;以及固定驱动电极，具有与可动接触电极膜相对的区域 驱动电极膜。 可动驱动电极膜比可动接触电极膜薄。 固定驱动电极接合到与基座接合的固定部分。
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公开(公告)号：US07755460B2
公开(公告)日：2010-07-13
申请号：US11987884
申请日：2007-12-05
IPC分类号： H01H51/22
CPC分类号： H01H47/325 , H01H59/0009
摘要： A micro-switching device includes a movable electrode provided on a movable support having an end fixed to a fixing member. The switching device also includes first and second stationary electrodes. The movable electrode includes first and second contact portions. The first stationary electrode includes a third contact portion facing the first contact portion of the movable electrode. The second stationary electrode includes a fourth contact portion facing the second contact portion of the movable electrode. The distance between the first and the third contact portions is smaller than the distance between the second and the fourth contact portions. The switching device further includes a driving mechanism having a driving force generation region provided on the movable support. The center of gravity of the driving force generation region is closer to the second contact portion than to the first contact portion.
摘要翻译： 微型开关装置包括可动电极，其设置在具有固定到固定构件的端部的可动支架上。 开关装置还包括第一和第二固定电极。 可动电极包括第一和第二接触部分。 第一固定电极包括面对可动电极的第一接触部分的第三接触部分。 第二固定电极包括面对可动电极的第二接触部分的第四接触部分。 第一和第三接触部分之间的距离小于第二和第四接触部分之间的距离。 开关装置还包括具有设置在可动支架上的驱动力产生区域的驱动机构。 驱动力产生区域的重心比第一接触部分更靠近第二接触部分。
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公开(公告)号：US07755459B2
公开(公告)日：2010-07-13
申请号：US12007630
申请日：2008-01-14
CPC分类号： H01H57/00 , H01H59/0009 , H01H61/04 , H01H2057/006 , H01H2061/006 , Y10T29/49105
摘要： A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In manufacturing the micro-switching device., the first electrode is formed on a substrate, and a sacrifice layer is formed on the substrate to cover the first electrode. Then, a first recess and a shallower second recess are formed in the sacrifice layer at a position corresponding to the first electrode. The second electrode is formed to have a portion opposing the first electrode via the sacrifice layer, and to fill the first recess. The third electrode is formed to have a portion opposing the first electrode via the sacrifice layer; and to fill the second recess. Thereafter the sacrifice layer is removed.
摘要翻译： 微型开关装置包括固定部分，可移动部分，具有第一和第二触点的第一电极，具有接触第一触点的第三触点的第二电极和与第二触点相对的第四触点的第三电极。 在微型开关元件的制造中，第一电极形成在基板上，牺牲层形成在基板上以覆盖第一电极。 然后，在与第一电极对应的位置处，在牺牲层中形成第一凹部和较浅的第二凹部。 第二电极形成为具有经由牺牲层与第一电极相对的部分，并填充第一凹部。 第三电极通过牺牲层形成为具有与第一电极相对的部分; 并填补第二个休息。 然后除去牺牲层。
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公开(公告)号：US20080173524A1
公开(公告)日：2008-07-24
申请号：US11878210
申请日：2007-07-23
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01H1/06 , H01P1/127
摘要： A switch includes a movable portion, a first electrode and a second electrode. The movable portion is provided on a substrate and moves with respect to the substrate. The first electrode is provided on the movable portion. The second electrode is able to contact with the first electrode and is fixed to the substrate. f×Ro×C≦1.6×10−4 when an operation frequency is represented as “f” (Hz), a transmission impedance is represented as “Ro” (Ω), and a capacitance in “OFF” state between the first electrode and the second electrode is represented as “C” (F).
摘要翻译： 开关包括可动部分，第一电极和第二电极。 可移动部分设置在基板上并相对于基板移动。 第一电极设置在可动部上。 第二电极能够与第一电极接触并固定到基板。 当操作频率被表示为“f”（Hz）时，fxRoxC <= 1.6×10 -4 - ，传输阻抗被表示为“Ro”（Ω），并且在“OFF” 第一电极和第二电极被表示为“C”（F）。
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公开(公告)号：US07312677B2
公开(公告)日：2007-12-25
申请号：US10878330
申请日：2004-06-29
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , B81B2201/016 , B81B2203/0127 , B81C1/00142 , B81C2201/0109
摘要： A method is provided for making a micro-switching element. The switching element includes a substrate, two supporting members fixed to the substrate, and a movable beam bridging between the supporting members. The beam includes a membrane, a movable contact electrode and a movable driving electrode, both disposed on the membrane. The switching element also includes a pair of stationary contact electrodes facing the movable contact electrode, and a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force. The method includes the steps of making a sacrifice layer on the substrate, making the membrane on the sacrifice layer, and subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.
摘要翻译： 提供了一种制造微型开关元件的方法。 开关元件包括基板，固定到基板的两个支撑构件和桥接在支撑构件之间的可移动梁。 梁包括设置在膜上的膜，可动接触电极和可移动驱动电极。 开关元件还包括面对可动接触电极的一对固定接触电极，以及与可动驱动电极配合以产生静电力的固定驱动电极。 该方法包括以下步骤：在基底上制备牺牲层，使膜处于牺牲层上，并使牺牲层进行介入蚀刻，使得支撑构件形成为牺牲层的剩余部分 底物和膜。
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公开(公告)号：US20060171097A1
公开(公告)日：2006-08-03
申请号：US11104453
申请日：2005-04-13
IPC分类号： H01G5/00
CPC分类号： H01G5/18 , H01G5/16 , Y10T29/417 , Y10T29/435
摘要： The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
摘要翻译： 第一可动电极是平坦的，但是第二可动电极变形为凸形。 电介质层被放置在第二可动电极的相对表面上。 通过调整施加在第一可动电极和第二可动电极之间的电压，通过在两个电极之间产生的静电吸引力确保两个电极之间的任意距离，并获得所需的静电电容。 当两个电极之间的距离缩短时，首先在中心处，第一可移动电极的一部分和第二可动电极的一部分彼此接触，并且它们之间具有介电层。 然后，第一可动电极和电介质层（第二可动电极）从接触部朝向周边依次相接触，接触面积逐渐增大。
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公开(公告)号：US20050190023A1
公开(公告)日：2005-09-01
申请号：US10878330
申请日：2004-06-29
IPC分类号： H01H49/00 , B81B3/00 , B81B5/00 , B81B7/00 , B81C1/00 , H01H11/00 , H01H51/22 , H01H59/00 , H01L21/00 , H01L29/00
CPC分类号： H01H59/0009 , B81B2201/016 , B81B2203/0127 , B81C1/00142 , B81C2201/0109
摘要： A method is provided for making a micro-switching element. The switching element includes a substrate, two supporting members fixed to the substrate, and a movable beam bridging between the supporting members. The beam includes a membrane, a movable contact electrode and a movable driving electrode, both disposed on the membrane. The switching element also includes a pair of stationary contact electrodes facing the movable contact electrode, and a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force. The method includes the steps of making a sacrifice layer on the substrate, making the membrane on the sacrifice layer, and subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.
摘要翻译： 提供了一种制造微型开关元件的方法。 开关元件包括基板，固定到基板的两个支撑构件和桥接在支撑构件之间的可移动梁。 梁包括设置在膜上的膜，可动接触电极和可移动驱动电极。 开关元件还包括面对可动接触电极的一对固定接触电极，以及与可动驱动电极配合以产生静电力的固定驱动电极。 该方法包括以下步骤：在衬底上制造牺牲层，使膜处于牺牲层上，并使牺牲层进行介入蚀刻，使得支撑构件形成为牺牲层的剩余部分 底物和膜。
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公开(公告)号：US6140760A
公开(公告)日：2000-10-31
申请号：US66945
申请日：1998-04-28
申请人： Osamu Toyoda , Keiichi Betsui , Shinya Fukuta , Tadashi Nakatani
发明人： Osamu Toyoda , Keiichi Betsui , Shinya Fukuta , Tadashi Nakatani
CPC分类号： B82Y10/00 , H01J1/3042 , H01J31/127 , H01J9/025
摘要： A cathode device comprising a plurality of emitter tips having conical tip end portions to emit electrons therefrom. A gate electrode layer has an opening through which the tip end portion of each of the emitter tips is exposed. The diameter of the opening in the gate electrode layer is made smaller than that of the portion of the emitter tip at the juncture thereof with the substrate. In the fabrication of the cathode device, an oxide layer is formed at least on the surface of the formed emitter tip to sharpen the latter. By removing the oxide layer, an inner circumferential wall of the opening of the gate electrode layer is formed on the outside of the conical tip end portion of the emitter tip and extends approximately in parallel to the conical tip end portion of the emitter tip.
摘要翻译： 一种阴极器件，包括多个发射极尖端，其具有从其发射电子的锥形尖端部分。 栅电极层具有开口，每个发射极尖端的前端部分露出。 栅电极层中的开口的直径比发射极尖端的与基板的接合部的直径小。 在阴极器件的制造中，至少在形成的发射极尖端的表面上形成氧化物层，以使其锐化。 通过去除氧化物层，在发射极尖端的锥形末端部分的外侧形成栅极电极层的开口的内周壁，并且大致平行于发射极尖端的锥形末端部分延伸。
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