MICROFLUIDIC VALVE HAVING FREE-FLOATING MEMBER AND METHOD OF FABRICATION
    31.
    发明申请
    MICROFLUIDIC VALVE HAVING FREE-FLOATING MEMBER AND METHOD OF FABRICATION 有权
    具有自由浮动构件的微流控阀和制造方法

    公开(公告)号:US20100025613A1

    公开(公告)日:2010-02-04

    申请号:US12565636

    申请日:2009-09-23

    IPC分类号: F16K17/02 B21D53/10

    摘要: Micro check valves having a free-floating member for controlling flow of fluid in microfluidic and biomedical applications and methods of fabrication. A micro check valve includes a valve seat, a valve cap that contacts the valve seat and an untethered floating member that can move between the valve seat and the valve cap. Certain micro check valves have zero cracking pressure and no reverse leakage. Certain other valves may be configured to permit flow of fluid within a pressure range. The floating member can be solid or define an orifice, and the valve seat can have one or two levels. Valves can be configured to allow fluid to flow when the floating member is pushed by fluid against the valve cap or against the valve seat. The valve seat may be silicon or another material that is compatible with micromachining processes, and the valve cap and the floating member may be a polymer such as Parylene.

    摘要翻译: 微型止回阀具有用于控制微流体和生物医学应用中的流体流动的自由浮动部件和制造方法。 微型止回阀包括阀座,接触阀座的阀盖和可在阀座与阀盖之间移动的无阻力浮动件。 某些微型止回阀具有零开裂压力,无反向泄漏。 某些其它阀可以被配置为允许流体在压力范围内流动。 浮动构件可以是固定的或限定孔口,并且阀座可以具有一个或两个水平面。 阀可以被配置为当浮动构件被流体压靠在阀盖或阀座上时流体流动。 阀座可以是硅或与微加工过程相容的另一种材料,阀帽和浮动元件可以是聚合物,例如聚对二甲苯。

    Resonance-induced sensitivity enhancement method for conductivity sensors
    33.
    发明授权
    Resonance-induced sensitivity enhancement method for conductivity sensors 失效
    电导率传感器的共振诱导灵敏度增强方法

    公开(公告)号:US07629797B2

    公开(公告)日:2009-12-08

    申请号:US11697060

    申请日:2007-04-05

    IPC分类号: G01R27/26

    摘要: Methods and systems for improving the sensitivity of a variety of conductivity sensing devices, in particular capacitively-coupled contactless conductivity detectors. A parallel inductor is added to the conductivity sensor. The sensor with the parallel inductor is operated at a resonant frequency of the equivalent circuit model. At the resonant frequency, parasitic capacitances that are either in series or in parallel with the conductance (and possibly a series resistance) is substantially removed from the equivalent circuit, leaving a purely resistive impedance. An appreciably higher sensor sensitivity results. Experimental verification shows that sensitivity improvements of the order of 10,000-fold are possible. Examples of detecting particulates with high precision by application of the apparatus and methods of operation are described.

    摘要翻译: 用于提高各种电导率传感装置的灵敏度的方法和系统,特别是电容耦合的非接触电导检测器。 并联电感器被添加到电导率传感器。 具有并联电感器的传感器以等效电路模型的谐振频率工作。 在谐振频率下,与电导串联或并联的寄生电容(和可能的串联电阻)基本上从等效电路中去除,留下纯电阻阻抗。 传感器敏感度会更高。 实验验证表明灵敏度提高可达10,000倍。 描述了通过应用该装置和操作方法检测高精度的微粒的实例。

    Integrated surface-machined micro flow controller method and apparatus
    35.
    发明申请
    Integrated surface-machined micro flow controller method and apparatus 审中-公开
    综合表面加工微流量控制器的方法和装置

    公开(公告)号:US20080210306A1

    公开(公告)日:2008-09-04

    申请号:US11515794

    申请日:2006-09-06

    摘要: A surface-micromachined mass flow controller (MFC) comprises an electrostatically actuated microvalve integrated with a thermal flow sensor. The microvalve comprises a normally-open diaphragm defining an aperture allowing fluid communication between first and second flow channels. The diaphragm includes a second electrode actuable toward a valve seat including a first electrode. Fabricated utilizing a multilayer Parylene process, the active microvalve and the flow sensor are integrated onto a single chip to perform closed-loop flow control. For flow control, both Pulse Width Modulation (PWM) and actuation voltage adjustment are demonstrated.

    摘要翻译: 表面微加工质量流量控制器(MFC)包括与热流传感器集成的静电致动微型阀。 微型阀包括限定允许第一和第二流动通道之间流体连通的孔的常开的隔膜。 隔膜包括能够朝向包括第一电极的阀座致动的第二电极。 采用多层Parylene工艺制造,将活性微型阀和流量传感器集成到单个芯片上,以执行闭环流量控制。 对于流量控制,展示了脉宽调制(PWM)和启动电压调节。

    Pyrolyzed thin film carbon
    39.
    发明申请
    Pyrolyzed thin film carbon 有权
    热解薄膜碳

    公开(公告)号:US20060007983A1

    公开(公告)日:2006-01-12

    申请号:US11040116

    申请日:2005-01-24

    IPC分类号: G01J5/00

    CPC分类号: C23C18/02

    摘要: A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.

    摘要翻译: 制造碳薄膜的方法包括在基材上沉积催化剂,沉积与催化剂接触的烃并热解烃。 控制碳薄膜密度的方法包括将空腔蚀刻到基底中,将烃沉积到空腔中,并在空腔中热解烃以形成碳薄膜。 通过改变空腔的体积来实现碳薄膜密度的控制。 还提供了制备含碳图案结构的方法。 碳薄膜和含碳图案结构可用于NEMS,MEMS,液相色谱和传感器装置。

    On-chip temperature controlled liquid chromatography methods and devices
    40.
    发明申请
    On-chip temperature controlled liquid chromatography methods and devices 失效
    片上温度控制液相色谱方法和装置

    公开(公告)号:US20050274174A1

    公开(公告)日:2005-12-15

    申请号:US11059625

    申请日:2005-02-17

    摘要: An apparatus for liquid chromatography comprises a liquid chromatography separation column on a substrate, wherein the separation column is coupled to a heater on the substrate. A chip-based temperature controlled liquid chromatography device comprises a substrate, a thermal isolation zone, and a separation column thermally isolated from the substrate by the thermal isolation zone. An apparatus for chip-based liquid chromatography comprising a cooling device is provided. A temperature gradient liquid chromatography system comprises a chip-based temperature controlled liquid chromatography device, a fluidic coupling, and an electrical interface. Methods of making and methods of using of chip-based temperature gradient liquid chromatography devices are also provided.

    摘要翻译: 用于液相色谱的装置包括在基底上的液相色谱分离柱,其中分离柱与基底上的加热器相连。 基于芯片的温度控制液相色谱装置包括基底,热隔离区和通过热隔离区与基底热隔离的分离柱。 提供了一种包括冷却装置的基于芯片的液相色谱仪。 温度梯度液相色谱系统包括基于芯片的温度控制液相色谱装置,流体耦合和电接口。 还提供了制备方法和使用基于芯片的温度梯度液相色谱装置的方法。